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1. 发明专利

JP2014124871A Liquid repellent film forming method, liquid repellent film, nozzle plate, droplet discharge head, and droplet discharge device 审中-公开
标题翻译：液体成膜方法，液体填充膜，喷嘴板，喷射头和脱墨装置
公开(公告)号：JP2014124871A
公开(公告)日：2014-07-07
申请号：JP2012284488
申请日：2012-12-27
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： WAKAMATSU KOSUKE
IPC分类号： B41J2/135 , C07F7/12
摘要： PROBLEM TO BE SOLVED: To provide a liquid repellent film forming method capable of forming a liquid repellent film having high liquid repellency to various liquids, a liquid repellent film having high liquid repellency to various liquids, a nozzle plate having the liquid repellent film, a droplet discharge head, and a droplet discharge device.SOLUTION: A liquid repellent film forming method for forming a liquid repellent film on a base material by using a coupling agent having a metal M comprises: a first supply step of supplying a coupling agent represented by a general formula (4) described below or a general formula (5) described below to the base material by using a vapor phase deposition method; and a replacement step of replacing the group Rb of the coupling agent supplied to the base material with a hydroxy group. The first supply step and the replacement step are repeated twice or more.
摘要翻译：要解决的问题：为了提供能够形成对各种液体具有高防液性的防液膜的防液膜形成方法，对各种液体具有高拒斥性的防液膜，具有防液膜的喷嘴板，液滴喷射头和液滴喷射装置。溶液：通过使用具有金属M的偶联剂在基材上形成疏液性膜的疏液性成膜方法包括：第一供给步骤，将由下述通式（4）或下述通式（5）表示的化合物，使用气相沉积法，以及用羟基代替供给到基材的偶联剂的基团Rb的置换步骤。第一供给步骤和替换步骤重复两次以上。

2. 发明专利

JP2010047024A Head and apparatus for delivering liquid droplet 有权
标题翻译：用于输送液滴的头和装置
公开(公告)号：JP2010047024A
公开(公告)日：2010-03-04
申请号：JP2009275476
申请日：2009-12-03
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable liquid droplet delivering head which is excellent in dimensional accuracy and chemical resistance and is capable of high-quality printing for a long period of time, and to provide a highly reliable liquid droplet delivering apparatus equipped with the liquid droplet delivering head. SOLUTION: The inkjet recording head 1 includes a substrate 20 in which delivering liquid storing chambers 21 are formed, a nozzle plate 10 provided on the undersurface of the substrate 20 and equipped with nozzle holes 11, and a sealing sheet 30 provided on the upper surface of the substrate 20 so as to cover the delivering liquid storing chambers 21. The substrate 20 and the nozzle plate 10 are bonded to each other via a bonding film 15. The bonding film 15 is formed by the plasma polymerization method, including both an Si skeleton which has a random atomic structure including siloxane bonds, and leaving groups bonded to the Si skeleton. The leaving groups existing near the surface of the bonding film 15 are left from the Si skeleton by applying an energy, and the substrate 20 and the nozzle plate 10 are bonded to each other by an adhesiveness generated at the bonding film 15. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种高度可靠的液滴输送头，其尺寸精度和耐化学性优异，能够长期高质量的印刷，并提供高可靠性的液滴输送装备有液滴输送头的装置。解决方案：喷墨记录头1包括其中形成有输送液体储存室21的基板20，设置在基板20的下表面上并配备有喷嘴孔11的喷嘴板10和设置在基板20上的密封片30 基板20的上表面以覆盖输送液体储存室21.基板20和喷嘴板10通过接合膜15彼此接合。接合膜15通过等离子体聚合方法形成，包括既具有包含硅氧烷键的随机原子结构的Si骨架和离去与Si骨架结合的基团。存在于接合膜15表面附近的离去基团通过施加能量从Si骨架留下，并且基板20和喷嘴板10通过在接合薄膜15处产生的粘合力彼此接合。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2009202387A Manufacturing method of joined body, droplet discharge head, and droplet discharge apparatus 审中-公开
标题翻译：接合体制造方法，脱墨头和脱墨装置
公开(公告)号：JP2009202387A
公开(公告)日：2009-09-10
申请号：JP2008045610
申请日：2008-02-27
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE , KOBAYASHI MASANAO
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a joined body which ensures a joining strength and a durability, even when a base material has a large surface roughness, an unevenness and a step on its surface, and even when base materials to be joined to each other have only a small contacting region.
