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1. 发明专利

JP2011149917A Probe cleaning unit, and panel inspection device and probe cleaning method having the same 有权
标题翻译：检测清洁单元，面板检查装置和具有该检测装置的检测清洁方法
公开(公告)号：JP2011149917A
公开(公告)日：2011-08-04
申请号：JP2010058669
申请日：2010-03-16
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： MIURA KAZUYOSHI , OSANAI YASUAKI , SAWADA TAKESHI , YAMAGUCHI TSUNE , KUGA TOMOAKI , KIYONO YOJI
IPC分类号： G01R31/00 , B08B1/00 , G01R1/06 , G01R31/28 , G02F1/13 , G02F1/1362 , G09F9/00
摘要： PROBLEM TO BE SOLVED: To provide a probe cleaning unit that selects only a probe assembly having a probe requiring cleaning and efficiently cleans the probe by easy operation. SOLUTION: This probe cleaning unit includes an arm section movably attached to a probe unit of a panel inspection device between positions corresponding to at least the probe assemblies, a body section attached to the arm section, a moving base supported by the body section linearly reciprocatably, a means for linearly reciprocating the moving base with respect to the body section, and a distance adjusting mechanism for adjusting the distance between the arm section and the moving base so that a first cleaning means attached to the moving base comes into contact with the tips of a plurality of probes of the probe assemblies when the moving base is linearly reciprocated with respect to the body section. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种探针清洁单元，其仅选择具有需要清洁的探针的探针组件，并且通过容易的操作有效地清洁探针。解决方案：该探针清洁单元包括臂部分，臂部分可移动地附接到面板检查装置的探针单元，其位置对应于至少探针组件，附接到臂部的主体部分，由主体支撑的移动基座截面线性地往复运动，用于使运动基座相对于主体部线性地往复运动的装置以及用于调节臂部分和移动基座之间的距离的距离调节机构，使得附接到移动基座的第一清洁装置接触当移动的基座相对于身体部分线性地往复运动时，探针组件的多个探针的尖端。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2009162692A Probe system 审中-公开
标题翻译：探测系统
公开(公告)号：JP2009162692A
公开(公告)日：2009-07-23
申请号：JP2008002426
申请日：2008-01-09
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： FUKUSHI TOSHIO , MIURA KAZUYOSHI , OSANAI YASUAKI
IPC分类号： G01R1/073 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To improve workability of a maintenance about a probe system.
SOLUTION: The probe system is equipped with a probe block for integrally supporting a plurality of probes, a suspension block for supporting the probe block and a TCP connecting section for electrically connecting each probe of the probe block to a signal substrate on the probe base side. The TCP connecting section has a connecting means which can be detachably attached to the signal substrate on the probe base side, and the TCP connecting section and the probe block are configured integrally and attached to/detached from the suspension block.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提高探针系统维护的可操作性。解决方案：探针系统配备有用于一体地支撑多个探针的探针块，用于支撑探针块的悬架块和用于将探针块的每个探针电连接到探针块上的信号基板的TCP连接部分探针底面。 TCP连接部具有连接装置，其能够可拆卸地附接到探针基座侧的信号基板，并且TCP连接部和探针块被一体地构造并附接到悬挂块或从悬挂块拆卸。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2008267873A Probe unit and inspection apparatus 有权
标题翻译：探测装置和检查装置
公开(公告)号：JP2008267873A
公开(公告)日：2008-11-06
申请号：JP2007108380
申请日：2007-04-17
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： OSANAI YASUAKI , MIURA KAZUYOSHI , SAITO HIROKI , FUKUSHI TOSHIO
IPC分类号： G01R31/28
摘要： PROBLEM TO BE SOLVED: To make the replacement work for a probe unit to be safe and to be performed by one man.
