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1. 发明专利

JP2007287304A Method of forming pattern film with narrow width and thin-film magnetic head having magnetic pole layer with narrow width 审中-公开
标题翻译：具有窄宽度的薄膜的薄膜形成方法和具有窄宽度的磁性层的薄膜磁头
公开(公告)号：JP2007287304A
公开(公告)日：2007-11-01
申请号：JP2006345740
申请日：2006-12-22
申请人： Tdk Corp , Tdk株式会社
发明人： GOMI HIROTAKA , ISOBE MITSUHARU , ITO NORIYUKI , FUNADA HIROAKI , YAMANA KENJI , TERASAWA MAKOTO , HASEGAWA YASUHIRO
IPC分类号： G11B5/31
CPC分类号： G11B5/313 , G11B5/1278 , G11B5/315 , G11B5/3163 , Y10T29/49037 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To provide a method for forming a pattern film, capable of forming a pattern film with a narrower width than the resolution of an exposure machine and a resist used independently of etching at the end. SOLUTION: The method includes the steps of: forming a base layer in the element forming surface of a substrate; forming a first frame layer having end surfaces facing each other across a space having a width W 1 on the base layer; forming a second frame layer having end surfaces facing each other across a space having a width W 2 larger than the width W 1 in the same direction as that of the width W 1 on the first frame layer, so that the space having the width W 2 is located right above the space having the width W 1 ; forming a trench-forming film provided with a trench having a minimum width W 3 smaller than the width W 1 in the same direction as that of the width W 1 so as to fill at least a part of the spaces having the width W 1 and the width W 2 respectively; and forming a pattern film so as to fill at least a part of the trench. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种形成图案膜的方法，其能够形成具有比曝光机的分辨率更窄的宽度的图案膜和在结束时独立于蚀刻使用的抗蚀剂。解决方案：该方法包括以下步骤：在衬底的元件形成表面中形成基底层; 形成具有在所述基底层上具有宽度W 1 的空间的彼此面对的端表面的第一框架层; 形成第二框架层，所述第二框架层的宽度W 1 的宽度W SB> 1 的宽度W 1 的宽度W < SB> 1 ，使得具有宽度W 2 的空间位于具有宽度W 1 的空间的正上方; 在与宽度W 1相同的方向上形成具有小于宽度W 1 的最小宽度W 3 的沟槽的沟槽形成膜以便分别填充具有宽度W 1 和宽度W 2 的空间的至少一部分; 以及形成图案膜以填充沟槽的至少一部分。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2001076323A PRODUCTION OF SPIN VALVE MAGNETO-RESISTANCE EFFECT ELEMENT AND PRODUCTION OF THIN FILM MAGNETIC HEAD PROVIDED WITH THE SAME 失效
公开(公告)号：JP2001076323A
公开(公告)日：2001-03-23
申请号：JP25147999
申请日：1999-09-06
申请人： TDK CORP
发明人： SASAKI TETSUO , ITO NORIYUKI , TERUNUMA KOICHI
IPC分类号： G11B5/31 , G11B5/39 , H01F10/32 , H01F41/30 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To provide a production method of a spin valve magneto-resistance effect(SVMR) element easy to control the magnetic distortion and excellent in production stability and a production method of a thin film magnetic head provided with this SVMR element. SOLUTION: This SVMR element comprises a non-magnetic metal thin film layer 11, first and second ferromagnetic thin film layers (a free layer 10 and a pined layer 12) laminated by interposing the layer 11 and an antiferromagnetic thin film layer 13 laminated on the opposite surface of the layer 12 to the layer 11. The production method of this SVMR comprises laminating the layer 10 consisting of the two-layer structure of a NiFe layer 10a and a CoFe layer 10b, the layer 11, the layer 12 and the layer 13 in this order and then heat- treating the laminate so that the change of the magnetic distortion to depend on the change of the film thickness of the layer 10 a is made small.