SOLUTION: A joining base material 300 has a joining film 320 made by applying an activation treatment to a thin film including a siloxane bond and an elimination group. A joined body 350 consisting of the joining base material 300 and the other base material 330 to be joined, are overlaid and pressurized so that the joining film 320 is brought into contact with the base material 330 to be joined, and then heated while it is pressurized, so as to form a joined body.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决问题的方案为了提供一种确保接合强度和耐久性的接合体，即使在基材具有大的表面粗糙度，表面的不均匀性和台阶的情况下，即使是要接合的基材彼此只有一个小的接触区域。解决方案：接合基材300具有通过对包括硅氧烷键和消除基团的薄膜进行活化处理制成的接合膜320。由接合基材300和待接合的另一基材330组成的接合体350被覆盖并加压，使得接合膜320与待接合的基材330接触，然后在加热的同时加热加压，以形成接合体。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2009139600A Actuator, optical scanner and image forming apparatus 审中-公开
标题翻译：执行器，光学扫描仪和图像形成装置
公开(公告)号：JP2009139600A
公开(公告)日：2009-06-25
申请号：JP2007315300
申请日：2007-12-05
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： OTSUKA KENJI , MATSUO YASUHIDE , WAKAMATSU KOSUKE , HIGUCHI KAZUHISA
IPC分类号： G02B26/10 , C08G77/04 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide an actuator which is configured by storing a movable plate in a closed space excellent in air-tightness, and has high reliability irrespective of constitutional material of members joined via a joint film, to provide an optical scanner comprising the actuator, and to provide an image forming apparatus comprising the optical scanner. SOLUTION: The actuator 1 comprises: a base body 2 having a vibration system of two degrees-of-freedom; and supports 3, 4. The base body 2 and the support 3, and the base body 2 and the support 4 are joined air-tightly via a joint film 81 and a joint film 82 respectively. Thus, the vibration system of two degrees-of-freedom is enclosed within the closed space. The respective joint films 81, 82 have an Si skeleton having a random atomic structure containing siloxane bonds and groups to be disconnected which are connected to the Si skeleton. By applying energy to the joint films 81, 82, the free radicals are disconnected from the Si skeleton. Accordingly, adhesion is revealed in the respective joint films 81, 82 and, as the result, the base body 2 and the support 3, and the base body 2 and the support 4 are air-tightly joined. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种致动器，其通过将可移动板存储在气密性良好的封闭空间中而构成，并且与通过接合膜接合的构件的构成材料无关地具有高可靠性，以提供光学扫描器，其包括致动器，并且提供包括光学扫描器的图像形成装置。解决方案：致动器1包括：具有两个自由度的振动系统的基体2; 基体2和支撑体3以及基体2和支撑体4分别经由接合膜81和接合膜82气密地接合。因此，两个自由度的振动系统封闭在封闭空间内。各接合膜81,82具有含有硅氧烷键的随机原子结构的Si骨架和与Si骨架连接的要断开的组。通过向接合膜81,82施加能量，自由基与Si骨架断开。因此，在各接合膜81,82中显示出粘合性，结果，基体2和支撑体3以及基体2和支撑体4气密接合。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2009134027A Optical device, wavelength variable filter module, and optical spectrum analyzer 有权
标题翻译：光学器件，波长变化滤波器模块和光谱分析仪
公开(公告)号：JP2009134027A
公开(公告)日：2009-06-18
申请号：JP2007309554
申请日：2007-11-29
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： WAKAMATSU KOSUKE , OTSUKA KENJI , MATSUO YASUHIDE , HIGUCHI KAZUHISA
IPC分类号： G02B26/00 , B81B3/00 , G02B5/28
