会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明专利
    • Salt as acid generator for chemically amplifiable resist composition
    • 盐酸发生器用于化学可放电电阻组合物
    • JP2007197432A
    • 2007-08-09
    • JP2006351841
    • 2006-12-27
    • Sumitomo Chemical Co Ltd住友化学株式会社
    • YAMAGUCHI NORIFUMIYOSHIDA ISAOHARADA YUKAKO
    • C07C309/18C07C381/12G03F7/004G03F7/039H01L21/027
    • PROBLEM TO BE SOLVED: To provide a salt that can be used as an acid generator for giving a chemically amplifiable resist composition showing high resolution. SOLUTION: The salt is represented by the formula (I) (wherein X: an alkylene which may include a thioether bond or an ether bond except the atom connecting to the oxygen atom of -COO- group; Y: a 5C to 30C hydrocarbon group including at least one aromatic ring wherein the carbon atom of the Y may be substituted with an oxygen atom, and/or may form a carbonyl group; Y also may be a 1C to 6C alkyl, a 1C to 6C alkoxy group, a 1C to 5C perfluoroalkyl group, a 1C to 6C hydroxyalkyl group or may include one or more kinds of hydroxy group and cyano group; A + : organic counterion; n : 0 or 1; Q 1 , Q 2 are independent from each other and each a perfluoroalkyl group bearing 1-6 F or C atoms). COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供可用作产生显示高分辨率的化学可放大抗蚀剂组合物的酸产生剂的盐。 解决方案:盐由式(I)表示(其中X:除了连接至-COO-基团的氧原子的原子之外可以包括硫醚键或醚键的亚烷基; Y:5C至 30C烃基,其中Y可以被氧原子取代的芳香环,和/或可以形成羰基; Y也可以是1〜6C的烷基,1〜6的烷氧基, 1〜5个全氟烷基,1〜6个羟基烷基,或可以含有一个或多个羟基和氰基;有机抗衡离子; n:0或1; Q 1 ,Q 2 彼此独立,每个具有1-6个F或C原子的全氟烷基)。 版权所有(C)2007,JPO&INPIT