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    • 6. 发明专利
    • Semiconductor pressure sensor, and method of manufacturing the same
    • 半导体压力传感器及其制造方法
    • JP2011164057A
    • 2011-08-25
    • JP2010030132
    • 2010-02-15
    • Mitsubishi Electric Corp三菱電機株式会社
    • DEO SHINICHIYOSHIKAWA EIJIASADA SHINSUKETOKUNAGA TAKASHI
    • G01L9/00B81B3/00B81C3/00H01L29/84
    • PROBLEM TO BE SOLVED: To provide a semiconductor pressure sensor, capable of improving the destructive pressure resistance by reducing the stress concentration in the boundary between a part facing a recess and a part jointed to a first silicon substrate on the surface of a second silicon substrate facing the first silicon substrate, and to provide a method of manufacturing the semiconductor pressure sensor.
      SOLUTION: This semiconductor pressure sensor includes the first silicon substrate 2 having a recess 8a in its one surface 3, the second silicon substrate 6 whose one surface 7 is joined to the first silicon substrate 2 so as to seal the recess 8a, a strain detecting element 13 formed on the other surface 12 of the second silicon substrate 6, and a first silicon oxide film 18 formed in a part of the one surface 7 of the second silicon substrate 6 that faces the recess 8a so as to cover the boundary between the part facing at least the recess 8a and the part joined to the one surface 3 of the first silicon substrate 2.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种半导体压力传感器,其能够通过降低面向凹部的部分与与第一硅基板的表面上接合的部分之间的边界处的应力集中来提高耐破坏性, 第二硅衬底面对第一硅衬底,并提供制造半导体压力传感器的方法。 解决方案:该半导体压力传感器包括在其一个表面3中具有凹部8a的第一硅衬底2,其一个表面7与第一硅衬底2接合以密封凹部8a的第二硅衬底6, 形成在第二硅衬底6的另一个表面12上的应变检测元件13和形成在第二硅衬底6的面向凹部8a的一个表面7的一部分上的第一氧化硅膜18,以覆盖 至少面向凹部8a的部分和与第一硅衬底2的一个表面3接合的部分之间的边界。版权所有(C)2011,JPO&INPIT
    • 10. 发明专利
    • Semiconductor device
    • 半导体器件
    • JP2013239512A
    • 2013-11-28
    • JP2012110397
    • 2012-05-14
    • Mitsubishi Electric Corp三菱電機株式会社
    • KAJIWARA TAKANOBUASADA SHINSUKEFUJINO JUNJISUDO SHINGOTOKUMARU JUN
    • H01L25/07H01L23/12H01L25/18
    • H01L2224/48091H01L2924/13055H01L2924/13091H01L2924/00014H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a semiconductor device which can reduce manufacturing cost and repair cost and which can achieve downsizing.SOLUTION: The semiconductor device comprises: an electrically insulating substrate 2 on which a semiconductor element 1 is mounted; a control substrate 5 on which an electronic component 7 relevant to the semiconductor element 1 is mounted; a spring terminal 10 for electrically connecting the semiconductor element 1 and the control substrate 5; and a positioning pin 9 for connecting one end of the spring terminal 10 and the control substrate 5. The spring terminal 10 includes an elastic part. The one end of the spring terminal 10 and the control substrate 5 are detachably fastened to each other by the positioning pin 9, and the other end of the spring terminal 10 and the electrically insulating substrate 2 come in contact with each other by elastic deformation of the elastic part of the spring terminal 10.
    • 要解决的问题:提供一种能够降低制造成本和修理成本并可实现小型化的半导体器件。解决方案:半导体器件包括:安装有半导体元件1的电绝缘基板2; 安装有与半导体元件1相关的电子部件7的控制基板5; 用于电连接半导体元件1和控制基板5的弹簧端子10; 以及用于连接弹簧端子10的一端和控制基板5的定位销9.弹簧端子10包括弹性部。 弹簧端子10的一端和控制基板5通过定位销9可拆卸地彼此固定,并且弹簧端子10的另一端和电绝缘基板2通过弹性变形彼此接触 弹簧端子10的弹性部分。