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1. 发明专利

JP2012215534A Probe apparatus 有权
标题翻译：探测器
公开(公告)号：JP2012215534A
公开(公告)日：2012-11-08
申请号：JP2011105945
申请日：2011-05-11
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , YASUDA TAKAO , OSANAI YASUAKI , YOKOYAMA MAKOTO , FUKUSHI TOSHIO , KIMURA TAKESHI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To surely connect a contact electrode of a probe apparatus to an electrode of an inspection object.SOLUTION: The probe apparatus includes a probe block extended in a front-back direction, a flexible wiring sheet support attached to the lower side of a front part of the probe block and a wiring sheet supported on the lower side of the wiring sheet support. The wiring sheet support includes an extension part extended in an oblique direction descending to the front. The wiring sheet includes an extended part supported on the lower side of the extension part. Further, the wiring sheet includes a sheet-like member, a plurality of wires formed on the sheet-like member and contact electrodes formed on the front parts of respective wires. Each contact electrode includes a front end face erected from the wire, an undersurface extended linearly or arcuately in the oblique direction and a corner part formed by the front end face and the undersurface.
摘要翻译：要解决的问题：将探针装置的接触电极可靠地连接到检查对象的电极。解决方案：探针装置包括沿前后方向延伸的探针块，安装在探针块的前部的下侧的柔性布线片支架和支撑在布线的下侧的布线片表单支持。布线板支撑件包括沿着向前下降的倾斜方向延伸的延伸部。布线板包括支撑在延伸部分的下侧的延伸部分。此外，布线板包括片状构件，形成在片状构件上的多根线和形成在各个线的前部的接触电极。每个接触电极包括从电线竖立的前端面，在倾斜方向上线性或弧形延伸的下表面和由前端面和下表面形成的拐角部分。版权所有（C）2013，JPO＆INPIT

2. 发明专利

JP2011133462A Probe device 有权
标题翻译：探测器
公开(公告)号：JP2011133462A
公开(公告)日：2011-07-07
申请号：JP2010213162
申请日：2010-09-24
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： KUGA TOMOAKI , YASUDA TAKAO , OGASAWARA JURI , KIYONO YOJI , NAKAYASHIKI YUTA , MIURA KAZUYOSHI , AKAHIRA MEGUMI
IPC分类号： G01R1/073 , G01R31/26 , G02F1/13 , G02F1/1368
摘要： PROBLEM TO BE SOLVED: To make a difference in the amount of displacement of a probe in relation to a probe holder as small as possible and thereby to enable correct testing. SOLUTION: The probe device includes a probe assembly including a plurality of probes and a probe holder wherein the probes are disposed at intervals in the lateral direction and in an extendible manner in the fore-and-aft direction with their needle central regions opposed. Either one of the probe holder and each probe includes a downward-facing first section and a forward-facing second section, and the other of the probe holder and each probe includes an upward-facing third section which can come into contact with the first section and a backward-facing fourth section which can come into contact with the second section. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：使探针相对于探针支架的位移量尽可能小，从而能够进行正确的测试。解决方案：探针装置包括探针组件，其包括多个探针和探针支架，其中探针沿横向方向以可前后方向以前后方向设置，其针头中心区域反对。探针保持器和每个探针中的任一个包括面向下的第一部分和向前的第二部分，并且探针保持器和每个探针中的另一个包括向上的第三部分，其可以与第一部分接触以及可以与第二部分接触的向后的第四部分。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2007303834A Probe assembly 有权
标题翻译：探测组件
公开(公告)号：JP2007303834A
公开(公告)日：2007-11-22
申请号：JP2006129333
申请日：2006-05-08
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： KUGA TOMOAKI , YASUDA TAKAO , DEWA HARUMASA , ROKUNOHE JURI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To provide an electric connection device capable of surely preventing the flexural deformation of the supporting bar when the over drive force is activated to the probe supported by a support through the supporting bar.
