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    • 1. 发明专利
    • Solid-state image pickup device
    • 固态图像拾取器件
    • JPH11274459A
    • 1999-10-08
    • JP7197598
    • 1998-03-20
    • Toshiba Corp株式会社東芝
    • INOUE IKUKONOZAKI HIDETOSHIIHARA HISANORIYAMAGUCHI TETSUYAYAMASHITA HIROSHIMAKABE AKIRANOMACHI EIKOHORI MIKIKONAKAMURA NOBUO
    • H01L27/146H04N5/335H04N5/365H04N5/367H04N5/369H04N5/3745
    • PROBLEM TO BE SOLVED: To reduce white scratches, fixed pattern noise and random noise, by reducing a leak current generated on a substrate interface.
      SOLUTION: A solid-state image pick up device is provided with a photoelectric conversion part 20 formed on a semiconductor substrate, an amplifying transistor 2-1-1 modulated by signal charges accumulated by photoelectric conversion of the photoelectric conversion part 20, and read transistors (21, 22) which read a signal current from the amplifying transistor 2-1-1 from the photoelectric conversion part 20. The difference between the gate voltage of the read transistor and the reverse potential of the semiconductor substrate, namely, read potential Φ, is reduced, by setting the threshold value of the read transistor at a high value, within a range wherein reading of the signal charge from the photoelectric converting part 20 can be performed.
      COPYRIGHT: (C)1999,JPO
    • 要解决的问题:通过减少在基板界面上产生的泄漏电流来减少白色划痕,固定图案噪声和随机噪声。 解决方案:固态摄像装置设置有形成在半导体衬底上的光电转换部分20,由光电转换部分20的光电转换累积的信号电荷调制的放大晶体管2-1-1和读出的晶体管 (21,22),其从光电转换部20读取来自放大晶体管2-1-1的信号电流。读取晶体管的栅极电压与半导体衬底的反向电位之间的差即读取电位Φ 通过将读取晶体管的阈值设定为高值,在可以执行从光电转换部20读取信号电荷的范围内被减小。
    • 3. 发明专利
    • Solid-state image pick up device
    • 固态图像拾取器件
    • JPH11274457A
    • 1999-10-08
    • JP7089298
    • 1998-03-19
    • Toshiba Corp株式会社東芝
    • YAMASHITA HIROSHIIHARA HISANORIINOUE IKUKOYAMAGUCHI TETSUYANAKAMURA NOBUONARUSE HIROSHIIGUMA HIDEMIKISHIBATA HIDENORIMAKABE AKIRAABE SEIGONOMACHI EIKOSHIOYAMA YOSHIYUKIHORI MIKIKONOZAKI HIDETOSHI
    • H01L27/146H04N5/335H04N5/355H04N5/361H04N5/374
    • H01L27/14609
    • PROBLEM TO BE SOLVED: To facilitate ejection of a signal charge at a signal accumulating part and to prevent deterioration of dynamic range in an element, thermal noise, residual image, etc., in the dark from generating, even when the pixel size of a MOS type solid-state image pick up device is reduced, a read gate voltage is deteriorated and a well concentration is increased.
      SOLUTION: On the surface of a p-type silicon substrate 21, a (p)
      + type diffusion layer 23 which constitutes a photoelectric conversion region 22 and the drain 24 of a read MOS type field effect transistor are formed. At the lower part of the (p)
      + diffusion layer 23, a signal accumulating part 25 formed of an (n) type diffusion layer is formed adjacent to the (p)
      + type diffusion layer. On the surface of the silicon substrate 21, the gate electrode 26 of a MOS type field effect transistor is provided between the (p)
      + diffusion layer 23 and the drain 24. The edge part of the gate electrode 26 of the MOS transistor of the signal accumulating part 25 is protruded, having its edge position extended downward from the read gate electrode 26 of the diffusion layer 23 further than the edge part of the read gate electrode 26 of the (p)
      + diffusion layer 23 provided on the surface of the silicon substrate 21.
      COPYRIGHT: (C)1999,JPO
    • 要解决的问题:为了便于在信号累积部分处的信号电荷的排出,并且防止在黑暗中的元件,热噪声,残留图像等中的动态范围的劣化产生,即使当像素尺寸 MOS型固体摄像装置减少,读栅极电压劣化,阱浓度增加。 解决方案:在p型硅衬底21的表面上,形成构成光电转换区22的(p)+型扩散层23和读取MOS型场效应晶体管的漏极24。 在(p)+扩散层23的下部,形成与(p)+型扩散层相邻的(n)型扩散层形成的信号存储部25。 在硅衬底21的表面上,MOS型场效应晶体管的栅极26设置在(p)+扩散层23和漏极24之间.MOS晶体管的栅电极26的边缘部分 信号累积部25的边缘位置比扩散层23的读取栅电极26向下延伸的边缘位置比设置在(p)+扩散层23的读取栅电极26的边缘部分突出 硅衬底21的表面。
    • 4. 发明专利
    • Solid-state image pick up device
    • 固态图像拾取器件
    • JPH11274455A
    • 1999-10-08
    • JP7055898
    • 1998-03-19
    • Toshiba Corp株式会社東芝
    • YAMAGUCHI TETSUYANOZAKI HIDETOSHIIHARA HISANORIINOUE IKUKOYAMASHITA HIROSHINARUSE HIROSHIIGUMA HIDEMIKISHIBATA HIDENORIMAKABE AKIRAABE SEIGONOMACHI EIKOSHIOYAMA YOSHIYUKIHORI MIKIKO
    • H01L27/146H04N5/335H04N5/361H04N5/365H04N5/369H04N5/3745
    • H01L27/14609
    • PROBLEM TO BE SOLVED: To provide a solid-state image pick up device, which accurately reads out a signal charge from a photodiode even when a voltage is reduced, and also reduces generation of leak current.
      SOLUTION: A solid-state image pick up device is provided with a read transistor. The react transistor has an (n) type semiconductor layer 2, which is formed on a semiconductor substrate for photoelectric conversion, a (p) type semiconductor layer 3, which is formed to shield the upper surface of the (n) type semiconductor layer 2; and an (n) type semiconductor layer 4, which is formed on the surface of the semiconductor substrate and is connected electrically with the (n) type semiconductor layer 2 for reading a signal charge from the (n) type semiconductor layer 2. The read transistor reads the signal charge from the (n) type semiconductor layer 2 through the (n) type semiconductor layer 4. The (p) type semiconductor layer 3 and the (n) type semiconductor layer 4 are formed at a prescribed interval so as not to bring the depletion layer formed by the (p) type semiconductor layer 3 into contact with the depletion layer formed by the (n) type semiconductor layer 4.
      COPYRIGHT: (C)1999,JPO
    • 要解决的问题:提供一种固态图像拾取装置,其即使在电压降低时也准确地从光电二极管读出信号电荷,并且还减少了泄漏电流的产生。 解决方案:固态图像拾取装置具有读取晶体管。 反应晶体管具有形成在用于光电转换的半导体衬底上的(n)型半导体层2,形成为(n)型半导体层2的上表面的(p)型半导体层3 ; 和(n)型半导体层4,其形成在半导体衬底的表面上并与(n)型半导体层2电连接,用于从(n)型半导体层2读取信号电荷。 晶体管通过(n)型半导体层4从(n)型半导体层2读取信号电荷。(p)型半导体层3和(n)型半导体层4以规定的间隔形成为不 使由(p)型半导体层3形成的耗尽层与由(n)型半导体层4形成的耗尽层接触。