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    • 4. 发明专利
    • Nano thin film composite structure and manufacturing method thereof
    • 纳米薄膜复合结构及其制造方法
    • JP2006255869A
    • 2006-09-28
    • JP2005080646
    • 2005-03-18
    • Nagoya Institute Of Technology国立大学法人 名古屋工業大学
    • TANAKA SHUNICHIROMIWA HIROTAKATAKIOTO ATSUSHI
    • B82B1/00B82B3/00
    • PROBLEM TO BE SOLVED: To provide a nano thin film composite structure formed on a substrate by ultrafine particles, having a new structure not obtained in the past.
      SOLUTION: In the state where masks formed of target material provided with predetermined slits are disposed at a distance ranging from 10 μm to 1 mm, high energy beams are radiated to the inner walls of the slits in the mask from the oblique direction, thereby separating the ultrafine particles formed of component atoms or component molecules of the mask. The separated ultrafine particles are caused to adhere to a part outside of parts corresponding to the slits of the mask in the substrate, thereby forming a nano thin film part, and simultaneously caused to adhere to the parts corresponding to the slits of the mask in the substrate, thereby forming an accumulated film part mainly composed of ultrafine particles larger than the ultrafine particles forming the nano thin film part and having a larger thickness than the nano thin film part. Thus, an intended nano thin film composite structure is obtained.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供通过超细颗粒在基板上形成的纳米薄膜复合结构,具有过去未获得的新结构。 解决方案:在设置有预定狭缝的目标材料形成的掩模设置在10μm至1mm的距离的状态下,高能束从倾斜方向辐射到掩模中的狭缝的内壁 从而分离由成分原子或掩模的成分分子形成的超微粒子。 使分离的超细颗粒粘附到与基板中的掩模的狭缝相对应的部分的外部的部分,从而形成纳米薄膜部分,并同时使其粘附到与掩模的狭缝相对应的部分 从而形成主要由超过形成纳米薄膜部分的超微粒子的超微粒子构成并且具有比纳米薄膜部分更大的厚度的聚集膜部分。 因此,获得了预期的纳米薄膜复合结构。 版权所有(C)2006,JPO&NCIPI
    • 5. 发明专利
    • Nano composite structure and its manufacturing method
    • 纳米复合结构及其制造方法
    • JP2006142394A
    • 2006-06-08
    • JP2004331718
    • 2004-11-16
    • Nagoya Institute Of Technology国立大学法人 名古屋工業大学
    • TANAKA SHUNICHIROMIKI YOSHIKI
    • B82B1/00B82B3/00
    • PROBLEM TO BE SOLVED: To provide a nano composite structure having a new structure expected for application to various uses.
      SOLUTION: Second particulates consisting of constituent atoms or constituent molecules leaving from a target material are made exist on a substrate in a form of linking each other or a form of a nanometer film by irradiation of a target material placed on the substrate with a high-energy beam. After that, the simple substance of a first particulates or the aggregate consisting of a plurality of them is arranged on the group of the second particulates and the target material is irradiated with the high-energy beam again. By this process, the nano composite structure is obtained which is covered with a surface skin layer in a form of the second particulates smaller than the first particulates linking each other or in a form of a nanometer film constituted of the second particulates.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供具有预期用于各种用途的新结构的纳米复合结构。 解决方案:由构成原子或从靶材料构成的成分分子组成的第二颗粒通过照射放置在基板上的靶材料而以彼此相互连接或形成纳米膜的形式存在于基板上, 高能束。 之后,将第一粒子的简单物质或由多个粒子组成的骨料排列在第二粒子群上,再次用高能束照射靶物质。 通过该方法,获得纳米复合结构,其被第二颗粒形式的表面表层覆盖,第二颗粒小于彼此连接的第一颗粒或由第二颗粒构成的纳米膜的形式。 版权所有(C)2006,JPO&NCIPI
    • 9. 发明专利
    • Sample fixing fixture
    • 样品固定装置
    • JP2006261070A
    • 2006-09-28
    • JP2005080647
    • 2005-03-18
    • Nagoya Institute Of Technology国立大学法人 名古屋工業大学
    • TANAKA SHUNICHIROMIWA HIROTAKA
    • H01J37/20G01N1/28H01J37/30
    • PROBLEM TO BE SOLVED: To provide a sample fixing fixture enabling the irradiation of an ion beam at an irradiation angle larger than the upper limit of an irradiation angle peculiar to an ion milling device.
      SOLUTION: This sample fixing fixture is used in the ion milling device capable of irradiating the ion beam to a reference plane at a prescribed irradiation angle, and composed of a sample holding member to hold the sample to which the ion beam is irradiated, a pedestal fixed to a sample holding stand in the ion milling device, and a support member to support the sample holding member on the pedestal by connecting the sample holding member with the pedestal. The sample holding member is mounted to the pedestal by the support member in an inclined state with respect to the reference plane.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供能够以大于离子铣削装置特有的照射角度的上限的照射角照射离子束的样品固定夹具。 解决方案:该样品固定夹具用于能够以规定的照射角将离子束照射到基准面的离子研磨装置,并由样品保持部件构成,以保持照射离子束的样品 固定在离子研磨装置中的样品保持架的基座,以及通过将试样保持构件与基座连接而将试样保持构件支撑在基座上的支撑构件。 样品保持构件通过支撑构件相对于参考平面以倾斜状态安装到基座。 版权所有(C)2006,JPO&NCIPI
    • 10. 发明专利
    • Micro/nano layered structure and manufacturing method thereof
    • MICRO / NANO层状结构及其制造方法
    • JP2006255870A
    • 2006-09-28
    • JP2005080651
    • 2005-03-18
    • Nagoya Institute Of Technology国立大学法人 名古屋工業大学
    • TANAKA SHUNICHIROMIWA HIROTAKA
    • B82B1/00B82B3/00G21K5/04G21K5/08
    • PROBLEM TO BE SOLVED: To provide a micro/nano layered structure formed of ultrafine particles on a substrate, having a new structure not obtained in the past.
      SOLUTION: In the state where masks 4 formed of target material provided with predetermined slits are disposed at a distance ranging from 5 to 500 nm, high energy beams 8 are radiated to the inner walls 6a of the slits 6 in the mask from the oblique direction, thereby separating the ultrafine particles 10 formed of component atoms or component molecules of the mask. The separated ultrafine particles are caused to adhere to parts corresponding to the slits of the mask in the substrate, thereby obtaining the micro/nano layered structure 12 having a form of projecting toward the upside of the substrate.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供在基板上由超细颗粒形成的微/纳层状结构,具有过去未获得的新结构。 解决方案:在设置有预定狭缝的目标材料形成的掩模4设置在5至500nm的距离的状态下,高能量束8被辐射到掩模中的狭缝6的内壁6a, 倾斜方向,从而分离由成分原子形成的超微粒10或掩模的成分分子。 使分离的超细颗粒粘附到与基板中的掩模的狭缝相对应的部分,从而获得具有向基板的上侧突出的形式的微/纳米层状结构12。 版权所有(C)2006,JPO&NCIPI