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    • 4. 发明专利
    • Observation technique due to coherent vibration
    • 观测技术由于共振
    • JP2007263594A
    • 2007-10-11
    • JP2006085627
    • 2006-03-27
    • Japan Fine Ceramics Center財団法人ファインセラミックスセンター
    • FUKUNAGA KEIICHIHIRAYAMA TSUKASA
    • G01N23/04G01N21/27G01N21/45G02B21/00
    • PROBLEM TO BE SOLVED: To provide a technique for reducing the effect of the vibration acting on an observation target when the observation target is observed by allowing vibration to act on the observation target.
      SOLUTION: A plurality of vibrations having coherency are produced and the intensity of the vibration acting on the observation target by the interference of a plurality of the vibrations is set to 1/2 or below of the average intensity of the vibration at the position of the observation target. By shifting a focus from the observation target, the focus shift image containing the hologram of the observation target is formed on an observation surface from the vibration interacting with the observation target. Then, the vibration at the position of the observation target is regenerated from the focus shift image formed on the observation surface.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种通过允许振动作用在观察目标上来观察观察目标时减小作用于观察目标的振动的影响的技术。 解决方案:产生具有一致性的多个振动,并且通过多个振动的干涉作用在观察目标上的振动的强度被设定为在该振动的平均强度的1/2或更低 观察目标的位置。 通过从观察目标移动焦点,从观察对象的相互作用的振动观察表面形成包含观察对象的全息图的聚焦偏移图像。 然后,从形成在观察面上的聚焦移动图像再生观察对象位置的振动。 版权所有(C)2008,JPO&INPIT
    • 7. 发明专利
    • Manufacture method of sample, and device for removing damage layer
    • 制造方法,以及用于去除损伤层的装置
    • JP2013234855A
    • 2013-11-21
    • JP2012105565
    • 2012-05-07
    • Japan Fine Ceramics Center一般財団法人ファインセラミックスセンター
    • SATO TAKASHIYAMAMOTO KAZUOHIRAYAMA TSUKASA
    • G01N1/28G01N1/32G01N27/02H01J37/305
    • PROBLEM TO BE SOLVED: To provide a sample suitable for the on-site observation of an electrical element in an operation state.SOLUTION: In order to make a sample for the on-site observation of an electrical element in an operation state, a sample piece is cut out from an electrical element, so that a thin film part 920 is formed on a sample piece 910a by focused ion beam method. Subsequently the thin film region including the thin film part 920 is irradiated with inert gas ion beams. A damage layer which is formed during formation of the thin film part 920 and affects the action of the sample piece 910a as an electrical element is thus removed. When the damage layer is removed, predefined electrical characteristics of the sample piece 910a are evaluated for determination of whether the sample piece 910a is workable as an electrical element.
    • 要解决的问题:提供适于在操作状态下现场观察电气元件的样品。解决方案:为了在操作状态下制作用于现场观察电气元件的样品,样品 从电气元件切出片,从而通过聚焦离子束法在样品片910a上形成薄膜部分920。 随后,用惰性气体离子束照射包括薄膜部分920的薄膜区域。 因此,去除了在形成薄膜部分920期间形成并影响作为电气元件的样品片910a的作用的损伤层。 当去除损伤层时,评估样品片910a的预定电特性以确定样品片910a是否可作为电元件。
    • 8. 发明专利
    • Observation device for observing form of stress application region of film-like specimen, and observation jig
    • 用于观察薄膜样品应力区域的观察装置,以及观察JIG
    • JP2014191969A
    • 2014-10-06
    • JP2013065957
    • 2013-03-27
    • Japan Fine Ceramics Center一般財団法人ファインセラミックスセンター
    • HAMANAKA TADASHIKATO TAKEHARUHIRAYAMA TSUKASAYOKOE DAISAKUYOSHIDA RYUJI
    • H01J37/20
    • PROBLEM TO BE SOLVED: To more easily observe a form of a stress application region in the case where a local stress is applied to a film-like specimen.SOLUTION: An observation device for observing a form of a stress application region of a film-like specimen SPC comprises: a microscope; a base 210 disposed within a preset distance from an objective lens of the microscope; a height adjusting screw 220 which is provided in the base 210 closer to the objective lens and extends in an optical axis direction; a specimen holder 230 in which a screw hole 232 is provided into which the height adjusting screw 220 can be threaded and which penetrates the holder in an optical axis direction, and the specimen SPC is fixed over the screw hole 232; and a blade holder 242 in which a blade 244 is provided for locally applying a stress to the specimen SPC and which is configured to be abutted to the height adjusting screw 220 closer to the objective lens. A distance between an end of the height adjusting screw 220 closer to the objective lens and the base 210 is kept constant.