摘要： PROBLEM TO BE SOLVED: To provide an optical device, a wavelength variable filter module, and an optical spectrum analyzer having excellent dimensional accuracy and separating wavelength for a long period of time with high accuracy while reducing the cost. SOLUTION: The optical device includes: a first substrate 2 provided with a movable plate 21 having a first light-reflecting film 25 so as to be displaced; and a second substrate 3 provided with a second light-reflecting film 34 opposite to the first light-reflecting film 25. The second substrate 3 has a first layer 3a and a second layer 3b bonded to the first layer 3a via a bonding film 41. The bonding film 41 contains an Si skeleton having a random atomic structure including a siloxane (Si-O) coupling, and a leaving group coupled to the Si skeleton. The bonding film 41 has the leaving group present around the surface thereof leaving from the Si skeleton by applying energy to at least a partial region of the film to bond the first layer 3a and the second layer 3b by adhesion which is developed in the region of the surface of the bonding film 41. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决问题：提供具有优异的尺寸精度的光学装置，波长可变滤波器模块和光谱分析仪，并且在降低成本的同时以高精度长时间分离波长。解决方案：光学装置包括：第一基板2，设置有具有第一光反射膜25以便移位的可动板21; 以及设置有与第一光反射膜25相对的第二光反射膜34的第二基板3.第二基板3具有通过接合膜41接合到第一层3a的第一层3a和第二层3b。接合膜41包含具有包含硅氧烷（Si-O）偶合的随机原子结构的Si骨架和与Si骨架连接的离去基团。接合膜41具有在其表面周围存在的离去基团，其通过向膜的至少部分区域施加能量而离开Si骨架，以通过在第一层3a和第二层3b的区域中显影的粘合来结合第一层3a和第二层3b 粘合膜41的表面。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2009113304A Liquid droplet discharge head and liquid droplet discharge apparatus 审中-公开
标题翻译：液体喷射头和液体排放装置
公开(公告)号：JP2009113304A
公开(公告)日：2009-05-28
申请号：JP2007287913
申请日：2007-11-05
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a highly-reliable liquid droplet discharge head which is excellent in a dimensional accuracy and chemical resistance while enabling a printing of high quality for a long period of time, and a highly-reliable liquid droplet discharge apparatus equipped with the discharge head. SOLUTION: An inkjet recording head 1 includes: a substrate 20 wherein a discharged liquid storing room 21 is formed; a nozzle plate 10 provided in the undersurface of the substrate 20; a sealing sheet 30, a diaphragm 40, and a piezoelectric element 50 provided in the top surface of the substrate 20; and a case head 60 provided in the top surface of the diaphragm 40. The diaphragm 40 and the case head 60 are joined through a joining film 45b. The joining film 45b contains a Si skeleton which has a random atomic structure containing a siloxane bond, and a leaving group joining to the Si skeleton. By giving an energy, the leaving group existing near the surface of the joining film 45b leaves from the Si skeleton, and then, the adhesiveness arisen in the joining film 45b makes the diaphragm 40 and the case head 60 joined mutually. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种高可靠性的液滴喷射头，其在尺寸精度和耐化学性方面优异，同时能够长时间打印高质量，并且具有高可靠性的液滴喷射装有排放头的设备。解决方案：喷墨记录头1包括：形成排出液体储存室21的基板20; 设置在基板20的下表面中的喷嘴板10; 设置在基板20的上表面的密封片30，隔膜40和压电元件50; 以及设置在隔膜40的上表面的外壳头60.隔膜40和外壳头60通过接合膜45b接合。接合膜45b含有具有硅氧烷键的随机原子结构的Si骨架和与Si骨架连接的离去基团。通过给予能量，存在于接合薄膜45b表面附近的离开组从Si骨架离开，然后，接合薄膜45b中产生的粘合性使隔膜40和外壳头部60相互接合。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2009113303A Liquid droplet discharge head and liquid droplet discharge device 审中-公开
标题翻译：液体喷射头和液体排出装置
