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1. 发明专利

JP2017080946A ＭＥＭＳデバイスの製造方法、ＭＥＭＳデバイス、液体噴射ヘッド、および液体噴射装置审中-公开
公开(公告)号：JP2017080946A
公开(公告)日：2017-05-18
申请号：JP2015209627
申请日：2015-10-26
申请人：セイコーエプソン株式会社 , Seiko Epson Corp
发明人： TAKAHASHI WATARU , MATSUO YASUHIDE , OTSUKA KENJI
IPC分类号： B41J2/16 , B81B3/00 , B81C3/00
CPC分类号： B41J2/14233 , B41J2/1607 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1646 , B41J2202/11
摘要：【課題】可動領域のクラック等の損傷を抑制すると共に振動特性を揃えることが可能なMEMSデバイスの製造方法、MEMSデバイス、液体噴射ヘッド、および液体噴射装置を提供する。【解決手段】マスクを介して一の基板(16)をエッチングして、当該一の基板に空間(26)を形成する空間形成工程と、マスク除去液によりマスクを除去すると共に、可動領域(17)の空間側の面に基板積層方向に垂直方向において空間よりも大きい凹部(38)を形成する凹部形成工程と、一の基板の他の基板と接合面に接着剤(21)の層を形成する接着剤層形成工程と、一の基板と他の基板とを位置合わせする位置合わせ工程と、一の基板と他の基板とを接着剤を介して押圧し、両基板の間から漏出した接着剤を、空間を区画する壁を通じて凹部に導入する接着剤導入工程と、を含み、位置合わせ工程の前に、加熱により接着剤の硬化を進める予備硬化工程を行うことを特徴とする。【選択図】図3

2. 发明专利

JP2013131756A Heat sink with bonding film, bonding method of bonded body and heat sink, and display device 有权
标题翻译：带有粘结膜的热沉，粘结体和热沉的粘结方法和显示装置
公开(公告)号：JP2013131756A
公开(公告)日：2013-07-04
申请号：JP2012277222
申请日：2012-12-19
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： OTSUKA KENJI , MATSUO YASUHIDE , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE
IPC分类号： H01L23/36 , C09J5/00 , C09J5/06 , C09J7/02 , C09J183/00 , C09J183/04 , C09J183/06 , C09J183/08 , G09F9/00 , H01L23/40
摘要： PROBLEM TO BE SOLVED: To provide a heat sink with a bonding film which can be bonded efficiently and strongly to a bonded body with high dimensional accuracy under low temperature, with a thin bonding film interposed therebetween, and can thereby dissipate heat of the bonded body efficiently, and to provide a method of bonding a bonded body and a heat sink so that the heat of the bonded body can be dissipated efficiently, and a highly reliable display device including a heat sink with a bonding film.SOLUTION: A heat sink 1 with a bonding film has a heat sink 2, and a bonding film 3 provided on the heat sink 2, and can be bonded to a reflector 4 (bonded body). The bonding film 3 is a film including an Si skeleton having a random atomic structure including a siloxane bond, and a desorption group being bonded to the Si skeleton. When energy is imparted to the bonding film 3, at least the desorption group existing near the surface is desorbed from the Si skeleton, and adhesiveness to the reflector 4 appears on the surface of the bonding film 3.
