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1. 发明专利

JP2014153430A Integrated type light receiving element 审中-公开
标题翻译：集成式接收元件
公开(公告)号：JP2014153430A
公开(公告)日：2014-08-25
申请号：JP2013020736
申请日：2013-02-05
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： KURATA MASAO , AOZASA SHINICHI , NASU YUSUKE , TAMURA MUNEHISA , KASAHARA RYOICHI , ITOU MIKITAKA
IPC分类号： G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide a small-sized integrated type light receiving element having a good crosstalk characteristic.SOLUTION: An integrated type light receiving element comprises: a substrate 12; optical waveguides 17 (each of which includes a core part 16 and a clad 14) formed on the substrate 12; mirrors 18 each of which is disposed at the end of the optical waveguide 17; and a plurality of PDs 22 (each including a PD receiving part 20) arranged on the optical waveguide 17 side by side. The mirror 18 flips up light for the PDs 22 propagating the core part 16 by reflection. The integrated type light receiving element is manufactured through the steps in which the plurality of mirrors 18 corresponding to the plurality of core parts 16 respectively are each formed with an oblique mirror groove by anisotropic etching, the mirrors are formed by metal deposition, superfluous mirrors are removed by laser ablation, and the like.
摘要翻译：要解决的问题：提供具有良好串扰特性的小型集成型光接收元件。解决方案：集成型光接收元件包括：基板12; 形成在基板12上的光波导17（每个包括芯部16和包层14）每个反射镜18设置在光波导17的端部; 以及并排设置在光波导17上的多个PD 22（每个包括PD接收部20）。反射镜18翻转PD，通过反射传播核心部分16。集成型光接收元件通过以下步骤制造，其中对应于多个芯部16的多个反射镜18分别通过各向异性蚀刻形成斜镜槽，反射镜通过金属沉积形成，多余反射镜为通过激光烧蚀除去等。

2. 发明专利

JP2014153428A Integrated type photo detector 有权
标题翻译：集成型照相检测器
公开(公告)号：JP2014153428A
公开(公告)日：2014-08-25
申请号：JP2013020732
申请日：2013-02-05
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： KURATA MASAO , AOZASA SHINICHI , NASU YUSUKE , TAMURA MUNEHISA , KASAHARA RYOICHI , ITOU MIKITAKA
IPC分类号： G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide an integrated type photo detector capable of accurately forming a mirror surface by including a structure capable of monitoring information (an angle and depth of a mirror surface formed by etching) on the progress of etching in a manufacturing process (an etching process).SOLUTION: A planar light wave circuit used for forming an integrated type photo detector includes: a surface scale 30 on an optical waveguide 17 (on a clad 14); and a core scale 32 being in the clad 14 and at the same height as that of a core 16. The surface scale 30 and the core scale 32 can be observed from the top surface of the planar light wave circuit.
摘要翻译：要解决的问题：提供一种能够通过包括能够在制造过程中对蚀刻进行的监视信息（蚀刻形成的镜面的角度和深度）的结构进行准确地形成镜面的集成型光电检测器（蚀刻工艺）。解决方案：用于形成集成型光电检测器的平面光波电路包括：光波导17（包层14）上的表面刻度30; 并且铁芯标尺32位于包层14中并且与芯16的高度处于相同的高度。可以从平面光波电路的顶表面观察表面刻度30和芯标32。

