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1. 发明专利

JP2007327897A Terahertz spectroscopic device 审中-公开
标题翻译： TERAHERTZ光谱仪器
公开(公告)号：JP2007327897A
公开(公告)日：2007-12-20
申请号：JP2006160617
申请日：2006-06-09
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： FUKUSHIMA ITSUKI
IPC分类号： G01N21/35 , G01N21/3586
摘要： PROBLEM TO BE SOLVED: To provide a terahertz spectroscopic device capable of shortening a measuring time without lowering reliability of measurement. SOLUTION: In this terahertz spectroscopic device equipped with a beam splitter for splitting a light pulse from a laser light source into pump light and probe light P3, and an optical path length changing optical system for changing the optical path length of the pump light or the probe light P3 split by the beam splitter, the optical path length changing optical system is constituted of a plurality of pairs of mirrors 9a, 10a, 9b, 10b, and one pair of mirrors 9a, 10a among the plurality of pairs of mirrors is set to be movable. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供能够缩短测量时间而不降低测量可靠性的太赫兹分光装置。解决方案：在该太赫分光装置中，配备有用于将来自激光光源的光脉冲分离成泵浦光和探测光P3的分束器，以及用于改变泵的光路长度的光路长度变化光学系统光或由分束器分开的探测光P3，光路长度变化光学系统由多对成像镜9a，10a，9b，10b和一对镜9a，10a组成，镜子可以移动。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2007101370A Terahertz spectral device 审中-公开
标题翻译： TERAHERTZ光谱仪
公开(公告)号：JP2007101370A
公开(公告)日：2007-04-19
申请号：JP2005291852
申请日：2005-10-05
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： FUKUSHIMA ITSUKI
IPC分类号： G01J3/28 , G01N21/35 , G01N21/3563 , G01N21/3586
摘要： PROBLEM TO BE SOLVED: To provide a terahertz spectral device capable of obtaining exact spectrum regardless of positioning accuracy of a delay stage. SOLUTION: At every movement of the delay stage 8, a detection signal corresponding to the electric intensity of terahertz pulse wave is gained from a terahertz detector 7. Simultaneously, a pulse corresponding to the position of the delay stage 8 output from a stage position meter 9 is gained and a time wave corresponding to the position of the delay stage 8 in gaining the electric field intensity of the terahertz wave is obtained. After correcting the time wave to the data of equivalent time internals, it is Fourier-converted to obtain an amplitude spectrum and a phase spectrum. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供无论延迟级的定位精度如何，能够获得精确频谱的太赫兹频谱装置。解决方案：在延迟级8的每次移动中，从太赫兹检测器7获得对应于太赫兹脉冲波的电强度的检测信号。同时，与从延迟级8输出的延迟级8的位置对应的脉冲获得阶段位置计9，并获得与延迟级8的位置对应的时间波，以获得太赫兹波的电场强度。在将时间波校正到等效时间内部数据之后，对其进行傅立叶转换以获得幅度谱和相位谱。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2007093390A Terahertz wave imaging device 有权
标题翻译： TERAHERTZ波形成像装置
公开(公告)号：JP2007093390A
公开(公告)日：2007-04-12
申请号：JP2005283215
申请日：2005-09-29
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： FUKUSHIMA ITSUKI
IPC分类号： G01N21/23 , G01N21/35 , G01N21/3586
摘要： PROBLEM TO BE SOLVED: To provide a terahertz wave imaging device capable of acquiring images of satisfactory quality. SOLUTION: Terahertz light from a sample 6 is made to form an image in an electro-optical crystal 11 via a first telecentric optical system 7. The state of distribution of double refraction which appears on the electro-optical crystal 11 according to the strength of electric fields of terahertz light guided to the first telecentric optical system 7 is converted into light intensity by an analyzer 12. An image acquired by the analyzer 12 is made to form an image in a CCD camera 14 via a second telecentric optical system 13. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够获取满意质量的图像的太赫兹波成像装置。解决方案：使来自样品6的太赫兹光经由第一远心光学系统7在电光晶体11中形成图像。根据电光晶体11出现的双折射分布状态通过分析器12将导向第一远心光学系统7的太赫兹光的电场强度转换为光强度。由分析仪12获取的图像经由第二远心光学系统在CCD照相机14中形成图像 13.版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2006339179A Exposure method 审中-公开
