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    • 2. 发明专利
    • Temperature evaluating method of contact point
    • 接触点温度评估方法
    • JP2009257845A
    • 2009-11-05
    • JP2008105159
    • 2008-04-14
    • National Institute Of Advanced Industrial & TechnologyUlvac-Riko Incアルバック理工株式会社独立行政法人産業技術総合研究所
    • IKEUCHI KENROSHIMADA KENJITAKASAKI YOICHIISHII YOSHIICHIYAMAMOTO ATSUSHI
    • G01N25/18
    • PROBLEM TO BE SOLVED: To provide a method for evaluating the temperature of the contact point between an unknown sample and a thermal probe by a the calibration formula formed between a temperature in the thermal probe and the temperature of the contact point by directly measuring the temperature of the contact point using a reference sample.
      SOLUTION: The temperature of the contact point of the reference substance which comprises the same material as that of a sample stand placed on the sample stand and the thermal probe is evaluated using a measuring instrument equipped with the thermal probe and the temperature of the contact point between the unknown simple placed on the sample stand and the thermal probe is evaluated from the temperature in the thermal probe on the basis of the correlation of the obtained temperature of the contact point and the temperature in the thermal probe. The temperature of the contact point of the reference substance and the tip of the probe rod constituting the thermal probe is evaluated as a thermocouple formed between a wire for measuring a voltage of the contact point issued from the sample stand and a wire for measuring a probe reference issued from the thermal probe.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种通过直接在热探针中的温度和接触点的温度之间形成的校准公式来评估未知样品和热探针之间的接触点的温度的方法 使用参考样品测量接触点的温度。

      解决方案:使用配备有热探针的测量仪器和装备有热探针的测量仪器来评估参考物质的接触点的温度,该参考物质的接触点与放置在样品台上的样品台相同的材料和热探针的温度 基于所获得的接触温度和热探针中的温度的相关性,从热探针中的温度来评估放置在样品台上的未知简单和热探针之间的接触点。 参考物质的接触点和构成热探针的探针杆的尖端的温度被评价为在用于测量从样品台发出的接触点的电压的线和用于测量探针的导线之间形成的热电偶 参考从热探头发出。 版权所有(C)2010,JPO&INPIT

    • 3. 发明专利
    • Thermoelectric material measurement device
    • 热电材料测量装置
    • JP2013214642A
    • 2013-10-17
    • JP2012084678
    • 2012-04-03
    • Ulvac-Riko Incアルバック理工株式会社
    • SHIMADA KENJIISHII YOSHIKAZU
    • H01L35/34G01K7/02
    • PROBLEM TO BE SOLVED: To provide a thermoelectric characteristic measurement device which reduces a heated space and achieves high accuracy, a short time, and low costs with a small scale structure.SOLUTION: One end surface of a sample 3 is placed on a lower electrode 15 and the other end surface of the sample 3 is pressed by an upper electrode 17 from above. The sample 3 is fixed by the structure. Thus, the lower electrode 15 and the upper electrode 17 concurrently achieve fixing functions of the sample 3, and it is not necessary to provide fixing means separately. The lower electrode 15 is formed into a cap shape to which a tip of a lower sample holder 41 having a cooling tube 45 therein is attached.
    • 要解决的问题:提供一种减小加热空间并实现高精度,短时间和小规模结构的低成本的热电特性测量装置。解决方案:将样品3的一个端面放置在下电极 15,样品3的另一个端面由上部电极17从上方按压。 样品3由结构固定。 因此,下电极15和上电极17同时实现样品3的固定功能,并且不需要单独提供固定装置。 下部电极15形成为盖状,在其上安装了具有冷却管45的下部样品保持器41的前端。
    • 5. 发明专利
    • Thermophysical property measuring method
    • 热物理测量方法
    • JP2009300086A
    • 2009-12-24
    • JP2008151353
    • 2008-06-10
    • Ulvac-Riko Incアルバック理工株式会社
    • IKEUCHI KENROSHIMADA KENJI
    • G01N25/18G01K11/06
    • PROBLEM TO BE SOLVED: To increase the number of measuring targets to precisely measure the heat conductivity and volume specific heat capacity of a membrane.
