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1. 发明专利

JPH0952769A PRODUCTION OF ALUMINUM NITRIDE BASED SOLID BODY 失效
公开(公告)号：JPH0952769A
公开(公告)日：1997-02-25
申请号：JP20602795
申请日：1995-08-11
申请人： TOSHIBA CERAMICS CO , TOSHIBA MONOFRAX
发明人： KOTAKA HIROAKI , YAMAOKA SHUSUKE , MATSUO HIDEYASU , ANDO MASAHIRO , FUJII MIKIYA , TERADA HIROYUKI , MISU YASUO
IPC分类号： C01B21/072 , C04B35/581
摘要： PROBLEM TO BE SOLVED: To obtain aluminum nitride whose nitride reaction is progressed even at =0.5 volume % gaseous hydrocarbons with gaseous NH3 , the aluminous solid body is γ-Al2 O3 or its precursor and the heating temp. is 1,200-1,700 deg.C.

2. 发明专利

JP2006240960A High specific resistance silicon carbide sintered compact 有权
标题翻译：高耐磨性碳化硅烧结紧密
公开(公告)号：JP2006240960A
公开(公告)日：2006-09-14
申请号：JP2005062454
申请日：2005-03-07
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： MATSUYAMA TOYOKAZU , HIRATA HIROYASU , KANAI HIDEYUKI , SEKO JUN , ANDO MASAHIRO , FUKUOKA SEIICHI
IPC分类号： C04B35/565 , F16J15/34 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a high specific resistance silicon carbide sintered compact suitably usable, e.g. as an insulating member for semiconductor fabrication equipment and liquid crystal device fabrication equipment, and further capable of coping with the enlargement, the increase of precision and the complication in the above member or the like. SOLUTION: The high specific resistance silicon carbide sintered compact in which the content of nitrogen is 0.4 to 0.5 wt%, a part of the nitrogen is allowed to enter into solid solution in silicon carbide crystals, the balance is present on the grain boundaries of the silicon carbide crystals as boron nitride crystals, and specific resistance is ≥0.1 GΩ cm is obtained by an atmospheric pressure sintering process. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供适合使用的高比电阻碳化硅烧结体，例如，作为半导体制造装置和液晶装置制造装置的绝缘构件，并且还能够应对上述构件等中的放大，精度提高和复杂化。解决方案：使氮含量为0.4〜0.5重量％的高比电阻碳化硅烧结体，使一部分氮气进入碳化硅晶体的固溶体，余量存在于晶粒作为氮化硼晶体的碳化硅晶体的边界，通过大气压烧结工艺获得比电阻≥0.1GΩcm。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2005119925A High-resistivity silicon carbide sintered compact 审中-公开
标题翻译：高电阻碳化硅烧结紧凑
公开(公告)号：JP2005119925A
公开(公告)日：2005-05-12
申请号：JP2003358764
申请日：2003-10-20
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： SEKO JUN , ANDO MASAHIRO , FUKUOKA SEIICHI
IPC分类号： F16J15/34 , C04B35/565 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To provide a high-resistivity silicon carbide sintered compact capable of being used as e.g., an insulation member in semiconductor production apparatuses and liquid crystal device production apparatuses and capable of coping with an increase in the size, accuracy, and complexity of the member. SOLUTION: The high-resistivity silicon carbide sintered compact used is a silicon carbide sintered compact prepared by adding a boron source and a nitrogen source to silicon carbide and has a nitrogen content of 650 to 8,000 wt. ppm, a resistivity of at least 10 7 Ω cm, and a density of at least 3.0 g/cm 3 . COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够用作半导体制造装置和液晶装置制造装置中的绝缘构件的高电阻率碳化硅烧结体，能够应对尺寸，精度的增加，以及会员的复杂性。解决方案：所使用的高电阻率碳化硅烧结体是通过将硼源和氮源添加到碳化硅中并且氮含量为650至8,000重量％而制备的碳化硅烧结体。 ppm，电阻率为至少10×SP>Ωcm，密度至少为3.0g / cm 3。版权所有（C）2005，JPO＆NCIPI

4. 发明专利

JPH09314718A HIGH THERMAL CONDUCTIVITY COMPOSITE SHEET 失效
公开(公告)号：JPH09314718A
公开(公告)日：1997-12-09
申请号：JP15599996
申请日：1996-05-28
申请人： TOSHIBA CERAMICS CO
发明人： KOTAKA HIROAKI , YAMAOKA SHUSUKE , ANDO MASAHIRO
IPC分类号： B32B5/02 , B32B7/02 , B32B9/00 , B32B27/12
摘要： PROBLEM TO BE SOLVED: To provide a sheet which is insulating, has high thermal conductivity, and suitable for a semiconductor packaging material. SOLUTION: A high thermal conductivity composite sheet characterized by a process in which a nonwoven fabric of aluminum nitride fibers and a plastic thin plate are laminated integrally into a sheet. Preferably, the nonwoven fabric is obtained by a method in which a nonwoven fabric of amorphous alumina fibers is heat-treated at 1200-1700 deg.C in an ammonia gas atmosphere containing not more than 30vol% of hydrocarbon gas.