3. 发明专利

JP2012156336A Optical integrated circuit 有权
标题翻译：光电集成电路
公开(公告)号：JP2012156336A
公开(公告)日：2012-08-16
申请号：JP2011014531
申请日：2011-01-26
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： WATANABE HIROSHI , NUNOTANI NOBUHIRO , KASATANI KAZUO , NASU YUSUKE
IPC分类号： H01S5/026 , G02F1/035 , H01S5/12 , H01S5/343
摘要： PROBLEM TO BE SOLVED: To perform miniaturization and to reduce power consumption in an optical integrated circuit for which a semiconductor laser and a semiconductor Mach-Zehnder modulator are integrated.SOLUTION: A first optical waveguide is connected to one end of a wavelength variable DFB laser array, a second optical waveguide is connected to the other end, a first semiconductor Mach-Zehnder modulator is connected to the first optical waveguide, and a second semiconductor Mach-Zehnder modulator is connected to the second optical waveguide. The arrangement direction of a mesa structure of the semiconductor laser is a direction optimum for regrowth to a side face of the mesa structure, and the arrangement direction of two arm waveguides provided in the semiconductor Mach-Zehnder modulator is a direction for maximizing Pockels effect to the two arm waveguides. In addition, in the optical integrated circuit related to this embodiment, the resonator structure of the semiconductor laser is configured symmetrically so as to equalize optical outputs at both ends thereof, and they are both inputted to the semiconductor Mach-Zehnder modulator without abandoning the optical output from one part.
摘要翻译：要解决的问题：在半导体激光器和半导体马赫 - 曾德调制器集成的光学集成电路中执行小型化和降低功耗。解决方案：第一光波导连接到波长可变DFB激光器阵列的一端，第二光波导连接到另一端，第一半导体马赫 - 曾德调制器连接到第一光波导，并且第二半导体马赫 - 曾德调制器连接到第二光波导。半导体激光器的台面结构的布置方向是对于台面结构的侧面的再生长最佳的方向，并且设置在半导体马赫 - 曾德调制器中的两个臂波导的布置方向是使普克尔效应最大化的方向两臂波导。此外，在本实施例的光集成电路中，对称地配置半导体激光器的谐振器结构，以使其两端的光输出均等化，并且它们都被输入到半导体马赫 - 曾德调制器而不放弃光从一部分输出。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2012042515A Manufacturing method of optical waveguide component 有权
标题翻译：光波导组件的制造方法
公开(公告)号：JP2012042515A
公开(公告)日：2012-03-01
申请号：JP2010181030
申请日：2010-08-12
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： KURATA MASAO , NASU YUSUKE , HASHIZUME YASUAKI , YAMAZAKI YASUSHI
IPC分类号： G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide a groove inclined with respect to a substrate surface and having less inclination angle change on a PLC (planar optical circuit).SOLUTION: A PLC is held inclined with respect to a substrate surface using an inclination-holding tool 20 on a bottom electrode in an etching chamber. An electrolytic control block 30 is provided in the vicinity of the PLC for controlling electric field distribution in the chamber. A groove is then formed on the PLC by anisotropic plasma etching in a state where the inclination-holing tool and the electrolytic control block are electrically connected with the bottom electrode.
摘要翻译：要解决的问题：提供相对于基板表面倾斜并且在PLC（平面光学电路）上具有较小倾斜角度变化的凹槽。解决方案：使用蚀刻室中的底部电极上的倾斜保持工具20，将PLC相对于基板表面倾斜保持。在PLC附近设置有电解控制块30，用于控制室内的电场分布。然后在倾斜孔工具和电解控制块与底部电极电连接的状态下，通过各向异性等离子体蚀刻在PLC上形成凹槽。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2012008329A Polarization independent optical waveguide device 有权
标题翻译：极化独立的光波导器件
公开(公告)号：JP2012008329A
公开(公告)日：2012-01-12
申请号：JP2010143929
申请日：2010-06-24
申请人： Nippon Telegr & Teleph Corp , Ntt Electornics Corp , Nttエレクトロニクス株式会社 , 日本電信電話株式会社
发明人： SAIDA TAKASHI , NASU YUSUKE , JINNAI HIROMITSU
IPC分类号： G02B6/12
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide device which has an optical waveguide circuit having an optical interference circuit without polarization dependence.SOLUTION: The optical waveguide device is formed on a substrate, has an input optical waveguide and an output optical waveguide, and includes at least an optical interference circuit. The optical interference circuit includes an optical multiplexing/demultiplexing circuit for demultiplexing the input, a plurality of optical delay waveguides for delaying each demultiplexed optical signal, and an optical multiplexing/demultiplexing circuit for multiplexing the light from the respective optical delay waveguides. The plurality of optical delay waveguides include inter-polarization phase difference application means which applies a phase difference π between TE polarization and TM polarization.
