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    • 7. 发明专利
    • Sputtering target and method for production thereof
    • 喷射目标及其生产方法
    • JP2009263796A
    • 2009-11-12
    • JP2009118277
    • 2009-05-15
    • Nippon Mining & Metals Co Ltd日鉱金属株式会社
    • INOUE AKIHISAKIMURA HISAMICHISASAMORI KENICHIROYAHAGI MASATAKANAKAMURA ATSUSHITAKAHASHI HIDEYUKI
    • C22C45/02B22F3/14C22C5/00C22C9/00C22C16/00C22C19/07C22C21/10C22C45/00C22C45/04C22C45/10C22F1/053C23C14/34
    • C23C14/3414C22C5/00C22C9/00C22C16/00C22C19/07C22C21/10C22C45/02C22C45/10C22F1/053
    • PROBLEM TO BE SOLVED: To provide a high quality target material of a practical size in which the crystal structure is extremely fine and uniform, and which does not cause any problems of defects resulting from the generation of particles or unevenness in the composition, by employing, for instance, the powder metallurgy process, in place of a conventional bulk metal glass produced by the quenching of molten metal, which requires a high cost for its production, for the coating film to be used in nanoprocessing. SOLUTION: Disclosed is a sputtering target having a structure where the average crystallite size is 1 nm to 50 nm, comprises an alloy having a three-component system or greater with Co as its primary component in an atomic ratio of 50 atom% or more, and comprises the requirements of a metallic glass satisfying that the elements to the primary component have an atomic radius difference of 12% or more and that negative heat of mixing is satisfied. The alloy having a three-component system or greater comprises Ta and B. The sputtering target also has a relative density of ≥96.4%, and also is an amorphous body obtained by sintering gas atomized powder. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供晶体结构非常细小且均匀的实用尺寸的高质量靶材,并且不会引起由于颗粒的产生或组合物的不均匀性引起的缺陷的问题 通过采用例如粉末冶金方法代替通过熔融金属淬火而生产的常规散装金属玻璃,其需要高生产成本,用于在纳米加工中使用的涂膜。 解决方案:公开了具有平均微晶尺寸为1nm至50nm的结构的溅射靶,包括具有以三原子比为原子比为50原子%的Co作为其主要成分的三分体积以上的合金, 以上,并且包括满足主要成分的元素的原子半径差为12%以上,满足负的混合热的金属玻璃的要求。 具有三分体积以上的合金包括Ta和B.溅射靶的相对密度也为≥96.4%,也是通过烧结气体雾化粉末获得的非晶体。 版权所有(C)2010,JPO&INPIT