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1. 发明专利

JP5341900B2 Charged particle energy analyzer 有权
公开(公告)号：JP5341900B2
公开(公告)日：2013-11-13
申请号：JP2010530533
申请日：2008-03-31
申请人：クラトス・アナリテイカル・リミテツド
发明人：アレクセービチコリーネ，ニコライ , キューブリック，デーン , 郁夫小西
IPC分类号： H01J37/252 , H01J49/48
CPC分类号： H01J49/484
摘要： Charged particle energy analysers enabling simultaneous high transmission and energy resolution are described. The analysers have an electrode structure (11) comprising coaxial inner and outer electrodes (14, 15) having inner and outer electrode surfaces (IS, OS) respectively. The inner and outer electrode surfaces are defined, at least in part, by spheroidal surfaces having meridonal planes of symmetry orthogonal to a longitudinal axis of the electrode structure (11). The inner and outer electrode surfaces are generated by rotation, about the longitudinal axis, of arcs of two non-concentric circles having different radii R2 and R1 respectively, R2 being greater than R1. The distance of the outer electrode surface from the longitudinal axis in the respective meridonal plane is R01 and the distance of the inner electrode surface from the longitudinal axis in the respective plane is R02 and R1, R2, R01 and R02 have a defined relationship.

2. 发明专利

JP6301269B2 粒子分光計のための分析装置有权
公开(公告)号：JP6301269B2
公开(公告)日：2018-03-28
申请号：JP2014560888
申请日：2012-03-06
申请人：シエンタ・オミクロン・アーベー
发明人：ビョルン・ヴァンベリ
IPC分类号： H01J49/48
CPC分类号： H01J49/48 , G01N23/2273 , G01N2223/085 , H01J37/05 , H01J49/0031 , H01J49/06 , H01J49/061 , H01J49/484 , H01J2237/0535

3. 发明专利

JP2011501373A Charged particle energy analyzer 有权
公开(公告)号：JP2011501373A
公开(公告)日：2011-01-06
申请号：JP2010530533
申请日：2008-03-31
申请人：シマヅリサーチラボラトリー(ヨーロッパ)リミティド
发明人：キューブリック，デーン , アレクセービチコリーネ，ニコライ , 郁夫小西
IPC分类号： H01J37/252 , H01J49/48
CPC分类号： H01J49/484
摘要： Charged particle energy analysers enabling simultaneous high transmission and energy resolution are described. The analysers have an electrode structure (11) comprising coaxial inner and outer electrodes (14, 15) having inner and outer electrode surfaces (IS, OS) respectively. The inner and outer electrode surfaces are defined, at least in part, by spheroidal surfaces having meridonal planes of symmetry orthogonal to a longitudinal axis of the electrode structure (11). The inner and outer electrode surfaces are generated by rotation, about the longitudinal axis, of arcs of two non-concentric circles having different radii R2 and R1 respectively, R2 being greater than R1. The distance of the outer electrode surface from the longitudinal axis in the respective meridonal plane is R01 and the distance of the inner electrode surface from the longitudinal axis in the respective plane is R02 and R1, R2, R01 and R02 have a defined relationship.

4. 发明专利

JP2015511055A 粒子分光計のための分析装置有权
标题翻译：分析粒子光谱仪
公开(公告)号：JP2015511055A
公开(公告)日：2015-04-13
申请号：JP2014560888
申请日：2012-03-06
申请人：ヴィゲー・シエンタ・アーベー
发明人：ビョルン・ヴァンベリ
IPC分类号： H01J49/48 , G01N23/20
CPC分类号： H01J49/48 , G01N23/2273 , G01N2223/085 , H01J37/05 , H01J49/0031 , H01J49/06 , H01J49/061 , H01J49/484 , H01J2237/0535
摘要：本発明は、粒子放出試料(11)から放出された荷電粒子に関する少なくとも一つのパラメーター、例えば粒子のエネルギー、開始方向、開始位置、又はスピンに関するパラメーターを決定するための方法に関する。上記の方法は、荷電粒子のビームをレンズシステム(13)によって測定領域の入口へ導くステップと、測定領域内で上記の少なくとも一つのパラメーターの指標となる粒子の位置を検出するステップと、を備える。さらに、上記の方法は、粒子ビームが測定領域に入射する前に、同じ座標方向に少なくとも二回粒子ビームを偏向させるステップを備える。それによって、測定領域(3)の入口(8)における粒子ビームの位置及び方向の両方は、試料(11)の物理的な操作の必要性をある程度除くように制御されることが可能である。次に、これによって、エネルギー測定におけるエネルギー分解能を改善できるように、試料が効率的に冷却されることが可能になる。
摘要翻译：本发明中，至少一个与从所述粒子排放的样品（11）发射的带电粒子的参数，例如，颗粒的能量，启动方向，开始位置，或用于确定旋转相关的参数的方法。上述方法包括通过透镜系统（13），从而导致测量区的入口带电粒子的束的步骤中，测量区域的步骤，以检测粒子的位置是指示上述至少一个参数的，所述。此外，粒子束入射到测量区域之前上述方法中，包括偏转的步骤至少两次在同一粒子束坐标方向。从而，无论是位置和在（3）可以被控制在一定程度上测量区域的入口（8）所述粒子束的方向消除对样品（11）的物理操纵的需要。然后，因此，如能改善在能源计量能量分辨率，可以进行采样被高效地冷却。