摘要翻译：要解决的问题：为了提供具有接合膜的散热器，其能够在低温下以高尺寸精度高效且牢固地结合到接合体，其间具有薄的接合膜，从而能够散发接合体的热量并且提供一种接合体和散热器的接合方法，使得能够有效地散发接合体的热量，以及包括具有接合膜的散热器的高可靠性的显示装置。解决方案：散热器1 接合膜具有散热器2和设置在散热器2上的接合膜3，并且可以结合到反射器4（接合体）。接合膜3是包含具有硅氧烷键的随机原子结构的Si骨架和与Si骨架结合的解吸基的膜。当向接合膜3施加能量时，至少存在于表面附近的解吸基团从Si骨架解吸，并且在接合膜3的表面上出现与反射体4的粘附性。

3. 发明专利

JP2010047025A Head and apparatus for delivering liquid droplet 有权
标题翻译：用于输送液滴的头和装置
公开(公告)号：JP2010047025A
公开(公告)日：2010-03-04
申请号：JP2009275477
申请日：2009-12-03
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable liquid droplet delivering head which is excellent in dimensional accuracy and chemical resistance and is capable of high-quality printing for a long period of time, and to provide a highly reliable liquid droplet delivering apparatus equipped with the liquid droplet delivering head. SOLUTION: The inkjet recording head 1 includes a substrate 20 in which delivering liquid storing chambers 21 are formed, a nozzle plate 10 provided on the undersurface of the substrate 20 and equipped with nozzle holes 11, and a sealing sheet 30 formed on the upper surface of the substrate 20 so as to cover the delivering liquid storing chambers 21. The substrate 20 and the nozzle plate 10 are bonded to each other via a bonding film 15. The bonding film 15 is formed by the plasma polymerization method, including both an Si skeleton which has a random atomic structure including siloxane bonds, and leaving groups bonded to the Si skeleton. The leaving groups existing near the surface of the bonding film 15 are left from the Si skeleton by applying an energy, and the substrate 20 and the nozzle plate 10 are bonded to each other by an adhesiveness generated at the bonding film 15. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供尺寸精度和耐化学性优异的高可靠性液滴输送头，能够长期高质量地印刷，并提供高可靠性的液滴输送装备有液滴输送头的装置。解决方案：喷墨记录头1包括其中形成有输送液体存储室21的基板20，设置在基板20的下表面上并配备有喷嘴孔11的喷嘴板10和形成在基板20上的密封片30 基板20的上表面以覆盖输送液体储存室21.基板20和喷嘴板10通过接合膜15彼此接合。接合膜15通过等离子体聚合方法形成，包括既具有包含硅氧烷键的随机原子结构的Si骨架和离去与Si骨架结合的基团。存在于接合膜15表面附近的离去基团通过施加能量从Si骨架留下，并且基板20和喷嘴板10通过在接合薄膜15处产生的粘合力彼此接合。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2009220581A Joined article and joining method 审中-公开
标题翻译：加工文章和加工方法
公开(公告)号：JP2009220581A
公开(公告)日：2009-10-01
申请号：JP2009154911
申请日：2009-06-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE
IPC分类号： B32B27/00 , C09J5/00 , H01L21/02
CPC分类号： C09J5/06 , B29C59/14 , B29C65/02 , B29C65/1403 , B29C65/1406 , B29C65/1432 , B29C65/1435 , B29C65/1483 , B29C65/1496 , B29C65/16 , B29C65/1606 , B29C65/1616 , B29C65/1619 , B29C65/483 , B29C65/4835 , B29C65/4845 , B29C65/5021 , B29C65/5057 , B29C65/52 , B29C65/528 , B29C66/004 , B29C66/02 , B29C66/1122 , B29C66/30223 , B29C66/348 , B29C66/45 , B29C66/71 , B29C66/712 , B29C66/72321 , B29C66/72323 , B29C66/72325 , B29C66/7234 , B29C66/73111 , B29C66/73112 , B29C66/73113 , B29C66/73343 , B29C66/8322 , B29C66/83221 , B29C66/91411 , B29C66/9161 , B29C66/919 , B29C66/954 , B29C2035/0827 , B29K2009/06 , B29K2021/00 , B29K2021/003 , B29K2023/00 , B29K2023/06 , B29K2023/083 , B29K2023/086 , B29K2023/12 , B29K2025/00 , B29K2027/06 , B29K2027/08 , B29K2027/12 , B29K2027/16 , B29K2027/18 , B29K2033/12 , B29K2055/02 , B29K2059/00 , B29K2063/00 , B29K2067/00 , B29K2067/006 , B29K2069/00 , B29K2071/00 , B29K2071/12 , B29K2075/00 , B29K2077/00 , B29K2077/10 , B29K2079/08 , B29K2079/085 , B29K2081/06 , B29K2096/005 , B29K2105/0079 , B29K2105/0085 , B29K2105/0088 , B29K2995/0027 , B29L2009/00 , B29L2031/767 , B41J2/161 , B41J2/1623 , C08J7/123 , H01L21/187 , Y10T156/10 , Y10T428/265 , Y10T428/2809 , Y10T428/2817 , Y10T428/2826 , Y10T428/2848 , Y10T428/2852 , Y10T428/31663 , B29C65/00 , B29K2081/04 , B29K2075/02 , B29K2067/06 , B29K2067/04 , B29K2067/003 , B29K2061/04 , B29K2033/08 , B29K2029/04 , B29K2025/08 , B29K2025/06 , B29K2023/18 , B29K2023/16
