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1. 发明专利

JP2008298748A Probe device 审中-公开
标题翻译：探测器
公开(公告)号：JP2008298748A
公开(公告)日：2008-12-11
申请号：JP2007148374
申请日：2007-06-04
申请人： Toyota Motor Corp , Ulvac-Riko Inc , アルバック理工株式会社 , トヨタ自動車株式会社
发明人： KAWASAKI MASASHI , WATANABE MASAKI , SHIMADA KENJI , TSUJIMOTO AKIHIRO
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To provide a probe device for high temperature service, capable of position control of each probe in a probe array, and operating stably at high temperature.
SOLUTION: The probe device includes a front edge part 22a and a rear edge part 22b which are projected at one blade-like probe 22, the probe array 12 consisting of a plurality of combined probe units 26 which are sandwiched by a ceramic structural body 24, a probe fixation holding block 14 fixing the probe array 12, a fixing mechanism which the plurality of the probe units are screwed to a predetermined position of the probe fixation holding block through a penetration hole 32 mounted at the probe fixation holding block. The diameter of the penetration hole 32 mounted at the probe fixation holding block is made larger than outer diameter of the screw thread of the fixation 30, therefore, the position adjustment of the probe unit 26 is possible on the probe fixation holding block 14.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于高温服务的探针装置，能够在探针阵列中对每个探针进行位置控制，并在高温下稳定运行。解决方案：探针装置包括突出在一个刀片状探针22上的前边缘部分22a和后边缘部分22b，探针阵列12由多个由陶瓷夹持的组合探针单元26组成结构体24，固定探针阵列12的探针固定保持块14，固定机构，多个探针单元通过安装在探针固定保持块上的穿透孔32旋入到探针固定保持块的预定位置。安装在探针固定保持块上的穿透孔32的直径被制成大于固定件30的螺纹的外径，因此，可以在探针固定保持块14上进行探针单元26的位置调整。 P>版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2008300795A Temperature measuring apparatus for thermoelectric material 审中-公开
标题翻译：温度测量装置用于热电材料
公开(公告)号：JP2008300795A
公开(公告)日：2008-12-11
申请号：JP2007148369
申请日：2007-06-04
申请人： Toyota Motor Corp , Ulvac-Riko Inc , アルバック理工株式会社 , トヨタ自動車株式会社
发明人： KAWASAKI MASASHI , WATANABE MASAKI , KITA TAKUSHI , SHIMADA KENJI , NAGAYA HIROSHI
IPC分类号： H01L35/00 , G01J5/48
摘要： PROBLEM TO BE SOLVED: To obtain thermal image data for temperature measurement without performing complicated image processing of infrared ray camera images.
SOLUTION: This invention provides a temperature measuring apparatus for a thermoelectric conversion element, which images the image of a substrate (100), wherein thermoelectric conversion elements (8) and electrodes (80a, 80b) that measure electromotive force at both ends of the thermoelectric conversion elements are formed on the surface, using an infrared ray camera (102). The image data near the contact part between the thermoelectric conversion element and the electrode are obtained from the image (110) imaged. Based on the image data obtained, the temperature near the contact part is measured by the apparatus. When the predetermined part of the substrate for evaluation indicates a marker on the position displayed on the screen of the infrared ray camera, and the alignment of the substrate for evaluation and the infrared ray camera is made so that the predetermined part and the marker may be on the same position, the region near the contact part displayed on the screen of the infrared ray camera is set as measuring regions (120a, 120b) in advance. After that, temperature is computed based on the image data gained from the measuring region on the screen after the alignment is made.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：获得用于温度测量的热图像数据，而不进行红外线照相机图像的复杂图像处理。解决方案：本发明提供了一种热电转换元件的温度测量装置，其对基片（100）的图像进行成像，其中测量两端电动势的热电转换元件（8）和电极（80a，80b）的热电转换元件使用红外线照相机（102）形成在表面上。从成像的图像（110）获得热电转换元件和电极之间的接触部分附近的图像数据。基于获得的图像数据，通过该装置测量接触部分附近的温度。当用于评估的基板的预定部分指示在红外线照相机的屏幕上显示的位置上的标记，并且进行用于评估的基板和红外线照相机的对准，使得预定部分和标记可以是在相同的位置上，预先将设置在红外线摄像机的屏幕上的接触部分附近的区域设置为测量区域（120a，120b）。之后，基于在对准之后从屏幕上的测量区域获得的图像数据计算温度。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2009256768A Method for producing strontium titanate thin film 审中-公开
标题翻译：生产钛酸锶薄膜的方法
公开(公告)号：JP2009256768A
公开(公告)日：2009-11-05
申请号：JP2008222109
申请日：2008-08-29
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , OTOMO AKIRA , OKUDE MASAKI , KITA TAKUSHI
IPC分类号： C23C14/08 , C01G23/00
摘要： PROBLEM TO BE SOLVED: To provide a method for obtaining a layered strontium titanate thin film comprising an RP phase having high crystallinity.