公开(公告)号：JP2009113303A
公开(公告)日：2009-05-28
申请号：JP2007287912
申请日：2007-11-05
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： WAKAMATSU KOSUKE , OTSUKA KENJI , MATSUO YASUHIDE , HIGUCHI KAZUHISA
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable liquid droplet discharge head which is excellent in dimension accuracy and chemical resistance and attains a high quality printing over a long period of time, and to provide a highly reliable liquid droplet discharge device with the liquid droplet discharge head. SOLUTION: An ink jet type recording head 1 includes: a substrate 20 in which liquid discharge chambers 21 are formed; a nozzle plate 10 disposed on the underside of the substrate 20; a sealing sheet 30 and vibrating plate 40 (sealing plate) disposed on the upper side of the substrate 20; and piezoelectric elements 50 disposed on the upper side of the vibrating plate 40. The vibrating plate 40 and the piezoelectric elements 50 are joined via a joining film 45a. The joining film 45a includes a Si-frame having a random atomic structure including siloxane (Si-O) bond, and a leaving group bonding to this Si-frame. The leaving group present near the surface of the joining film 45a leaves from the Si-frame by applying energy. The vibrating plate 40 and the piezoelectric element 50 are joined by adhesion imparted to the joining film 45a. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供尺寸精度和耐化学性优异的高可靠性液滴喷射头，并且长时间地获得高质量的打印，并且提供了具有高可靠性的液滴喷射装置液滴排放头。喷墨式记录头1包括：形成有液体排出室21的基板20; 设置在基板20的下侧的喷嘴板10; 设置在基板20的上侧的密封片30和振动板40（密封板）以及设置在振动板40的上侧的压电元件50.振动板40和压电元件50通过接合膜45a接合。接合膜45a包括具有包含硅氧烷（Si-O）键的随机原子结构的Si框架和与该Si框架结合的离去基团。存在于接合膜45a的表面附近的离去基团通过施加能量从Si框架离开。振动板40和压电元件50通过赋予接合膜45a的粘合而接合。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2009035721A Substrate with joining film, joining method and joined product 审中-公开
标题翻译：带有接合膜的基板，接合方法和接合的产品
公开(公告)号：JP2009035721A
公开(公告)日：2009-02-19
申请号：JP2008133673
申请日：2008-05-21
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE
IPC分类号： C09J7/02 , B41J2/16 , C09J5/02 , C09J183/04 , C09J183/05 , H01L21/02 , H01L27/12
CPC分类号： C09J5/06 , B29C59/14 , B29C65/02 , B29C65/1403 , B29C65/1406 , B29C65/1432 , B29C65/1435 , B29C65/1483 , B29C65/1496 , B29C65/16 , B29C65/1606 , B29C65/1616 , B29C65/1619 , B29C65/483 , B29C65/4835 , B29C65/4845 , B29C65/5021 , B29C65/5057 , B29C65/52 , B29C65/528 , B29C66/004 , B29C66/02 , B29C66/1122 , B29C66/30223 , B29C66/348 , B29C66/45 , B29C66/71 , B29C66/712 , B29C66/72321 , B29C66/72323 , B29C66/72325 , B29C66/7234 , B29C66/73111 , B29C66/73112 , B29C66/73113 , B29C66/73343 , B29C66/8322 , B29C66/83221 , B29C66/91411 , B29C66/9161 , B29C66/919 , B29C66/954 , B29C2035/0827 , B29K2009/06 , B29K2021/00 , B29K2021/003 , B29K2023/00 , B29K2023/06 , B29K2023/083 , B29K2023/086 , B29K2023/12 , B29K2025/00 , B29K2027/06 , B29K2027/08 , B29K2027/12 , B29K2027/16 , B29K2027/18 , B29K2033/12 , B29K2055/02 , B29K2059/00 , B29K2063/00 , B29K2067/00 , B29K2067/006 , B29K2069/00 , B29K2071/00 , B29K2071/12 , B29K2075/00 , B29K2077/00 , B29K2077/10 , B29K2079/08 , B29K2079/085 , B29K2081/06 , B29K2096/005 , B29K2105/0079 , B29K2105/0085 , B29K2105/0088 , B29K2995/0027 , B29L2009/00 , B29L2031/767 , B41J2/161 , B41J2/1623 , C08J7/123 , H01L21/187 , Y10T156/10 , Y10T428/265 , Y10T428/2809 , Y10T428/2817 , Y10T428/2826 , Y10T428/2848 , Y10T428/2852 , Y10T428/31663 , B29C65/00 , B29K2081/04 , B29K2075/02 , B29K2067/06 , B29K2067/04 , B29K2067/003 , B29K2061/04 , B29K2033/08 , B29K2029/04 , B29K2025/08 , B29K2025/06 , B29K2023/18 , B29K2023/16