摘要： PROBLEM TO BE SOLVED: To provide a joined article which comprises two substrates strongly and efficiently joined to each other in high dimensional accuracy at a low temperature and has high reliability, and to provide a method for joining two substrates, by which the two substrates can efficiently be joined to each other at a low temperature. SOLUTION: The joined article 5 has two base plates (base substrates) 21, 22 and two joining films 31, 32 disposed between the base plates 21, 22, and is prepared by joining the two base plates 21, 22 with the two joining films 31, 32 interposed. The joining films 31, 32 in the joined article 5 contains a Si skeleton having a random atomic structure containing siloxane (Si-O) bonds and leaving groups bonded to the Si skeleton. When energy is imparted to each of the joining films 31, 32, adhesiveness is expressed, and thus the two base plates 21, 22 are joined to each other. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种包括两个基板的接合制品，其在低温下以高尺寸精度牢固且有效地接合并且具有高可靠性，并且提供了一种用于接合两个基板的方法，两个基板可以在低温下有效地彼此接合。解决方案：接合制品5具有两个基板（基底基板）21,22和设置在基板21,22之间的两个接合薄膜31,32，并且通过将两个基板21,22与插入两个接合膜31,32。接合体5中的接合薄膜31,32含有具有硅氧烷（Si-O）键和离子基团与Si骨架结合的随机原子结构的Si骨架。当赋予每个接合薄膜31,32的能量时，表现出粘合性，因此两个底板21,22彼此接合。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2009190299A Bonding base, method for manufacturing bonding base, method for manufacturing bonded material, and liquid drop ejecting device 审中-公开
标题翻译：粘结基体，制造粘结基体的方法，制造粘结材料的方法和液体喷射装置
公开(公告)号：JP2009190299A
公开(公告)日：2009-08-27
申请号：JP2008034124
申请日：2008-02-15
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： MATSUO YASUHIDE , OTSUKA KENJI , HIGUCHI KAZUHISA , WAKAMATSU KOSUKE , KOBAYASHI MASANAO
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide a bonding base that can maintain bonding strength and durability even when the base has a large surface roughness and a concavo-convex pattern or steps present on the surface, or has a small contact area where base materials to be bonded are in contact with each other.
SOLUTION: The bonding base 100 has a bonding layer 150 formed by stacking bonding films 120, 130, 140 into a three-layer structure on one surface 114 of the base 110. Each bonding film 120, 130, 140 is formed by subjecting each thin film essentially comprising polyorganosiloxane containing an alkyl group to activation processing by irradiation with UV rays as an embodiment of energy rays.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：为了提供即使当基体具有大的表面粗糙度和存在于表面上的凹凸图案或台阶的接合强度和耐久性的接合基底时，或者接触面积小的基底要结合的材料彼此接触。解决方案：接合基底100具有通过在基体110的一个表面114上将结合膜120,130,140堆叠成三层结构而形成的接合层150.每个接合膜120,130,140由作为能量射线的一个实施例，使基本上含有烷基的聚有机硅氧烷的每个薄膜经受紫外线照射的活化处理。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2009142046A Actuator and image forming apparatus 审中-公开
标题翻译：执行器和图像形成装置
公开(公告)号：JP2009142046A
公开(公告)日：2009-06-25
申请号：JP2007315297
申请日：2007-12-05
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HIGUCHI KAZUHISA , MATSUO YASUHIDE , OTSUKA KENJI , WAKAMATSU KOSUKE
IPC分类号： H02N2/00 , B06B1/06 , B81B3/00 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an actuator which is excellent in uniformity of characteristics among products and has desired vibration characteristics, and to provide an image forming apparatus with the actuator. SOLUTION: The actuator 1 comprises: a substrate 2 having a pair of drive members 21, 22, a movable plate 23 provided between the drive members, and a frame-like support part 24 surrounding the members and plate; and opposed substrates 4, 5 supporting the substrate 2. A piezoelectric element 6 for driving the drive members 21, 22 is connected on the opposed substrate 4 via a bonding film 3. The bonding film 3 contains Si skeletons containing siloxane bond and having a random atom structure, and also contains releasing groups bonded to the Si skeletons, before energy is provided. The bonding film 3 of this type includes energy to release a part of the releasing groups from the Si skeletons, causing active species instead. Thereby, the bonding film 3 exhibits adhesion to adhere the piezoelectric element 6 and the opposed substrate 4. