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    • 2. 发明专利
    • System and method for measuring total organic carbon content in ultrapure water
    • 用于测量超声水中总有机碳含量的系统和方法
    • JP2012063302A
    • 2012-03-29
    • JP2010209234
    • 2010-09-17
    • Japan Organo Co Ltdオルガノ株式会社
    • MURAYAMA MASAMITAKAHASHI KAZUSHIGESUGAWARA HIROSHI
    • G01N31/00G01N27/06
    • G01N33/1846
    • PROBLEM TO BE SOLVED: To stably measure a TOC (total organic carbon) concentration in ultrapure water while suppressing influences of hydrogen peroxide included in the ultrapure water.SOLUTION: A measuring system 1 for a TOC concentration in ultrapure water includes a hydrogen peroxide decomposing catalyst 2 capable of removing at least a part of hydrogen peroxide from ultrapure water containing hydrogen peroxide, and a TOC concentration measuring device 3 disposed in a post stage of the hydrogen peroxide decomposition catalyst. The TOC concentration measuring device 3 includes: a holding chamber 4 introducing ultrapure water therein and holding the ultrapure water; a UV irradiation unit 5 irradiating the ultrapure water held in the holding chamber with UV rays; a conductivity measuring unit measuring the conductivity of the ultrapure water held in the holding chamber 4 before and after irradiation with UV rays; and a data processing unit 9 calculating the TOC concentration included in the ultrapure water before irradiation of UV rays by the UV irradiation unit, based on the conductivity measured by the conductivity measuring unit.
    • 待解决的问题:为了稳定地测量超纯水中的TOC(总有机碳)浓度,同时抑制超纯水中所含的过氧化氢的影响。 解决方案:超纯水中TOC浓度的测量系统1包括能够从含有过氧化氢的超纯水中除去至少一部分过氧化氢的过氧化氢分解催化剂2和设置在过氧化氢中的TOC浓度测量装置3 过氧化氢分解催化剂的后期。 TOC浓度测定装置3包括:保持室4,在其中引入超纯水并保持超纯水; 紫外线照射单元5,用紫外线照射保持在保持室中的超纯水; 电导率测量单元,测量在照射紫外线之前和之后保持在保持室4中的超纯水的电导率; 以及数据处理单元9,基于由电导率测量单元测量的电导率,计算紫外线照射单元照射紫外线之前的超纯水中包含的TOC浓度。 版权所有(C)2012,JPO&INPIT