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1. 发明专利

JPH05240800A 失效
公开(公告)号：JPH05240800A
公开(公告)日：1993-09-17
申请号：JP24237192
申请日：1992-09-10
申请人： PHOTON DYNAMICS INC , ISHIKAWAJIMA HARIMA HEAVY IND
发明人： FURANSOA JIEI HENRII
IPC分类号： G01M11/00 , G01N21/88 , G01N21/956 , G01R31/00 , G02F1/13 , G02F1/1362 , G09F9/00 , G09G3/00
摘要： PURPOSE: To obtain an apparatus capable of inspecting the defect of an active matrix liquid crystal display board used for a liquid crystal display panel. CONSTITUTION: The apparatus for inspecting liquid crystal display board comprises a detector C having an electro-optical element 2 and an active matrix liquid crystal display board 5, an illuminator A for emitting a light to the board 5, a photoconductor B for introducing a light perpendicularly to the element 2, and a photoreceiver for receiving the reflected light from the element 2. The illuminator A has a halogen light and a filter 31a. The element 2 has a light reflector 9 of a dielectric multilayer film. The photoconductor B is assembled with a translucent mirror 3OB at a transparent unit 30A, and installed obliquely to the optical axis. According to the apparatus, the various defects of the board 5 can be detected with high accuracy at the time of detecting.

2. 发明专利

JPH05296938A 失效
公开(公告)号：JPH05296938A
公开(公告)日：1993-11-12
申请号：JP24237092
申请日：1992-09-10
申请人： PHOTON DYNAMICS INC , ISHIKAWAJIMA HARIMA HEAVY IND
发明人： FURANSOA JIEI HENRII
IPC分类号： G01M11/00 , G01N17/04 , G01N21/88 , G01N21/956 , G01R31/00 , G02F1/13 , G06T1/00 , G09F9/00 , G09G3/00
摘要： PURPOSE: To quickly check a defect of a board by an arrangement wherein a plurality of image pickup means having a specified image pickup range are operated simultaneously, and an image pickup data obtained by controlling the polarity and the level of an inspection voltage is stored and subjected to image processing, and defective pixel information thus extracted is synthesized and displayed. CONSTITUTION: A voltage applying unit 7 applies a bias voltage of specific level, between a transparent thin film electrode 2a and each pixel electrode 13. When no defective pixel is present in a liquid crystal display panel board 5, a field corresponding to the bias voltage level is applied entirely to an electrooptic element 2. Liquid crystal molecules sealed in the element 2 are thereby arranged in same direction and a liquid crystal sheet 8 transmits a light. In other words, when a light is radiated from a light source 1, a light passed through the sheet 8 is reflected on a light reflector 9 toward CCD cameras 3-1,..., 3-N. When a defective pixel is present, the applying field at the corresponding part is varied and the transmittance of the element 2 is varied and the gray level image of a pixel is picked up by means of the cameras 3-1,..., 3-N. It is processed by an image processor 4 and defective pixel information is extracted and synthesized and the overall defective state of the board 5 is displayed and checked.

3. 发明专利

JPH0627479A METHOD AND APPARATUS FOR AUTOMATIC INSPECTION AND REPAIR OF SIMPLE MATRIX CIRCUIT PANEL 失效
公开(公告)号：JPH0627479A
公开(公告)日：1994-02-04
申请号：JP18159992
申请日：1992-06-17
申请人： PHOTON DYNAMICS INC
发明人： FURANSOA JIEI HENRII
IPC分类号： G02F1/13 , G02F1/1343 , G09G3/00 , G09G3/36 , H05K3/22
摘要： PURPOSE: To repair a panel, which is discriminated as a panel having a sufficiently small number of defects, before and after the final assembling by examining a circuit panel like an LCD panel during a process and after the final assembling to discriminate defects. CONSTITUTION: An inspection system discriminates individual defects by classifications and positions, and this information is included in a repair file. A repair system accesses this file to follow a prescribed repair method for the defect of a prescribed classification in the place. Defects of a simple matrix panel include open circuit defects and line-to-line short circuits. An automatic non-contact capacitance imaging system 110 is included in the inspection system. In the repair system, a first laser selectively removes a material to cut a line. A dispenser applies a liquid organic metal film to a faulty area. A second laser draws a line in the film to form a conductive path, thus repairing the defect.

