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1. 实用新型

JP3004494U 失效
公开(公告)号：JP3004494U
公开(公告)日：1994-11-15
申请号：JP702894
申请日：1994-05-23
IPC分类号： G01D3/04 , G06F15/46

2. 发明专利

JPH06177005A ALIGNER 失效
公开(公告)号：JPH06177005A
公开(公告)日：1994-06-24
申请号：JP33075292
申请日：1992-12-10
申请人： NIKON CORP
发明人： YOKOTA MUNEYASU , YANAGIHARA MASAMITSU , NARAKI TAKESHI
IPC分类号： G06F19/00 , G03F1/76 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/66 , G03F1/08 , G06F15/46
摘要： PURPOSE:To provide an aligner in which the works, that have not been applied with exposure, processing normally, can be discharged in a manner that they are easily detected in a post-processing step and whose occupying area is not increased. CONSTITUTION:A control circuit 10 judges, based on the information from a sensor 7 for detecting the suction status of a work P and an alignment microscope 8 for detecting the alignment mark of the work P, whether or not the work P carried in on an X-Y stage 3 is ready to be applied with exposure processing normally. When the circuit 10 judges that the work P is in such a status, the work P is applied with normal exposure processing. On the contrary, when the circuit 10 judges that the work P is not so, an exposing pattern different from that during normal exposing processing is exposed against the work P.

3. 发明专利

JPH06167541A IC HANDLER FOR CONTROLLING IC CARRYING SPEED 失效
公开(公告)号：JPH06167541A
公开(公告)日：1994-06-14
申请号：JP34331492
申请日：1992-11-30
申请人： ANDO ELECTRIC
发明人： HARA KAZUTAKA , ITO DAIJIRO
IPC分类号： B65G1/137 , G01R31/26 , G06F19/00 , H01L21/66 , H01L21/677 , H01L21/68 , G06F15/46
摘要： PURPOSE:To reduce carrying errors of IC sand provide an IC handler for controlling IC carrying a speed for reducing deterioration of parts for carrying by controlling the carrying speed of ICs in a range not worsening a processing capacity in response to a measuring time of a measuring part. CONSTITUTION:In an IC handier equipping an IC supply means 2 for supplying measuring IC, a measuring means 3 for measuring IC, an IC housing means 4 for housing measurement-finished ICs and CPU 1 for controlling them, a motor drive parameter is written to a storing means 5 every address, CPU 1 serves to read the parameter with CPU 1 and input to the IC supply means 2, which serves to supply IC to the measuring means 3, measure a measuring time of the measuring means 3, compare an IC supply and housing time with the measuring time, a read parameter is rewritten with an operation and control means 1C at the time when the measuring time is longer than the supply and housing time and control drive speed of motors of the IC supply means 2 and the IC housing means 4.

4. 发明专利

JPH0674877A AUTOMATIC QUALITY INSPECTOR FOR PARTS 失效
公开(公告)号：JPH0674877A
公开(公告)日：1994-03-18
申请号：JP23027592
申请日：1992-08-28
申请人： HONDA MOTOR CO LTD
发明人： NAGANO YOJI , KUMITA ZENICHIRO , TAKAKURA TAKASHI
IPC分类号： G01M99/00 , G05B15/02 , G05B19/418 , G06F9/06 , G06F19/00 , G01M19/00 , G06F15/46
摘要： PURPOSE:To obtain an automatic parts inspector for parts which can create a quality inspection program easily and readily without requiring any technical knowledge regarding software by creating and changing a quality inspection plan interactively with a display via an input means. CONSTITUTION:An automatic quality inspector 10 is provided with a master CPU 12, a CRT 14, a touch panel 16, and a RAM 20. Further, the automatic quality inspector 10 is provided with a measurement part 22, a judgment plan generation part 24, an automatic operation screen generation part 26, an automatic operation procedure creation part 28, and an automatic quality inspection part 30 and information which is output to the CRT 14 via the above master CPU 12 from each device is selected by touching the touch panel 16, thus creating a quality inspection program easily and at the same time inspecting the quality of parts to be inspected.

5. 发明专利

JPH0656226A PRODUCT CONTROL SYSTEM 失效
公开(公告)号：JPH0656226A
公开(公告)日：1994-03-01
申请号：JP21008692
申请日：1992-08-06
申请人： HITACHI LTD
发明人： HORIGUCHI KAZUO , NEMOTO KAZUNORI
IPC分类号： B23Q41/08 , B65G1/137 , G05B19/418 , G06F17/30 , G06Q50/00 , G07C3/08 , G06F15/21 , G06F15/46
摘要： PURPOSE:To carry out starting designation from a host computer in a short time. CONSTITUTION:An input/output terminal device 2 which receives starting designation from a host computer 1 and so forth and is provided with a display device is connected with an infrared radiation lead lighter 3 which transmits starting designation information with infrared radiation, a handy type infrared radiation remote controller 4 receives and memorizes information from the infrared radiation lead lighter 3, and response control panels 7 which are installed at the respective products cases 6 receive the infrared radiation information which is sent by the remote controller. Besides, the received information is compared with a particular product number which is memorized in advance, and a light emitting diode 9 lights up only Men both of them meet each other.