标题翻译：曝光方法
公开(公告)号：JP2006339179A
公开(公告)日：2006-12-14
申请号：JP2005158339
申请日：2005-05-31
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： MUNEMASA SHIGEO , TAKAHASHI NOBUYUKI , KIKUCHI TAKAHISA
IPC分类号： H01L21/027 , G03F7/20
摘要： PROBLEM TO BE SOLVED: To reduce the displacement of transfer position of a pattern image so as to realize high-accuracy exposure. SOLUTION: When the movement of a wafer W with respect to the image of a reticle pattern and the transfer of the pattern to the wafer W are repeated alternately for transferring the reticle pattern to a plurality of different shot areas SA n (n=1-28) on the wafer W, the correction quantities dx n and dy n of X axis and Y axis at the position of the wafer W are calculated, on the basis of the movement distance and an exposure time for transferring the pattern image to the wafer W, prior to the movement of the wafer W, and the target position for moving the wafer W is corrected by corresponding amounts dx n and dy n . COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：减少图案图像的转印位置的位移，以实现高精度曝光。解决方案：当晶片W相对于掩模版图案的图像的移动和图案转移到晶片W交替重复以将掩模版图案转印到多个不同的拍摄区域SA 在晶片W上的n （n = 1-28），在X轴和Y轴的位置处的修正量dx n 和dy n 基于在晶片W的移动之前的移动距离和用于将图案图像转印到晶片W的曝光时间来计算晶片W，并且通过相应的量dx校正用于移动晶片W的目标位置 n 和dy n 。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006170822A Terahertz photodetector, terahertz photodetection method, and terahertz imaging apparatus 审中-公开
标题翻译： TERAHERTZ摄影机，TERAHERTZ光电保护方法和TERAHERTZ成像设备
公开(公告)号：JP2006170822A
公开(公告)日：2006-06-29
申请号：JP2004364175
申请日：2004-12-16
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： TSUMURA NAOKI , AKAHORI HIROMICHI
IPC分类号： G01N21/35 , G01N21/3586
CPC分类号： G01J3/42 , G01N21/21 , G01N21/3581
摘要： PROBLEM TO BE SOLVED: To accurately detect and measure the state of polarization of terahertz light from samples. SOLUTION: Terahertz pulsed light T1 emitted from a terahertz light generating element 10 is transmitted through a sample S to be terahertz pulsed light T2 and made incident onto a terahertz photodetection element 20. The terahertz photodetection element 20 has a pair of dipole antennas 21A and 21B arranged in such a way as to intersect with each other at right angles and detects the terahertz pulsed light T2 for every polarized component even if the terahertz photodetection element 20 has a perpendicularly polarized component. Detection data is processed at a control/arithmetic operation part 9 to acquire measurement values of electrical characteristics, impurity concentrations, etc. of the sample S. In addition, the sample S is two-dimensionally moved by a two-dimensional driving mechanism 8 to compose measurement values from each point on the sample S and form images as two-dimensional images. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：准确地检测和测量来自样品的太赫兹光的偏振状态。解决方案：从太赫兹光产生元件10发射的太赫兹脉冲光T1通过样品S透射为太赫兹脉冲光T2并入射到太赫兹光电检测元件20.太赫兹光检测元件20具有一对偶极天线 21A和21B以直角相互交叉的方式布置，即使太赫兹光检测元件20具有垂直偏振分量，也可以检测每个偏振分量的太赫兹脉冲光T2。在控制/算术运算部9处理检测数据，得到样品S的电特性，杂质浓度等的测定值。另外，样品S通过二维驱动机构8二维地移动到从样本S上的每个点组成测量值，并将图像形成为二维图像。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2005316052A Image forming optical system 审中-公开
标题翻译：图像成像光学系统
公开(公告)号：JP2005316052A
公开(公告)日：2005-11-10
申请号：JP2004132832
申请日：2004-04-28
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： FUKUDA MITSURU
IPC分类号： G02B13/24 , G02B15/16
摘要： PROBLEM TO BE SOLVED: To provide a variable-magnification image forming optical system where at least chromatic aberrations and distortion aberrations are corrected satisfactorily, and which has high resolution and a wide visual field.
