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1. 发明专利

JP2002328306A ULTRAVIOLET MICROSCOPE AND OBSERVATION METHOD USING THE SAME 失效
公开(公告)号：JP2002328306A
公开(公告)日：2002-11-15
申请号：JP2001132239
申请日：2001-04-27
申请人： NIKON CORP , TOSHIBA CORP
发明人： TSURUMUNE TOKUJI , MIZUNO JIRO , ITO SHINICHI , TAKAHASHI RIICHIRO , EMA TATSUHIKO
IPC分类号： G02B21/00 , G02B21/16 , G02B21/26 , G02B21/36
摘要： PROBLEM TO BE SOLVED: To provide an ultraviolet microscope capable of for reducing a sample damage caused on the occasion of ultraviolet rays observation and to provide an observation method using the same. SOLUTION: The ultraviolet microscope is provided with ultraviolet rays observation means (21-26, 41 and 43) by which a sample (11) is observed based on ultraviolet rays, gas supply means (51-57) by which an inert gas is supplied between the ultraviolet rays observation means and the sample, and a timing control means (13) which controls the inert gas supply timing by the gas supply means. In addition, the timing control means makes the gas supply means preliminarily supply the inert gas before observing the sample ultraviolet rays, and also fully supply the inert gas at least during the time of observing the sample with ultraviolet rays.

2. 发明专利

JP2000046716A APPROACH METHOD OF CANTILEVER AND SCANNING PROBE MICROSCOPE USING IT 失效
公开(公告)号：JP2000046716A
公开(公告)日：2000-02-18
申请号：JP21168198
申请日：1998-07-28
申请人： NIKON CORP
发明人： YAMAMOTO TAKUMA , NAKANO KATSUSHI , TSURUMUNE TOKUJI
IPC分类号： G01B7/28 , G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/02 , G01Q60/32 , G01Q60/38 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To allow a cantilever to softly approach a sample speedily by changing voltage being applied to a piezo drive element, by allowing the cantilever to take shelter from the sample, by changing the voltage again, and by allowing the cantilever to approach the sample. SOLUTION: When the measurement of a place on a sample is completed, voltage that specifies a set point from a computer 34 is changed, feedback is applied from a state where a cantilever approaches the sample so that the cantilever is vibrated by larger amplitude, and a piezo drive element 38 allows the cantilever to take shelter from the sample. Then, scanning in the direction of the plane of the sample is stopped, and the cantilever is moved to the next measurement place of the sample. In this case, to prevent a probe from being instantaneously pushed into the sample due to the abrupt approach of the cantilever to the sample, the gain of an amplifier 35 is set lower than that on measurement, and set point specified voltage is returned to voltage on measurement. When approach is completed, the gain of the amplifier 35 is returned to a setting value on measurement, and the scanning of the probe is restarted.

3. 发明专利

JP2002023062A CONTROL METHOD FOR OPTICAL ILLUMINATION SYSTEM FOR LASER MICROSCOPE 失效
公开(公告)号：JP2002023062A
公开(公告)日：2002-01-23
申请号：JP2000206715
申请日：2000-07-07
申请人： NIKON CORP
发明人： TSURUMUNE TOKUJI , TAKENAKA HIDEKAZU
IPC分类号： G02B21/16
摘要： PROBLEM TO BE SOLVED: To provide a control method for optical illumination system for DUV (deep ultraviolet) laser microscope, by which highly accurate image observation or image measurement can be performed by easily removing luminosity non- uniformity inside an illumination field to occur in a DUV laser microscope. SOLUTION: On an image processing board 20 of a personal computer(PC) 18, an analog image signal from a CCD(charge coupled device) camera 17 is converted to a digital signal and processing for making into pseudo color is applied to this digital image signal. Namely, concerning the digital image signal having no color information, the luminance values of all pixels in the image are digitized and R, G and B planes are assigned respectively to the luminance values for each of pixels of the image in an LUT, that the color display mechanism of the PC 18 has. The image thus made into pseudo color is displayed on a monitor 21. Thus, luminance non-uniformity in the illumination field can be recognized visually and easily and accurately discriminated.