3. 发明专利

JP2001028107A THIN FILM MAGNETIC HEAD, MAGNETIC HEAD DEVICE, MAGNETIC DISK DEVICE AND MANUFACTURE OF THIN FILM MAGNETIC HEAD 失效
公开(公告)号：JP2001028107A
公开(公告)日：2001-01-30
申请号：JP19989999
申请日：1999-07-14
申请人： TDK CORP
发明人： TERUNUMA KOICHI , MINO TETSUYA , KANAKUBO KATSUYA , ITO NORIYUKI
IPC分类号： G11B5/31 , G11B5/39
摘要： PROBLEM TO BE SOLVED: To obtain a thin film magnetic head having a low apex angle and capable of controlling zero point of throat height with high precision. SOLUTION: A magnetic film (211) which constitutes a first pole section has a recessed part 213 on its one surface. The recessed part 213 is so formed as to fall from a first incline starting point P1 set on one surface of the magnetic film (211) at a first inclined angle θ1 backward of the first pole section. An insulating film 25 is filled within the recessed part 213 and rises above one surface of the magnetic film (211) and an outer surface of a side of a surface opposed to a medium is formed into a slope. A first magnetic film 221 of a second pole section has higher saturation magnetic flux density than that of a second magnetic film 222 and has a part inclined from a second incline starting point at a second inclined angle θ2.

4. 发明专利

JP2001014613A PRODUCTION OF THIN-FILM MAGNETIC HEAD 失效
公开(公告)号：JP2001014613A
公开(公告)日：2001-01-19
申请号：JP18443999
申请日：1999-06-29
申请人： TDK CORP
发明人： TERUNUMA KOICHI , MINO TETSUYA , KANAKUBO KATSUYA , ITO NORIYUKI
IPC分类号： G11B5/31 , G11B5/39
摘要： PROBLEM TO BE SOLVED: To obtain a process for producing a thin-film magnetic head which substantially does not cause a problem of readhesion even if the thickness of magnetic films having a high saturation magnetic flux density disposed on a surface opposed to a gap film is increased. SOLUTION: The first magnetic film 221 of the high saturation magnetic flux density having a primary pattern is formed on the surface of the gap film 24. A stage for forming the first magnetic film 221 includes a stage for forming the film in such a manner that the primary pattern is larger than the final pattern and is formed to the pattern at which its end edge is confined within a frame used for a frame plating method.

5. 发明专利

JP2000340858A MAGNETORESISTIVE EFFECT FILM AND MAGNETORESISTIVE EFFECT HEAD 失效
公开(公告)号：JP2000340858A
公开(公告)日：2000-12-08
申请号：JP15154199
申请日：1999-05-31
申请人： TDK CORP
发明人： SASAKI TETSUO , TERUNUMA KOICHI , KAWASHIMA HIROAKI , ITO NORIYUKI
IPC分类号： G11B5/39 , H01F10/32 , H01L43/08 , H01L43/10
摘要： PROBLEM TO BE SOLVED: To obtain a magnetoresistive effect film which is superior in detection sensitivity of a magnetic signal and linearity of a detected signal and can improve the output of a magnetic head, and a magnetoresistive effect head using the magnetoresistive effect film. SOLUTION: A soft magnetic layer 20, constituting a magnetoresistive effect film 2a of a spin bubble type is constituted of a laminate of at least two layers, which is constituted by arranging a first soft magnetic layer 21 practically composed of Co or CoFe and a second soft magnetic layer 22 practically composed of NiFeX (where, X is at least one kind selected from Ta and Nb) in this order from a nonmagnetic metal layer 30 side. As a more suitable configuration, the soft magnetic layer is constituted of a laminate of at least three layers, which is constituted by arranging the first soft magnetic layer 21 practically composed of Co or CoFe, a third soft magnetic layer 23 practically composed of NiFe and the second soft magnetic layer 22 practically composed of NiFeX (where X is at least one kind selected from Ta and Nb) in this order from the nonmagnetic metal layer 30 side.