SOLUTION: A front group G
F having positive refractive power, a diaphragm S, and a rear group G
R having positive refractive power are arranged, in this order starting from the object side. The lens 11, positioned closest to the object side of the front group, has a concave face on the object side. The lens 22, positioned closest to the image side of the rear group, has a concave face on the image side. When varying the magnification of the image forming optical system 10 from the low magnification side to the high magnification side, the front group and the rear group are separately moved to the object side, while reducing the arrangement distance of the diaphragm (aerial gap D1). The maximum image height Y' of the image forming optical system 10, the focal distance fm of the image forming optical system at the lowest magnification, the focal distance f
F of the front group and the focal distance f
R of the rear group satisfy the following conditional inequalities: 0.15 F /fm R /fm
摘要翻译：要解决的问题：提供一种可变放大倍率的图像形成光学系统，其中至少色差和畸变像差被令人满意地校正，并且具有高分辨率和宽视野。
解决方案：具有正折光力的前组G F ，具有正折光力的光阑S和后组G R 按此顺序排列从物体侧。最靠近前组的物体侧的透镜11在物体侧具有凹面。位于最靠近后组的像侧的透镜22在图像侧具有凹面。当从低倍率侧向高倍率侧改变成像光学系统10的放大率时，前面组和后面组分别移动到物体侧，同时减小了隔膜的布置距离（空中间隙D1）。图像形成光学系统10的最大图像高度Y'，最低倍率下的图像形成光学系统的焦距fm，前面组的焦距f F 和焦距f 后组的 R 满足以下条件不等式：0.15 F / fm <1.5和1.3 R / FM <1.7。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005129732A Tera-hertz light generation device and tera-hertz light measuring instrument 审中-公开
标题翻译： TERA-HERTZ光生成装置和TERA-HERTZ光度测量仪器
公开(公告)号：JP2005129732A
公开(公告)日：2005-05-19
申请号：JP2003363785
申请日：2003-10-23
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： USAMI MAMORU
IPC分类号： G01N21/01 , G01N21/35 , G01N21/3563 , G01N21/3586 , H01S1/02
摘要： PROBLEM TO BE SOLVED: To provide a tera-hertz light generation device capable of generating tera-hertz pulse light in a wide band and a tera-hertz light measuring instrument suited to various measuring purposes. SOLUTION: The tera-hertz light generation device 10 is provided with a light transmission antenna 4 for radiating tera-hertz pulse light T1, a semiconductor member 5 for radiating tera-hertz pulse light T2, a laser light source 1 for irradiating the light transmission antenna 4 and the semiconductor member 5 respectively with excitation light L4, L5, and a wire grid 6 for synthesizing these tera-hertz pulse light components T1, T2 to one tera-hertz pulse light. The tera-hertz light measuring instrument 100 is provided with the tera-hertz light generation device 10, a tera-hertz optical system for irradiating a sample S with tera-hertz pulse light T3 and guiding tera-hertz pulse light T4 from the sample S to a detection means, a tera-hertz light detector 27 for detecting the tera-hertz pulse light T4, and an operation means for calculating the physical property value of the sample S on the basis of a value detected by the tera-hertz light detector 27. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供能够在宽带内产生泰赫兹脉冲光的泰勒光发生装置和适合于各种测量目的的泰赫兹光测量仪器。解决方案：泰勒光发生装置10设置有用于辐射紫外脉冲光T1的光发射天线4，用于辐射紫外脉冲光T2的半导体部件5，用于照射光传输天线4和半导体部件5分别具有用于将这些太赫兹脉冲光分量T1，T2合成为一赫兹脉冲光的激发光L4，L5和线栅6。泰勒赫测量仪100具有泰勒赫兹光产生装置10，一个用于用样品S脉冲光T3照射样品S并从样品S引导紫外线脉冲光T4的紫外光学系统检测装置，用于检测紫外线脉冲光T4的紫外光检测器27，以及根据由泰勒赫兹光检测器检测的值计算样品S的物理特性值的操作装置 27.版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005121547A Terahertz optical measuring apparatus 审中-公开
标题翻译： TERAHERTZ光学测量装置
公开(公告)号：JP2005121547A
公开(公告)日：2005-05-12
申请号：JP2003358309
申请日：2003-10-17
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： KANOUCHI YOSHINORI , OTANI ISAO
IPC分类号： G01N21/01 , G01N21/35 , G01N21/3586
摘要： PROBLEM TO BE SOLVED: To provide a terahertz optical measuring apparatus for holding a sample in the air so as to always maintain proper measurement precision. SOLUTION: The terahertz optical measuring apparatus 100 is provided with a housing apparatus 1, an optical surface plate 2, a transmission-side measured sample holding plate 11 for holding a transmission-side measured sample S1, and a reflection-side measured sample holding plate 21 for holding a reflection-side measured sample S2. A terahertz optical system 200 is disposed in a sealed space A, formed by the housing apparatus 1 and the optical surface plate 2. The transmission-side measured sample holding plate 11 and the reflection-side measured sample holding plate 21 are supported by a support post 6, separated from the housing apparatus 1 and disposed outside the housing apparatus 1. The transmission-side measured sample S1 and the reflection-side measured sample S2 are held by a transmission-side measured sample holder 12 and a reflection-side measured sample holder 22. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于将样品保持在空气中的太赫兹光学测量装置，以便始终保持适当的测量精度。解决方案：太赫兹光学测量装置100设置有壳体装置1，光学面板2，用于保持透射侧测量样品S1的发射侧测量样品保持板11和测量的反射侧用于保持反射侧测量样品S2的样品保持板21。太赫兹光学系统200设置在由壳体装置1和光学面板2形成的密封空间A中。透射侧测量样品保持板11和反射侧测量样品保持板21由支撑体支柱6与壳体装置1分离并设置在壳体装置1的外部。发射侧测量样本S1和反射侧测量样本S2由发射侧测量样本保持器12和反射侧测量样本持有人22.版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2005055801A Projection type display device 审中-公开
标题翻译：投影型显示设备
公开(公告)号：JP2005055801A
公开(公告)日：2005-03-03
申请号：JP2003288586
申请日：2003-08-07
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： MORI YOICHI , FUJITA TAKANORI , HATTORI TETSUO
IPC分类号： G02B7/02 , G03B21/00
摘要： PROBLEM TO BE SOLVED: To eliminate the blur of a projected picture caused by the temperature change of the back focus of a projection lens.