SOLUTION: The probe unit is composed of: a probe stage fixed to the main body; a probe assembly body provided with the probes being in direct contact with the inspection objective board such as liquid crystal panel; and a probe base for supporting the probe assembly while being supported state by the probe stage. The probe base is composed of a reference plate part, and one or ≥2 adjusting plate parts, and the position adjusting mechanism for adjusting each adjusting plate provided between the reference plate part and the adjusting plate part and between each adjusting plate part. The reference plate part is capable of attaching to the specific position of the probe stage without positional allowance and the adjusting plate part is capable of attaching to the probe stage with positional allowance.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：使探头单元的更换工作安全，并由一个人执行。解决方案：探头单元由固定在主体上的探针台构成; 探针组件体，其设置有与检查对象板例如液晶面板直接接触的探针; 以及用于在由探针台支撑状态的同时支撑探针组件的探针基座。探针基座由参考板部分和一个或两个调节板部分组成，以及用于调整设置在参考板部分和调节板部分之间以及每个调节板部分之间的每个调节板的位置调节机构。参考板部分能够安装到探针台的特定位置而没有位置限制，并且调节板部分能够以位置余量附接到探针台。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2013200256A Probe device 审中-公开
标题翻译：探测器
公开(公告)号：JP2013200256A
公开(公告)日：2013-10-03
申请号：JP2012069517
申请日：2012-03-26
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , OSANAI YASUAKI , KIMURA TAKESHI , KIYONO YOJI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To provide a probe device which prevents unstable motion of an individual probe element and is capable of preferably coping with higher density of an electrode arrangement in which electrodes are arranged in a plurality of lines along the edge portion of an object to be inspected.SOLUTION: There is provided a probe device in which a probe sheet is supported by a probe block via a support plate, the support plate is protruded from the front edge of the probe block together with the probe sheet, and an elastic member is interposed between the support plate and the probe sheet in a region where at least the support plate and the probe sheet are protruded. This allows the protruded region of the probe sheet to be a laminated structure including the probe sheet, the elastic member and the support plate. Further, an entrance angle of probe elements of the probe sheet is set to an angle smaller than 10 degrees. These configurations make it possible to suppress needle pressure of each probe element within the variation of approximately 1 g even if contact electrodes of the adjacent probe elements are arranged while being displaced in a lengthwise direction of the probe sheet.
摘要翻译：要解决的问题：提供一种防止单个探针元件的不稳定运动的探针装置，并且能够优选地应对电极布置的更高密度，其中电极沿着物体的边缘部分布置在多条线中，检查。解决方案：提供了一种探针装置，其中探针片通过支撑板由探针块支撑，支撑板与探针片一起从探针块的前边缘突出，并且弹性构件在至少支撑板和探针片突出的区域中夹在支撑板和探针片之间。这样就可以使探测片的突出区域成为包括探针片，弹性构件和支撑板的叠层结构。此外，探针片的探针元件的入射角被设定为小于10度的角度。这些构造使得即使在沿着探针片的长度方向移位的同时布置相邻探针元件的接触电极，也可以将每个探针元件的针压抑制在大约1g的变化范围内。

5. 发明专利

JP2012215534A Probe apparatus 有权
标题翻译：探测器
公开(公告)号：JP2012215534A
公开(公告)日：2012-11-08
申请号：JP2011105945
申请日：2011-05-11
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , YASUDA TAKAO , OSANAI YASUAKI , YOKOYAMA MAKOTO , FUKUSHI TOSHIO , KIMURA TAKESHI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To surely connect a contact electrode of a probe apparatus to an electrode of an inspection object.SOLUTION: The probe apparatus includes a probe block extended in a front-back direction, a flexible wiring sheet support attached to the lower side of a front part of the probe block and a wiring sheet supported on the lower side of the wiring sheet support. The wiring sheet support includes an extension part extended in an oblique direction descending to the front. The wiring sheet includes an extended part supported on the lower side of the extension part. Further, the wiring sheet includes a sheet-like member, a plurality of wires formed on the sheet-like member and contact electrodes formed on the front parts of respective wires. Each contact electrode includes a front end face erected from the wire, an undersurface extended linearly or arcuately in the oblique direction and a corner part formed by the front end face and the undersurface.
摘要翻译：要解决的问题：将探针装置的接触电极可靠地连接到检查对象的电极。解决方案：探针装置包括沿前后方向延伸的探针块，安装在探针块的前部的下侧的柔性布线片支架和支撑在布线的下侧的布线片表单支持。布线板支撑件包括沿着向前下降的倾斜方向延伸的延伸部。布线板包括支撑在延伸部分的下侧的延伸部分。此外，布线板包括片状构件，形成在片状构件上的多根线和形成在各个线的前部的接触电极。每个接触电极包括从电线竖立的前端面，在倾斜方向上线性或弧形延伸的下表面和由前端面和下表面形成的拐角部分。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2010127706A Probe unit and inspection apparatus 审中-公开
标题翻译：探测装置和检查装置
公开(公告)号：JP2010127706A
公开(公告)日：2010-06-10
申请号：JP2008301299
申请日：2008-11-26
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： ANZAI MASAYUKI , MIURA KAZUYOSHI , SAITO HIROKI , OSANAI YASUAKI
IPC分类号： G01R1/073 , G01M11/00 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To provide a probe unit and an inspection apparatus, making an inspection work more efficient.