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种在产品之间的特性均匀性优异并且具有期望的振动特性的致动器，并且提供具有致动器的图像形成装置。执行器1包括：具有一对驱动构件21,22，设置在驱动构件之间的可动板23和围绕构件和板的框架状支撑部24的基板2; 以及支撑基板2的相对的基板4,5。用于驱动驱动构件21,22的压电元件6经由接合膜3连接在相对的基板4上。接合膜3包含含有硅氧烷键并具有随机的Si骨架原子结构，并且在提供能量之前还含有与Si骨架结合的释放基团。这种接合膜3包括从Si骨架释放一部分释放基团的能量，从而引起活性物质。因此，接合膜3表现出粘附以粘附压电元件6和相对的基板4.版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2009136120A Actuator and image forming apparatus 审中-公开
标题翻译：执行器和图像形成装置
公开(公告)号：JP2009136120A
公开(公告)日：2009-06-18
申请号：JP2007311796
申请日：2007-11-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HIGUCHI KAZUHISA , MATSUO YASUHIDE , OTSUKA KENJI , WAKAMATSU KOSUKE
IPC分类号： H02N2/00 , B81B3/00 , G02B26/08 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an actuator which has a superior durability and has desired vibration characteristics and to provide an image forming apparatus with the same. SOLUTION: The actuator 1 has a frame-like support section 29, a moving plate 22 having a light reflecting section 221 provided on the inside of the frame-like support section 29, and two sets of connecting sections 20 and 21 for connecting the support section 29 and the moving plate 22 to turnably support the moving plate 22. The connecting section 20 has a pair of elastic members 25 and 26 and the connecting section 21 has a pair of elastic members 27 and 28. On the elastic members 25-28, piezoelectric elements 51-54 are bonded via a bonding film 3. Before energy is given, the bonding film 3 includes an Si skeleton containing a siloxane bond and having a random atomic structure and a leaving group which bonds with the Si skeleton. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有优异的耐久性并具有期望的振动特性的致动器，并提供具有该致动器的图像形成装置。解决方案：致动器1具有框架状支撑部分29，具有设置在框架状支撑部分29的内侧上的光反射部分221的移动板22和两组连接部分20和21，用于连接支撑部分29和移动板22以可转动地支撑移动板22.连接部分20具有一对弹性部件25和26，连接部分21具有一对弹性部件27和28.在弹性部件如图25-28所示，压电元件51-54通过接合膜3接合。在施加能量之前，接合膜3包括含有硅氧烷键并具有随机原子结构的Si骨架和与Si骨架键合的离去基团。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2009134197A Color filter with bonding film, method of bonding adherend with color filter, and image display device 审中-公开
标题翻译：具有粘结膜的彩色滤光片，用彩色滤光片粘接粘合剂的方法和图像显示装置
公开(公告)号：JP2009134197A
公开(公告)日：2009-06-18
申请号：JP2007311798
申请日：2007-11-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HIGUCHI KAZUHISA , MATSUO YASUHIDE , OTSUKA KENJI , WAKAMATSU KOSUKE
IPC分类号： G02B5/20 , G02F1/1335
摘要： PROBLEM TO BE SOLVED: To provide a color filter with bonding film in which the filter is strongly bonded to an adherend, via a thin bonding film with high dimensional accuracy, to provide a method of efficiently and strongly bonding the color filter and the adherend with high dimensional accuracy, and to provide an image display device which is furnished with the color filter with bonding film, reliable and displays a clear image. SOLUTION: The color filter 1 with bonding film has a color filter 2 and the bonding film 3 provided on the surface of colored layers 22 and partition walls 23 which the color filter 2 has, and is capable of being bonded to a transparent electrode substrate 71 (adherend). Such a bonding film 3 is a film which includes an Si framework having a random atomic structure including siloxane binding and a leaving group bonded to the Si framework. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了通过具有高尺寸精度的薄接合膜为滤色器强力地粘合到被粘物上的粘合膜提供滤色器，以提供一种有效且牢固地粘合滤色器和具有高尺寸精度的被粘物，并且提供了具有粘合膜的滤色器的图像显示装置，可靠并且显示清晰的图像。解决方案：具有接合膜的滤色器1具有滤色器2和设置在着色层22的表面上的接合膜3和滤色器2具有的分隔壁23，并且能够粘合到透明电极基板71（被粘物）。这种接合膜3是包括具有包含硅氧烷结合的随机原子结构的Si骨架和与Si骨架结合的离去基团的膜。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2009134195A Optical device and image forming apparatus 审中-公开
