会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明专利
    • Plasma igniter for inductively coupled plasma ion source
    • 用于感应耦合等离子体源的等离子体雾化仪
    • JP2011204672A
    • 2011-10-13
    • JP2011018095
    • 2011-01-31
    • Fei Coエフ・イ−・アイ・カンパニー
    • GRAUPERA ANTHONYKELLOGG SEANMILLER TOMLAUR DUSTINZHANG SHOUYIN
    • H01J27/16C23C16/507H01J37/08H01J37/09H01J37/16H01J37/317H05H1/46
    • H01J37/08H01J37/24H01J2237/0815H01J2237/31749H05H1/36
    • PROBLEM TO BE SOLVED: To provide a method for igniting plasma in a focused ion beam system in which the inductively coupled plasma ion source is biased to a high dc voltage.SOLUTION: In the focused ion beam system, a high dc voltage of a biasing power supply 930 connects to an oscillatory waveform from a plasma igniter 950 near a focused ion beam column and applies to a source biasing electrode 906 comprising a part of a plasma chamber 954. A logic circuitry 924 controls a plasma igniter power supply 925 which drives the plasma igniter 950. An oscillatory waveform from the plasma igniter 950 whose potential is lower is connected to the high dc voltage through an insulation transformer or a capacitor. By mounting the plasma igniter 950 near the focused ion beam column, capacitance effects of the cable supplying the high dc voltage are minimized.
    • 要解决的问题:提供一种在聚焦离子束系统中点燃等离子体的方法,其中电感耦合等离子体离子源被偏置到高直流电压。解决方案:在聚焦离子束系统中,偏压的高直流电压 电源930连接到聚焦离子束柱附近的等离子体点火器950的振荡波形,并施加到包括等离子体室954的一部分的源偏置电极906.逻辑电路924控制等离子体点火器电源925,其驱动 等离子体点火器950.来自电位较低的等离子体点火器950的振荡波形通过绝缘变压器或电容器连接到高直流电压。 通过将等离子体点火器950安装在聚焦离子束柱附近,提供高直流电压的电缆的电容效应被最小化。
    • 6. 发明专利
    • Power supply apparatus
    • 电源设备
    • JP2011113696A
    • 2011-06-09
    • JP2009267075
    • 2009-11-25
    • Ulvac Japan Ltd株式会社アルバック
    • MATSUBARA SHINOBUHORISHITA YOSHIKUNIONO ATSUSHI
    • H05H1/46C23C14/00C23C14/34G05F1/02H05H1/00H05H1/24
    • H02M1/32C23C14/34C23C14/564H02H9/001H05H1/36H05H1/46
    • PROBLEM TO BE SOLVED: To provide a power supply apparatus that effectively limits a rise of current on the occurrence of arc discharge directly causing splash and/or particles to occur, and at the same time can prevent a discharge voltage from being excessive on completion of arc processing. SOLUTION: The power supply apparatus E includes a DC power supply section 2 for applying a DC voltage to a target T contacting plasma P, and an arc processing unit 3 that can detect arc discharge caused on an electrode by positive and negative outputs 5a, 5b from the DC power supply section and extinguish the arc discharge. The apparatus has output characteristics switching circuits 6, SW2 that switch an output to the electrode to cause the output to the electrode to have a constant-current characteristic when the occurrence of the arc discharge is detected by the arc processing unit and extinguishment processing of the arc is started and to have a constant-voltage characteristic until completion of the extinguishment processing of the arc. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种能够有效地限制电弧放电发生时的电流上升的电源装置,直接导致飞溅和/或颗粒发生,并且同时可以防止放电电压过大 电弧加工完成。 解决方案:电源装置E包括用于向目标T接触等离子体P施加直流电压的直流电源部分2和能够通过正和负输出检测在电极上产生的电弧放电的电弧处理单元3 5a,5b从直流电源部分熄灭并熄灭电弧放电。 该装置具有输出特性切换电路6,SW2,其在通过电弧处理单元检测到电弧放电的发生时将输出切换到电极,使得对电极的输出具有恒定电流特性,并且熄灭处理 电弧开始并具有恒定电压特性,直到电弧的熄灭处理完成。 版权所有(C)2011,JPO&INPIT
    • 9. 发明专利
    • Plasma cutting machine and plasma power source system
    • 等离子切割机和等离子体电源系统
    • JP2008105043A
    • 2008-05-08
    • JP2006289052
    • 2006-10-24
    • Komatsu Sanki Kkコマツ産機株式会社
    • YAMAGUCHI YOSHIHIROIRIYAMA TAKAHIRO
    • B23K10/00
    • H05H1/36
    • PROBLEM TO BE SOLVED: To enable plasma cutting machine to be continuously operated even in the occurrence of a failure in a part of a plasma power source device, and to enable the power source device to be divided and mounted on the body of the plasma cutting machine.