    • 要解决的问题:在局部应力施加到薄膜样品的情况下,更容易观察应力施加区域的形式。解决方案:一种用于观察膜状试样的应力施加区域形式的观察装置, 样品SPC包括:显微镜; 设置在距显微镜的物镜预定距离内的基座210; 高度调节螺钉220设置在靠近物镜的基座210中并沿光轴方向延伸; 其中设置有螺纹孔232的样本保持器230,高度调节螺钉220可以被螺纹连接并且沿光轴方向穿过保持器,并且样本SPC被固定在螺钉孔232上; 以及刀片保持器242,其中设置刀片244用于对样本SPC局部施加应力,并且构造成抵靠靠近物镜的高度调节螺钉220。 高度调节螺钉220的靠近物镜的端部与基座210之间的距离保持恒定。
    • 9. 发明专利
    • Sample support stage for observing three-dimensional structure, protractor and three-dimensional structure observing method
    • 观察三维结构,三维结构和三维结构观察方法的样本支持阶段
    • JP2009070604A
    • 2009-04-02
    • JP2007235315
    • 2007-09-11
    • Japan Fine Ceramics CenterUniv Nagoya国立大学法人名古屋大学財団法人ファインセラミックスセンター
    • YOSHIDA KENTAHIRAYAMA TSUKASAYAMAMOTO KAZUONAE RAITANAKA NOBUOSAITO AKIRAYAMAZAKI JUN
    • H01J37/20
    • PROBLEM TO BE SOLVED: To provide a sample support stage for observing a three-dimensional structure of high versatility with a sample constitution while adopting a constitution capable of always holding a sample in the visual field center of an electron microscope, a protractor and a three-dimensional structure observing method.
      SOLUTION: This sample support stage 30 has a base 31 and a sample support member 32 rotatably arranged to the base 31, and is arranged via a holder 10 in a tip part of a rotary member 16 rotatable in a ± specific angle range from a reference attitude. The protractor 40 marked with a plurality of angle graduations at a specific angle interval is installed on the sample support stage 30. While adjusting an index 34 of the sample support member 32 to the graduations 42 of the protractor 40, a plurality of turning angle states rotated stepwise at a specific angle interval to the base 31 are maintained, and the sample can be observed from all the directions of 360° by successively rotating a rotary member at the ± specific angle in the respective turning angle states.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供一种用于在采用能够将样品始终保持在电子显微镜的视场中心的构造的情况下用样品构成观察高通用性的三维结构的样品支撑台,量角器 和三维结构观察方法。 解决方案:该样品支撑台30具有基部31和可旋转地布置到基部31的样品支撑构件32,并且经由支架10布置在旋转构件16的可在±特定角度范围内旋转的顶端部分 从参考态度。 在样品支撑台30上安装有以特定角度间隔标记有多个角度刻度的量角器40。在将样品支撑构件32的折痕34调整到量角器40的刻度42时,多个转动角状态 保持与基座31成一定角度的间隔逐步旋转,并且可以通过在旋转角度状态下以±特定角度继续旋转旋转部件,从360°的所有方向观察样本。 版权所有(C)2009,JPO&INPIT