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    • 4. 发明专利
    • Multi-transistor
    • 多晶体管
    • JPS5916367A
    • 1984-01-27
    • JP12554182
    • 1982-07-19
    • Jido Keisoku Gijutsu Kenkiyuukumiai
    • SAITOU TADASHI
    • H01L21/331H01L21/8222H01L27/06H01L27/082H01L29/73
    • H01L27/082
    • PURPOSE:To improve the characteristic by a method wherein electrodes are so formed that the lead-out direction of emitter and collector electrodes and the lead-out direction of a base electrode become in reverse directions to each other, and a resistance region connected to the emitter lead-out electrode and the collector lead-out electrode are intersected via an insulation layer. CONSTITUTION:The base lead-out electrode 15 is led out on the insulation layer to the left side of the figure and then connected, and likewise the collector lead- out electrode 17 is led out to the right side of the figure and then connected. The emitter lead-out electrode 16 is led out to the same direction as the collector lead-out electrode 17. The diffused resistance region 18 doped with the impurity of reverse conductivity type to that of the substrate is formed; the emitter lead- out electrode 16 is connected to one end thereof, and the electrode to lead out signal is formed at the other end. The insulation layer 19 of SiO2, etc. is formed on the surface of the diffused resistance region 18, and the collector lead- out electrode 17 is wired thereon.
    • 目的:通过这样形成电极的方法来提高特性,使得发射极和集电极的引出方向和基极的引出方向彼此相反,并且连接到 发射极引出电极和集电极引出电极经由绝缘层相交。 构成:将基极引出电极15引导到图的左侧的绝缘层上,然后连接,同样,集电体引出电极17被引出到图的右侧,然后连接。 发射极引出电极16被引出到与集电极引出电极17相同的方向。形成掺杂有反向导电类型的杂质的扩散电阻区域18; 发射极引出电极16的一端连接,另一端形成导出信号的电极。 SiO 2等的绝缘层19形成在扩散电阻区域18的表面上,集电体引出电极17被布线在其上。
    • 7. 发明专利
    • Manufacture of semiconductor device
    • 半导体器件的制造
    • JPS61128571A
    • 1986-06-16
    • JP24998884
    • 1984-11-27
    • Fujitsu Ltd
    • OKAMURA SHIGERUTAGUCHI TAKAO
    • H01L29/812H01L21/338H01L27/082
    • H01L27/082
    • PURPOSE:To dope an impurity accurately between a gate and a source regardless of a positional error on the formation of the gate by measuring the positions of the gate and the source by focussed ion beams and additionally doping the impurity between the source and the gate in high concentration on the basis of the measured values. CONSTITUTION:Si is implanted between a source and a gate by using Si ion s focussed at a value such as 0.1-0.1mumphi. An N additional layer 17 may be shaped through doping extending over a metal in the gate 14 at that time, but it is preferable that the N additional layer 17 is formed separated by 0.1mum-0.5mum from the gate 14, thus also acquiring source-gate withstanding voltage. The N additional layer is shaped by utilizing a marker. That is, the position of the gate can be obtained with high precision when the marker for detecting the position of the gate formed at the same time as a gate process is detected, and the layer 17 is separated easily by 0.1-0.5mum with high accuracy.
    • 目的:通过通过聚焦离子束测量栅极和源的位置,并且在源极和栅极之间另外掺杂杂质,可以在栅极和源极之间精确掺杂杂质,而不管栅极形成时的位置误差如何 基于测量值的高浓度。 构成:通过使用聚焦在0.1-0.1mumphi的值的Si +离子将Si注入源和栅极之间。 此时,可以通过掺杂在栅极14中的金属上形成N +个附加层17,但是优选地,N +附加层17形成为与栅极分开0.1mum-0.5mum 14,因此也获得源极耐受电压。 N +附加层通过利用标记成形。 也就是说,当检测到与栅极处理同时形成的栅极的位置的标记被检测到时,可以以高精度获得栅极的位置,并且层1​​7容易地分离0.1-0.5mum,具有高的 准确性。
    • 8. 发明专利
    • Semiconductor integrated circuit device
    • 半导体集成电路设备
    • JPS59188160A
    • 1984-10-25
    • JP6075283
    • 1983-04-08
    • Hitachi Ltd
    • FURUHATA MAKOTO
    • H01L21/8226H01L21/331H01L27/082H01L29/73
    • H01L27/082
    • PURPOSE:To enable to reduce an area of a semiconductor integrated circuit device by employing an inverse transistor for transistors of a pair which form a differential amplifier. CONSTITUTION:Two inverse n-p-n type transitors Q1, Q2 in which the collectors and the emitters are inverse have a structure of p type region 8 to become bases, n type region 9 to become collectors, and n type epitaxial layer 10 to become common emitter. Thus, the emitters of the Q1, Q2 are commonly used as the n type epitaxial layer, and the emitters can be accordingly formed in an insular region surrounded by the layer 3, and the area of the isolating layer to become a partition can be reduced.
    • 目的:通过对构成差分放大器的一对晶体管采用反向晶体管,能够减小半导体集成电路器件的面积。 构成:其中集电极和发射极相反的两个反npn型转换器Q1,Q2具有p型区域8的结构,成为基极,n +型区域9成为集电极,n型外延层10成为 共同发射器。 因此,Q1,Q2的发射极通常用作n型外延层,并且发射体可以相应地形成在被层3包围的岛状区域中,并且隔离层的成为分隔的区域可以被减小 。