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1. 发明专利

JPH08278186A LIQUID LEVEL DETECTING METHOD AND LIQUID LEVEL DETECTOR 失效
公开(公告)号：JPH08278186A
公开(公告)日：1996-10-22
申请号：JP8280095
申请日：1995-04-07
申请人： TOKAI RYOKAKU TETSUDO KK , HITACHI LTD , HITACHI ELECTR ENG
发明人： KOBAYASHI IRARIO HARUOMI , HARA YASUHIKO , NAKAGAWA YASUO , TAKENAKA YASUO , SHIINO HISASHI , ITO YOSHIAKI , SUZUKI SATOSHI , TAKANE KIMIKAZU
IPC分类号： G01F23/00 , G01F23/28 , G06T1/00
摘要： PURPOSE: To perform promotion of high speed and labor-saving for both maintenance and inspection operations by detecting a liquid level on an observation window type level gauge noncontactually and automatically. CONSTITUTION: This device has a falling illuminating system 1 irradiating from the normal direction of a level gauge 3 via a half mirror 2 and an oblique illuminating system 4 irradiating this level gauge 3 from the oblique direction as an illuminating system, and these two illuminating systems 1 and 4 are selected and thereby an image of the level gauge 3 is picked up by a closed-circuit DTV camera 6 through a red filter 5. This picked-up image is converted into digital image data by an analog-to-digital converter 7, then it is taken into a computer 8 built in with a frame memory and an image processing part. At this computer 8, a specified process is carried out, thereby detecting a liquid level, and the test result is outputted.

2. 发明专利

JPH08278116A INSPECTION METHOD FOR BOLT LOOSENESS AND INSPECTION DEVICE THEREFOR 失效
公开(公告)号：JPH08278116A
公开(公告)日：1996-10-22
申请号：JP8279295
申请日：1995-04-07
申请人： TOKAI RYOKAKU TETSUDO KK , HITACHI LTD , HITACHI ELECTR ENG
发明人： KOBAYASHI IRARIO HARUOMI , HARA YASUHIKO , NAKAGAWA YASUO , TAKENAKA YASUO , SHIINO HISASHI , ITO YOSHIAKI , YOSHIDA CHIKAO , TAKANE KIMIKAZU
IPC分类号： G01B11/26 , G01M17/08
摘要： PURPOSE: To perform a bolt looseness inspection work more quickly and more reliably, and save manpower by automatically inspecting the looseness of a bolt for tightening a structural body. CONSTITUTION: A bolt 11 is illuminated with a lighting system 12 from an oblique direction relative to a line normal to a bolt tightening plane, and the image of a bolt section is photographed with a TV camera 13. The image so taken is converted to a digital image signal via an A/D converter 14, and stored in a frame memory 15. Then, angular information on a contour line is extracted from the signal in an image processing section built in a computer 16. Thereafter, the extracted angular information and reference angular information preliminarily stored are compared with each other to judge whether the looseness of the bolt 11 exists or not. Thus, the looseness of the bolt 11 can be inspected quickly as well as accurately. The reliability of inspection is thereby improved and an inspection work time can be substantially reduced.

3. 发明专利

JP2001141669A METHOD AND APPARATUS FOR INSPECTING FLAW OF CIRCUIT PATTERN 失效
公开(公告)号：JP2001141669A
公开(公告)日：2001-05-25
申请号：JP2000280117
申请日：2000-09-11
申请人： HITACHI LTD , HITACHI VIDEO & INF SYST
发明人： HARA YASUHIKO , KOIZUMI MITSUYOSHI , KITAMURA SHIGEKI
IPC分类号： G01B11/30 , G01N21/956 , G06T1/00 , G06T7/00
摘要： PROBLEM TO BE SOLVED: To judge the harmfulness from an aspect of continuity of a complicated flaw capable of being judged by a human eye at a high speed by image processing. SOLUTION: A sample having a pattern formed on the surface thereof is photographed by an imaging means while the imaging means operated by a predetermined imaging signal and the sample are moved relatively to obtain the image of the sample. A partial image containing a flaw candidate is extracted from the image while the sample is photographed to be stored in a memory means, and this stored partial image is processed to extract the flaw candidate. On the basis of the size or shape or the extracted flaw candidate or the positional relation between the extracted flaw candidate and the pattern, the harmfulness of the extracted flaw candidate is judged.

4. 发明专利

JPH11317576A MANUFACTURE OF BOARD 失效
公开(公告)号：JPH11317576A
公开(公告)日：1999-11-16
申请号：JP12306898
申请日：1998-05-06
申请人： HITACHI LTD , HITACHI VIA MECHANICS LTD
发明人： DOI HIDEAKI , HARA YASUHIKO , NINOMIYA TAKANORI , YAMAGUCHI TAKESHI , MURAKAMI TETSUO
IPC分类号： G01B11/24 , B23K26/00 , G01B11/30 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To obtain a method of boring a hole efficiently in a board in a board manufacturing process so as to dispense with a screening operation, through which defective boards caused by a boring failure are screened out for re-boring after a boring operation is carried in a usual manufacturing method. SOLUTION: An image-pickup mechanism and a mechanism, which is capable of discriminating the state of holes resting on the basis of the picture image of holes picked up by the image-pickup mechanism are provided to a boring device which bores a hole in a board 1, and when a boring failure occurs to a board, the detective board is marked with a mark. Or, boards are automatically selected and kept in a non-defective or a defective stocker. Or, when a boring failure occurs, a hole is automatically bored again in a board.