4. 发明专利

JPH0588191A REPAIR DEVICE USING LASER AND METHOD OF BORING PASSIVATION LAYER 失效
公开(公告)号：JPH0588191A
公开(公告)日：1993-04-09
申请号：JP5601192
申请日：1992-02-07
申请人： PHOTON DYNAMICS INC
发明人： JINETSUTO ADEIEGO , FURANSOA JIEI HENRII
IPC分类号： B23K26/00 , B23K26/03 , B23K26/06 , B23K26/073 , G02F1/13 , G02F1/1343 , G02F1/1345 , G02F1/1362 , G03F1/00 , G03F1/72 , H05K3/00 , H05K3/22 , H05K3/46
摘要： PURPOSE: To provide a repair device which uses a laser suitable for repair of a large-sized matrix, such as, for example, a liquid crystal display. CONSTITUTION: This repair device executes the removal and adhesion of a material by using a repair tool consisting of an optical system 14 having a first laser which operates in association with a liquid dispenser 12 which is operated by low energy to fuse away the repair region of the target and to apply the soln. on the target region and a second laser which decomposes the soln. of the coated layer prior to the fusion and removal of the material in the repair region of the target.

5. 发明专利

JPH06167538A OPTICALLY ADDRESSABLE PROBE DEVICE OF HIGH-DENSITY CIRCUIT BOARD AND ITS UTILIZATION METHOD 失效
公开(公告)号：JPH06167538A
公开(公告)日：1994-06-14
申请号：JP7560992
申请日：1992-02-27
申请人： PHOTON DYNAMICS INC
发明人： FURANSOA JIEI HENRII
IPC分类号： G01R31/26 , H01L21/66 , H05K3/00 , H05K3/46
摘要： PURPOSE: To obtain a probe apparatus applicable to any circuit with improved reliability even if a probe density exceeds a highly specific value by providing a probe panel having photoelectrically addressable electrodes of high density and means for operating respective photoelectric switches. CONSTITUTION: The design of a circuit board 16 based on CAD (computer aided design) data 18 is loaded in a computer 20. The computer 20 operates a laser pulse sequencer 22 and a matrix address designation controller 24 by utilizing the design data from the data 18. Further, upper and lower probe matrixes 12, 14 are driven by utilizing both, and the board 16 is tested. The matrixes 12, 14 receive the test data obtained by the executed test by the board 16, and send it to a measuring controller 26. The controller 26 further senses the test result to the computer 20 for net test sequence. Respective contact electrodes can provide electrode density of 10000 electrodes/square inch to largely exceed the density of about 200 probes/square inch.

6. 发明专利

JPH05232493A 失效
公开(公告)号：JPH05232493A
公开(公告)日：1993-09-10
申请号：JP28517292
申请日：1992-09-30
申请人： PHOTON DYNAMICS INC
发明人： JINETSUTO ADEIIGO , FURANSOA JIEI HENRII , KINGU SHII SHIEN
IPC分类号： B23K26/00 , G02F1/1343
摘要： PURPOSE: To enable a repairing system for circuit and panel composed mainly of a laser to effectively deposit a conductive material to a target area by distributing a solution in the target area so that the solution can excellently bond the conductive material to the target area and can be uniformly dried. CONSTITUTION: The method for distributing a solution in a target area of the repairing system composed mainly of a laser for removing materials from circuit panels is composed of a process for discharging the solution from a nozzle 88 which is excited with ultrasonic waves while the nozzle 88 is moved relatively to the target area and the nozzle 88 generates a thin film in the target area for making preparations for the disintegration by means of a second laser. The nozzle 88 has a head 104 which vibrates at such an ultrasonic frequency that causes a standing wave across a recessed section having a fluid distributing orifice at its central part. The fluid distributing orifice is composed of a hollow tube in a channel and the hollow tube has one opening and is separated from the wall of the opening with a clearance in between. The tube is fixedly held on the plane of vibration of the head 104.

7. 发明专利

JPH06213975A APPARATUS AND METHOD FOR OBSERVATION OF VOLTAGE IN MANY POSITIONS ON SURFACE OF PANEL UNDER TEST 失效
公开(公告)号：JPH06213975A
公开(公告)日：1994-08-05
申请号：JP4047091
申请日：1991-02-13
申请人： PHOTON DYNAMICS INC
发明人： FURANSOA JIEI HENRII
IPC分类号： G01R19/00 , G01R31/302 , G01R31/308 , G01R31/309 , G02F1/03 , G09F9/00
摘要： PURPOSE: To electrooptically detect a voltage as the function of positions of many voltage sources on the surface. CONSTITUTION: When the input beam 24 of light energy is radiated on a surface 14 via an electrooptical modulator 31, the image of the voltage distribution crossing the surface 14 is extracted at many voltage test points of a panel under test. The modulator 31 causes the power modulation in the light energy of the voltage on the surface of the panel under test. The power modulation can be observed by a regional light sensor (camera) 48. The space-dependent two-dimensional power-modulated image directly displaying the spatially corresponding voltage state is directly generated on the surface of the panel under test via the power modulation.

