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    • 3. 发明专利
    • VACUUM DEPOSITION METHOD
    • JP2000282221A
    • 2000-10-10
    • JP8583699
    • 1999-03-29
    • MATSUSHITA ELECTRIC IND CO LTD
    • ISHIDA MIKIOYASUDA OSAMUNISHIGORI YOSHITOMOMORIWAKI MICHIYASUISHIDA KENJI
    • H01G4/015C23C14/24H01G4/18
    • PROBLEM TO BE SOLVED: To maintain the effect of preventing the deposition of a vapor depositing material on masking tape over the long length by retaining the distribution of the molecular weight of oil for preventing vapor deposition in the longitudinal direction. SOLUTION: As oil for preventing vapor deposition, liq. paraffin with molecular weight in the range of 194 to 562 is used. In the case the oil is evaporated by an evaporator, there is a tendency that the evaporation occurs from the low molecular part at first, and it deposits on masking tape, and by the deposition of the one with molecular weight part from 194 to 392 suitable for application on the tape, the effect of screening a vapor depositing material can be obtd. Oil on the high molecular side from 392 not only has the effect less, but also has the tendency to remain in the evaporator and cause sudden evaporation. Thus, fresh oil is fed by the amt. to be required, an oil exhausting mechanism is added on a space between the oil evaporator and an exhausting tank, and the amt. same as that to be fed is exhausted, by which the oil in the molecular weight part (from 194 to 392) in the range effective for screening the vapor depositing material can easily be maintained in the longitudinal direction.
    • 4. 发明专利
    • VACUUM DEPOSITING METHOD
    • JP2000178718A
    • 2000-06-27
    • JP36262698
    • 1998-12-21
    • MATSUSHITA ELECTRIC IND CO LTD
    • NISHIGORI YOSHITOMOMORIWAKI MICHIYASUISHIDA MIKIOYASUDA OSAMUTAMAKI SHIGERU
    • H01G4/015C23C14/04C23C14/24H01G4/18
    • PROBLEM TO BE SOLVED: To prevent the deposition of vapor depositing material onto a tape by executing atomizing or coating by contact transfer of oil for preventing vapor deposition on the face of a masking tape which runs together with a vapor depositing substrate while being brought into contact with it at a position on the upstream more than the vapor depositing position in a vacuum depositing chamber and the contact starting position with the vapor depositing substrate. SOLUTION: As oil for preventing vapor deposition, liq. paraffin of 194 to 562 molecular weight is preferable. A coating method in which an oil evaporator is used, and an endless tape is atomized with oil as vapor is preferable. At this time, the total molecular number of the liq. paraffin of 194 to 394 molecular weight is desirably controlled to 10 to 50% of the molecular number of the whole oil. A box of metal or the like is arranged at the back side of the tape at a position in which the oil is applied on the tape, and the scattering oil is trapped to suppress the increase of the pressure in the vacuum depositing chamber. In the case that the vapor deposition film resistance is 2±0.5 Ω/cm, the depositing thickness of Al in the masking tape is 0.2 mm, and vapor deposition of 32,000 m is made possible without generating the peeling and releasing of Al on the tape.