SOLUTION: Each probe of the probe assembly is composed of platy members which are arranged in thickness direction under the support while keeping intervals. The probe is supported by a supporting bar made of electric insulation material which is supported by the support while passing through the plate thickness direction. The probe is made into a slit bar arranged on the front edge of the support and received in the slit groove opened to downward. The needle tip of the probe is arranged through each slit groove protrusively to downward. On the slit bar or the support a rigid fulcrum for restricting the deformation of probe by abutting to the probe before the probe is abutting the groove on the top surface of the slit groove.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种电连接装置，当过载驱动力被支撑通过支撑杆支撑的探针被激活时，能够可靠地防止支撑杆的弯曲变形。
解决方案：探头组件的每个探头由平板状构件组成，它们在保持间隔的同时沿着厚度方向布置在支撑下。探头由电绝缘材料制成的支撑杆支撑，该支撑杆在穿过板厚方向时由支撑件支撑。将探针制成设置在支撑件的前边缘上的狭缝条，并且被容纳在向下开口的狭缝槽中。探针的针尖突出地布置成每个狭缝槽向下。在狭缝条或支撑件上有一个刚性的支点，用于通过在探头与槽之间的凹槽对接之前通过抵靠探针来限制探针的变形。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2006145514A Probe assembly 有权
标题翻译：探测组件
公开(公告)号：JP2006145514A
公开(公告)日：2006-06-08
申请号：JP2005030700
申请日：2005-02-07
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： HASEGAWA YOSHIE , KUGA TOMOAKI , SAITO HIROKI , YASUDA TAKAO , DEWA HARUMASA
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To prevent breakage of slit bars, even though the needlepoint domain, pressed against by an electrode of an object to be measured is of a flexible configuration during the acting time of overdriving. SOLUTION: In the probe assembly, the probes are supported by a substrate by a pair of guide bars extending to array direction of probes. A needlepoint region at a tip side of the probes is arranged in the slit of a pair of slit bars, and an elastic body, extending in the longitudinal direction of the guide bar, is arranged between the probes and the substrate or the slit bars. Thereby, since the probes are pressed against the guide bars by the elastic body, play of the probes, with respect to the guide bars, is eliminated and tilting of the probes can be prevented. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了防止狭缝条的破裂，即使在过驱动的作用时间中被待测物体的电极压下的针尖区域具有柔性构造。解决方案：在探针组件中，探针由一对延伸到探针的排列方向的导杆由衬底支撑。在一对狭缝条的狭缝中布置有探针前端的针尖区域，并且在探针与基板或狭缝条之间配置有沿导杆的长度方向延伸的弹性体。因此，由于通过弹性体将探针压靠在引导杆上，消除了相对于引导杆的探针的游离，并且可以防止探针的倾斜。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2008275406A Probe device and inspection device 审中-公开
标题翻译：探测设备和检测设备
公开(公告)号：JP2008275406A
公开(公告)日：2008-11-13
申请号：JP2007118128
申请日：2007-04-27
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： YASUDA TAKAO , KUGA TOMOAKI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To ensure contact between each contactor of a film type probe and an electrode of an inspection object.
