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1. 发明专利

JPH11111827A HOLDING DEVICE AND PROCESSING DEVICE MOUNTING THE SAME 失效
公开(公告)号：JPH11111827A
公开(公告)日：1999-04-23
申请号：JP27544297
申请日：1997-10-08
申请人： TOKYO ELECTRON LTD , AM TECHNOLOGY KK
发明人： ARAMI JIYUNICHI , KAWANAMI HIROSHI , ENDOU SHIYOUSUKE , SUZUKI NOBUYUKI
IPC分类号： B23Q3/15 , C23C16/46 , H01L21/203 , H01L21/205 , H01L21/302 , H01L21/3065 , H01L21/68 , H01L21/683
摘要： PROBLEM TO BE SOLVED: To uncrack even at a high temperature and unremove an electrostatic chuck from a metallic heater due to a thermal distortion, by a method wherein a thermal expansion buffer layer having an intermediate thermal expansion coefficient between thermal expansion coefficients of the electrostatic chuck, and a heater is provided between the electrostatic chuck and the heater and jointed thereto. SOLUTION: A holding device comprises a metallic heater 3 in which a heating body 5 is buried, an electrostatic chuck 11 made of ceramics, and a thermal expansion buffer layer 6 joined and provided between the heater 3 and the electrostatic chuck 11. The thermal expansion buffer layer 6 has a thermal expansion coefficient between that of the electrostatic chuck 11 and that of the heater 3. Thus, a difference in the thermal expansion coefficients between the electrostatic chuck 11 and the heater 3 is scattered as a small difference in the thermal expansion coefficients between the electrostatic chuck 11 and the thermal expansion buffer layer 6 and a small difference in the thermal expansion coefficients between the heater 3 and the thermal expansion buffer layer 6, and a stress distortion due to a difference in the thermal expansion coefficients applied on the electrostatic chuck 11 is reduced.

2. 发明专利

JPH11269578A MANUFACTURE OF COMPOSITE BODY 失效
公开(公告)号：JPH11269578A
公开(公告)日：1999-10-05
申请号：JP7293898
申请日：1998-03-23
申请人： DENKI KAGAKU KOGYO KK , AM TECHNOLOGY KK
发明人： SUZUKI NOBUYUKI , TERASHI AKIRA , OBATA MASAAKI , HIROTSURU HIDEKI , TERASAKI RYUICHI
IPC分类号： B22D19/00 , B22D19/14 , C22C1/10 , C22C47/00 , C22C47/08 , C22C47/12 , C22C1/09
摘要： PROBLEM TO BE SOLVED: To prevent an inorganic structural body from being broken by arranging a fibrous inorganic material adjacently to the porous inorganic structural body, impregnating a metal therein by the high-pressure casting method or the molten metal forging method to prevent non-uniformity in the local temperature due to the heat radiation into a jig, a or the like. SOLUTION: A metal such as aluminum alloy is impregnated in a porous inorganic structural body consisting of silicon carbide, aluminum nitride, silicon nitride aluminum oxide, or the like arranged with a fibrous inorganic material mainly consisting of aluminum adjacently thereto. As porous inorganic structural body, a ceramic sintered body or the like having pores capable of impregnating the metal, the strength of, for example, 10 MPa which is difficult to generate breakage is preferable. The fibrous inorganic material is an assembly of blanket, mat and the like formed of inorganic compound fiber, and is arranged to cover the porous inorganic structural body. The heat radiation from the porous inorganic structural body through a jig, a die, or the like is reduced in impregnating the metal, and the local non-uniformity in temperature is suppressed to obtain a uniform composite body.

3. 发明专利

JPH11165057A VACUUM VESSEL AND ITS PRODUCTION 失效
公开(公告)号：JPH11165057A
公开(公告)日：1999-06-22
申请号：JP36748997
申请日：1997-12-04
申请人： AM TECHNOLOGY KK
发明人： SUZUKI NOBUYUKI
IPC分类号： B65D25/20 , B01J3/00 , B22D19/00 , B65D81/20 , F25D1/02
摘要： PROBLEM TO BE SOLVED: To obtain a vacuum vessel large in the overall coefficient of heat transfer and capable of accurately performing temp. control by forming a tubular flow passage capable of passing a cooling or heating medium on a cylindrical part of the vacuum vessel formed cylindrical or bottomed vessel like. SOLUTION: The vacuum vessel 1 suitably used for an etching device, a sputtering device or the like for producing a semiconductor, a liquid crystal or a solar cell is formed by using aluminum, magnesium or the alloy and a pipe 2, through which a fluid for temp. control is passed, is disposed in the vacuum vessel 1 so as to be cast-in. As a result, the generation of mold cavity in the surroundings of the pipe 2 is eliminated to increase the overall coefficient of heat transfer to the inside of the vacuum vessel 1. As the material for the pipe 1, one of copper, iron, an aluminum alloy, titanium, stainless, a nickel alloy and the like is used. And a porous body made of a ceramic can be arranged on the circumferential part of the vacuum vessel 1.