5. 发明专利

JPH08222575A SURFACE MODIFYING QUARTZ JIG FOR SEMICONDUCTOR HYDROGEN HEAT TREATMENT 失效
公开(公告)号：JPH08222575A
公开(公告)日：1996-08-30
申请号：JP4900595
申请日：1995-02-13
申请人： TOSHIBA CERAMICS CO
发明人： KOTAKA HIROAKI , YAMAOKA SHUSUKE , ANDO MASAHIRO , MATSUO HIDEYASU , AIBA YOSHIRO
IPC分类号： C03B20/00 , C01B21/068 , C03B32/00 , C03C23/00 , C04B41/87 , H01L21/324
摘要： PURPOSE: To improve the durability to hydrogen gas in a jig for a core tube made of quartz glass for hydrogen heat treatment in semiconductor manufacture process. CONSTITUTION: This is a surface modifying quartz jig for semiconductor hydrogen heat treatment having a surface layer containing acid nitrides. Furthermore, this is a surface modifying quartz jig for semiconductor hydrogen heat treatment where a silicon nitrides is made preferably in the thickness half the acid nitride modifying surface layer or under. The surface layer is about 10μm from the surface, and it is to be desired that the content of the nitrogen in the surface layer for about 2μm from the surface should be 40% or less in percentage of the number of atoms. It is to be desired that the surface layer containing acid nitrides should be made by applying heat contact treatment to the surface of a quartz jig, using ammonium gas, at a temperature of 700-1200 deg.C under existence of carbon generation source, so as to nitride the vicinity of the surface.

6. 发明专利

JPH08133872A TRANSLUCENT ALUMINA HAVING MODIFIED SURFACE LAYER AND ITS PRODUCTION 失效
公开(公告)号：JPH08133872A
公开(公告)日：1996-05-28
申请号：JP27264994
申请日：1994-11-07
申请人： TOSHIBA CERAMICS CO
发明人： KOTAKA HIROAKI , YAMAOKA SHUSUKE , ANDO MASAHIRO , MATSUO HIDEYASU , AIBA YOSHIRO
IPC分类号： C04B41/87 , C04B35/115 , C04B41/52
摘要： PURPOSE: To obtain a translucent alumina having modified surface layer with excellent durability and resistant to the deterioration of translucence even after repeated heating and cooling cycles by forming two layers consisting of aluminum nitride and aluminum oxynitride on the surface layer of a translucent alumina. CONSTITUTION: This translucent alumina is produced by chemically modifying the surface layer of an alumina substrate. The part excluding the surface layer having a thickness of =2 times that of the aluminum nitride layer is formed under the aluminum nitride layer.

7. 发明专利

JPH08132196A NOZZLE FOR CASTING 失效
公开(公告)号：JPH08132196A
公开(公告)日：1996-05-28
申请号：JP29214694
申请日：1994-11-01
申请人： TOSHIBA CERAMICS CO
发明人： KAWAMURA TOSHIO , NIWA SHIGEKI , HASEBE NOBUHIRO , ANDO MASAHIRO , MOCHIZUKI YOICHIRO , TAKIGAWA HITOSHI
IPC分类号： B22D41/54 , B22D11/10 , C04B35/00 , C04B35/103 , C04B35/81
摘要： PURPOSE: To improve thermal shock resistance in particular while maintaining oxidation resistance and corrosion resistance approximately same as conventional one by uniformly dispersing the aluminum borate whisker of specified quantity in the refractory consisting of carbon and one or more kinds of other materials. CONSTITUTION: The refractory consisting of carbon and one or more kinds of other materials is reinforced in strength by the function of aluminum borate whisker having mechanical strength and chemical stability. To this end, aluminum borate is uniformly dispersed by 0.2-10wt.% (outside ratio). Further, the aluminum borate whisker shown as chemical formula 9Al2 O3 .2B2 O3 is of short fiber like cat whisker and has good dispersibility. Further, aluminum borate whisker is made to 0.5-5μm diameter, 10-1000μm length to have good dispersibility, lowering of mechanical strength is prevented.