6. 发明专利

JPH10312512A MAGNETORESITIVE HEAD 失效
公开(公告)号：JPH10312512A
公开(公告)日：1998-11-24
申请号：JP11723697
申请日：1997-05-07
申请人： TOSHIBA CORP , TDK CORP
发明人： FUKUZAWA HIDEAKI , KAMIGUCHI YUZO , INOUE NAOYUKI , IWASAKI HITOSHI , ITO NORIYUKI , OIKE TARO , KAWASHIMA HIROAKI
IPC分类号： G11B5/012 , G11B5/39 , H01F10/30 , H01L43/08
摘要： PROBLEM TO BE SOLVED: To effectively control the generation of Barkhausen noise when narrow tracks are used in a magnetoresitive head of the spin valve type, in which a magnetism sensing layer having magnetic layer including highly saturated and magnetized Co. SOLUTION: This head is a GMR head including a spin valve GMR film 14 having a magnetism sensing layer 15 including, for example, a magnetic layer containing Co and a bias magnetic field applying film 21 for applying the bias magnetic field to this spin valve GMR film 14. The bias magnetic field applying film 21 is formed of a laminated film of a magnetic base layer 2 and a hard magnetic layer 23 formed thereon. The hard magnetic layer 23 is provided adjacent the end part of the spin valve GMR film 14 via the magnetic base layer 22. The magnetic base layer 22 has a saturated and magnetized Ms which satisfies at least either the conditions of Ms >=Ms or Ms >=Ms for saturated and magnetized Ms of the magnetism sensing layer and saturated and magnetized Ms of the hard magnetized layer.

7. 发明专利

JP2002324928A METHOD FOR MANUFACTURING MAGNETORESISTIVE EFFECT DEVICE AND THIN FILM MAGNETIC HEAD 失效
公开(公告)号：JP2002324928A
公开(公告)日：2002-11-08
申请号：JP2001128486
申请日：2001-04-25
申请人： TDK CORP
发明人： SHIMAZAWA KOJI , ITO NORIYUKI , TERUNUMA KOICHI
IPC分类号： G01R33/09 , G11B5/39 , H01F41/18 , H01F41/30 , H01L43/08 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To stably manufacture a magnetoresistive effect device and a thin film magnetic head, which can obtain the stabilized high output and operation. SOLUTION: The magnetoresistive effect device is provided with an MR element, two bias magnetic field application layer 27 applying a vertical bias magnetic field to the MR element, and two electrode layers 6 adjacent to one face of each bias magnetic field application layer 27 and arranged to partially overlap with one face of the MR element. The MR element has a protection layer 26 arranged on a soft magnetic layer 25. In the manufacturing method of the magnetoresistive effect device, a coating layer removed in a subsequent process is previously formed on the protection layer 26, and an oxidized layer formed by naturally oxidizing a part of the upper side of the coating layer and the coating layer are removed before the electrode layers 6 are formed by etching. Thus, a high resistance layer 31 is formed by oxidizing the protection layer 26 in an area between the two electrode layers 6 after the electrode layers 6 are formed.

8. 发明专利

JPH10261209A MAGNETO-RESISTANCE EFFECT SENSOR AND MAGNETIC HEAD FORMED BY USING THE SENSOR 失效
公开(公告)号：JPH10261209A
公开(公告)日：1998-09-29
申请号：JP1198698
申请日：1998-01-07
申请人： TDK CORP
发明人： SASAKI TETSUO , ITO NORIYUKI , KAWASHIMA HIROAKI
IPC分类号： G11B5/39
摘要： PROBLEM TO BE SOLVED: To prevent a change of the vertical asymmetry of the amplitude of regenerative signal waveforms to the change in a sense current by providing a first ferromagnetic material layer (free layer) with a nonmagnetic material current bypassing layer on the side opposite to a nonmagnetic conductive material spacer layer and disposing a diffusion preventive layer between the free layer and the nonmagnetic material current bypassing layer. SOLUTION: The diffusion preventive layer 23 is laminated on the nonmagnetic material current bypassing layer 22 and the first ferromagnetic material thin-film layer (free layer) 24 is laminated on the diffusion preventive layer 23. Further, a second ferromagnetic material thin-film layer (pinned layer) 26 is laminated thereon via the nonmagnetic conductive material spacer thin-film layer 25. The nonmagnetic material current bypassing layer 22 is formed near the free layer 24 as the current bypassing layer in such a manner, by which the center of the sense current is eventually made to flow through the free layer 24 or near the free layer and the change in the asymmetry by the sense current magnetic field is made smaller.