5. 发明专利

JPH0933599A PATTERN INSPECTION METHOD AND APPARATUS 失效
公开(公告)号：JPH0933599A
公开(公告)日：1997-02-07
申请号：JP1075396
申请日：1996-01-25
申请人： HITACHI LTD
发明人： SUZUKI YOKO , DOI HIDEAKI , HARA YASUHIKO , IIDA TADASHI , FUJISHITA YASUHIRO , NAKAGAWA YASUO , NINOMIYA TAKANORI
IPC分类号： G01N23/04 , G01N21/88 , G01N21/956 , G01N29/04 , G01R31/02 , G06T7/00 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To provide a wire pattern inspection method and an apparatus therefor which can detect a three-dimensional defect containing an internal defect of the wire pattern of a multilayer substrate. SOLUTION: Emitted X rays are made to transmit an object to be inspected and X-ray transmission varied density image signals corresponding to the thicknesses of wire patterns including the overlapping of a plurality of layers of the wire patterns is converted into digital image signals. The digital image signals converted are binarized 37 by a plurality of thresholds corresponding to the number of overlaps of the wire patterns to extract binarized image signals corresponding to the number of overlaps of the wire patterns. A skeleton line image signal indicating a skeleton line is extracted 40 for each of the binarized image signals. A defect judging processing means 54 is provided to inspect defects of the wire patterns by comparing connection information on the wire patterns obtained from the binarized skeleton line image signals with the larger number of overlaps extracted with the connection information on the wire patterns obtained from the binarized skeleton line image signals with the less number of the overlaps.

6. 发明专利

JPH0612248B2 失效
公开(公告)号：JPH0612248B2
公开(公告)日：1994-02-16
申请号：JP23835284
申请日：1984-11-14
申请人： HITACHI LTD
发明人： HARA YASUHIKO , SAITO KEIYA , TSUKAZAKI KOICHI , SASE AKIRA
IPC分类号： H05K3/00 , G01B11/24 , G01B15/00 , G02B27/00

7. 发明专利

JPH061179B2 失效
公开(公告)号：JPH061179B2
公开(公告)日：1994-01-05
申请号：JP1534085
申请日：1985-01-31
申请人： HITACHI LTD
发明人： DOI HIDEAKI , HARA YASUHIKO
IPC分类号： G01B9/04 , G01B11/30 , G01N21/94 , G01N21/958 , H01L21/66 , G01N21/88

8. 发明专利

JPH05164520A METHOD AND APPARATUS FOR DETECTING THREE-DIMENSIONAL SHAPE 失效
公开(公告)号：JPH05164520A
公开(公告)日：1993-06-29
申请号：JP33659991
申请日：1991-12-19
申请人： HITACHI LTD
发明人： HARA YASUHIKO , DOI HIDEAKI , KENBO YUKIO
IPC分类号： G01B11/24 , G01B11/02
摘要： PURPOSE:To detect a three-dimensional shape of an object having various light reflection characteristics stably in an optical manner regardless of lightness and darkness, a glossy surface and a plain surface. CONSTITUTION:Objects 1 and 1' are irradiated with a light spot by a polarization laser 10. Reflected light from the light spot is focused with an imaging lens to be detected with a photo detector 5 and height information is detected from information on the light spot. At this point, a quantity of the reflected light varies intense or weak according to conditions of reflection of the surface of the object. But the use of a logarithmic type characteristic detector 5, a quantity of light controller 16 for the control of a quantity of light and a polarizer 11 allow the detection of three-dimensional information of the objects 1 and 1' to adapt to the variation. It was difficult in the past to detect a three- dimensional shape of the object having various light reflection conditions. This allows the detection of the three-dimensional shape in a metal work part, electronic packaged substrate or other objects containing white or black thereby enabling the automation of inspection, measurement, positional recognition and the like.

9. 发明专利

JPH0523503B2 失效
公开(公告)号：JPH0523503B2
公开(公告)日：1993-04-02
申请号：JP22182185
申请日：1985-10-07
申请人： HITACHI LTD
发明人： KOIZUMI MITSUYOSHI , OOSHIMA YOSHIMASA , YAMAUCHI YOSHIHIKO , HARA YASUHIKO
IPC分类号： H01L21/66 , G01B11/00 , G01N21/88 , G01N21/956 , H01L21/027 , H01L21/30

10. 发明专利

JPH052650A FEATURE EXTRACTING CIRCUIT AND PATTERN INSPECTING DEVICE 失效
公开(公告)号：JPH052650A
公开(公告)日：1993-01-08
申请号：JP14629791
申请日：1991-06-18
申请人： HITACHI LTD , HITACHI VIDEO & INF SYST
发明人： DOI HIDEAKI , HARA YASUHIKO , NOHARA TOSHIISA , MINAMITANI NORIHIRO
IPC分类号： H01L21/66 , G06T1/00 , G06T7/00
摘要： PURPOSE:To easily detect an altered feature pattern with reliability even if the characteristic as an inspection object is altered by controlling the validity/ invalidity of an image element constituting a template by means of control information. CONSTITUTION:The image of the pattern inspection object 11 is image-formed on a sensor 13 through a condenser lens 12, and image information obtained by the sensor 13 is converted into a binarized image signal 100 in a binarization circuit 14 and is inputted to a feature extracting circuit 15. The charactersitic extracting circuit 15 consists of a template alteration unit segment circuit 16 and a template element combination circuit 17, and the output of the template element combination circuit 17 is obtained as a feature extraction signal 101. The feature extracting circuit 15 detects whether the specified feature pattern appears in a local two-dimensional image or not based on the binarized image signal 100. Control information 102 for specifying the feature pattern as the detection object is given from controller 18 to the circuits 16 and 17.

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