摘要翻译：要解决的问题：提供一种具有光波导电路的光波导器件，该光波导电路具有光学干涉电路而没有偏振依赖性。解决方案：光波导器件形成在衬底上，具有输入光波导和输出光波导，并且至少包括光学干涉电路。光干扰电路包括用于对输入进行解复用的光复用/解复用电路，用于延迟每个解复用的光信号的多个光延迟波导，以及用于对来自各个光延迟波导的光进行多路复用的光复用/解复用电路。多个光学延迟波导包括施加TE偏振和TM偏振之间的相位差π的偏振相位差施加装置。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2012004982A Optical signal processing apparatus 有权
标题翻译：光信号处理设备
公开(公告)号：JP2012004982A
公开(公告)日：2012-01-05
申请号：JP2010139870
申请日：2010-06-18
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： SAIDA TAKASHI , UMEKI TAKESHI , NASU YUSUKE , NOSAKA HIDEYUKI
IPC分类号： H04B10/516 , G02F1/377 , G02F2/00 , H04B10/07 , H04B10/556 , H04B10/58 , H04B10/61 , H04B10/67
摘要： PROBLEM TO BE SOLVED: To provide an optical signal processing apparatus for an optical signal to which multivalue phase modulation is performed, without using an AD converter.SOLUTION: An optical signal processing apparatus has an optical input port 1, and four-stage optical phase receiving means cascade-connected to the optical input port 1. Optical phase receiving means 5a of a first stage has optical tap means 2a, and optical phase determination means 4a connected to an output of the tap optically. The optical tap means 2a divides an optical signal into a tap output and a main output. Optical phase receiving means 5b of a second stage has optical frequency doubler means 3a, optical tap means 2b connected to the output of the optical frequency doubler means 3a optically, and optical phase determination means 4b connected to the output of the tap optically. Optical phase receiving means 5c of a third stage is similar to the second stage. Optical phase receiving means 5d of a fourth stage as the last stage has optical frequency doubler means 3c, and optical phase determination means 4d connected to the output of the optical frequency doubler means 3c optically. Each optical frequency doubler means doubles an optical frequency and an optical phase.
摘要翻译：要解决的问题：提供一种用于执行多值相位调制的光信号的光信号处理装置，而不使用AD转换器。光信号处理装置具有光输入端口1和级联连接到光输入端口1的四级光相位接收装置。第一级的光相位接收装置5a具有光分接装置2a，以及光学相位确定装置4a，其连接到分接头的输出。光抽头装置2a将光信号划分为抽头输出和主输出。第二级的光相位接收装置5b具有光学倍频装置3a，光学抽头装置2b，光学倍率装置3a的输出连接光学装置2b，光学相位确定装置4b以光学方式连接到分接头的输出端。第三级的光相位接收装置5c类似于第二级。作为最后一级的第四级的光学相位接收装置5d具有光学倍频装置3c，光学相位确定装置4d以光学方式连接到光学倍频装置3c的输出端。每个光学倍频器意味着使光学频率和光学相位加倍。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2014186264A Manufacturing method of optical function element 有权
标题翻译：光学功能元件的制造方法
公开(公告)号：JP2014186264A
公开(公告)日：2014-10-02
申请号：JP2013062708
申请日：2013-03-25
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： AOZASA SHINICHI , TAMURA MUNEHISA , KURATA MASAO , NASU YUSUKE , ITOU MIKITAKA , KASAHARA RYOICHI
IPC分类号： G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical function element matching the crystal surface orientation of an optical circuit substrate and the crystal surface orientation of a function element substrate with high accuracy.SOLUTION: The method includes the steps of: forming a Si cleavage surface 56 in a Si substrate 54 by cleavage; forming fastening parts 58-1 and 58-2 on the Si substrate 54 on the basis of the Si cleavage surface 56; forming an InP cleavage surface 52 in an InP substrate 50 by cleavage; and performing positioning of the Si substrate 54 and the InP substrate 50 by contacting the InP cleavage surface 52 with a surface parallel and/or vertical to the Si cleavage surface 56 held by the fastening parts 58-1 and 58-2.
摘要翻译：要解决的问题：提供一种以高精度提供与光电路基板的晶体表面取向匹配和功能元件基板的晶体表面取向的光学功能元件的制造方法。解决方案：该方法包括以下步骤： Si裂解表面56在Si衬底54中的裂解; 基于Si裂解表面56在Si衬底54上形成紧固部件58-1和58-2; 通过切割在InP衬底50中形成InP解理面52; 并且通过使InP解理表面52与由紧固部件58-1和58-2保持的Si解理面56平行和/或垂直的表面接触来执行Si衬底54和InP衬底50的定位。