4. 发明专利

JP2010266709A Laser scanning microscope, control method and program thereof 有权
标题翻译：激光扫描显微镜，其控制方法和程序
公开(公告)号：JP2010266709A
公开(公告)日：2010-11-25
申请号：JP2009118295
申请日：2009-05-15
申请人： Nikon Corp , 株式会社ニコン
发明人： MANO SHIGEYUKI , TSURUMUNE TOKUJI
IPC分类号： G02B21/00
摘要： PROBLEM TO BE SOLVED: To perform effective analysis with few resources.
SOLUTION: First, a set XYZ scanning area A
XYZ is preview-scanned (S12), preview images I
P1 to I
Pn are acquired (S13), and crop areas A
C1 to A
Cn are set (S15 to S18). Next, the crop areas A
C1 to A
Cm calculated for main-scanning based on the set crop areas A
C1 to A
Cn in each Z step are main-scanned (S19, S20), then, crop images I
C1 to I
Cm are acquired. Then, a three-dimensional image is formed of the acquired crop images I
C1 to I
Cm , then, the effective analysis can be performed with few resources. The present invention is applicable to a confocal microscope to acquire three-dimensional data of a sample S.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：以少量资源进行有效的分析。解决方案：首先，预览扫描（S12）预设扫描区域A XYZ ，将预览图像I P1 到I Pn （S13），裁剪区域A C1 到A Cn （S15〜S18）。接下来，基于设定的作物区域A C1 到A Cn计算的用于主扫描的作物区域A C1 到A Cm 对每个Z步骤中的进行主扫描（S19，S20），然后获取裁剪图像I C1 到I Cm 。然后，由获取的作物图像I C1 形成三维图像到I Cm ，则可以以很少的资源执行有效分析。本发明可应用于共焦显微镜以获取样品S的三维数据。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2002023063A ULTRAVIOLET MICROSCOPE AND CONTROL METHOD THEREFOR 失效
公开(公告)号：JP2002023063A
公开(公告)日：2002-01-23
申请号：JP2000206230
申请日：2000-07-07
申请人： NIKON CORP
发明人： TSURUMUNE TOKUJI , TAKENAKA HIDEKAZU
IPC分类号： G01J1/42 , G02B5/22 , G02B21/16
摘要： PROBLEM TO BE SOLVED: To provide a ultraviolet microscope, with which damage to occur on an observation object because of the irradiation with ultraviolet rays can be reduced when inaging the observation object by using the ultraviolet microscope and to provide a control method therefor. SOLUTION: In the search stage of an observation position, an ND(neutral density) filter 12 is inserted on the optical path of DUV(deep ultraviolet) laser beam, the quantity of that light is reduced to the prescribed quantity of light within an allowable value, and damage on the irradiated surface of a sample caused by the Koehler illumination of DUV laser light is reduced. At such a time, the frame rate of a CCD(charge coupled device) camera 16 is decelerated by a frame rate control part 21, the analog image signal of an image picked up by the CCD camera 16 is amplified by an amplifier circuit 19, and the luminance gradation of the image made into digital signal is shifted to the side of lighter gradation by a gradation shift processing circuit 20. Thus, the brightness and contrast of the picture displayed on a monitor 26 are increased and the reduction of picture quality with the reduction of the quantity of DUV laser beam is complemented.

6. 发明专利

JPH08160056A PROBE HOLDER AND PROBE MICROSCOPE USING IT 失效
公开(公告)号：JPH08160056A
公开(公告)日：1996-06-21
申请号：JP30230094
申请日：1994-12-06
申请人： NIKON CORP
发明人： TSURUMUNE TOKUJI
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/24 , G01Q70/02 , G01Q90/00
摘要： PURPOSE: To prevent the cantilever of a probe holder from damaged or contaminated by covering an opening part and the cantilever with a shielding member and, when a sample surface is measured, moving or dismounting it. CONSTITUTION: When a micro-cantilever chip 102 is installed, the holder body 201 is provided with a mounting part of a chip 102, in such a way that a lever part and a stylus protrude enough from an opening part 204. And, the body 201 is provided with a guide groove 203 in the longitudinal direction, and, protruding part of a shielding cover 202 having a U-shape in cross section is slidably fitted in the groove 203. The cover 202 does not drop out easily from the body 201 thanks to the elastic force and frictional force of itself, integrated into the body 201. This height is, when the chip 102 is mounted, made higher than the height between the upper face of the body 201 and the tip of the stylus of the cantilever 103, and the width and depth is made larger than the opening part 204, so that the opening part 204 and the lever 103 are covered. And then, by sliding the cover 202 along the groove 203 for dismounting, or shifting it for the lever 103 exposed, a sample surface is measured.