SOLUTION: The method comprises: a step where a target arranged at the inside of a chamber is irradiated with laser light so as to be a pulse shape at a prescribed first temperature, and an SrO layer is formed on a substrate arranged at a position confronted with the target; and a step where the target arranged at the inside of the chamber is irradiated with laser light so as to be a pulse shape at a prescribed second temperature, and an SrTiO
3 layer is formed on the SrO layer formed on the substrate arranged at the position confronted with the target. The first temperature is lower than the upper limit temperature at which crystals can be grown only by the SrO layer, the second temperature is higher than the lower limit temperature required for the crystallization of the SrTiO
3 layer, and the first temperature is lower than the second temperature.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种获得包含具有高结晶度的RP相的层状钛酸锶薄膜薄膜的方法。解决方案：该方法包括：一个步骤，其中布置在腔室内部的靶用激光照射成规定的第一温度的脉冲形状，并且将SrO层形成在布置在面对目标的位置; 并且在形成有SrO层的情况下，在配置在室内的目标物的激光照射为规定的第二温度的脉冲形状的步骤，形成SrTiO 3 S层，在布置在与目标相对的位置上的基板上。第一温度低于仅通过SrO层生长晶体的上限温度，第二温度高于SrTiO 3 S 3层的结晶所需的下限温度，第一温度低于第二温度。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2009043615A Pulsed electron beam generating device and pulsed electron beam film deposition device 审中-公开
标题翻译：脉冲电子束生成装置和脉冲电子束膜沉积装置
公开(公告)号：JP2009043615A
公开(公告)日：2009-02-26
申请号：JP2007208299
申请日：2007-08-09
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , WATANABE MASAKI , EBISUMORI KAZUO
IPC分类号： H01J37/065 , C23C14/30 , H01J37/30
摘要： PROBLEM TO BE SOLVED: To provide a pulsed electron beam generating device stably operating for a long period of time, and an electron beam film deposition device using the above device.
SOLUTION: In this pulsed electron beam generating device 8 equipped with a pulsed electron beam generating part 8a to generate pulsed electron beams, and a guide tube 8b forming a hollow tube made of an insulating material, which is connected to the pulsed electron beam generating part 8a to guide the generated electron beam to a target surface, a fin 8c of an insulating material which has a height in the direction perpendicular to the longitudinal direction of the tube is provided on the side of the guide tube 8b so as to make an almost one round around the side of the guide tube.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供长时间稳定运行的脉冲电子束产生装置和使用上述装置的电子束成膜装置。解决方案：在装有脉冲电子束产生部分8a以产生脉冲电子束的脉冲电子束产生装置8中，以及形成由绝缘材料制成的中空管的导管8b连接到脉冲电子光束产生部8a将生成的电子束引导到目标表面，在导管8b的一侧设置有与管的纵向方向垂直的方向上具有高度的绝缘材料的翅片8c，以便围绕导管的一侧围绕一圈。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2007024603A Measuring method of thin film like sample 审中-公开
标题翻译：薄膜样品的测定方法
公开(公告)号：JP2007024603A
公开(公告)日：2007-02-01
申请号：JP2005204853
申请日：2005-07-13
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , WATANABE MASAKI , KITA TAKUSHI , SAKAKIBARA TSUTOMU
IPC分类号： G01N27/04 , G01N25/00
摘要： PROBLEM TO BE SOLVED: To provide a measuring method of a thin film like sample capable of simply measuring the Seebeck coefficient or thermoelectric characteristics of the thin film like sample.
