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1. 发明专利

JP2002039963A VISUAL INSPECTION METHOD 失效
公开(公告)号：JP2002039963A
公开(公告)日：2002-02-06
申请号：JP2001107932
申请日：2001-04-06
申请人： HITACHI LTD
发明人： NOGUCHI MINORU , NAKAGAWA YASUO , HAMADA TOSHIMITSU , FUSHIMI SATOSHI , ISHII KYOZO , HAYASHI TSUNEO
IPC分类号： G01B11/24 , B23K1/00 , G01N21/956 , G06T1/00 , H05K3/34
摘要： PROBLEM TO BE SOLVED: To provide a visual inspection method whereby defects such as missing of soldering at soldering parts, extraordinarily much/extraordinarily little soldering, short circuits of the soldering parts, etc., can be inspected at high speeds with a high reliability, in other words, defects of a sample can be sorted at high speeds by observing an appearance of the sample. SOLUTION: A table is driven on the basis of preliminarily stored position coordinate data to bring a desired region of the sample loaded on the table into a visual field of a microscope. The desired region of the sample brought into the visual field of the microscope is imaged, whereby an image of the desired region is obtained. The image of the desired region is stored, and the stored image of the desired region is sorted.

2. 发明专利

JPH09264728A METHOD AND APPARATUS FOR DETECTION OF FLAW OR FOREIGN BODY AS WELL AS ELECTRONIC COMPONENT WITH FLAW OR FOREIGN BODY INSPECTED 失效
公开(公告)号：JPH09264728A
公开(公告)日：1997-10-07
申请号：JP25184396
申请日：1996-09-24
申请人： HITACHI LTD , HITACHI ELECTR ENG
发明人： DOI HIDEAKI , SHIBA MASATAKA , NAKAGAKI AKIRA , HIROI TAKASHI , NAKASU NOBUAKI , NAKAGAWA YASUO , WATANABE TETSUYA , JINGU TAKAHIRO
IPC分类号： G01B11/00 , G01B11/30 , G01N21/88 , G01N21/94 , G01N21/956
摘要： PROBLEM TO BE SOLVED: To expand the dynamic range of the detection of a flaw or a foreign body which exists on a substrate such as a semiconductor wafer or the like. SOLUTION: An inspection image 32a and a reference image 32b are obtained from digital information in which the output of a linear sensor 16 is A/D- converted 30. A flaw candidate 39 is detected by using disagreement information 35 by a two-chip comparison circuit 41 and by using mask information by a saturation-region processing circuit 42. The two-chip comparison circuit 41 enables a level to be matched by a correction circuit. In addition, when a threshold value in a comparison can be changed, the dynamic range of a linear sensor as a bottleneck for increasing a sensitivity is expanded without lowering a sensitivity more than required. The size or the position of a flaw or a foreign body which is comparatively large can be identified even when a blooming operation is generated by the flaw or the foreign body. Thereby, the accuracy of a flaw or foreign-body inspection apparatus can be enhanced.

3. 发明专利

JPH09115867A BARRIER WALL SUPPORT FOR CLEANING, CLEANING ASSIST STRUCTURE, METHOD AND APPARATUS FOR CLEANING 失效
公开(公告)号：JPH09115867A
公开(公告)日：1997-05-02
申请号：JP27144795
申请日：1995-10-19
申请人： HITACHI LTD
发明人： KURAHASHI KYOKO , NAKAGAWA YASUO , HIRABAYASHI HISAAKI
IPC分类号： B08B11/02 , B08B3/04 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To reduce transfer while sustaining the advantage of batch type cleaner, i.e., high throughput, by providing a plurality of barrier walls and supporting members therefor constructed such that the interval of barrier wall can be varied. SOLUTION: The cleaning assist structure 11 comprises 49 planar barrier walls 10, and 96 beams 13C for supporting the barrier walls 10. The beam 13C is pivoted to a shaft 132 at one end of the rectangular side face of barrier wall 10 having the other end where the shaft 133 of beam 13C is born by a slider mechanism, i.e. a groove. The cleaning assist structure 11 varies the interval of barrier wall 10 by varying the angle between two intersecting beams 13d, 13e. According to the structure, transfer can be reduced while sustaining the advantage of batch type cleaner, i.e.,high throughput, and a wafer can be cleaned using a clean barrier wall 10 at all times.

4. 发明专利

JPH0926312A METHOD AND APPARATUS FOR DETECTION OF THREE-DIMENSIONAL SHAPE 失效
公开(公告)号：JPH0926312A
公开(公告)日：1997-01-28
申请号：JP20447896
申请日：1996-08-02
申请人： HITACHI LTD
发明人： NAKAGAWA YASUO , SHIYURII KEE NAIYAA
IPC分类号： G01B11/24 , G01C3/06 , G06T1/00 , G06T7/00
摘要： PROBLEM TO BE SOLVED: To detect a three-dimensional shape with good accuracy by a method wherein, regarding an object, an image whose focusing measure in a desired point is maximum is selected from a plurality of images whose focus point is different and its focus position is set as the height of the point. SOLUTION: In a state that an object 1 is irradiated with illumination light from a lamp 6 via a semitransparent mirror 4 or the like, the object 1 is moved up and down by a raising and lowering mechanism 3, and during this time, an image is detected by an image detector 8 such as a TV camera or the like. Thereby, a plurality of images are obtained in different focus positions. Then, a focusing-measure detection part 9 computes focusing measures F1 (numerical values representing respective focusing states in respective points) regarding the points on a screen on the basis of a video signal V1 from the detector 8. Then, a focusing-measure maximum-value-position detection part 10 finds the maximum value of the focusing measures F1 in the respective points on the object, and it finds the z-coordinates of the points. Then, the maximum value indicates height in its coordinate point. Consequently, when the z- coordinates are computed regarding all coordinate points on the object, the three- dimensional shape of the object can be found.