7. 发明专利

JP2009116031A Photodetection unit and microscope 审中-公开
标题翻译：光电单元和显微镜
公开(公告)号：JP2009116031A
公开(公告)日：2009-05-28
申请号：JP2007288786
申请日：2007-11-06
申请人： Nikon Corp , 株式会社ニコン
发明人： TSURUMUNE TOKUJI , AOSHIMA MIKIO
IPC分类号： G02B21/00
摘要： PROBLEM TO BE SOLVED: To provide a photodetection unit etc., configured to replace optical elements while preventing external light from entering detection elements.
SOLUTION: Regarding the photodetection unit 6 including at least one of optical elements 20, 21 and 22 for separating observation light into prescribed wavelength components, and a plurality of photodetecting elements 23, 24, 25 and 26 for detecting the observation light separated by the optical elements 20, 21 and 22 for every wavelength component, the unit 6 includes: movable holding means 27, 28 and 29 for holding the optical elements 20, 21 and 22 and moving the optical elements 20, 21 and 22 from the observation light receiving position to a replacing position other than the observation light receiving position, to replace the optical elements 20, 21 and 22; and light shielding means 35 for preventing natural light from entering the photodetection elements 23, 24, 25 and 26 disposed in accordance with the movement of the optical elements 20, 21 and 22 to the replacing position.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种被配置为在防止外部光进入检测元件的同时替换光学元件的光检测单元等。解决方案：关于包括用于将观察光分离为规定波长成分的光学元件20,21和22中的至少一个的光检测单元6，以及用于检测分离的观察光的多个光电检测元件23,24,25和26 通过用于每个波长分量的光学元件20,21和22，单元6包括：用于保持光学元件20,21和22并将光学元件20,21和22从观察中移动的可移动保持装置27,28和29 光接收位置到除了观察光接收位置之外的替换位置，以代替光学元件20,21和22; 以及遮光装置35，用于防止自然光进入根据光学元件20,21和22的移动设置到更换位置的光电检测元件23,24,25和26。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2002040334A MICROSCOPIC CONTROLLER, METHOD FOR USING MICROSCOPIC CONTROLLER AND METHOD FOR CONTROLLING MICROSCOPIC APPARATUS 失效
公开(公告)号：JP2002040334A
公开(公告)日：2002-02-06
申请号：JP2000227472
申请日：2000-07-27
申请人： NIKON CORP
发明人： TSURUMUNE TOKUJI
IPC分类号： G02B21/36 , G02B21/00 , H04N7/18
摘要： PROBLEM TO BE SOLVED: To provide a microscopic controller (12) which is excellent in an operation environment in stop-down work of a microscopic apparatus. SOLUTION: The microscopic controller (12) which is applied to the microscopic apparatus (10) having detecting means (10f and 10g) for detecting the switching state of optical systems and imaging means (10e, 10e' and 10h) for acquiring live image date by picking up the microscopic images formed by the currently used optical system has a display control means (12) which captures the live image data and displays the same on a display device (16) and an image saving means (12) which saves the still image data by the optical system when the switching of the optical system is detected through the detecting means. The images by the optical system used in the past are displayed on the display device in accordance with the still image data saved by the image saving means.

9. 发明专利

JPH06265344A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH06265344A
公开(公告)日：1994-09-20
申请号：JP7878093
申请日：1993-03-12
申请人： NIKON CORP
发明人： ISHII NOBUHITO , TSURUMUNE TOKUJI , OKUDA KOJI , ISHIKAWA MIYUKI
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q10/02 , G01Q30/02 , G01Q60/10 , H01J37/28
摘要： PURPOSE:To avoid the collision of a probe with a protrusion part, to quickly move the probe and to shorten the measuring time of the microscope by a method wherein a shortest movement route which can bypass the protrusion part on the surface of a sample is selected on the basis of the three-dimensional shape on the surface of the sample. CONSTITUTION:A shape recognition part 10b draws a contour-line image from an image stored in an image memory 10a by connecting parts which are focused and bright because they are situated on the same height as the tip of a probe 6 on a sample 1. It judges that the parts are protrusion parts and that parts other than them are recessed parts. Then, a probe-movement control part 10c selects a shortest movement route which can bypass the protrusion parts on the surface of the sample 1 on the basis of the contour-line image. A probe control device 11 controls a fine movement mechanism 7 and an X-Y stage 2 on the basis of the signal of the control means 10c, it relatively moves the probe 6 along the shortest movement route, it scans the surface of the sample 1 and it forms a microimage in a measuring region. Thereby, an operation to raise the probe 6 is omitted, its movement time is shortened, and the collision of the probe 6 with the protrusion parts can be avoided.

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