9. 发明专利

JPH06349030A MAGNETO-RESISTANCE EFFECT HEAD 失效
公开(公告)号：JPH06349030A
公开(公告)日：1994-12-22
申请号：JP15259893
申请日：1993-06-01
申请人： TDK CORP
发明人： ITO NORIYUKI , SASAKI TETSUO , UNO YASUSHI
IPC分类号： G11B5/39
摘要： PURPOSE:To sufficiently suppress Barkhausen noise by patterning a nonmagnetic layer in such a manner that this layer remains at the width over its operating region and laminating an MR layer and a diaferromagnetic layer via the nonmagnetic later held therebetween. CONSTITUTION:The MR head is constituted by laminating the MR layer 13 consisting of NiFe, etc., and having 200 to 5O0Angstrom film thickness on an insulating layer 10 consisting of Sin2, etc., and the nonmagnetic layer 12 consisting of Ti, Ta, etc., and having 100 to 300Angstrom film thickness. The nonmagnetic layer 12 is patterned at the width Uw set over the operating region as the MR element of the MR layer 13. The diaferromagnetic material layer 14 consisting of FeMn and 50 to 300Angstrom film thickness and the soft magnetic material layer 11 consisting of NiFeRh, etc., and having 150 to 600Angstrom are laminatecl in this order from the lower side thereon. The diaferromagnetic material layer 14 is formed as a film continuous integrally near the operating region as the MR element. Since vertical bias magnetic fields are generated by the magnetical interaction of the diaferromagnetic material layer 14 and the MR film 13, the formation of the MR element as a monodomain is possible and the generation of the Barkhausen noise is suppressed.

10. 发明专利

JP2003272112A Thin-film magnetic head, its manufacturing method and magnetic disk device 有权
标题翻译：薄膜磁头，其制造方法和磁盘设备
公开(公告)号：JP2003272112A
公开(公告)日：2003-09-26
申请号：JP2002076647
申请日：2002-03-19
申请人： Tdk Corp , Tdk株式会社
发明人： TANAKA KOSUKE , TERUNUMA KOICHI , ITO NORIYUKI
IPC分类号： G11B5/39 , H01L43/08 , H01L43/12
摘要： PROBLEM TO BE SOLVED: To provide a thin-film magnetic head which comprises a very small size magnetic domain control layer capable of promoting the single magnetic domain formation of a magneto-sensitive layer and reducing Barkhausen noise, its forming method, and a magnetic disk device equipped with the thin-film magnetic head. SOLUTION: At least a part of the magnetic domain control layer of an area which hinders the single magnetic domain formation of a magneto-sensitive layer is eliminated while the magnetic domain control layer of an area which promotes the single magnetic domain formation of the magneto-sensitive layer is left. Thus, the single magnetic domain formation of the magneto-sensitive layer is achieved, and noise such as Barkhausen noise is suppressed. Additionally, a method is employed which first forms a magnetic domain control layer having a large area and then eliminates an unnecessary magnetic domain control layer which hinders the single magnetic domain formation of the magneto- sensitive layer. Thus, a very small size magnetic domain layer having a desired shape is accurately and easily formed. COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种薄膜磁头，其包括能够促进磁敏层的单磁畴形成和减少巴克豪森噪声的非常小的磁畴控制层，其形成方法和配备有薄膜磁头的磁盘装置。解决方案：消除阻碍磁敏感层的单磁畴形成的区域的磁畴控制层的至少一部分，而促进单磁畴形成的区域的磁畴控制层留下磁敏层。因此，实现了磁敏感层的单磁畴形成，抑制了巴克豪森噪声等噪音。此外，采用首先形成具有大面积的磁畴控制层，然后消除阻碍磁敏层的单磁畴形成的不必要的磁畴控制层的方法。因此，具有期望形状的非常小的磁畴层被精确且容易地形成。版权所有（C）2003，JPO

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