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JP2007248289A Cantilever and method for manufacturing same 有权
标题翻译： CANTILEVER及其制造方法
公开(公告)号：JP2007248289A
公开(公告)日：2007-09-27
申请号：JP2006072673
申请日：2006-03-16
申请人： Seiko Instruments Inc , セイコーインスツル株式会社
发明人： SHIGENO MASAJI , MATSUZAWA OSAMU , WATANABE NAOYA , NIHEI AMIKO , INOUE AKIRA , SHIRAKAWABE YOSHIHARU , MURAMATSU HIROSHI , YAMAMOTO YUJI
IPC分类号： G01Q60/38 , G01Q70/00
CPC分类号： G01R1/06738 , B33Y80/00 , G01Q70/10 , G01Q70/16 , G01R1/06727 , G01R1/07342 , G01R3/00 , Y10T29/49007
摘要： PROBLEM TO BE SOLVED: To enable a probe section to be attached using no adhesive for a short time without any effort, enable even a minute probe section to be attached which is difficult to be observed by an optical microscope, and enable a modification to be carried out without being restricted by any material in order to improve the degree of freedom in design. SOLUTION: A cantilever 1 is equipped with: a lever section 2 with spring characteristics which extends from the proximal end side to the distal end side along one direction and has a plane opposite to a sample; a holder section 3 for supporting the proximal end side of the lever section; the probe section 4 which can contact with the sample under the state of being disposed at the distal end of the lever section and has an opposing surface 4a being opposite to at least the sample side and being made up in a spherical form having a predetermined radius; and a holding section 5 for holding the probe section in such the state that the opposing surface is exposed. The holding section has a contact surface in its inner surface for contacting with the outer surface of the probe section in such the state that the holding section is arranged on a position surrounding the perimeter of the probe section, and the probe section is held by a chemical bonding force interacting directly between the contact surface and the outer surface. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了使得探针部分在没有任何努力的情况下在短时间内不使用粘合剂附着，甚至能够安装由光学显微镜难以观察到的微小的探针部分，并且能够进行修改而不受任何材料的限制，以提高设计自由度。解决方案：悬臂1装备有：具有弹簧特性的杠杆部分2，其沿着一个方向从近端侧延伸到远端侧并且具有与样本相对的平面; 用于支撑杆部的近端侧的保持部3; 探针部分4，其可以在设置在杆部分的远端处的状态下与样品接触并且具有与至少样品侧相对的相对表面4a，并且具有预定半径的球形 ; 以及用于将探针部保持在相对面露出的状态的保持部5。保持部在其内表面具有与探针部的外表面接触的接触表面，使得保持部布置在围绕探头部的周边的位置的状态，并且探针部被保持在化学结合力直接在接触表面和外表面之间相互作用。版权所有（C）2007，JPO＆INPIT

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