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    • 7. 发明专利
    • Joint glass cutting method, package manufacturing method, package, piezoelectric transducer, electronic apparatus, and electric wave clock
    • 接头玻璃切割方法,包装制造方法,包装,压电传感器,电子设备和电波时钟
    • JP2012209635A
    • 2012-10-25
    • JP2011071735
    • 2011-03-29
    • Seiko Instruments Incセイコーインスツル株式会社
    • KAWADA YASUO
    • H03H3/02B28D5/00B81B3/00B81C3/00C03B33/037C03B33/09H03B5/32H03H9/02
    • C03B33/076C03B33/0222C03B33/033C03B33/091H01L21/67092H01L21/67132H03H9/1021Y02P40/57Y10T83/0495
    • PROBLEM TO BE SOLVED: To accurately and efficiently form a groove on one face of a joint glass.SOLUTION: A joint glass cutting method has: a first focal point adjusting step for focusing laser light R2 that can be radiated on a joint glass 60 from one face 50b of the joint glass 60 to a joint material 23 by imaging the joint material 23 from the face 50b; a second focal point adjusting step for moving a focal point of the laser light R2 toward the face 50b of the joint glass 60 in a thickness direction of the joint glass 60 by estimated thickness of a glass substrate 50 to be irradiated after the first focal point adjusting step; a detected part formation step for forming a detected part D on the face 50b by radiating the laser light R2 after the second focal point adjusting step; a third focal point adjusting step for re-focusing the laser light R2 to the detected part D by imaging the detected part D from the face 50b; and a groove formation step for forming a groove M' on the face 50b by radiating the laser light R2 along a cutting schedule line after the third focal point adjusting step.
    • 要解决的问题:准确有效地在接合玻璃的一个表面上形成凹槽。 接头玻璃切割方法具有:第一焦点调整步骤,用于将可以从接合玻璃60的一个表面50b照射到接合玻璃60上的激光R2聚焦到接合材料23上, 来自面部50b的材料23; 第二焦点调整步骤,用于在接合玻璃60的厚度方向上将激光R2的焦点朝着接合玻璃60的表面50b移动,以在第一焦点之后照射的玻璃基板50的估计厚度 调整步骤 检测部件形成步骤,用于通过在第二焦点调节步骤之后照射激光R2来在面50b上形成检测部分D; 第三焦点调整步骤,用于通过从面50b对检测到的部分D成像来将激光R2重新聚焦到检测部分D; 以及沟槽形成步骤,用于通过在第三焦点调整步骤之后沿着切割计划线辐射激光R2来在面50b上形成凹槽M'。 版权所有(C)2013,JPO&INPIT