8. 发明专利

JP2014052533A Light reception module 有权
标题翻译：光接收模块
公开(公告)号：JP2014052533A
公开(公告)日：2014-03-20
申请号：JP2012197399
申请日：2012-09-07
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： NASU YUSUKE , NAKAJIMA FUMITO , SAIDA TAKASHI , OGAWA IKUO
IPC分类号： G02B6/42 , G02B6/122 , H01L31/02 , H01L31/0232
摘要： PROBLEM TO BE SOLVED: To provide a light reception module that has signal characteristic deterioration suppressed by preventing characteristic deterioration at both of two connection points between an optical circuit and a light reception element and between the light reception element and an electric amplifier circuit without growing in size.SOLUTION: A light reception module 1 comprises: an optical circuit 10 that outputs an optical signal input from an input waveguide 9 from a waveguide formed at a tilt to a vertical direction of an output edge surface by a predetermined angle θwg; a lens array 12 that is provided on the output edge surface of the optical circuit such that an input surface is in parallel with the output edge surface of the optical circuit and outputs a light signal output from the optical circuit from a lens having a lens center axis formed at a tilt to the vertical direction of an output surface; a light reception element 14 that is arranged such that a light reception surface is in parallel with the output surface of the lens array, receives a light signal output from the lens array by the light reception surface to photoelectrically convert the light signal to an electric signal, and outputs the electric signal; and a high frequency electric circuit 16 that is arranged in proximity to the light reception element, performs electric signal processing of the electric signal output from the light reception element and outputs the processed electric signal.
摘要翻译：要解决的问题：提供一种光接收模块，其通过防止在光电路和光接收元件之间的两个连接点以及光接收元件和电放大器电路之间的特性劣化而抑制信号特性劣化，而不会增长光接收模块1包括：光电路10，其将从输入波导9输入的光信号从输出边缘表面的倾斜垂直方向输出预定角度; wg; 设置在光电路的输出边缘表面上的透镜阵列12，使得输入表面与光电路的输出边缘表面平行，并从具有透镜中心的透镜输出从光电路输出的光信号轴线以与输出表面的垂直方向倾斜的方式形成; 光接收元件14被布置为使得光接收表面与透镜阵列的输出表面平行，接收由光接收表面从透镜阵列输出的光信号，以将光信号光电转换成电信号，并输出电信号; 以及布置在光接收元件附近的高频电路16，对从光接收元件输出的电信号进行电信号处理，并输出经处理的电信号。