SOLUTION: The probe unit includes: a probe block for performing a lighting inspection by contacting each of a plurality of probes to each of a plurality of terminals arranged on a panel to be inspected; and a short-circuit device for short-circuiting each of the terminals when a defect such as a wiring trouble occurs in the panel to be inspected in performing the lighting inspection by contacting each of the probes to each of the terminals. The short-circuit device is configured of a short-circuit member arranged facing each of the terminals for short-circuiting all the terminals by simultaneously contacting to each of the terminals and a pressing mechanism for supporting the short-circuit member in the state being supported by the probe block side and for contacting it to each of the terminals on the occurrence of the defect. By contacting the short-circuit member supported by the pressing mechanism to each of the terminals, it is determined whether the defect is caused by the panel or by the probe unit.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供探针单元和检查装置，使检查工作更有效率。探针单元包括：探针块，用于通过将多个探针中的每一个接触布置在待检查的面板上的多个端子中的每一个进行照明检查; 以及短路装置，用于在通过使每个探针接触每个端子进行照明检查时在要检查的面板中发生诸如布线故障的缺陷时，使每个端子短路。该短路装置由面对各个端子的短路部件构成，用于通过同时接触每个端子来短路所有端子，以及用于在被支撑的状态下支撑短路部件的按压机构通过探针块侧并且在发生缺陷时将其接触到每个端子。通过将由按压机构支撑的短路部件接触每个端子，确定缺陷是由面板还是由探针单元引起。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2009150768A Probe unit and inspection device 审中-公开
标题翻译：探测单元和检查设备
公开(公告)号：JP2009150768A
公开(公告)日：2009-07-09
申请号：JP2007328771
申请日：2007-12-20
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： FUKUSHI TOSHIO , SAITO HIROKI , OSANAI YASUAKI
IPC分类号： G01R31/00 , G01R1/073 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To save a space for wiring for simplified lighting inspection; to facilitate maintenance; and to reduce cost. SOLUTION: This probe unit is equipped with a connection cable part for connecting electrically a probe assembly to an external device, and the connection cable part is equipped with a short circuit part for connecting electrically each wire of an FPC cable to each probe side of the probe assembly. The short circuit part is equipped with short bumps provided individually on each wire on each probe side of the probe assembly, and a lengthy short bar to be in contact simultaneously with all short bumps arrayed in one row. Each short bump is arrayed in one lateral row respectively corresponding to red, green and yellow, and each row in red, green and yellow is disposed on each mutually shifted position. The three short bars are provided in correspondence to red, green and yellow, and each short bar is set to have a length to be in contact simultaneously with all short bumps. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：节省布线空间，简化照明检查; 方便维修; 并降低成本。
解决方案：该探头单元配有用于将探针组件电连接到外部设备的连接电缆部分，连接电缆部件配备有短路部分，用于将FPC电缆的每根电线连接到每个探针探头组件的一侧。短路部分配备有在探针组件的每个探针侧上的每根导线上单独提供的短凸块，以及与一排排列的所有短凸起同时接触的冗长的短棒。每个短凸块分别对应于红色，绿色和黄色的一个横排排列，并且每行红色，绿色和黄色设置在每个相互移位的位置。三条短条对应于红色，绿色和黄色提供，并且每个短条被设置为具有与所有短凸起同时接触的长度。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2012163397A Probe device and manufacturing method thereof 有权
标题翻译：探针装置及其制造方法
公开(公告)号：JP2012163397A
公开(公告)日：2012-08-30
申请号：JP2011022590
申请日：2011-02-04
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , YASUDA TAKAO , OSANAI YASUAKI , YOKOYAMA MAKOTO
IPC分类号： G01R1/073 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To prevent displacement of a contact electrode of a probe device from an electrode of a body to be inspected.SOLUTION: The probe device includes a flexible wiring sheet, a support body supporting the wiring sheet, and a gap maintaining member attached to the wiring sheet. The wiring sheet includes a plurality of wires provided on one surface thereof and a plurality of contact electrodes provided on the wires. The gap maintaining member has a thermal expansion coefficient lower than that of the wiring sheet and rigidity higher than that of the wiring sheet and is attached to the wiring sheet to maintain gaps between the plurality of wires in a state where the wiring sheet is expanded.