4. 发明专利

JP2003120733A VEHICULAR BRAKE ROTARY BODY 审中-公开
公开(公告)号：JP2003120733A
公开(公告)日：2003-04-23
申请号：JP2001316650
申请日：2001-10-15
申请人： DAIHATSU MOTOR CO LTD , AM TECHNOLOGY KK
发明人： TOGE ITSURO , SUZUKI NOBUYUKI
IPC分类号： B22D19/00 , B22D19/14 , F16D65/10 , F16D65/12
摘要： PROBLEM TO BE SOLVED: To reduce weight in a vehicular brake rotary body. SOLUTION: This vehicular brake rotary body is constituted as follows: a pressing object part 1 for pressing a frictional braking body is formed by impregnating metal into nonmetallic molds 4 and 5 having a large number of small clearance and spaces, the molds 4 and 5 are composed of a ceramic material or a carbon fiber, and the metal is set to aluminum or an aluminum alloy or magnesium or a magnesium alloy or brass A.

5. 发明专利

JP2000202520A MANUFACTURE OF PIPE COATED WITH ALUMINUM 失效
公开(公告)号：JP2000202520A
公开(公告)日：2000-07-25
申请号：JP3764499
申请日：1999-01-06
申请人： AM TECHNOLOGY KK
发明人： SUZUKI NOBUYUKI
IPC分类号： B23P11/02 , B21C37/06 , B23K20/00 , B23K20/02 , B23K20/16 , B32B1/08
摘要： PROBLEM TO BE SOLVED: To make thermal conductivity higher and heat capacity smaller and to improve the mechanical characteristics at the time of high temperature by coating the outer side of a metallic pipe with a pipe of aluminum or aluminum alloy by a shrinkage fit. SOLUTION: The outer side of the metallic pipe essentially consisting of copper, iron or nickel is coated with the pipe made of the aluminum or aluminum alloy by the shrinkage fit. At this time, a low melting metal or alloy of a melting point below the melting point of the aluminum between the core material pipe and the aluminum is applied to either of the outer surface on the core material side or the inner surface on the aluminum side. Metals, such as zinc, indium, cadmium and tin, and alloys, such as aluminum-zinc, aluminum- germanium, aluminum-silicon and aluminumcadmium, are enumerated as the low melting metal. Electroplating, hot dip coating, wire brushing of molten metal, etc., are used as the coating application method. The coating application thickness is specified to about 0.001 to 1 mm.

6. 发明专利

JP2002294359A METAL-MATRIX CARBON-FIBER-REINFORCED COMPOSITE MATERIAL AND ITS MANUFACTURING METHOD 失效
公开(公告)号：JP2002294359A
公开(公告)日：2002-10-09
申请号：JP2001135551
申请日：2001-03-29
申请人： AM TECHNOLOGY KK , JAPAN SCIENCE & TECH CORP , OCHIAI SHOJIRO , SENTAN ZAIRYO KK
发明人： SUZUKI NOBUYUKI , TSUSHIMA EIKI , OCHIAI SHOJIRO
IPC分类号： B22D19/00 , B22D19/14 , C22C1/10 , C22C47/06 , C22C49/02 , C22C49/04 , C22C49/06 , C22C49/14 , C22C101/04 , C22C101/06 , C22C101/10 , C22C101/14 , C22C101/18
摘要： PROBLEM TO BE SOLVED: To solve the conventional problem that direct reaction between metal and carbon fiber in a metal-matrix carbon-fiber-reinforced composite material causes the deterioration of the carbon fiber and the expected characteristics, such as strength, Young's modulus, high thermal conductivity and low thermal expansion, cannot be exhibited and to find the various characteristics of the metal-matrix carbon-fiber-reinforced composite material and to provide the material having excellent weatherability and heat resistance by suppressing the above reaction. SOLUTION: In manufacturing the carbon-fiber compact, an organic precursor which remains in the form of carbon on firing in a nonoxidizing atmosphere is used as a binder so that the resultant residual carbon can be interposed later between the molten metal and the carbon fiber to prevent the direct reaction. Deterioration in strength of the carbon fiber can be prevented. In the method for manufacturing the metal-matrix carbon-fiber-reinforced composite material, composing with the metal is performed by pressing the molten metal into the carbon compact under high pressure.