SOLUTION: A thin film 22 is arranged on a substrate 10 having a plurality of electrodes 12A-12D exposed to its surface so as to come into contact with the electrodes 12 and a current is supplied across the electrodes 12 to measure the characteristics of the thin film 22.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够简单地测量薄膜样样品的塞贝克系数或热电特性的薄膜样样品的测量方法。解决方案：薄膜22布置在具有暴露于其表面的多个电极12A-12D以与电极12接触的基板10上，并且电流跨越电极12供应以测量特性的薄膜22.版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2009043613A Pulsed electron beam generating device, and pulsed electron beam film deposition device 审中-公开
标题翻译：脉冲电子束生成装置和脉冲电子束膜沉积装置
公开(公告)号：JP2009043613A
公开(公告)日：2009-02-26
申请号：JP2007208242
申请日：2007-08-09
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , WATANABE MASAKI , KITA TAKUSHI , MURAI TATEYA , EBISUMORI KAZUO
IPC分类号： H01J37/06 , C23C14/30 , H01J37/317
摘要： PROBLEM TO BE SOLVED: To provide a pulsed electron beam generating device capable of continuously generating a large number of electron beam pulses, and an electron beam film deposition device using the above device.
SOLUTION: In this pulsed electron beam generating device 8 equipped with a pulsed electron beam generating part 8a to generate pulsed electron beams, and a guide tube 8b forming a hollow tube made of an insulating material, which is connected to the pulsed electron beam generating part 8a to guide the generated electron beam to a target surface, a cylindrical structure 8c for coating a part of the side of the guide tube is mounted to the guide tube with a gap provided between itself and the surface of the guide tube 8b.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够连续产生大量电子束脉冲的脉冲电子束产生装置和使用上述装置的电子束成膜装置。解决方案：在装有脉冲电子束产生部分8a以产生脉冲电子束的脉冲电子束产生装置8中，以及形成由绝缘材料制成的中空管的导管8b连接到脉冲电子光束产生部分8a将产生的电子束引导到目标表面，用于涂覆导管一侧的一部分的圆柱形结构8c安装在引导管上，其间设置有引导管8b的表面之间的间隙。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2009042127A Measurement method for thin-film shaped sample 审中-公开
标题翻译：薄膜形状样品的测量方法
公开(公告)号：JP2009042127A
公开(公告)日：2009-02-26
申请号：JP2007208852
申请日：2007-08-10
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , WATANABE MAKI , KITA TAKUSHI
IPC分类号： G01N25/00 , G01N25/18
摘要： PROBLEM TO BE SOLVED: To provide a measurement method for a thin-film shaped sample capable of stably and accurately measuring Seebeck characteristics of the thin-film shaped sample by giving sufficient temperature gradient when the thin-film shaped sample is small and the distance between terminals for voltage measurement is short.
