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    • 4. 发明专利
    • FILM FORMING DEVICE
    • JPH0375357A
    • 1991-03-29
    • JP20966089
    • 1989-08-15
    • TOSHIBA CORP
    • NAKAMURA SUGURUSASAKI MITSUO
    • C23C14/28C23C14/32
    • PURPOSE:To stably form a vapor-deposited film for a long period with good efficiency in laser light irradiation at the time of irradiating a film forming material with laser light in a vacuum vessel to form the vapor-deposited film on a substrate by using a film forming material container of specified shape and blowing a gas against the inner surface of a laser light-transmitting window to clean the inner surface. CONSTITUTION:The vacuum vessel 1 is evacuated, and a supporting shaft 2 is rotated to rotate a holder 3 and plural substrates 22 thereon. The substrate 22 on the holder is electrically heated by a power source 10, gaseous Ar, etc., from a cylinder 17 are blown against the inside of the laser light-transmitting window 14 to clean off the deposited film forming material and to keep the transmissivity of laser light, the film forming material 23 in the container 4 on the holder is irradiated with the laser light 24 from a laser oscillator 12 through the window 14, hence the material 23 is heated and vaporized, a glow discharge is generated between an electrode 19 and the holder 3, and the vapor of the material is activated by the ionized Ar and attracted on the substrate 22 by the voltage gradient between the holder 3 and the electrode 19 to form a film. Since the container 4 is conical with the upper part narrowed, the laser light 24 is repeatedly reflected in the container, hence the material 23 is efficiently heated, the material is not leaked to the outside, and the instruments in the vacuum vessel are not damaged.
    • 7. 发明专利
    • LASER DEVICE
    • JPS63265204A
    • 1988-11-01
    • JP9868987
    • 1987-04-23
    • TOSHIBA CORP
    • NAKAMURA SUGURUKINOSHITA JUNICHI
    • G02B6/00B23K26/064H01S3/101
    • PURPOSE:To prevent change in the oscillation mode and intensity of laser light and to lessen the deterioration of an optical system disposed in the transmission path thereof by forming a light transmission body for guiding the laser light oscillated from a laser oscillator to hermetic structure capable of reducing the pressure thereon and reducing the pressure in said body. CONSTITUTION:The laser oscillator, the light transmission body which guides the laser light released from the laser oscillator and is formed into the hermetic structure capable of reducing the pressure therein, and a pressure reducing device which reduces the pressure in this light transmission body are provided. The attenuation of the laser light during transmission can be lessened if the light transmission body for guiding the laser light oscillated from the laser oscillator is made into the hermetic structure capable of reducing the pressure therein and is used after the pressure therein is reduced. The change in the mode to be generated by multiple reflections of fluctuation of gas or the like is prevented and the deterioration of the optical system is prevented by disposing said system in this light transmission body.
    • 8. 发明专利
    • LASER IRRADIATING METHOD
    • JPS6281284A
    • 1987-04-14
    • JP21907185
    • 1985-10-03
    • TOSHIBA CORP
    • NAKAMURA SUGURUSASAKI MITSUO
    • B23K26/00B23K26/064
    • PURPOSE:To prevent the thermal breakdown of apparatus by arranging the reflecting body having the through hole of a laser beam at the upper part of he body to be irradiated and by making the laser beam incident on the through hole thereof slantly. CONSTITUTION:The plane reflecting body 1 which pierced a slit like through hole 15 is arranged at the upper part of the body 12 to be irradiated. The condensing device 19 composed of a condensing lens 18, reflecting mirror 19, 20 is provided at the upper part of the reflecting body 10 further. The metal layer 24 to be irradiated is coated or flame-coated on the surface of the body 12 to be irradiated in advance and the body 12 to be irradiated is then moved in the direction X via X table 13a in the state of being preheated. In this case, a vibrating laser beam 23 is irradiated on the body 12 to be irradiated via a slit hole 15. The surface layer part of the metal layer 24 and the body 12 to be irradiated is melted with diffusion and the reflecting beam 25 is reflected on a reflecting face 11. The thermal damage of the lens 18, etc. can thus be prevented.
    • 10. 发明专利
    • Work inspection method
    • 工作检查方法
    • JPS6120685A
    • 1986-01-29
    • JP13999284
    • 1984-07-06
    • Toshiba Corp
    • NAKAMURA SUGURUSASAKI MITSUO
    • B23K26/00B23K26/03G01B5/00G01B11/00
    • G01B5/0002B23K26/03B23K26/382
    • PURPOSE:To prevent the damages of a photodetector by a retreat as well as to confirm the piercing completion by positioning a retreating photodetector beneath the material to be worked after the piercing with a laser beam irradiation of the material to be worked and by detecting the complete passing with the laser beam for maeasurement. CONSTITUTION:A piercing with irradiation 18 is performed with a laser beam 5 on the prescribed position of the material 9 to be worked of a chuck jig supporting cylinder shape. A shape detector 10 is advanced with driving a motor 13 after the prescribed time and with detecting the laser beam 5 for measurement of a laser nozzle 1 the completion of the piercing 18 is detected. The conventional incomplete piercing is surely prevented. The shape detector 10 is retreated during the laser beam piercing and the adhesion of scattering matters is prevented by an inert gas 17 for cleaning the detecting face at the position beneath the piersing and there is no damage.
    • 目的:为了防止光电探测器受到后退的损害,并且通过在激光束照射待加工材料之后将穿孔后的光电检测器放置在待加工材料之下,并通过检测完整的 通过激光束进行测量。 构成:利用照射18进行穿刺,用激光束5进行卡盘夹具支撑筒状的待加工材料9的规定位置。 形状检测器10在规定时间后驱动电动机13并且通过检测用于激光喷嘴1的测量的激光束5而前进,检测到穿孔18的完成。 可以防止传统的不完全穿孔。 形状检测器10在激光束刺穿期间被退回,并且通过惰性气体17来防止散射物质的粘附,用于清洁在码垛下方的位置处的检测面,并且没有损坏。