6. 发明专利

JPH0635520A SERIAL DATA PROCESSOR FOR PROCESSING, IDENTIFICATION AND OUTPUT/INPUT OF SERIAL DATA BETWEEN ACTUATOR AND CONTROLLER AND METHOD TO CONTROL ACTUATOR USING SAME DATA PROCESSOR 失效
公开(公告)号：JPH0635520A
公开(公告)日：1994-02-10
申请号：JP22313892
申请日：1992-07-10
申请人： NIPPON FILCON KK
发明人： NAITO HIDEHARU , KOMIYA YUKIO , SAITO MITSURU
IPC分类号： G05B19/18 , G05B19/414 , G06F19/00 , G06F15/46
摘要： PURPOSE:To control plural actuators with a single controller and with no confusion of the serial data by performing the processing, the identification, and the output/input of the serial data between the controller and the actuators. CONSTITUTION:A processor 1 decides the identification number of the serial data 1 and deletes the identification number of the serial data to which the identification number of an actuator 1 connected to the processor 1 is added to output the serial data 2 to the actuator 1. Meanwhile the processor 1 also inputs the serial data 1 as it is to a processor 2. The processor 2 decides the identification symbol of the serial data 1 and deletes the identification symbol of the serial data to which the identification number of an actuator 2 is added to output the serial data 3 to the actuator 2. The actuator 2 also inputs the serial data as it is to a processor 3. Thus the actuators 1-3 can be controlled with no confusion of the serial data 1-3 and the influences of the communication setting (1)-(4) can be prevented to the communication.

7. 发明专利

JPH0630476A INFORMATION TRANSMITTING SYSTEM 失效
公开(公告)号：JPH0630476A
公开(公告)日：1994-02-04
申请号：JP20018992
申请日：1992-07-06
申请人： YAMATAKE HONEYWELL CO LTD
发明人： HISANAGA TETSUO , KAJITA TETSUYA
IPC分类号： H04Q9/00 , G06F19/00 , G06F15/46
摘要： PURPOSE:To transmit status change information without reducing the resolution of a D/A converter. CONSTITUTION:When an abnormal state is generated, an output signal is sent from an abnormality diagnostic circuit (a) and a switch 81 in a source circuit 8 is turned on by the output signal. Thereby voltage 82 is impressed to the non-inverted input terminal of an amplifier 63. When a line current to be sent by the voltage is set up to >=20mA, the abnormal state can be transmitted.

8. 发明专利

JPH05315207A SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPH05315207A
公开(公告)日：1993-11-26
申请号：JP11560092
申请日：1992-05-08
申请人： NEC CORP
发明人： KONO HIROMICHI
IPC分类号： G06K19/06 , G06F19/00 , G06T1/00 , H01L21/02 , H01L21/66 , G06F15/46 , G06F15/62
摘要： PURPOSE:To enhance the performance of a chip-shaped semiconductor device by a combination, to analyze the distribution of defects inside the face of a wafer and to pursue the defects by a method wherein where the chip-shaped semiconductor device former on the face of the wafer is situated inside the face can be recognized by means of a simple recognition apparatus. CONSTITUTION:At least one information recording region 3 for positional information use is formed around an integrated-circuit formation region 1 in a chip- shaped semiconductor device formed on the face of a wafer as a semiconductor substrate. A chip-position discrimination number inside the wafer is recorded in the information recording region 3 in a dot matrix manner by using a laser irradiation method or the like. During an arbitrary process after the wafer has been divided into chips or even the chips have been completed, positional information can be read out.

9. 发明专利

JPH05301266A 失效
公开(公告)号：JPH05301266A
公开(公告)日：1993-11-16
申请号：JP10643692
申请日：1992-04-24
申请人： SEKISUI CHEMICAL CO LTD
发明人： KAWASAKI ATSUSHI
IPC分类号： B29C45/26 , B29C45/73 , B29C45/76 , B29C45/78 , G06F19/00 , G06F15/46
摘要： PURPOSE:To realize improved analytical accuracy even when the arrival times of resin to the respective parts of a mold are different from each other. CONSTITUTION:The analyzer concerned consists of the calculating section 11 of the arrival time of resin, which calculates and outputs the arrival times of charged resin to the respective parts of a mold, the inputting section 12 of the arrival time of resin, the calculating section 13 of actual cooling time distribution, which calculates the actual cooling timed at the respective parts of the mold on the basis of the arrival times of the resin, the calculating section 14 of released hear, which calculates the heat released from the resin at the respective parts of the mold, and the calculating section 15 of average heat flow flux distribution, which calculates the average heat flow flux of the mold on the basis of the released heat.

10. 发明专利

JPH05297065A 失效
公开(公告)号：JPH05297065A
公开(公告)日：1993-11-12
申请号：JP9814392
申请日：1992-04-17
申请人： NEC CORP
发明人： KUDO MOTOFUMI
IPC分类号： G01R31/28 , G06F19/00 , H01L21/66 , G06F15/46
摘要： PURPOSE:To reduce the number of inspection processes and the number of technical processes by a programmer by a method wherein an optimized inspection which corresponds to a change in the characteristic of a device under test can be formed automatically. CONSTITUTION:The title apparatus is provided with the following: a control block 6 in which a predesigned control program has been built in; a control block 7 in which an optimized control program has been built in; and inspection blocks 1 to 5 in which respective inspection programs for each inspection item have been built in and which execute an inspection according to the control programs. In addition, the title apparatus is provided with the following: a measuring block 8 which finds inspection-time information for each inspection item; an analysis block 9 which finds defect occurrence frequency classification information for each inspection item; an optimization block 10 in which an optimized inspection flow and an optimized control program based on it are generated from the found inspection-time information and the found defect occurrence frequency classification information; and an ATE bus 11 which can transmit information between individual blocks.

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