5. 发明专利

JPH08297103A METHOD AND DEVICE FOR TOMOGRAPH 失效
公开(公告)号：JPH08297103A
公开(公告)日：1996-11-12
申请号：JP13992796
申请日：1996-06-03
申请人： HITACHI LTD
发明人： NAKAHATA MITSUZO , HAMADA TOSHIMITSU , NAKAGAWA YASUO
IPC分类号： G01N23/04 , G01N23/18 , H01L21/60 , H01L21/66
摘要： PURPOSE: To detect a cross sectional image with high resolution by providing an X-ray generating means, a sample mounting means, a transmission X-ray image forming means, a two-dimensional image display means, and a cross section observation position setting means. CONSTITUTION: X-ray radiation is applied to an inspected sample 2 from a fine focal point X-ray source 1, and a transmission X-ray image is converted into a visible image by an image intensifier 4. The visible image is guided to an image pickup tube 5 or a linear image sensor 6 via an optical path switching mirror 7 and a lens. The X-ray image detected by the image pickup tube 5 is observed by a monitor television 9, the X-ray image detected by the linear image sensor 6 is quantized in sequence, then it is stored in an image memory 12 and can be read out from a computer 13. The initial positioning adjustment of a sample holder 10 in the X, Y directions and the switching of the optical path switching mirror 7 are conducted via the computer 13 and a drive control circuit 16 based on the instruction from an operation panel 15.

6. 发明专利

JPH08241912A MANUFACTURE FOR ELECTRONIC CIRCUIT COMPONENT 失效
公开(公告)号：JPH08241912A
公开(公告)日：1996-09-17
申请号：JP2501696
申请日：1996-02-13
申请人： HITACHI LTD
发明人： TAKAHASHI MICHIRO , MITA TORU , NAKAGAWA YASUO , HAMADA TOSHIMITSU , IWATA HISAFUMI , KANEDA AIZO , SERIZAWA KOJI , TANAKA HIROYUKI , SUGIMOTO KOICHI , SAKAI TOSHIHIKO , MATSUKAWA KEIZO , MIMATA TSUTOMU
IPC分类号： H01L21/60
摘要： PURPOSE: To achieve a highly accurate and reliable bonding of a TAB inner lead corresponding to a multiple-pin TAB by allowing a lead connection electrode formed on the surface of a circuit substrate to face a lead formed on a carrier and using a bonding tool supported by an elastic support guide part. CONSTITUTION: A tool stage 502 mounted to a base 501 so that it can slide in Y direction is driven by a permanent magnet type DC servo motor 503. A tool-driving permanent magnet type DC servo motor 505 is located on the tool stage 502 and the angle of an input link 508a of a link mechanism 508 can be changed via a deceleration harmonic drive 507. An output link 508c of the link mechanism can move up and down along a slide guide mechanism 517 and a tool support 509 and a tool 510 which are connected to the output link 508c move up and down. The gap between a load cell 511 and the upper surface of the tool support 509 can be changed by finely adjusting a screw 512.

7. 发明专利

JPH0831497B2 失效
公开(公告)号：JPH0831497B2
公开(公告)日：1996-03-27
申请号：JP23242588
申请日：1988-09-19
申请人： HITACHI LTD
发明人： IWATA HISAFUMI , NOMOTO MINEO , NAKAGAWA YASUO , MATSUOKA MASATO
IPC分类号： H01L21/60 , G01B11/00

8. 发明专利

JPH0624215B2 失效
公开(公告)号：JPH0624215B2
公开(公告)日：1994-03-30
申请号：JP20705584
申请日：1984-10-04
申请人： HITACHI LTD
发明人： MAEDA SHUNJI , KUBOTA HITOSHI , FUSHIMI SATOSHI , MAKIHIRA HIROSHI , NAKAGAWA YASUO
IPC分类号： G01B11/30 , G01B11/24 , G01N21/956 , H01L21/66

9. 发明专利

JPH05234352A 失效
公开(公告)号：JPH05234352A
公开(公告)日：1993-09-10
申请号：JP3920692
申请日：1992-02-26
申请人： HITACHI LTD
发明人： NAKADA TOSHIHIKO , NAKAGAWA YASUO , UTO YUKIO
IPC分类号： G11B33/14
摘要： PURPOSE:To provide a magnetic disk device made free of pollution by fixing fine foreign matters which are mixed to be sealed into the magnetic disk device. CONSTITUTION:A thin film 20 made of a sticky material is provided in an internal surface of a cover 8 of a magnetic disk device or in a passage of air generated with the rotation of a magnetic device 1. Floating fine foreign matters mixed to be sealed into the magnetic disk device are made to adhere to the sticky material 20 as mentioned above to fix. This enables the making of the fine foreign matters free of pollution thereby preventing the adherence of the foreign matters to the magnetic disk. This also prevents collision between the foreign matters and the magnetic head thereby upgrading the reliability of the magnetic disk device significantly.

10. 发明专利

JPH0554605B2 失效
公开(公告)号：JPH0554605B2
公开(公告)日：1993-08-13
申请号：JP13176085
申请日：1985-06-19
申请人： HITACHI LTD
发明人： ICHINOSE TOSHIAKI , NINOMYA TAKANORI , NAKAGAWA YASUO
IPC分类号： G01B15/00 , G01B15/04 , H01J37/28

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