标题翻译：光学装置和图像形成装置
公开(公告)号：JP2009134195A
公开(公告)日：2009-06-18
申请号：JP2007311794
申请日：2007-11-30
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： OTSUKA KENJI , MATSUO YASUHIDE , WAKAMATSU KOSUKE , HIGUCHI KAZUHISA
IPC分类号： G02B26/10 , B81B3/00 , G03B21/00 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To provide an optical device which gives an optical scanning suitable for an optical scanner for an image forming apparatus such as a projector in which the freedom of design is enhanced while reducing size, and to provide an image forming apparatus. SOLUTION: The optical device 1 turns a movable plate 25 around a first axis line X by turning a driving member 22 around the first axis line X accompanied by a torsional deformation of respective first axis members 23 and 24, and at the same time, turns the movable plate 25 around a second axis line Y accompanied by a torsional deformation of respective second axis members 26 and 27, wherein the respective first axis members 23 and 24 have composing material different from that of the driving member 22, are composed of a material having smaller rigidity than that of the respective second axis members 26 and 27, and bonded to the driving member 22 via a bonding film, which includes a Si skeleton having a random atomic structure including siloxane (Si-O) bonding and a free radical bonded to the Si skeleton. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种光学装置，其提供适合于诸如投影仪的图像形成装置的光学扫描器的光学扫描，其中设计自由度在减小尺寸的同时被增强，并且提供图像形成仪器。解决方案：光学装置1通过围绕第一轴线X旋转驱动构件22并伴随着各个第一轴构件23和24的扭转变形而使可动板25绕第一轴线X旋转，并且在相同的位置随着时间的推移，可动板25围绕第二轴线Y转动，伴随着各个第二轴部件26和27的扭转变形，其中相应的第一轴部件23和24具有与驱动部件22不同的构成材料，具有比各个第二轴构件26和27刚性小的刚性材料，并且通过接合膜粘合到驱动构件22，该接合膜包括具有硅氧烷（Si-O）键合的随机原子结构的Si骨架和自由基键合到Si骨架上。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2009134029A Optical device and image forming apparatus 审中-公开
标题翻译：光学装置和图像形成装置
公开(公告)号：JP2009134029A
公开(公告)日：2009-06-18
申请号：JP2007309556
申请日：2007-11-29
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： HIGUCHI KAZUHISA , MATSUO YASUHIDE , OTSUKA KENJI , WAKAMATSU KOSUKE
IPC分类号： G02B26/08 , B81B3/00 , G02B26/10 , G02B27/18 , G03B21/00 , G03B21/16
摘要： PROBLEM TO BE SOLVED: To provide an optical device which is stably driven and an image forming apparatus furnished with the optical device. SOLUTION: The optical device 1 has: a second mass part 23 which has a light reflection part 29 and is turnably provided; a driving means which drives the second mass part 23; and a heat sink 10 bonded to a supporting part 24 via a bonding film 11, wherein the driving means turns the second mass part 23 then an object is scanned with the light reflected on the light reflection part 29. The bonding film 11 includes an Si framework having a random atomic structure including siloxane binding and a leaving group bound to the Si framework before energy is given. In such a bonding film 11, part of leaving group is detached from the Si framework by giving an energy, instead active species is developed. Thus, adhesiveness is developed on the bonding film 11 and a supporting part 24 and the heat sink 10 are bonded. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种稳定驱动的光学装置和配备有该光学装置的图像形成装置。解决方案：光学装置1具有：具有光反射部29并且可转动地设置的第二质量部23; 驱动第二质量部23的驱动装置; 以及通过接合膜11接合到支撑部24的散热器10，其中驱动装置转动第二质量部分23，然后用在光反射部分29上反射的光来扫描物体。接合膜11包括Si 框架具有包含硅氧烷结合的随机原子结构和在给出能量之前与Si骨架结合的离去基团。在这种接合膜11中，通过产生能量，离开基团的一部分与Si骨架脱离，而不是开发出活性物质。因此，在接合膜11上形成粘合性，并且支撑部件24和散热片10接合。版权所有（C）2009，JPO＆INPIT

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