摘要： PROBLEM TO BE SOLVED: To provide a substrate with a joining film which can be strongly and efficiently joined to an adherend in high dimensional accuracy, to provide a method for efficiently joining the joining film-having substrate to the adherend at low temperature, and to provide a joined product in which the joining film-having substrate and the adherend are strongly joined to each other in high dimensional accuracy and having high reliability. SOLUTION: This substrate with a joining film has a substrate 2 and a joining film 3 disposed on the substrate 2, and can be joined to a facing substrate 4 (other adherend). The joining film 3 is a film containing Si skeletons having random atom structures containing siloxane (Si-O) bonds, and releasing groups bonded to the Si skeletons, and the crystallinity of the Si skeletons is ≤45%. The joining films 3 is irradiated with UV rays to release the releasing groups from Si skeletons, whereby adhesiveness to the facing substrate 4 can be expressed to the surface 35 of the joining film 3. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供具有能够以高尺寸精度牢固且有效地接合到被粘物的接合膜的基板，以提供一种在低温下有效地将接合薄膜的基板与被粘物接合的方法并且提供其中接合膜的基底和被粘物以高尺寸精度牢固地彼此接合并具有高可靠性的接合产品。＆lt; P＆gt;解决方案：具有接合膜的基板具有基板2和设置在基板2上的接合膜3，并且可以与面对基板4（其他被粘物）接合。接合膜3是含有具有含有硅氧烷（Si-O）键的无规原子结构的Si骨架和与Si骨架结合的释放基团的膜，Si骨架的结晶度为≤45％以下。用紫外线照射接合膜3以从Si骨架释放释放基团，由此可以将粘合性表达到接合膜3的表面35.版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2009035719A Joined article and joining method 有权
标题翻译：加工文章和加工方法
公开(公告)号：JP2009035719A
公开(公告)日：2009-02-19
申请号：JP2008133671
申请日：2008-05-21
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE
IPC分类号： C09J5/00 , C09J5/06 , C09J183/04 , C09J183/05
CPC分类号： C09J5/06 , B29C59/14 , B29C65/02 , B29C65/1403 , B29C65/1406 , B29C65/1432 , B29C65/1435 , B29C65/1483 , B29C65/1496 , B29C65/16 , B29C65/1606 , B29C65/1616 , B29C65/1619 , B29C65/483 , B29C65/4835 , B29C65/4845 , B29C65/5021 , B29C65/5057 , B29C65/52 , B29C65/528 , B29C66/004 , B29C66/02 , B29C66/1122 , B29C66/30223 , B29C66/348 , B29C66/45 , B29C66/71 , B29C66/712 , B29C66/72321 , B29C66/72323 , B29C66/72325 , B29C66/7234 , B29C66/73111 , B29C66/73112 , B29C66/73113 , B29C66/73343 , B29C66/8322 , B29C66/83221 , B29C66/91411 , B29C66/9161 , B29C66/919 , B29C66/954 , B29C2035/0827 , B29K2009/06 , B29K2021/00 , B29K2021/003 , B29K2023/00 , B29K2023/06 , B29K2023/083 , B29K2023/086 , B29K2023/12 , B29K2025/00 , B29K2027/06 , B29K2027/08 , B29K2027/12 , B29K2027/16 , B29K2027/18 , B29K2033/12 , B29K2055/02 , B29K2059/00 , B29K2063/00 , B29K2067/00 , B29K2067/006 , B29K2069/00 , B29K2071/00 , B29K2071/12 , B29K2075/00 , B29K2077/00 , B29K2077/10 , B29K2079/08 , B29K2079/085 , B29K2081/06 , B29K2096/005 , B29K2105/0079 , B29K2105/0085 , B29K2105/0088 , B29K2995/0027 , B29L2009/00 , B29L2031/767 , B41J2/161 , B41J2/1623 , C08J7/123 , H01L21/187 , Y10T156/10 , Y10T428/265 , Y10T428/2809 , Y10T428/2817 , Y10T428/2826 , Y10T428/2848 , Y10T428/2852 , Y10T428/31663 , B29C65/00 , B29K2081/04 , B29K2075/02 , B29K2067/06 , B29K2067/04 , B29K2067/003 , B29K2061/04 , B29K2033/08 , B29K2029/04 , B29K2025/08 , B29K2025/06 , B29K2023/18 , B29K2023/16
