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1. 发明专利

JP2013200256A Probe device 审中-公开
标题翻译：探测器
公开(公告)号：JP2013200256A
公开(公告)日：2013-10-03
申请号：JP2012069517
申请日：2012-03-26
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , OSANAI YASUAKI , KIMURA TAKESHI , KIYONO YOJI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To provide a probe device which prevents unstable motion of an individual probe element and is capable of preferably coping with higher density of an electrode arrangement in which electrodes are arranged in a plurality of lines along the edge portion of an object to be inspected.SOLUTION: There is provided a probe device in which a probe sheet is supported by a probe block via a support plate, the support plate is protruded from the front edge of the probe block together with the probe sheet, and an elastic member is interposed between the support plate and the probe sheet in a region where at least the support plate and the probe sheet are protruded. This allows the protruded region of the probe sheet to be a laminated structure including the probe sheet, the elastic member and the support plate. Further, an entrance angle of probe elements of the probe sheet is set to an angle smaller than 10 degrees. These configurations make it possible to suppress needle pressure of each probe element within the variation of approximately 1 g even if contact electrodes of the adjacent probe elements are arranged while being displaced in a lengthwise direction of the probe sheet.
摘要翻译：要解决的问题：提供一种防止单个探针元件的不稳定运动的探针装置，并且能够优选地应对电极布置的更高密度，其中电极沿着物体的边缘部分布置在多条线中，检查。解决方案：提供了一种探针装置，其中探针片通过支撑板由探针块支撑，支撑板与探针片一起从探针块的前边缘突出，并且弹性构件在至少支撑板和探针片突出的区域中夹在支撑板和探针片之间。这样就可以使探测片的突出区域成为包括探针片，弹性构件和支撑板的叠层结构。此外，探针片的探针元件的入射角被设定为小于10度的角度。这些构造使得即使在沿着探针片的长度方向移位的同时布置相邻探针元件的接触电极，也可以将每个探针元件的针压抑制在大约1g的变化范围内。

2. 发明专利

JP2012215534A Probe apparatus 有权
标题翻译：探测器
公开(公告)号：JP2012215534A
公开(公告)日：2012-11-08
申请号：JP2011105945
申请日：2011-05-11
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , YASUDA TAKAO , OSANAI YASUAKI , YOKOYAMA MAKOTO , FUKUSHI TOSHIO , KIMURA TAKESHI
IPC分类号： G01R1/073
摘要： PROBLEM TO BE SOLVED: To surely connect a contact electrode of a probe apparatus to an electrode of an inspection object.SOLUTION: The probe apparatus includes a probe block extended in a front-back direction, a flexible wiring sheet support attached to the lower side of a front part of the probe block and a wiring sheet supported on the lower side of the wiring sheet support. The wiring sheet support includes an extension part extended in an oblique direction descending to the front. The wiring sheet includes an extended part supported on the lower side of the extension part. Further, the wiring sheet includes a sheet-like member, a plurality of wires formed on the sheet-like member and contact electrodes formed on the front parts of respective wires. Each contact electrode includes a front end face erected from the wire, an undersurface extended linearly or arcuately in the oblique direction and a corner part formed by the front end face and the undersurface.
摘要翻译：要解决的问题：将探针装置的接触电极可靠地连接到检查对象的电极。解决方案：探针装置包括沿前后方向延伸的探针块，安装在探针块的前部的下侧的柔性布线片支架和支撑在布线的下侧的布线片表单支持。布线板支撑件包括沿着向前下降的倾斜方向延伸的延伸部。布线板包括支撑在延伸部分的下侧的延伸部分。此外，布线板包括片状构件，形成在片状构件上的多根线和形成在各个线的前部的接触电极。每个接触电极包括从电线竖立的前端面，在倾斜方向上线性或弧形延伸的下表面和由前端面和下表面形成的拐角部分。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012037362A Probe unit and inspection device 有权
标题翻译：探测单元和检查设备
公开(公告)号：JP2012037362A
公开(公告)日：2012-02-23
申请号：JP2010177274
申请日：2010-08-06
申请人： Micronics Japan Co Ltd , 株式会社日本マイクロニクス
发明人： NARAOKA SHUJI , KIMURA TAKESHI , FUKUSHI TOSHIO
IPC分类号： G01R1/073 , G01R1/067 , G01R31/00 , G02F1/13 , G02F1/1345
摘要： PROBLEM TO BE SOLVED: To maintain the contact accuracy high between each contactor of a film type probe and each electrode of an object to be inspected.SOLUTION: A probe unit is so constituted that: each contactor is provided at the tip of the film type probe; the film type probe is supported by a probe block in a state where the tip extends from the probe block with free flexibility; a pressure member has a pressure surface contacting with the tip of the film type probe and is swingably supported by the probe block in a state where the pressure surface faces the tip of the film type probe; and a gap is formed between the pressure surface of the pressure member and the tip of the film type probe.
摘要翻译：要解决的问题：为了保持膜型探针的每个接触器与待检查物体的每个电极之间的接触精度高。解决方案：探针单元的结构如下：每个接触器设置在膜型探针的尖端处; 薄膜型探针由探针块支撑，其中尖端从探针块以自由的灵活性延伸; 压力构件具有与膜型探针的尖端接触的压力表面，并且在压力表面面向薄膜型探针的尖端的状态下由探针块可摆动地支撑; 并且在压力构件的压力表面和膜型探针的尖端之间形成间隙。版权所有（C）2012，JPO＆INPIT

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