8. 发明专利

JPH0627428A DEVICE FOR OBSERVING IMAGE AT LARGE NUMBER OF POSITION ON SURFACE DURING TEST AND METHOD OF OBSERVING CAPACITY OF ESE POSITION 失效
公开(公告)号：JPH0627428A
公开(公告)日：1994-02-04
申请号：JP6988092
申请日：1992-02-19
申请人： PHOTON DYNAMICS INC
发明人： FURANSOA JIEI HENRII
IPC分类号： G02F1/13 , G01R31/308 , G01R31/312
摘要： PURPOSE: To electrooptically detect a capacity as a function of positions of numerous conductive areas on a surface. CONSTITUTION: A simple matrix liquid crystal display(LCD) panel which has a zone of a high-conductivity material and is not assembled is placed in the vicinity of the surface of a panel (PUT) 16 which is tested at present. A two-dimensional picture of the capacity distribution on the surface is taken out by illumination of an NCAP modulator or a modulator 31 like a device, whose base is a polymer where liquid crystal is dispersed, to perform the test. For the purpose of using the surface of the panel 16, which is tested at present, to directly generate a two-dimensional and spatially dependent power modulation picture which directly represents the spatially corresponding capacity state on the surface of the panel 16, the optical modulator 31 is arranged to allow lengthwise-direction probing geometry so that the capacity is measured in the gap between faces 32 and 34 facing each other of the optical modulator 31 which performs power modulation of the light energy which can be observed through an area optical sensor (like a camera).

9. 发明专利

JPH06180353A VOLTAGE-IMAGE FORMING DEVICE AND METHOD UTILIZING ELECTRIC-OPTIC 失效
公开(公告)号：JPH06180353A
公开(公告)日：1994-06-28
申请号：JP5934892
申请日：1992-02-13
申请人： PHOTON DYNAMICS INC
发明人： FURANSOA JIEI HENRII
IPC分类号： G01R19/00 , G01R15/24 , G01R31/302 , G01R31/308 , G02F1/13 , G02F1/1343
摘要： PURPOSE: To extract a data continuously by an arrangement wherein the two-dimensional image of voltage distribution on the surface of a panel irradiates the surface with an input beam of optical energy through an electrooptical modulation means. CONSTITUTION: A modulation means 30 is directed to capture at least a part of an input beam 24 delivered from the first face 32 thereof to the means 30 and impinging on the second face 34 of the means 30 contiguous to the region 40 on the surface of 14 of a PUT 16. An exciting voltage source 15 is coupled with a conductor on the PUT 16 as a variable voltage source for the position 12 of the PUT 16. More specifically, the bias function and the exciting function are distributed between the power supplies 37, 15 while being separated. The voltage on the surface 14 or at the position 12 in the vicinity thereof interacts with the means 30 and the optical transmission of the beam 24 is varied through matching with the position 12. It is observed as a variation of spatial dependency in the parallel matching of an output beam 42 with respect to the beam 24 and the variation is proportional to the voltage at the position 12 on the surface 14.

10. 发明专利

JPH0627478A APPARATUS AND METHOD FOR AUTOMATIC INSPECTION AND REPAIR OF ACTIVE MATRIX LCD PANEL 失效
公开(公告)号：JPH0627478A
公开(公告)日：1994-02-04
申请号：JP18159892
申请日：1992-06-17
申请人： PHOTON DYNAMICS INC
发明人： FURANSOA JIEI HENRII
IPC分类号： G02F1/13 , G02F1/1343 , G02F1/1362 , G09G3/00
摘要： PURPOSE: To repair a panel, which is identified as a panel having a sufficiently small number of repairable defects, before the final assembling by examining an LCD panel in a process to measure attenuation, turning-on times, and parasitic capacities of picture elements and identifying picture element defects and line defects. CONSTITUTION: Inspection and repair systems are connected through a repair file. The inspection system identifies individual defects by classifications and positions, and this information is included in the repair file. The repair system access this file to execute a designated repair method for the defect of a given classification in a given position. An automatic contactlness voltage imaging system is included in the inspection system. An electrotechnological voltage measuring system 30 includes an electrooptical sensor 32 and detects an electric signal in a certain area without direct contacting and makes the voltage into a picture. A means which repairs defects by applying laser and materials is included in the repair system.

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