SOLUTION: The measurement method for a thin-film shaped sample comprises the steps of arranging the thin-film shaped sample on a substrate with a plurality of electrodes on the surface thereof so as to contact at least a pair of the electrodes; heating the side of one electrode of the pair of them; current-carrying across the pair of electrodes while absorbing heat transferred from it to the side of the other electrode by heating; and measuring characteristics of the thin-film shaped sample.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种薄膜状样品的测量方法，其能够通过在薄膜状样品较小时提供足够的温度梯度来稳定且精确地测量薄膜状样品的塞贝克特性，电压测量端子之间的距离短。解决方案：薄膜状样品的测量方法包括以下步骤：在其表面上具有多个电极的衬底上设置薄膜状样品，以便与至少一对电极接触; 加热其一对电极的一侧; 同时吸收一对电极，同时通过加热吸收从其传递到另一个电极的侧面的热量; 并测量薄膜状样品的特性。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2007005359A Method of evaluating seebeck coefficient 审中-公开
标题翻译：评价SEEBECK系数的方法
公开(公告)号：JP2007005359A
公开(公告)日：2007-01-11
申请号：JP2005180490
申请日：2005-06-21
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , WATANABE MASAKI
IPC分类号： H01L35/28
摘要： PROBLEM TO BE SOLVED: To provide a method of evaluating the Seebeck coefficient for solving the problems, wherein the shape of a sample is defined and that it takes time to stabilize a temperature difference in a conventional measurement of the Seebeck coefficient, because the Seebeck coefficient is calculated, based on the temperature difference generated by heating one end of a measurement sample and cooling the other end and thermal electromotive force.
SOLUTION: This method of evaluating the Seebeck coefficient has at least a process of applying a DC current to a portion between one end of a measurement sample and the other end, to obtain the temperature difference (dΔT/dt) generated between the one end and the other end in a unit time.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种评估塞贝克系数以解决问题的方法，其中定义样品的形状，并且需要时间来稳定塞贝克系数的常规测量中的温度差，因为基于通过加热测量样品的一端并冷却另一端而产生的温差和热电动势来计算塞贝克系数。解决方案：该评估塞贝克系数的方法至少具有将直流电流施加到测量样品的一端与另一端之间的部分的过程，以获得在第一和第二端之间产生的温度差（dΔT/ dt）一端和另一端单位时间。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2008170259A Evaluating substrate of thermoelectric material, and package/collective evaluation device for the thermoelectric material 审中-公开
标题翻译：评估热电材料的基材，以及用于热电材料的包装/集合评估装置
公开(公告)号：JP2008170259A
公开(公告)日：2008-07-24
申请号：JP2007003383
申请日：2007-01-11
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , WATANABE MASAKI , KITA TAKUSHI
IPC分类号： G01N25/18 , H01L35/28
摘要： PROBLEM TO BE SOLVED: To arrange a larger number of thermoelectric samples on a multilayer wiring board, with respect to a limited number of probes of a measuring instrument.
SOLUTION: An evaluating substrate of a thermoelectric material includes the multilayer wiring board, wherein a plurality of the electrode terminals are formed so as to be exposed to the upper surface of the multilayer wiring board, and a plurality of the electrode pads formed to the peripheral part of the upper surface of the multilayer wiring board are connected by a plurality of the wiring patterns formed in a layer, and a plurality of thermoelectric material thin-film pieces formed on the upper surface of the multilayer wiring board, in contact with the electrode terminals and is constituted so that a plurality of the electrode terminals, formed on the upper surface of the multilayer wiring board constitute a plurality of electrode units, each of which has at least a pair of the electrode first terminals and the thermoelectric material thin-film pieces are formed on the electrode units. Two adjacent first electrode terminals are constituted of a common electrode in between two adjacent electrode units, and the common electrode is connected to one of a plurality of the electrode pads by a single wining pattern.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：相对于有限数量的测量仪器的探针，在多层布线板上布置更多数量的热电样品。解决方案：热电材料的评估基板包括多层布线板，其中多个电极端子形成为暴露于多层布线板的上表面，并且形成多个电极焊盘与多层布线基板的上表面的周边部分由形成在层中的多个布线图案相连接，并且形成在多层布线板的上表面上的多个热电材料薄膜片接触与电极端子构成，使得形成在多层布线板的上表面上的多个电极端子构成多个电极单元，每个电极单元至少具有一对电极第一端子和热电材料在电极单元上形成薄膜片。两个相邻的第一电极端子由两个相邻电极单元之间的公共电极构成，并且公共电极通过单一的精细图案连接到多个电极焊盘中的一个。版权所有（C）2008，JPO＆INPIT

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