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    • 2. 发明专利
    • Method and apparatus for attaching abrasive cloth to grinding machine
    • 将研磨机连接到研磨机的方法和装置
    • JPS5953151A
    • 1984-03-27
    • JP15962582
    • 1982-09-16
    • Toshiba Corp
    • KINOSHITA MASAHARU
    • B24B7/17B24D9/08
    • B24D9/085
    • PURPOSE:To enable abrasive cloths to be replaced without removing an upper platen, by sticking tentatively abrasive cloths to the upper stoool and lower stool, then pressing the stool with a roller between them, and rotating the stools. CONSTITUTION:An adhesive is applied onto the lower stool 7 and the abrasive cloth 20 is placed thereon. Then the upper stool 14 to which an adhesive has been applied is lowered and the abrasive cloths 20, 21 are pressed under a suitable pressure. After a few minutes have passed, when the upper stool 13 is raised, the cloth 20 is also raised with the upper platen 13, and therefore the cloths 20, 21 are tentatively stuck. Then an abrasive sticking apparatus is placed on the lower stool 7, and after the cloth 21 is attached to the lower stool 7, the stool 13 is lowered to become in contact with the roller 32 with the gears 15 and 3 fixed. Then when the stools 13, 7 are rotated backward at the same speed, the cloths 20, 21 are stuck well. Thus, the abrasive cloths can be replaced and stuck without removing the upper stool.
    • 目的:为了在不去除上压板的情况下更换磨料布,通过将上下的研磨布暂时粘在上部的凳子和下部的凳子上,然后用它们之间的滚筒将凳子按压,并转动凳子。 构成:将粘合剂施加到下凳7上,并将研磨布20放置在其上。 然后将已经施加有粘合剂的上部粪便14降低,并且研磨剂20,21在合适的压力下被压制。 经过几分钟后,当上部凳子13升起时,布20也随着上压板13升高,因此暂时卡住了布20,21。 然后在下部凳子7上放置研磨粘贴装置,在将布21安装在下部凳子7上之后,将凳子13降低,与齿轮15和3固定在辊32上。 然后当凳子13,7以相同的速度向后旋转时,布20,21被良好地卡住。 因此,可以在不去除上部粪便的情况下更换和粘贴磨料布。
    • 3. 发明专利
    • Method for adhering grinding pad, and fixture for adhering grinding pad
    • 用于加工研磨垫的方法和用于加工研磨垫的装置
    • JP2007105854A
    • 2007-04-26
    • JP2005301330
    • 2005-10-17
    • Fujikoshi Mach Corp不二越機械工業株式会社
    • NAKAMURA YOSHIOKOYAMA HARUMICHI
    • B24B37/08B24B37/12B24B37/20H01L21/304
    • B24B7/17B24B37/08B24D9/085
    • PROBLEM TO BE SOLVED: To facilitate an operation for adhering a grinding pad to upper and lower surface plates. SOLUTION: This method for adhering a grinding pad in a double-sided grinding device comprises a step for setting a carrier dedicated for adhering a pad fixed while a roller device 48 for pressurizing the grinding pad is positioned in a through hole in a manner that the roller device 48 is directed to a radial direction of upper and lower surface plates 14, 16, a step for making the upper and lower surface plates 14 and 16 relatively approach to each other and nipping the roller device 48 by the upper and lower surface plates 14, 16 with a predetermined pressuring force, and a step for rotating the upper and lower surface plates 14, 16 in opposite directions at identical speed, and pressing and adhering the grinding pad to grinding faces of the upper and lower surface plates 14, 16 by the roller device 48. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了便于将研磨垫粘附到上表面板和下表面板上的操作。 解决方案:用于将研磨垫粘合在双面研磨装置中的方法包括:将用于加压研磨垫的辊装置48定位在通孔中的专用于固定的垫的固定用托架的步骤 辊装置48指向上表面板14和下表面板16的径向的方式,使上表面板14和下表面板16相互靠近并将辊装置48夹在上面和下表面板14和16的步骤 下表面板14,16具有预定的加压力,以及用于以相同的速度沿相反方向旋转上表面板14和下表面板16的步骤,并将研磨垫按压并粘附到上表面板和下表面板的研磨面 14,16由辊装置48.版权所有(C)2007,JPO&INPIT
    • 4. 发明专利
    • Polishing device and methods for sticking and peeling off consumable/replaceable parts to/from polishing device
    • 抛光装置和方法,用于剥离和剥离消耗/更换零件往返于抛光装置
    • JP2004042163A
    • 2004-02-12
    • JP2002200404
    • 2002-07-09
    • Ebara Corp株式会社荏原製作所
    • TORII HIROOMIAIZAWA HIDEOWAKABAYASHI SATOSHI
    • B24B37/00B24B49/14B24D9/08B24D18/00H01L21/304
    • B24B37/20B24B49/14B24D9/085B24D18/0072
    • PROBLEM TO BE SOLVED: To provide a polishing device that easily sticks abrasive cloth, a packing film, a pressuring ring, and other consumable/replaceable parts to a polishing table or top ring and peeling these parts off the polishing table/top ring, and also to provide an easy method for sticking consumable/replaceable parts to the polishing device or peeling them off such a device. SOLUTION: In the polishing device, equipped with the top ring that supports a board and a polishing table 10 and designed to make the board supported by the top ring contact the polishing face of the polishing table 10, for polishing the board through relative motions of the polishing table 10 and the board, consumable/replaceable parts, such as abrasive cloth 11 to be adhered to the top ring and the polishing table 10, are stuck to the top ring and polishing table 10 through the intermediation of a temperature-sensitive adhesive tape 13, which becomes non-adhesive or adhesive, depending on whether its temperature surpasses a specified level. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种抛光装置,其可以将研磨布,包装膜,加压环和其他可消耗/可更换部件轻松地粘贴到抛光台或顶环上,并将这些部件从抛光台/顶部剥离 并且还提供将消耗/可更换部件粘贴到抛光装置或将其从这种装置上剥离的简单方法。 解决方案:在具有支撑板的顶环和抛光台10的抛光装置中,设计成使由顶环支撑的板与抛光台10的抛光面接触,用于通过 抛光台10和板的相对运动,待粘附到顶环的研磨布11等可消耗/可替换部件和抛光台10通过温度 敏感性粘合带13根据其温度是否超过指定水平而变得非粘合或粘合。 版权所有(C)2004,JPO