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1. 发明专利

JPH0642487B2 失效
公开(公告)号：JPH0642487B2
公开(公告)日：1994-06-01
申请号：JP13434389
申请日：1989-05-26
申请人： NIPPON STEEL CORP , NITTETSU DENSHI KK
发明人： SAITO HAJIME , HARADA HIROBUMI , SUZUKI KENICHI , HATANAKA HIROYUKI
IPC分类号： H01L21/322

2. 发明专利

JPH02312241A MANUFACTURE OF SILICON WAFER 失效
公开(公告)号：JPH02312241A
公开(公告)日：1990-12-27
申请号：JP13434389
申请日：1989-05-26
申请人： NIPPON STEEL CORP , NITTETSU DENSHI KK
发明人： SAITO HAJIME , HARADA HIROBUMI , SUZUKI KENICHI , HATANAKA HIROYUKI
IPC分类号： H01L21/322
摘要： PURPOSE:To make a wafer superior in a gettering power and hard in warp at the time of a heat treatment, and to contrive the improvement of the yield of the formation of devices by a method wherein the temperature at a time when the wafer is made to heat up in a stepwise manner in order from a low temperature and a heating-up temperature are rationalized. CONSTITUTION:A silicon wafer is subjected to oxygen out diffusion heat treatment at a temperature of 1000 deg.C or higher. Then, after the wafer is corrected for five hours or more at a temperature region between 550 deg.C and 630 deg.C, it is made to heat up to a temperature of the following stage of a temperature difference of 10 deg.C to 40 deg.C at a heating-up speed less than 0.1 deg.C/minute. A correction is repeated for two hours or more, the wafer is made to heat up in order up to a temperature region of 630 deg.C to 70 deg.C and a multistage treatment is performed by the correction. After that, a high-temperature heat treatment is performed in a temperature range of 950 deg.C to 1100 deg.C. Thereby, even after the wafer goes through a heat treatment for the formation of a device, it has a sufficient gettering power, a wafer hard to swarp is obtained and the yield of the formation of various silicon IC devices can be improved.

3. 发明专利

JPH07103898A DETERMINATION METHOD FOR GLOW DISCHARGE SPECTROCHEMICAL ANALYSIS 失效
公开(公告)号：JPH07103898A
公开(公告)日：1995-04-21
申请号：JP24553293
申请日：1993-09-30
申请人： NIPPON STEEL CORP
发明人： SUZUKI SHIGERU , YAMAZAKI SHUICHI , SUZUKI KENICHI , MIZUNO KAORU
IPC分类号： G01N21/67
摘要： PURPOSE:To provide a determination method for glow discharge spectrochemical analysis excellent in the quantitative properties of bulk concentration of an alloy and the distribution thereof in the depth direction from the surface of the alloy. CONSTITUTION:Sputtering rate, emission intensity, discharge voltage and discharge current of a standard sample are measured under constant current mode or constant voltage mode. Bulk concentration of an allay or the concentration of the alloy in the depth direction from the surface is then determined based on the relationship between the emission intensity obtained from a sample to be measured and the sputtering time using an effective emission yield calculated based on the measurements.

4. 发明专利

JPH0371957B2 失效
公开(公告)号：JPH0371957B2
公开(公告)日：1991-11-15
申请号：JP29928685
申请日：1985-12-28
申请人： NIPPON STEEL CORP
发明人： YOSHIHARA SEISHIRO , KAWANAMI TAKAO , SUZUKI KENICHI , KAKO YUKIHIRO
IPC分类号： B23K20/04 , B23K20/00

5. 发明专利

JPH0362511B2 失效
公开(公告)号：JPH0362511B2
公开(公告)日：1991-09-26
申请号：JP15009187
申请日：1987-06-18
申请人： NIPPON STEEL CORP
发明人： HASE TAIJI , OGAWA TADAO , SOEDA SEIICHI , KONDO MASAYOSHI , SUZUKI KENICHI
IPC分类号： B23K20/00

6. 发明专利

JPS61269039A APPARATUS FOR PREPARING OPPOSED FRACTURED SECTIONS UNDER HIGH VACUUM 失效
公开(公告)号：JPS61269039A
公开(公告)日：1986-11-28
申请号：JP11069885
申请日：1985-05-23
申请人： NIPPON STEEL CORP
发明人： YAMAMOTO MITSUJI , OTSUBO TAKASHI , NISHISAKA KOICHI , SUZUKI KENICHI , TAKIMOTO KENICHI
IPC分类号： G01N1/06 , G01N1/00
摘要： PURPOSE:To enable analysis by obtaining two opposed fractured sections forming a grain boundary in a clean state, by feeding out two specimen pieces on a specimen holder to the outside of a container along with the specimen holder by a specimen feeding fork. CONSTITUTION:A specimen 14 is mounted between an upper specimen receiving stand 5 and a lower specimen receiving stand 6. A hydraulic cylinder 11 is controlled to fall the lower specimen receiving stand 6 and load is preliminarily detected by a load cell 10 and the cylinder 11 is stopped immediately before load is applied to the specimen 14. The hydraulic cylinder 11 is set to a predetermined strain speed to start a test and the specimen 14 is broken. After breaking, an upper side specimen holder 15 is detached by a specimen feeding fork 16 and the specimen 14 is delivered to a vacuum carrier fork 17 at a specimen delivery position. A lower side specimen holder 18 is raised to the specimen replacing position on the upper surface of a test stand 1 by controlling the hydraulic cylinder 11. The lower side specimen holder 18 is detached in the same way as the upper side specimen holder 15 by the specimen feed fork 16 to deliver the specimen to a vacuum carrier fork 17.