摘要翻译：要解决的问题：为了防止探针装置的接触电极从要检查的身体的电极的位移。解决方案：探针装置包括柔性布线板，支撑布线板的支撑体和附接到布线板的间隙保持构件。布线板包括设置在其一个表面上的多条电线和设置在电线上的多个接触电极。间隙保持部件的热膨胀系数比布线片的热膨胀系数低，并且刚性高于布线片材，并且在布线片材被布置的状态下被附着到布线板上以保持多个布线之间的间隙。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2011027995A Inspection device 有权
标题翻译：检查装置
公开(公告)号：JP2011027995A
公开(公告)日：2011-02-10
申请号：JP2009173516
申请日：2009-07-24
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： YAMAUCHI KAZUHIRO , SAITO HIROKI , OSANAI YASUAKI , SAWADA TAKESHI , TAMURA TAKEHIRO
IPC分类号： G02F1/13 , G01M11/00 , G01R1/073 , G01R31/00
摘要： PROBLEM TO BE SOLVED: To prevent deviation between the terminal of an inspection target plate and a probe, at hand-push inspection. SOLUTION: An inspection device for inspecting the inspection target plate includes a probe unit which is brought into contact with the inspection target plate for applying an inspection signal. The probe unit includes a probe base fixed to the frame side of the device; a probe lock which has a base end supported by the probe base and has the probe at a front end thereof which is positioned accurately and supported opposite each terminal of the inspection target plate; and a positional deviation preventing mechanism which supports the inspection target plate to prevent deviation in the inspection target plate. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了防止检查对象板的端子与探头之间的偏移，手动检查。检测对象板的检查装置包括与检查对象板接触的探针单元，用于施加检查信号。探针单元包括固定到装置的框架侧的探针基座; 探针锁，其具有由所述探针基座支撑的基端，并且在其前端具有所述探针，所述探头位于与所述检查靶板的每个端子相对的位置上准确地并且被支撑; 以及位置偏移防止机构，其支撑检查对象板以防止检查对象板的偏差。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2008185570A Probe unit and inspection device 审中-公开
标题翻译：探测单元和检查设备
公开(公告)号：JP2008185570A
公开(公告)日：2008-08-14
申请号：JP2007022034
申请日：2007-01-31
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： OSANAI YASUAKI , MIURA KAZUYOSHI , SAITO HIROKI , FUKUSHI TOSHIO
IPC分类号： G01R1/073 , G02F1/13 , G02F1/1345
摘要： PROBLEM TO BE SOLVED: To accurately keep the position of each needle part by suppressing deflection through reduction of the bending moment that relates to a probe base.
SOLUTION: The probe unit used to inspect a board to be inspected comprises a probe assembly 34, having a needle part electrically in contact with an electrode of a circuit of the board to be inspected; a support part 33 for supporting the probe assembly; and a probe base 32 for integrally supporting the support part. The support part is provided with a suspension block installed in a tip part of the probe base; a slide block, disposed in the tip part of the suspension block for supporting the probe assembly and that is slidably supported so as to absorb repulsive force, when the needle comes in contact with the electrode; and a load-receiving member, installed in a base end part of the probe base for supporting the slide block and that is extended to the slide block and receives repulsive force by abutting against the slide block.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：通过减少与探针基座相关的弯矩来抑制偏转，从而精确地保持每个针部的位置。
解决方案：用于检查要检查的电路板的探针单元包括探针组件34，其具有与待检查的电路板的电路电接触的针部分; 用于支撑探针组件的支撑部33; 以及用于一体地支撑支撑部的探针基座32。支撑部分设置有安装在探针基座的尖端部分中的悬挂块; 滑动块，设置在所述悬挂块的顶端部分中，用于支撑所述探针组件，并且当所述针与所述电极接触时，所述滑动块被可滑动地支撑以吸收排斥力; 以及承载构件，其安装在所述探针基座的基端部，用于支撑所述滑动块，并且延伸到所述滑块并通过抵靠所述滑块接收排斥力。版权所有（C）2008，JPO＆INPIT

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