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    • 8. 发明专利
    • Method for forming photosensitive polyimide pattern and electronic element having the pattern
    • 形成光敏聚酰胺图案的方法和具有图案的电子元件
    • JP2006098514A
    • 2006-04-13
    • JP2004282041
    • 2004-09-28
    • Tdk CorpTdk株式会社
    • UEJIMA SATOSHI
    • G03F7/095G03F7/027G03F7/38G03F7/40H01L21/027
    • G03F7/0387H01F17/0006H01F41/042H05K3/0023H05K3/28H05K2201/0154H05K2203/0577
    • PROBLEM TO BE SOLVED: To provide a method capable of forming a photosensitive polyimide pattern which is excellent in pattern precision, prevents a patterning process from being complicated and has weak stress.
      SOLUTION: The method for forming the photosensitive polyimide pattern 38 on a metal conductive body 32 comprises the following processes (A) to (E) in the order; a process (A) of forming an ester bond type photosensitive polyimide precursor layer 33 by applying an ester bond type photosensitive polyimide precursor composition on the metal conductive body 32, a process (B) of forming an ionic bond type photosensitive polyimide precursor layer 34 by applying an ionic bond type photosensitive polyimide precursor composition on the precursor layer 33 up to a desired film thickness, a process (C) of transferring a mask pattern as a latent image 36 to the precursor layers 33, 34 by performing exposure via a mask 35, a process (D) of performing development and a process (E) of forming the polyimide pattern 38 by curing the precursor layers 33, 34.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提供能够形成图案精度优异的光敏聚酰亚胺图案的方法,防止图案化过程复杂并且具有弱应力。 解决方案:用于在金属导电体32上形成光敏聚酰亚胺图案38的方法包括以下步骤(A)至(E): 通过在金属导电体32上施加酯键型感光性聚酰亚胺前体组合物而形成酯键型感光性聚酰亚胺前体层33的方法(A),通过以下方式形成离子键型感光性聚酰亚胺前体层34的工序(B) 将前体层33上的离子键型光敏聚酰亚胺前体组合物施加到所需的膜厚度,通过经由掩模35进行曝光将作为潜像36的掩模图案转印到前体层33,34的工艺(C) ,进行显影的工艺(D)和通过固化前体层33,34形成聚酰亚胺图案38的工艺(E)。(C)2006年,JPO&NCIPI
    • 10. 发明专利
    • Pattern forming method
    • 图案形成方法
    • JP2005203434A
    • 2005-07-28
    • JP2004005686
    • 2004-01-13
    • Fuji Photo Film Co Ltd富士写真フイルム株式会社
    • SASAKI YOSHIHARU
    • G03F7/26G03F7/095H01L21/302H05K3/00H05K3/06
    • G03F7/095H05K3/0079H05K3/0082H05K3/064H05K2203/0577H05K2203/0588Y10S438/95Y10S438/975
    • PROBLEM TO BE SOLVED: To avoid lowering the yield due to breaking of a resist pattern and prevent an etching liquid flow from being blocked in the gap between thick film patterns to accurately form a desired pattern over the entire substrate, when photosensitive layers on a substrate are exposed and developed to form a mask pattern and the substrate is etched with the mask pattern to form the pattern of the same shape as that of the mask pattern on the substrate.
      SOLUTION: On a copper thin film 3 under etching, n photosensitive layers (N≥2) different in sensitivity are laminated so that the upper layer has the lower sensitivity with a mask pattern of an n-layer structure (e.g. a laminate structure of a thick film low sensitivity layer 9 laminated on a thin film high sensitivity layer 4) formed over those portions (e.g. around through-holes) wanted to ensure a strength endurable enough against the spray pressure of a developing solution or an etching liquid. The pattern on the upper layer is made smaller to expand the gap between the patterns, thereby preventing the flow of the developing solution or the etching liquid from being blocked.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题为了避免由于抗蚀剂图案的断裂而导致的产率降低,并且防止蚀刻液流在厚膜图案之间的间隙中被阻挡,以在整个基板上精确地形成期望的图案,当感光层 在衬底上曝光和显影以形成掩模图案,并且用掩模图案蚀刻衬底以形成与衬底上的掩模图案相同形状的图案。 解决方案:在蚀刻的铜薄膜3上,层叠不同灵敏度的n个感光层(N≥2),使得上层具有较低的灵敏度,具有n层结构的掩模图案(例如层压体 层叠在薄膜高灵敏度层4上的厚膜低灵敏度层9的结构,其形成在希望确保抵抗显影溶液或蚀刻液体的喷射压力足够的强度的部分(例如,围绕通孔)上。 使上层的图案更小以扩大图案之间的间隙,从而防止显影液或蚀刻液的流动被阻挡。 版权所有(C)2005,JPO&NCIPI