SOLUTION: In the projection type display device making light emitted from a light valve 105 incident on the projection lens 106 and projecting it, an attaching part 106-A attached to the end of the projection lens 106 and a mount member are connected through a back focus correction member 121. When ambient temperature rises, the back focus correction member 121 is expanded according to a thermal expansion coefficient and its length becomes large. When the ambient temperature rises, the attaching part 106-A is pressed by the expansion of the back focus correction member 121, and the lens 106 is displaced to an opposite side to the light valve 105 with respect to the mount member 111, then optical path length between the projection lens 106 and the light valve 105 becomes large, so that the change of the back focus of the projection lens 106 caused by the temperature change is corrected.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：消除由投影透镜的后焦点的温度变化引起的投影图像的模糊。解决方案：在投影型显示装置中，从入射到投影透镜106上的光阀105发出的光投射并投射安装在投影透镜106的端部的安装部分106-A和安装构件通过后焦点校正构件121.当环境温度升高时，后聚焦校正构件121根据热膨胀系数而膨胀并且其长度变大。当环境温度升高时，通过后聚焦校正构件121的膨胀来按压安装部106-A，并且透镜106相对于安装构件111移动到与光阀105相反的一侧，然后光学投影透镜106和光阀105之间的路径长度变大，校正了由温度变化引起的投影透镜106的后焦点的变化。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005037213A Detecting apparatus and imaging apparatus using the same 审中-公开
标题翻译：检测装置和使用它的成像装置
公开(公告)号：JP2005037213A
公开(公告)日：2005-02-10
申请号：JP2003199426
申请日：2003-07-18
申请人： Nikon Corp , Tochigi Nikon Corp , 株式会社ニコン , 株式会社栃木ニコン
发明人： USAMI MAMORU , FUJITA TAKANORI
IPC分类号： G01R33/032 , G01N21/27 , G01N21/35 , G01N21/3586 , G01R29/08 , G02F1/03 , G02F1/09
摘要： PROBLEM TO BE SOLVED: To eliminate the use of a special imaging optical system such as a large diameter telecentric lens and enlarge a region of an electromagnetic wave such as a terahertz light detected at a time. SOLUTION: An optoelectronic crystal 11 receives the terahertz pulse light in the two-dimensional region in bulk. After a probe pulse light generated from a probe pulse light generating part and synchronized with the terahertz pulse light is converted into a linear polarized light by a polarization plate 13, it is reflected by a beam splitter 12 and irradiates the two-dimensional region of the optoelectronic crystal 11 from the same side as the terahertz pulse light. The polarization plate 14 extracts a predetermined polarization component of the probe pulse light passing through the optoelectronic crystal 11 and having a polarized state changed by the terahertz pulse light. A diffusion plate 16 broadly diffuses the probe pulse light passing through the polarization plate 14. A CCD camera 15 picks up an image of an intensity distribution of the probe pulse light passing through the polarization plate 14 and diffused by the diffusion plate 16. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了消除使用诸如大直径远心透镜的特殊成像光学系统，并且放大一次检测到的诸如太赫兹光的电磁波的区域。解决方案：光电晶体11大量接收二维区域中的太赫兹脉冲光。在从探测脉冲光产生部分产生并与太赫兹脉冲光同步的探针脉冲光被偏振板13转换成线偏振光后，其被分束器12反射并照射到二维区域光电晶体11与太赫兹脉冲光相同。偏光板14提取通过光电子晶体11的探针脉冲光的预定偏振分量，并具有由太赫兹脉冲光改变的偏振状态。漫射板16将通过偏光板14的探测脉冲光广泛地扩散。CCD摄像机15拾取穿过偏振板14的探测脉冲光的强度分布的图像，并由扩散板16扩散。
版权所有（C）2005，JPO＆NCIPI

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