      SOLUTION: In the main circuit 11 of the plasma power source device 6, a plurality of small capacity power units (DC power source) 14-1 to 14-n are connected in parallel on the DC output side and connected to a plasma torch 20. The power units 14-1 to 14-n can be each asynchronously driven independently of other power units. A power source controller 12 controls the number of power units and the magnitude of output current for the operation, in accordance with cutting conditions (material and thickness of a workpiece and a cutting speed) and the number of operable power units. In the occurrence of a failure in a part of the power units, the power source controller 12 controls acceptable cutting conditions in accordance with the number of the remaining operable power units. The plasma power source device 6 can be divided and housed in the body of the plasma cutting machine.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:即使在等离子体电源装置的一部分发生故障的情况下,等离子切割机也能够连续运行,并且能够将电源装置分割并安装在 等离子切割机。

      解决方案:在等离子体电源装置6的主电路11中,多个小容量电力单元(DC电源)14-1至14-n并联连接在DC输出侧并连接到 等离子体焰炬20.功率单元14-1至14-n可以独立于其它功率单元而异步驱动。 电源控制器12根据切割条件(工件的材料和厚度,切割速度)和可操作的动力单元的数量来控制动力单元的数量和输出电流的大小。 在动力单元的一部分发生故障的情况下,电源控制器12根据剩余的可动力单元的数量来控制可接受的切割条件。 等离子体动力源装置6可以被分割并容纳在等离子切割机的主体中。 版权所有(C)2008,JPO&INPIT

    • 10. 发明专利
    • Power supply circuit for plasma generation, plasma generator, plasma treatment device, and target
    • 用于等离子体生成的电源电路,等离子体发生器,等离子体处理装置和目标
    • JP2005293854A
    • 2005-10-20
    • JP2004102452
    • 2004-03-31
    • Daiken Kagaku Kogyo KkKurita Seisakusho:KkHiroshi Takigawa大研化学工業株式会社株式会社栗田製作所浩史 滝川
    • TAKIGAWA HIROSHINISHIMURA YOSHIMIHARADA AKIO
    • H05H1/46H01L21/304H05H1/30H05H1/36
    • H05H1/36H05H1/48
    • PROBLEM TO BE SOLVED: To realize a power supply circuit for plasma generation, and a plasma generator capable of smoothly obtaining a plenty of generated plasma without having the device larger-sized, as well as a plasma treatment device capable of putting a plenty of treated objects under plasma treatment at low cost and a target item having target quality passing the plasma treatment, with the use of such a plasma generator. SOLUTION: An LC series circuit serially connecting a capacitor C and a coil L is provided between one of the outputs of an alternate high-voltage generating circuit generating alternate high voltage to be impressed between each electrode for discharge generation consisting of two or more first electrodes and one or more second electrodes and the above first electrodes. When discharge is generated at one of the electrode pairs, voltage fall is restrained by the coil even if discharge of the capacitor is progressed, and discharge by the other electrode pair is induced without being intervened, so that a plenty of plasma can be smoothly generated with a common use of the alternate high-voltage generating circuit. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了实现等离子体产生的电源电路以及能够平滑地获得大量产生的等离子体而不使装置尺寸更大的等离子体发生器,以及能够放置等离子体处理装置 通过使用这种等离子体发生器,以低成本等离子体处理的大量处理对象和具有通过等离子体处理的目标质量的目标物品。 解决方案:串联连接电容器C和线圈L的LC串联电路设置在产生交替高压的交替高压产生电路的输出之间,以在每个用于放电产生的电极之间施加电压,由两个或 更多的第一电极和一个或多个第二电极和上述第一电极。 当在一个电极对上产生放电时,即使电容器的放电进行,线圈也抑制了电压下降,并且由于其它电极对的放电而被引入而不被介入,从而可以平稳地产生大量的等离子体 通常使用交替的高压发生电路。 版权所有(C)2006,JPO&NCIPI