      SOLUTION: This thermophysical property measuring method includes a process (a) for calculating the amplitude A and phase difference θ of the temperature change of a metal membrane by measuring the temperature response of the metal membrane with respect to a sample formed by successively stacking the membrane becoming the measuring target and the metal membrane on a substrate, a process (b) for substituting the heat conductivity λ
      0 , volume specific heat capacity C
      0 and membrane thickness d
      0 of the metal membrane, the heat conductivity λ
      2 and volume specific heat capacity C
      2 of the substrate and the membrane thickness d
      1 of the membrane becoming the measuring target for the formula (wherein q is a constant other than 0) to lead out the function of showing the time dependence of the temperature on the surface of the metal membrane, and a process (c) for fitting Acosθ to the real number part of the formula to calculate the heat conductivity λ
      1 and volume specific heat capacity C
      1 of the membrane becoming the measuring target.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:增加测量目标的数量,以精确测量膜的热导率和体积比热容。 解决方案:该热物理性质测量方法包括通过测量金属膜相对于连续形成的样品的温度响应来计算金属膜的温度变化的振幅A和相位差θ的方法(a) 将作为测量对象的膜和金属膜堆叠在基板上,将热传导率λ 0 ,体积比热容C 0 和膜 金属膜的厚度d 0 ,基板的热传导率λ 2 和体积比热容C 2 ,膜厚d < 成为该式(其中q为0以外的常数)的测定对象的膜的SB> 1 ,以显示温度对金属膜的表面的时间依赖性的功能, 过程(c)将Acosθ拟合到公式的实数部分以计算热导数 成为测量目标的膜的体积比热容C 1 和体积比热容C 1 。 版权所有(C)2010,JPO&INPIT
    • 6. 发明专利
    • Temperature calibration method for infrared detector and specific heat capacity measuring method
    • 红外探测器温度校准方法及特殊热容量测量方法
    • JP2009002688A
    • 2009-01-08
    • JP2007161537
    • 2007-06-19
    • Ulvac-Riko Incアルバック理工株式会社
    • TSUJIMOTO AKIHIROSHIMADA KENJIISHIKAWA JUNICHITAKASAKI YOICHI
    • G01J5/00G01J5/28G01N25/18
    • PROBLEM TO BE SOLVED: To provide a temperature calibration method for infrared detectors, and a method for measuring a specific heat capacity by using a temperature-calibrated infrared detector, without using a thermocouple. SOLUTION: One surface of a standard sample is irradiated with laser pulse light, and a temperature change of the other surface is measured with a thermocouple for a predetermined period of time, and simultaneously an output change corresponding to the temperature change of the sample is measured with the infrared detector; exponential attenuation regions of these temperature and output changes are determined; and from a measured temperature with the thermocouple corresponding to a measured output with the infrared detector at a predetermined point of time in these regions, a temperature conversion coefficient for the measured output with the infrared detector is found. After the incident energy of the laser pulse light to the standard sample is found, one surface of a measuring sample is irradiated with laser pulse light; a temperature change of the other surface is measured with the temperature-calibrated infrared detector for the predetermined period of time; from the temperature change a maximum temperature rise value of the measuring sample on the occasion of the irradiation of the laser pulse light is found; and the specific heat capacity of the measuring sample is found from the incident energy and the weight of the measuring sample. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供用于红外检测器的温度校准方法,以及通过使用温度校准的红外检测器来测量比热容的方法,而不使用热电偶。

      解决方案:用激光脉冲光照射标准样品的一个表面,并用热电偶测量另一表面的温度变化预定时间段,同时输出对应于温度变化的变化 用红外探测器测量样品; 确定这些温度和输出变化的指数衰减区域; 在与这些区域中的预定时间点的红外线检测器的测量输出对应的热电偶的测量温度下,发现用红外线检测器测量的输出的温度转换系数。 在入射到标准样品的激光脉冲光能量后,用激光脉冲光照射测量样品的一个表面; 用温度校准的红外检测器测量另一表面的温度变化达预定时间段; 从温度变化可以看出,在照射激光脉冲光的情况下,测量样品的最大温度上升值被发现; 并根据测量样品的入射能量和重量求出测量样品的比热容。 版权所有(C)2009,JPO&INPIT

    • 7. 发明专利
    • Thermoelectric material measurement device
    • 热电材料测量装置
    • JP2013214641A
    • 2013-10-17
    • JP2012084677
    • 2012-04-03
    • Ulvac-Riko Incアルバック理工株式会社
    • SHIMADA KENJIISHII YOSHIKAZU
    • H01L35/28G01K7/02G01N25/00
    • PROBLEM TO BE SOLVED: To provide a thermoelectric characteristic measurement device that is capable of flexibly changing positions of two measurement points of a specimen and a distance therebetween.SOLUTION: Probe units 61 and 63 are moved in a vertical direction independently of each other. As a result, it becomes possible to flexibly change a position of a tip end portion 65 of the probe unit 61 and a position of a tip end portion 67 of the probe unit 63 in the vertical direction independently of each other. It is also possible to bring the probe units into contact with the measurement points of the specimen 3 so as to be energized toward the measurement points, thereby stabilizing contact positions.