7. 发明专利

JPS60185143A SPECTROCHEMICAL ANALYSIS METHOD USING GLOW DISCHARGE 失效
公开(公告)号：JPS60185143A
公开(公告)日：1985-09-20
申请号：JP4009784
申请日：1984-03-02
申请人： NIPPON STEEL CORP
发明人： SUZUKI KENICHI , NISHISAKA KOUICHI , OOTSUBO TAKASHI
IPC分类号： G01N21/67
摘要： PURPOSE:To measure the composition and the thickness of a surface layer, by measuring the depth profile of the surface of a solid by spectrochemical analysis using glow discharge, converting the sputtering time into the thickness by matrix effect correction, and converting light emitting intensity into element concentration. CONSTITUTION:The depth profile of the surface of a solid, which is expressed by the sputtering time and the light emitting intensity of an element, is measured by spectrochemical analysis using glow discharge. The depth profile is divided at every unit time. The light emitting intensity of each element is converted into the concentration of each element by correcting the mutual interference effects of coexisting elements, and the composition is determind. Then, based on the determined composition, the sputtering speed is corrected, and the thickness at every unit time is determined. Based on the obtained composition and the thickness, the sputtering weight at the part of the unit time is determined. Thus the element concentration, thickness and weight of the surface layer of the solid are determined.

8. 发明专利

JPS5914858B2 JPS5914858B2 - 失效
公开(公告)号：JPS5914858B2
公开(公告)日：1984-04-06
申请号：JP13074480
申请日：1980-09-22
申请人： Nippon Steel Corp
发明人： SUKAI TETSUYA , SUZUKI KENICHI , SUGANO HIDEO
IPC分类号： G01N27/62 , H01J49/20 , H01J49/26 , H01J49/32
CPC分类号： H01J49/20

9. 发明专利

JPS5757461A Magnetic field setting method for mass spectrometer 失效
标题翻译：用于大量光谱仪的磁场设置方法
公开(公告)号：JPS5757461A
公开(公告)日：1982-04-06
申请号：JP13074480
申请日：1980-09-22
申请人： Nippon Steel Corp
发明人： SUKAI TETSUYA , SUZUKI KENICHI , SUGANO HIDEO
IPC分类号： G01N27/62 , H01J49/20 , H01J49/26 , H01J49/32
CPC分类号： H01J49/20
摘要： PURPOSE:To improve the uniqueness in corresponding relation between a magnetic field value and coil current by hunting the coil current near the objective magnetic field value and bringing the coil current close to the objective magnetic field value while the amplitude of the hunting is diminished gradually. CONSTITUTION:Secondary ions generated from a sample 1 are accelerated with an acceleration electrode 2, detected with an ion detector 10 through an electric field 3 and a magnetic field 4, and the results are output on an output device 12 through an arithmetic unit 11. On the other hand, all mass numbers required to analyse are obtained by calculation or measurement, and are previously memorised in a memory 13. When, the magnetic field 4, a magnetic field detecting element 5, magnetic field detecting circuit 6, magnetic field controller 8, and magnetic field generating circuit 9 form a feedback loop which is to obtain the magnetic field intensity corresponding to output of a magnetic field setting devive 7, a coil current is hunted near the objective magnetic field value by its dynamic characteristics, and the coil current is brought rapidly close to the objective magnetic field value while the amplitude of hunting is being gradually diminished.
摘要翻译：目的：通过在线圈电流接近目标磁场值的同时提高磁场值与线圈电流对应关系的独特性，并使线圈电流接近目标磁场值，同时逐渐减小振幅。构成：从样品1产生的二次离子用加速电极2加速，用离子检测器10通过电场3和磁场4检测，结果通过运算单元11输出到输出装置12上。另一方面，分析所需的所有质量数均通过计算或测量获得，并且预先存储在存储器13中。当磁场4为磁场检测元件5，磁场检测电路6，磁场控制器如图8所示，磁场产生电路9形成反馈回路，其是为了获得与磁场设定偏差7的输出相对应的磁场强度，线圈电流通过其动态特性被追踪到目标磁场值附近，线圈电流迅速接近目标磁场值，同时狩猎的幅度逐渐减弱。

10. 发明专利

JPS5668513A ROLLING METHOD OF COPPERRCONTG* STEEL 失效
公开(公告)号：JPS5668513A
公开(公告)日：1981-06-09
申请号：JP14633179
申请日：1979-11-12
申请人： NIPPON STEEL CORP
发明人： EZAKA KAZUAKI , SUZUKI KENICHI , KATSUYAMA NORIO
IPC分类号： B21B3/00 , C21D8/00 , C21D8/02
摘要： PURPOSE:To lower heat original unit and lower the cost by limiting the heating extraction temp. and furnace residence time of a slab to predetermined ones, and hot rolling the same in the state that Cu is remained in scale, thereby limiting the copper at the base iron-scale interface of the hot coil to a predetermined content. CONSTITUTION:In rolling a copper-contg. steel, the slab is heated at

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