SOLUTION: A probe device includes a probe base fixed to a body frame side, a probe block for supporting the film type probe and bringing it into electrical contact with the electrode of the inspection object, and a pressurizing mechanism for pressurizing the film type probe with a uniform pressure while each contactor of the film type probe is in contact with the electrode of the inspection object. The pressurizing mechanism includes a tip pressurizing part for pressurizing the film type probe while each contactor of the film type probe is in contact with the electrode of the inspection object, by being brought into direct contact with the film type probe. The tip pressurizing part is constituted of a pressurizing plate for pressurizing the film type probe, an elastic body for smoothing equally a pressure by the pressurizing plate; and a support film provided on the contactor side of the film type probe, for uniformizing a pressure applied to each contactor in cooperation with the elastic body.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：确保膜型探针的每个接触器与检查对象的电极之间的接触。解决方案：探针装置包括：固定到主体框架侧的探针基座，用于支撑膜型探针并使其与检查对象的电极电接触的探针块，以及用于对膜进行加压的加压机构并且膜型探针的每个接触器与被检查物体的电极接触。加压机构包括：当膜型探针的每个接触器与检查对象物的电极接触时，通过与膜型探针直接接触，对薄膜型探针进行加压的末端加压部。尖端加压部由用于加压薄膜型探针的加压板，用于平滑加压板的压力的弹性体构成; 以及设置在膜型探针的接触器侧上的支撑膜，用于使与弹性体协作的施加到每个接触器的压力均匀化。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2011203275A Probe and probe assembly 审中-公开
标题翻译：探索和探索大会
公开(公告)号：JP2011203275A
公开(公告)日：2011-10-13
申请号：JP2011148815
申请日：2011-07-05
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： KUGA TOMOAKI , YASUDA TAKAO , DEWA HARUMASA , ROKUNOHE JURI
IPC分类号： G01R1/073 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a probe assembly capable of exchanging a probe and suitable for narrow pitch array.SOLUTION: The probe assembly includes: a plurality of probes each of which includes a support, a belt-like fixing part, and a needle tip which is extending from the end of the fixing part with narrower width dimension than the width dimension of the fixing part, which are a plurality of probes wherein the fixing part is arranged oppositely in parallel on the downside of the support while a width direction of the fixing part is a vertical direction; and an elongate support bar extending through the fixing part of the probes in the thickness direction in order to support each probe detachably, and supported by the support. One surface of the probe is covered with an insulating film for covering the surface partially, and the whole surface of the other surface is an exposed surface.
摘要翻译：要解决的问题：提供一种能够交换探针并适合于窄间距阵列的探针组件。解决方案：探针组件包括：多个探针，每个探针包括支撑体，带状固定部分和针尖端，其从固定部分的端部延伸的宽度尺寸小于作为多个探针的固定部分的宽度尺寸的尺寸，其中固定部件在支撑件的下侧上相对平行布置，而宽度方向固定部分是垂直方向; 以及在厚度方向上延伸穿过探针的固定部分的细长支撑杆，以便可拆卸地支撑每个探针，并由支撑件支撑。探针的一个表面覆盖有用于部分地覆盖表面的绝缘膜，另一个表面的整个表面是暴露表面。

7. 发明专利

JP2009115585A Probe assembly and test device 审中-公开
标题翻译：探头装配和测试装置
公开(公告)号：JP2009115585A
公开(公告)日：2009-05-28
申请号：JP2007288389
申请日：2007-11-06
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： KUGA TOMOAKI , NARAOKA SHUJI , YASUDA TAKAO
IPC分类号： G01R1/073 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To improve contact stability between blade-type probes and electrodes by reducing dispersion of the blade type probes.
SOLUTION: A probe assembly is provided that supports a blade-type probe and makes it electrically contact an electrode of an inspection object. The probe assembly includes a block piece to support integrally the plurality of probes; a positioning pin to pierce respectively the plurality of probes to integrally support and position the probes; a tip side contact load receiver to fit to the tip side being the inspection object side of the probes and to receive the contact load when a contact of the tip side of the probes contacts the electrode of the inspection object; and an end side contact load receiver to fit to the end side of the probes and to receive the contact load when a contact of the end side of the probes contacts an electrode of the probe base side.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：通过减少叶片型探针的分散度来提高叶片型探针和电极之间的接触稳定性。解决方案：提供了一种探针组件，其支撑刀片型探针并使其与检查对象的电极电接触。探针组件包括用于一体地支撑多个探针的块件; 定位销分别刺穿多个探针以一体地支撑和定位探针; 尖端侧接触负载接收器，以配合到作为探针的检查对象侧的前端侧，并且当探针的前端侧的接触与检查对象的电极接触时接收接触负载; 以及末端侧接触负载接收器，以适配于探针的端侧，并且当探针的端侧的接触接触探针基座侧的电极时接收接触负载。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2007303969A Probe and probe assembly 有权
标题翻译：探索和探索大会
公开(公告)号：JP2007303969A
公开(公告)日：2007-11-22
申请号：JP2006132699
申请日：2006-05-11
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： KUGA TOMOAKI , YASUDA TAKAO , DEWA HARUMASA , ROKUNOHE JURI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To provide a probe assembly capable of exchanging a probe and suitable for narrow pitch array.