9. 发明专利

JP2013007797A Plane type optical wave circuit 有权
标题翻译：平面型光波导路
公开(公告)号：JP2013007797A
公开(公告)日：2013-01-10
申请号：JP2011138924
申请日：2011-06-22
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社 , Ntt Electornics Corp , Nttエレクトロニクス株式会社
发明人： NASU YUSUKE , KASAHARA RYOICHI , OGAWA IKUO , SUZUKI MASAYA , EBISAWA FUMIHIRO
IPC分类号： G02B6/122 , G02B6/42 , H01L31/0232
CPC分类号： G02B6/4267 , G02B6/12002 , G02B6/12004 , G02B6/12033 , G02B6/3508 , G02B6/4292 , G02B2006/12159
摘要： PROBLEM TO BE SOLVED: To suppress both of optical axis deviation to be generated due to temperature variation and characteristic deterioration of an optical functional circuit in an integrated optical receiver or optical transmitter.SOLUTION: A plane type optical wave circuit has: a substrate; and a waveguide type optical functional circuit which consists of a material different from that of the substrate, and is formed on the substrate, includes; a waveguide area which contacts one side where an outgoing end face of an optical waveguide to which outgoing light from the optical functional circuit is emitted or an incident end face of the optical waveguide on which incident light to the optical functional circuit is made incident is formed, and only the optical waveguide is formed, and fixed to a mount for fixation which holds the plane type optical wave circuit only on the bottom of the substrate of a part where the waveguide area is formed.
摘要翻译：要解决的问题：抑制由于集成光接收机或光发射机中的光功能电路的温度变化和特性劣化而产生的光轴偏差。解决方案：平面型光波电路具有：基板; 以及由与基板不同的材料构成并形成在基板上的波导型光功能电路，包括：形成与发出来自光功能电路的出射光的光波导的出射端面的一侧接触的波导区域或入射到光功能电路的入射光的光波导的入射端面入射的波导区域并且仅形成光波导，并且固定到用于固定的安装座，其仅将平面型光波电路仅保持在形成波导区域的部分的基板的底部。版权所有（C）2013，JPO＆INPIT

10. 发明专利

JP2012247581A Phase shifter on semiconductor substrate, and polarization separator and polarization synthesizer using the same 有权
标题翻译：半导体基板上的相变和偏振分离器和使用其的极化合成器
公开(公告)号：JP2012247581A
公开(公告)日：2012-12-13
申请号：JP2011118502
申请日：2011-05-26
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： WATANABE HIROSHI , NASU YUSUKE , OGISO YOSHIHIRO
IPC分类号： G02F1/025 , G02B6/12 , G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide a phase shifter on a semiconductor substrate, that can adjust birefringence with high accuracy.SOLUTION: A PBS 100 includes a first optical coupler 110, a birefringence application part 120, a birefringence adjustment part 130, and a second optical coupler 140 on a semiconductor substrate 101 having a sphalerite type structure. The birefringence application part 120 and the birefringence adjustment part 130 function as a phase shifter. A first electrode 102D is disposed on a fifth waveguide part 102C of a first arm waveguide 102, and a second electrode 103D is disposed on a second inclination part of a fourth waveguide part 103B of a second arm waveguide 103. A first direction in which the first electrode 102D is disposed and a second direction in which the second electrode 103D is disposed are directions where, when unit voltage is applied to the both electrodes, phase difference between the upper and lower arm waveguides to TM polarization is suppressed and phase difference between the upper and lower arm waveguides to TE polarization is increased in the birefringence adjustment part 130.
摘要翻译：要解决的问题：在半导体衬底上提供可以高精度地调节双折射的移相器。解决方案：PBS 100包括具有闪锌矿型结构的半导体衬底101上的第一光耦合器110，双折射施加部分120，双折射调节部分130和第二光耦合器140。双折射施加部分120和双折射调节部分130用作移相器。第一电极102D设置在第一臂波导102的第五波导部分102C上，第二电极103D设置在第二臂波导103的第四波导部分103B的第二倾斜部分上。第一方向设置第一电极102D，并且设置第二电极103D的第二方向是当对两个电极施加单位电压时抑制上下臂波导之间的相位差与TM极化的方向被抑制，并且在双折射调节部分130中，上和下臂波导到TE极化增加。（C）2013，JPO和INPIT

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