    • 要解决的问题:提供能够灵活地改变试样的两个测量点的位置和距离之间的距离的热电特性测量装置。解决方案:探针单元61和63在垂直方向上彼此独立地移动。 结果,能够彼此独立地灵活地改变探针单元61的前端部65的位置和探针单元63的前端部67在垂直方向上的位置。 也可以使探针单元与试样3的测量点接触,以朝向测量点通电,从而稳定接触位置。
    • 8. 发明专利
    • Temperature measuring apparatus for thermoelectric material
    • 温度测量装置用于热电材料
    • JP2008300795A
    • 2008-12-11
    • JP2007148369
    • 2007-06-04
    • Toyota Motor CorpUlvac-Riko Incアルバック理工株式会社トヨタ自動車株式会社
    • KAWASAKI MASASHIWATANABE MASAKIKITA TAKUSHISHIMADA KENJINAGAYA HIROSHI
    • H01L35/00G01J5/48
    • PROBLEM TO BE SOLVED: To obtain thermal image data for temperature measurement without performing complicated image processing of infrared ray camera images.
      SOLUTION: This invention provides a temperature measuring apparatus for a thermoelectric conversion element, which images the image of a substrate (100), wherein thermoelectric conversion elements (8) and electrodes (80a, 80b) that measure electromotive force at both ends of the thermoelectric conversion elements are formed on the surface, using an infrared ray camera (102). The image data near the contact part between the thermoelectric conversion element and the electrode are obtained from the image (110) imaged. Based on the image data obtained, the temperature near the contact part is measured by the apparatus. When the predetermined part of the substrate for evaluation indicates a marker on the position displayed on the screen of the infrared ray camera, and the alignment of the substrate for evaluation and the infrared ray camera is made so that the predetermined part and the marker may be on the same position, the region near the contact part displayed on the screen of the infrared ray camera is set as measuring regions (120a, 120b) in advance. After that, temperature is computed based on the image data gained from the measuring region on the screen after the alignment is made.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:获得用于温度测量的热图像数据,而不进行红外线照相机图像的复杂图像处理。 解决方案:本发明提供了一种热电转换元件的温度测量装置,其对基片(100)的图像进行成像,其中测量两端电动势的热电转换元件(8)和电极(80a,80b) 的热电转换元件使用红外线照相机(102)形成在表面上。 从成像的图像(110)获得热电转换元件和电极之间的接触部分附近的图像数据。 基于获得的图像数据,通过该装置测量接触部分附近的温度。 当用于评估的基板的预定部分指示在红外线照相机的屏幕上显示的位置上的标记,并且进行用于评估的基板和红外线照相机的对准,使得预定部分和标记可以是 在相同的位置上,预先将设置在红外线摄像机的屏幕上的接触部分附近的区域设置为测量区域(120a,120b)。 之后,基于在对准之后从屏幕上的测量区域获得的图像数据计算温度。 版权所有(C)2009,JPO&INPIT
    • 10. 发明专利
    • Laser light irradiation amount adjusting mechanism for measuring sample having optical filter means, and thermal constant measuring device equipped with the mechanism
    • 激光照射量调整机构,用于测量具有光学过滤装置的样品,以及配备机械的恒温测量装置
    • JP2008304191A
    • 2008-12-18
    • JP2007148789
    • 2007-06-05
    • Ulvac-Riko Incアルバック理工株式会社
    • TSUJIMOTO AKIHIROSHIMADA KENJIKUWABARA MASARUTAKASAKI YOICHI
    • G01N25/18
    • PROBLEM TO BE SOLVED: To provide a laser light irradiation amount adjusting mechanism onto a measuring sample, and a thermal constant measuring device equipped with the mechanism, when measuring the thermal diffusivity by using a laser flash method.
      SOLUTION: An optical filter means equipped with a plurality of optical filters, having each different transmittance on an optical path of laser pulse light between a laser pulse light generation device for irradiating the measuring sample surface with the laser pulse light and a vacuum chamber for storing the measuring sample is provided, and a driving means, capable of arranging a prescribed optical filter on the optical path of the laser pulse light by making the optical filter means to rotate or slide longitudinally or horizontally is provided. The thermal constant measuring device equipped with the laser light irradiation amount adjusting mechanism to the measuring sample is also provided.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了在测量样品上提供激光照射量调节机构,以及在使用激光闪光法测量热扩散率时,配备有该机构的热恒定测量装置。 解决方案:一种装备有多个滤光器的滤光器装置,在用于将测量样品表面照射到激光脉冲光的激光脉冲光产生装置和真空之间,在激光脉冲光的光路上具有不同的透射率 提供了用于存储测量样本的腔室,并且提供了一种驱动装置,其能够通过使滤光器装置纵向或水平地旋转或滑动而在激光脉冲光的光路上布置规定的滤光器。 还提供了配备有到测量样品的激光照射量调节机构的热恒定测量装置。 版权所有(C)2009,JPO&INPIT