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    • 2. 发明专利
    • Method of forming pattern film with narrow width and thin-film magnetic head having magnetic pole layer with narrow width
    • 具有窄宽度的薄膜的薄膜形成方法和具有窄宽度的磁性层的薄膜磁头
    • JP2007287304A
    • 2007-11-01
    • JP2006345740
    • 2006-12-22
    • Tdk CorpTdk株式会社
    • GOMI HIROTAKAISOBE MITSUHARUITO NORIYUKIFUNADA HIROAKIYAMANA KENJITERASAWA MAKOTOHASEGAWA YASUHIRO
    • G11B5/31
    • G11B5/313G11B5/1278G11B5/315G11B5/3163Y10T29/49037Y10T29/49043Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • PROBLEM TO BE SOLVED: To provide a method for forming a pattern film, capable of forming a pattern film with a narrower width than the resolution of an exposure machine and a resist used independently of etching at the end. SOLUTION: The method includes the steps of: forming a base layer in the element forming surface of a substrate; forming a first frame layer having end surfaces facing each other across a space having a width W 1 on the base layer; forming a second frame layer having end surfaces facing each other across a space having a width W 2 larger than the width W 1 in the same direction as that of the width W 1 on the first frame layer, so that the space having the width W 2 is located right above the space having the width W 1 ; forming a trench-forming film provided with a trench having a minimum width W 3 smaller than the width W 1 in the same direction as that of the width W 1 so as to fill at least a part of the spaces having the width W 1 and the width W 2 respectively; and forming a pattern film so as to fill at least a part of the trench. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种形成图案膜的方法,其能够形成具有比曝光机的分辨率更窄的宽度的图案膜和在结束时独立于蚀刻使用的抗蚀剂。 解决方案:该方法包括以下步骤:在衬底的元件形成表面中形成基底层; 形成具有在所述基底层上具有宽度W 1 的空间的彼此面对的端表面的第一框架层; 形成第二框架层,所述第二框架层的宽度W 1 的宽度W SB> 1 的宽度W 1 的宽度W < SB> 1 ,使得具有宽度W 2 的空间位于具有宽度W 1 的空间的正上方; 在与宽度W 1相同的方向上形成具有小于宽度W 1 的最小宽度W 3 的沟槽的沟槽形成膜 以便分别填充具有宽度W 1 和宽度W 2 的空间的至少一部分; 以及形成图案膜以填充沟槽的至少一部分。 版权所有(C)2008,JPO&INPIT
    • 3. 发明专利
    • Method for measuring guide sensor resistance value, and manufacturing method of thin-film magnetic head
    • 测量传感器电阻值的方法及薄膜磁头的制造方法
    • JP2004241087A
    • 2004-08-26
    • JP2003031597
    • 2003-02-07
    • Shinka Jitsugyo KkTdk CorpTdk株式会社新科實業有限公司
    • HASEGAWA YASUHIROFUKUROI OSAMUSUGA TAKESHITANAKA YOSHIAKIHORIUCHI MITSURU
    • G11B5/39
    • PROBLEM TO BE SOLVED: To provide a method for measuring a guide sensor resistance value, capable of measuring the resistance value of a lapping guide formed with a magnetoresistive effect element on a substrate.
      SOLUTION: A pair of probes 61 connected with a resistance measuring instrument 60 are respectively brought into contact with a pair of lead patterns 31 of the lapping guide 3, and measuring current is made to flow through the lapping guide 3. Thus, the resistance measuring instrument 60 measures the resistance value of a sensor film pattern 30, including an MR film. The intensity of a current magnetic field generated, when the current is made to flow through the lapping guide 3 is previously divided into a steep region, in which variations in the counter magnetic field variations of the resistance value of the lapping guide 3 is steeper and a slow region in which the variations are slower. A fixed current value which generates a current magnetic field belonging to the slow region among these regions is adopted as a measured current value. Thus, the variance in the resistance measured value of the lapping guide 3 is reduced, and the resistance value of the MR film 20 on a wafer can be obtained precisely.
      COPYRIGHT: (C)2004,JPO&NCIPI
    • 要解决的问题:提供一种测量引导传感器电阻值的方法,其能够测量在基板上形成有磁阻效应元件的研磨导向器的电阻值。 解决方案:与电阻测量仪器60连接的一对探头61分别与研磨引导件3的一对引线图案31接触,并且使测量电流流过研磨导轨3.因此, 电阻测量装置60测量包括MR膜的传感器膜图案30的电阻值。 当电流流过研磨引导件3时产生的电流磁场的强度预先分成陡峭的区域,其中研磨导向件3的电阻值的反磁场变化的变化更陡峭, 其变化较慢的缓慢区域。 采用在这些区域中产生属于慢区域的电流磁场的固定电流值作为测定电流值。 因此,研磨导向件3的电阻测量值的变化减小,并且可以精确地获得晶片上的MR膜20的电阻值。 版权所有(C)2004,JPO&NCIPI
    • 4. 发明专利
    • Measuring method of insulation resistance in thin film magnetic head, and manufacturing method of thin film magnetic head
    • 薄膜磁头绝缘电阻的测量方法及薄膜磁头的制造方法
    • JP2006221740A
    • 2006-08-24
    • JP2005034336
    • 2005-02-10
    • Tdk CorpTdk株式会社
    • HASEGAWA YASUHIROSHIYOUJI JIYUNYAMAGUCHI MANABU
    • G11B5/31G11B5/455
    • PROBLEM TO BE SOLVED: To accurately measure insulation resistance of each element even when insulation resistance is measured simultaneously for a plurality of elements when a thin film magnetic head in which a substrate and a shield layer are connected is manufactured.
      SOLUTION: A head element assembly has a substrate 11 and a plurality of induction type magnetic transducer elements formed on the substrate 11. The induction type magnetic transducer element has a pair of magnetic layers including an upper part magnetic layer 19 connected electrically to the substrate 11 and a coil 20 insulated and supported between them. For insulation resistance of the induction type magnetic transducer element, insulation resistance between the upper part magnetic layer 19 and the coil 20 is measured by using the upper part magnetic layer 19 side as plus and using the coil 20 side as minus and applying DC voltage simultaneously to the plurality of induction type magnetic transducer elements.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:即使当制造连接有基板和屏蔽层的薄膜磁头时,即使在多个元件同时测量绝缘电阻时,也能精确测量各元件的绝缘电阻。 解决方案:头元件组件具有形成在基板11上的基板11和多个感应型磁换能器元件。感应型磁换能器元件具有一对磁性层,包括上部磁性层19, 基板11和在它们之间被绝缘和支撑的线圈20。 对于感应式磁换能器元件的绝缘电阻,通过使用上部磁性层19侧加上并使用线圈20侧为负并同时施加DC电压来测量上部磁性层19和线圈20之间的绝缘电阻 到多个感应型磁换能器元件。 版权所有(C)2006,JPO&NCIPI