8. 发明专利

JPH0584548A CONNECTING RING FOR HORIZONTAL CONTINUOUS CASTING 失效
公开(公告)号：JPH0584548A
公开(公告)日：1993-04-06
申请号：JP13373291
申请日：1991-03-29
申请人： TOSHIBA CERAMICS CO , NIPPON YAKIN KOGYO CO LTD
发明人： TERASAKI HISASHI , FUKAYA TAKAHIRO , ANDO MASAHIRO , SASAYAMA SHINICHI , YOSHIDA HIDEO
IPC分类号： B22D11/04 , B22D11/10 , B22D41/54
摘要： PURPOSE:To prevent the instability and to restrain the wear by incorporating the specific content of carbon with an impregnation in a sintered body containing stabilized zirconia as the main component and specifying the apparent porosity. CONSTITUTION:By incorporating 0.1-10wt.% carbon in the stabilized zirconia sintered body impregenated with carbon, the carbon prevents the intrusion of SiO or SiO2 as the cause of separation of the stabilizer and further acts as a reduction agent and the stabilizer is combined with SiO2 to make glassy. Then the apparent porosity is made to be

9. 发明专利

JP2007153700A Method of joining silicon carbide porous ceramic and joined member 有权
标题翻译：多孔陶瓷多孔陶瓷加工方法
公开(公告)号：JP2007153700A
公开(公告)日：2007-06-21
申请号：JP2005353172
申请日：2005-12-07
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： HYODO TOSHIHIKO , FUKUOKA SEIICHI , ANDO MASAHIRO
IPC分类号： C04B37/00 , H05K1/03
摘要： PROBLEM TO BE SOLVED: To provide a method of joining silicon carbide porous ceramics by which the porous ceramics each comprising silicon carbide and having many communicating pores through which a liquid is permeated are uniformely joined with soldering while preventing the infiltration of the soldering into the pores of the porous part without damaging the characteristics of the porous ceramic such as air permeability or water permeability and a joined memeber obtained by the same.
SOLUTION: An oxide film is formed on the inner and outer surfaces of the silicon carbide porous ceramics by heat-treating at ≥750°C and ≤1,700°C and one silicon carbide porous ceramic is joined to another silicon carbide on the oxide film formed surfaces each other with a silicon based soldering.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种连接碳化硅多孔陶瓷的方法，通过该方法，将包含碳化硅并且具有许多连通孔的渗透液体的多孔陶瓷与焊料均匀地接合，同时防止焊接的渗透进入多孔部分的孔中，而不损害多孔陶瓷的特性，例如透气性或透水性，以及由其获得的连接的元件。解决方案：通过在≥750℃和≤1,700℃下热处理在碳化硅多孔陶瓷的内表面和外表面上形成氧化物膜，并且将一个碳化硅多孔陶瓷接合到另一个碳化硅上氧化膜形成的表面彼此具有硅基焊接。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2005281094A Drying method for ceramic green body 审中-公开
标题翻译：陶瓷绿体干燥方法
公开(公告)号：JP2005281094A
公开(公告)日：2005-10-13
申请号：JP2004100003
申请日：2004-03-30
申请人： Toshiba Ceramics Co Ltd , 東芝セラミックス株式会社
发明人： HYODO TOSHIHIKO , ANDO MASAHIRO
IPC分类号： F26B5/16 , C04B33/30
摘要： PROBLEM TO BE SOLVED: To provide a drying method for a ceramic green body capable of inexpensively drying even the highly moist ceramic green body of a large shrinkage rate or the ceramic green body of a large thickness, large size and intricate shape without prolonging the time required for drying and without using a costly constant temperature constant humidity bath and without giving rise to cracking with an ordinary drying furnace.
SOLUTION: The drying method for the ceramic green body which is obtained by casting comprises: placing the ceramic green body on a drying tool; covering the ceramic green body and the drying tool by a film having moisture permeability in such a manner as not to come into contact with the ceramic green body; and drying the ceramic green body in the drying furnace.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种能够廉价地干燥大收缩率的高湿陶瓷生坯或陶瓷生坯的陶瓷生坯的干燥方法，其厚度大，尺寸大，复杂的形状没有延长干燥所需的时间，并且不使用昂贵的恒温恒湿浴并且不会用普通干燥炉引起裂纹。解决方案：通过浇铸获得的陶瓷生坯的干燥方法包括：将陶瓷生坯放置在干燥工具上; 通过具有透湿性的膜以不与陶瓷生坯接触的方式覆盖陶瓷生坯和干燥工具; 并在干燥炉中干燥陶瓷生坯。版权所有（C）2006，JPO＆NCIPI

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