SOLUTION: The probe assembly is composed of a plurality of probes each of which is composed of a support, a belt-like fixing part, and a needle tip which is extending from the end of the fixing part with narrower width than that of the fixing part. For detachably supporting each probe, the width direction of the fixing part of the probe is vertically supported under the support oppositely and parallel to the support by slender supports which pass through the fixing part in a thickness direction. On the mutually opposite faces of neighboring probes of the fixing part insulation films are provided for partially covering the each opposite face of the probe in the mutually shifted region.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供能够交换探针并适合于窄间距阵列的探针组件。解决方案：探针组件由多个探针构成，每个探针由支撑体，带状固定部分和从尖端的宽度窄的固定部分的端部延伸的针尖构成。的固定部分。为了可拆卸地支撑每个探针，探针的固定部分的宽度方向通过在厚度方向上穿过固定部分的细长的支撑件相对地并且平行于支撑件而垂直地支撑在支撑件下方。在固定部分绝缘膜的相邻探针的彼此相对的表面上设置用于在相互移动的区域中部分地覆盖探针的每个相对的面。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2012163397A Probe device and manufacturing method thereof 有权
标题翻译：探针装置及其制造方法
公开(公告)号：JP2012163397A
公开(公告)日：2012-08-30
申请号：JP2011022590
申请日：2011-02-04
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , YASUDA TAKAO , OSANAI YASUAKI , YOKOYAMA MAKOTO
IPC分类号： G01R1/073 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To prevent displacement of a contact electrode of a probe device from an electrode of a body to be inspected.SOLUTION: The probe device includes a flexible wiring sheet, a support body supporting the wiring sheet, and a gap maintaining member attached to the wiring sheet. The wiring sheet includes a plurality of wires provided on one surface thereof and a plurality of contact electrodes provided on the wires. The gap maintaining member has a thermal expansion coefficient lower than that of the wiring sheet and rigidity higher than that of the wiring sheet and is attached to the wiring sheet to maintain gaps between the plurality of wires in a state where the wiring sheet is expanded.
摘要翻译：要解决的问题：为了防止探针装置的接触电极从要检查的身体的电极的位移。解决方案：探针装置包括柔性布线板，支撑布线板的支撑体和附接到布线板的间隙保持构件。布线板包括设置在其一个表面上的多条电线和设置在电线上的多个接触电极。间隙保持部件的热膨胀系数比布线片的热膨胀系数低，并且刚性高于布线片材，并且在布线片材被布置的状态下被附着到布线板上以保持多个布线之间的间隙。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2006343307A METHOD OF INSPECTING SUBSTRATE FOR DISPLAY 有权
公开(公告)号：JP2006343307A
公开(公告)日：2006-12-21
申请号：JP2005295268
申请日：2005-10-07
申请人： MICRONICS JAPAN CO LTD
发明人： KUGA TOMOAKI , YASUDA TAKAO , DEWA HARUMASA
IPC分类号： G01R1/073 , G01R31/00 , G02F1/13 , G02F1/1343
摘要： PROBLEM TO BE SOLVED: To provide stable contact even when a transparent conductive film is an IZO film. SOLUTION: In this inspection method, a needle tip of a probe provided with the sharp needle tip having a hardness of a range over from HV500 to HV100 is pressed onto an electrode of a substrate for display to bring contact face pressure between the electrode and the needle tip into 0.04-0.06 g/μm 2 . COPYRIGHT: (C)2007,JPO&INPIT

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