5. 发明专利

JPS61140050A Residual gas analyzer type quadruple pole mass spectrometer with energy analyzer mounted thereon 失效
标题翻译：具有能量分析仪的残留气体分析仪型四倍体质谱仪
公开(公告)号：JPS61140050A
公开(公告)日：1986-06-27
申请号：JP26218584
申请日：1984-12-12
申请人： Fumio Watanabe
发明人： WATANABE FUMIO
IPC分类号： G01N27/62 , H01J49/00 , H01J49/24 , H01J49/42 , H01J49/44
CPC分类号： H01J49/004 , H01J49/4215 , H01J49/484
摘要： PURPOSE:To improve analysis accuracy by separating electron bombardment eliminated ions and vapor phase ions with use of an energy analyzer, independently subjecting them to mass analysis, and effecting a true residual gas analysis based on information yielded from a mass spectrometer thereof. CONSTITUTION:Since a difference of two times is produced between energies of electron bombardment eliminated ions carried in a positive electrode employing a closed semi-spherical positive electrode type ion source 1 and vapor phase ions, only the vapor phase ions are adapted for a mass analysis thereof to be incident upon a mass analyzer part drawing a circular-arc by properly selecting radii of semi-shperical electrodes 11, 12 of a concentric semispherical electrostatic deflection energy analyzer employed in an energy analyzer part 2. Against this, in mass-analyzing only the electron bombardment eliminated ions, voltage of a power source 20 may be made zero. These ions passing through the energy analyzer part 2 enter into a quadrupole mass analyzer part 3, mass-analyzed under proper electric conditions where DC and high frequency components are superposed, and enter into the next detector part 4.
摘要翻译：目的：通过使用能量分析仪分离电子轰击去除离子和气相，提高分析精度，独立对其进行质量分析，并根据其质谱仪产生的信息进行真实的残留气体分析。构成：由于在使用封闭的半球形正极型离子源1的正极和气相离子中携带的离子的电子轰击能量之间产生两倍的差异，因此只有气相离子适合于质量分析通过适当地选择在能量分析器部件2中使用的同心半球形静电偏转能量分析器的半透光电极11,12的半径来入射到质量分析器部件上绘制圆弧。因此，仅在大量分析中电子轰击消除了离子，电源20的电压可以为零。通过能量分析器部分2的这些离子进入四极质量分析器部分3，在其中叠加有DC和高频分量的适当电气条件下进行质量分析，并进入下一个检测器部分4。

6. 发明专利

JPS59211953A Secondary electron spectral device 失效
标题翻译：二次电子光谱仪器
公开(公告)号：JPS59211953A
公开(公告)日：1984-11-30
申请号：JP8611783
申请日：1983-05-17
申请人： Univ Osaka
发明人： URA KATSUMI , FUJIOKA HIROSHI , NAKAMAE KOUJI
IPC分类号： H01J49/44 , G01N23/22 , G01R31/26 , H01J37/252 , H01J49/48 , H01L21/66
CPC分类号： H01J49/484
摘要： PURPOSE:To reduce measuring errors in a part to be measured due to a partial field effect and improve the accuracy of potentiometry in a infinitesimal structure, by forming a secondary electron draw-out electrode into a parallel electrode in parallel with a sample surface as well as forming a spectroscopic decelerating electrode so as to go along a surface which vertically receives a secondary electron run past the secondary electron draw-out electrode. CONSTITUTION:A secondary electron draw-out electrode 1' for drawing out a secondary electron from a measuring electrode 3 is being formed as a parallel electrode in parallel with a sample surface 6, while there is provided with a spherical spectroscopic decelerating electrode 2 in a radius R2 centered with a center (virtual source) P of a minimum disarranging circle constituted of a tangential group of secondary electrons run past this secondary electron draw-out electrode 1. That si to say, the spherical spectroscopic decelerating electrode 2 covers the second electron draw-out electrode 1'. The secondary electron takes its way to a linear track after passing through the secondary electron draw-out electrode 1', and advances to the spectroscopic decelerating electrode 2. At this time, the secondary electron is made to be incident vertically into the spectroscopic decelerating electrode 2 so that no change in a vertical energetical component is produced owing to a partial electric field by a separate electrode 4. Therefore, no measuring errors happen there.
摘要翻译：目的：为了减少由于局部场效应而被测量的部分的测量误差，并提高无穷小结构中的电位测量精度，通过将二次电子引出电极与样品表面平行地形成平行电极作为形成分光减速电极，以便沿着垂直地接受二次电子流过二次电子引出电极的表面。构成：从测量电极3抽出二次电子的二次电子抽出电极1'与样品表面6平行地形成为平行电极，而在其中设置有球形分光减速电极2 半径R2以由穿过该二次电子抽出电极1的二次电子的切向组构成的最小排斥圆的中心（虚拟源）P居中。即，球面分光减速电极2覆盖第二电子抽出电极1'。二次电子通过二次电子抽出电极1'后进入线性轨道，并进入分光减速电极2.此时，使二次电子垂直入射到分光减速电极 2，使得由于通过单独的电极4的部分电场而不产生垂直能量分量的变化。因此，不存在测量误差。

7. 发明专利

JPS5117439B1 JPS5117439B1 - 失效
公开(公告)号：JPS5117439B1
公开(公告)日：1976-06-02
申请号：JP3618771
申请日：1971-05-25
IPC分类号： H01J49/48 , G01N23/00 , G01N27/62
CPC分类号： H01J49/48 , H01J49/484

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