摘要： PROBLEM TO BE SOLVED: To provide a joined article which comprises two substrates strongly and efficiently joined to each other in high dimensional accuracy at low temperature and has high reliability, and to provide a method for joining two substrates, by which the two substrates can efficiently be joined to each other at low temperature. SOLUTION: This joined article 5 has two substrates 21, 22 and two joining films 31, 32 disposed between the substrates 21, 22, and is prepared by joining the two substrates 21, 22 through the two joining films 31, 32. The joining films 31, 32 in the joined article 5 contains a Si skeleton having a random atom structure containing siloxane (Si-O) bonds and releasing groups bonded to the Si skeleton. Energy is imparted to each of the joining films 31, 32 to express adhesiveness, whereby the two substrates 21, 22 are joined to each other. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种包括两个基板的接合制品，其在低温下以高尺寸精度牢固有效地接合并且具有高可靠性，并且提供了一种用于连接两个基板的方法，基板可以在低温下有效地彼此接合。
解决方案：该接合物5具有两个基板21,22和两个设置在基板21,22之间的接合膜31,32，并且通过两个接合膜31,32接合两个基板21,22而制备。接合体5中的接合薄膜31,32含有具有硅氧烷（Si-O）键的随机原子结构的硅骨架和与Si骨架结合的释放基团。赋予每个接合薄膜31,32以表示粘附性的能量，由此两个基板21,22彼此接合。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2012194566A Optical device, wavelength variable filter module and optical spectrum analyzer 有权
标题翻译：光学器件，波长可变滤波器模块和光谱分析仪
公开(公告)号：JP2012194566A
公开(公告)日：2012-10-11
申请号：JP2012109008
申请日：2012-05-11
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HIGUCHI KAZUHISA , MATSUO YASUHIDE , OTSUKA KENJI , WAKAMATSU KOSUKE
IPC分类号： G02B26/02 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To provide an optical device, a wavelength variable filter module and an optical spectrum analyzer, having increased flexibility in designing and reducing the cost as well as achieving excellent dimensional accuracy, and capable of carrying out wavelength separation with high accuracy for a long period of time.SOLUTION: A first substrate 2 on which a movable plate 21 having a first light-reflecting part 25 is disposed as displaceable, and a second substrate 3 on which a second light-reflecting part 34 opposing to the first light-reflecting part 25 are joined by a joint film 41. The joint film 41 contains a Si skeleton containing a siloxane (Si-O) bond and a random atomic structure, and a leaving group bonded to the Si skeleton. By imparting energy to at least a partial region of the joint film 41, the leaving group present near the surface of the joint film 41 leaves from the Si skeleton and adhesiveness is developed in the region on the surface of the joint film 41, which joins the first substrate 2 and the second substrate 3.
摘要翻译：要解决的问题：提供一种光学装置，波长可变滤波器模块和光谱分析仪，其具有增加的设计和降低成本的灵活性以及实现优异的尺寸精度，并且能够进行波长分离高精度很长一段时间。解决方案：具有第一光反射部分25的可动板21设置在其上的可移动的第一基板2和与第一光反射部分相对的第二光反射部分34的第二基板3 接合膜41包含含有硅氧烷（Si-O）键和随机原子结构的Si骨架，以及与Si骨架结合的离去基团。通过向接合膜41的至少一部分区域赋予能量，存在于接合膜41的表面附近的离去基团离开Si骨架，并且在接合膜41的表面的区域中形成粘合性，该接合膜41的接合第一基板2和第二基板3.版权所有（C）2013，JPO＆INPIT

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