7. 发明专利

JP2001214247A SLIDING MATERIAL FOR BRAKE COMPOSED OF METAL COMPOSITE, PRODUCING METHOD THEREFOR, BRAKE ROTOR AND BRAKE DRUM 失效
公开(公告)号：JP2001214247A
公开(公告)日：2001-08-07
申请号：JP2000020070
申请日：2000-01-28
申请人： KURIBAYASHI TOUICHI , TAOKA MASAMICHI , AM TECHNOLOGY KK
发明人： KURIBAYASHI TOUICHI , TAOKA MASAMICHI , SUZUKI NOBUYUKI
IPC分类号： F16D65/12 , C22C1/10 , C22C21/00 , C22C47/06 , C22C47/12 , C22C49/14 , C22C101/00
摘要： PROBLEM TO BE SOLVED: To provide a sliding material for a brake excellent in capacities required for a sliding material for a brake, particularly, in hardness, heat resistance, wear resistance, a moderate friction coefficient and the stability of the friction coefficient. SOLUTION: This sliding material for a brake is composed of a metal composite obtained by impregnating aluminum or an aluminum alloy containing titanium by 0.5 to 5% in a volume ratio into a preliminarily molded body formed of ceramic fibers, carbon fibers, ceramic whiskers, ceramic particles or carbon particles.

8. 发明专利

JP2000203973A CARBON-BASE METAL COMPOSITE MATERIAL AND ITS PRODUCTION 失效
公开(公告)号：JP2000203973A
公开(公告)日：2000-07-25
申请号：JP32182899
申请日：1999-11-11
申请人： SENTAN ZAIRYO KK , AM TECHNOLOGY KK
发明人： KAWAMURA NORIAKI , TSUSHIMA EIKI , SUZUKI NOBUYUKI
IPC分类号： C04B41/88
摘要： PROBLEM TO BE SOLVED: To improve defects of a carbon material such as brittleness, insufficient strength, easy oxidizability, inferior scuffing resistance and low surface workability and to obtain a carbon material having an enhanced heat conductivity and a coefficient of thermal expansion adjusted according to the purpose of use. SOLUTION: A molten metal is pressurized and impregnated into a carbon molding with the pressing member of a pressure device to produce the objective carbon-base metal composite material. The temperature of the molten metal is higher than the melting point of the metal by 50-250 deg.C and pressure applied to the molten metal is >=200 kg/cm2 per unit cross-sectional area of the pressing member. The carbon-base metal composite material consists of a carbonaceous matrix and the metal dispersed in the matrix, >=90 vol.% of the pores in the matrix have been substituted by the metal and the metal content of the composite material is

9. 发明专利

JP2003193210A HYBRID COMPOSITE MATERIAL OF INTEGRAL CONSTRUCTION 审中-公开
公开(公告)号：JP2003193210A
公开(公告)日：2003-07-09
申请号：JP2001393522
申请日：2001-12-26
申请人： AM TECHNOLOGY KK
发明人： SUZUKI NOBUYUKI , TERASHI AKIRA
IPC分类号： B22D19/00 , C22C47/06 , C22C47/12 , C22C101/04 , C22C101/10 , C22C101/12 , C22C101/14 , C22C101/22 , C22C111/02
摘要： PROBLEM TO BE SOLVED: To provide a hybrid composite material of integral construction capable of satisfying two or more characteristic values which cannot be satisfied by a single composite material and also to provide its manufacturing method. SOLUTION: The hybrid composite material of integral construction can be manufactured by means of squeeze casting where a combined material consisting of two or more reinforcements is impregnated with molten metal under pressure. COPYRIGHT: (C)2003,JPO

10. 发明专利

JP2000239707A PRESSURIZED SINTERING METHOD 失效
公开(公告)号：JP2000239707A
公开(公告)日：2000-09-05
申请号：JP4252799
申请日：1999-02-22
申请人： AGENCY IND SCIENCE TECHN , AM TECHNOLOGY KK , SUGISAWA FUJIO
发明人： ABE TOSHIHIKO , HASHIMOTO HITOSHI , SUZUKI NOBUYUKI , YAMASHITA TOMOHISA , TERASHI AKIRA , SUGISAWA FUJIO
IPC分类号： B22F3/14 , C22C1/04 , C22C14/00
摘要： PROBLEM TO BE SOLVED: To prevent the bite between a sintered article and a graphite forming die, to reduce the cost, and to manufacture a Ti-Al intermetallic compound of excellent quality by suppressing the coarsening of grains, suppressing generation of cavities to obtain a dense structure over the whole, performing the compacting and the sintering, and using an appropriate releasing agent in manufacturing a long article such as a piston pin by impressing energizing pulse. SOLUTION: A mixed powder of Ti and Al, or alloy powder, or a sintering powder mainly consisting thereof, is filled in a forming device comprising an upper punch 1 or a die provided with an upper electrode, an upper graphite die 2 and a lower graphite die 3 having a forming space, and a lower punch 5 or a die provided with a lower electrode, the sintering powder is compacted and pressed into the lower graphite die, the upper graphite due is removed, and a formed green compact is energized and impressed in the lower graphite die.

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