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1. 发明专利

JP2003045370A Scanning electron microscope 审中-公开
标题翻译：扫描电子显微镜
公开(公告)号：JP2003045370A
公开(公告)日：2003-02-14
申请号：JP2001233767
申请日：2001-08-01
申请人： Hitachi Ltd , Hitachi Sci Syst Ltd , 株式会社日立サイエンスシステムズ , 株式会社日立製作所
发明人： ITO HIROYUKI , NAKAGAWA MINE , KANEOKA NORIYUKI
IPC分类号： G01N23/207 , G01N23/225 , H01J37/20 , H01J37/21
摘要： PROBLEM TO BE SOLVED: To provide a scanning microscope enabled to observe and analyze in a focalized state at all times even when a specimen is tilted and rotating against the direction of scanning.
SOLUTION: The rotational angle θ of a specimen 7 is calculated by a control part 16 depending on arbitrary coordinates (x, y) of two points on one scanning line of an electron beam 4 in the observation/analysis region of the specimen 7, and a focus current variation amount ΔI at every pixels are calculated depending on the rotational angle θ, and a deviation of focus is prevented by superposing the variation amount on a focus current of an object lens 6. A focalized image is easily obtained for the entire observation/analysis region of the specimen 7 even when the specimen is tilted and rotating against the direction of scanning.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种扫描显微镜，即使当试样相对于扫描方向倾斜并旋转时，也可以始终在聚焦状态下观察和分析。解决方案：根据样本7的观察/分析区域中的电子束4的一条扫描线上的两点的任意坐标（x，y），通过控制部分16计算样本7的旋转角度θ，根据旋转角θ计算每个像素的聚焦电流变化量ΔI，并且通过将变化量叠加在物镜6的聚焦电流上来防止聚焦的偏差。容易获得用于整个观察的聚焦图像 /分析区域，即使样品相对于扫描方向倾斜并旋转。

2. 发明专利

JP2007035649A Charged particle beam apparatus 有权
标题翻译：充电颗粒光束装置
公开(公告)号：JP2007035649A
公开(公告)日：2007-02-08
申请号：JP2006270249
申请日：2006-10-02
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KANEOKA NORIYUKI , KAWAMURA KATSUAKI
IPC分类号： H01J37/22
摘要： PROBLEM TO BE SOLVED: To realize excellent operability not requiring readjustment of contrast and/or brightness when switching detection systems, and to make relation of images based on signals generated by a plurality of detection systems intelligible.
SOLUTION: This charged particle beam device comprises a charged-particle beam source, a scanner scanning a charged particle beam, a plurality of detection systems independently generating a plurality of signals obtained from a sample by scan, a computer 19 comprising a pointing device, a signal selector, an image display 22 controlled by the computer, and a controller controlling the signal selector to display the image of the sample based on the signal generated by an arbitrary selected detection system on the image display 22. The image display displays an automatic adjustment button for the signal generated by the selected detection system and an automatic adjustment button for the signal generated by a detection system among the plurality of detection systems other than the selected detection system as well as the image of the signal generated by the selected detection system and automatically adjusts the contrast and/or the brightness of the signal corresponding to the selected automatic adjustment button.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了实现在切换检测系统时不需要重新调整对比度和/或亮度的良好的可操作性，并且基于由多个检测系统产生的信号可理解的图像的关系。解决方案：该带电粒子束装置包括带电粒子束源，扫描带电粒子束的扫描仪，多个独立地生成通过扫描从样本获得的信号的检测系统，计算机19包括指向设备，信号选择器，由计算机控制的图像显示器22以及控制信号选择器的控制器，以基于由任意选择的检测系统在图像显示器22上产生的信号显示样本的图像。图像显示器显示用于由所选择的检测系统产生的信号的自动调整按钮以及除了所选择的检测系统之外的多个检测系统中的检测系统产生的信号的自动调整按钮以及由所选择的检测系统生成的信号的图像检测系统，并自动调整对应于所选择的信号的对比度和/或亮度自动调节按钮。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2000036276A CHARGED PARTICLE BEAM DEVICE 失效
公开(公告)号：JP2000036276A
公开(公告)日：2000-02-02
申请号：JP20481898
申请日：1998-07-21
申请人： HITACHI LTD
发明人： KANEOKA NORIYUKI , KAWAMURA KATSUAKI
IPC分类号： G01N23/225 , H01J37/22
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam device having an excellent operability and having no necessity of readjustment of contrast and brightness at the time of switching a detection system. SOLUTION: When a secondary electron signal is selected by a signal selection switch on an operation image-plane by operating a mouse 21, a control means 14 controlled by a computer 19 displays the secondary electron signal on an image indicator 22 by controlling a switch 17. At the same time, when a contrast adjusting slide bar is moved by a mouse cursor on the operation image-plane, amplification degrees of a secondary electron amplifier 15 and a reflected electron amplifier 16 are relatedly adjusted in response to it, and when a brightness adjusting slide bar is moved, bias values of the amplifiers are relatedly adjusted in response to it. Therefore, when a reflected electron signal is selected by the mouse cursor and an image thereof is displayed thereafter, readjustment of the contrast and the brightness of the image is not required.

4. 发明专利

JPH1021864A SCANNING TYPE ELECTRONIC MICROSCOPE AND ANALOGOUS EQUIPMENT 失效
公开(公告)号：JPH1021864A
公开(公告)日：1998-01-23
申请号：JP16895996
申请日：1996-06-28
申请人： HITACHI LTD
发明人： YAMADA OSAMU , KAGEYAMA KASHIO , KANEOKA NORIYUKI
IPC分类号： H01J37/22 , H01J37/153 , H01J37/21
摘要： PROBLEM TO BE SOLVED: To improve operability without requiring switching operation by dividing an image display area into two or more sections, operating a pointing device on the respective divided area, and actuating a different adjustment function. SOLUTION: A secondary electron beam generated from a sample 7 is detected by means of a secondary electron beam detector 8 and amplified by means of an amplifier 10, after which two-dimensional image data is composed by means of an image processing device 11 among a controller 9 and displayed on an image display area 16 set in the display screen of an image display 15 via a calculator 12. This image display area 16 is divided into two or more areas 17 to 21. A pointing device 13 having an indicating switch 14 connected to the calculator 12 is moved, a position of a position display marker 22 to be displayed on the display screen is moved, and a coordinate value at that position is obtained.

5. 发明专利

JPH07272667A CONVERGENT ION BEAM PROCESSING DEVICE 失效
公开(公告)号：JPH07272667A
公开(公告)日：1995-10-20
申请号：JP5850994
申请日：1994-03-29
申请人： HITACHI LTD
发明人： KANEOKA NORIYUKI , ONISHI TAKESHI
IPC分类号： H01J37/22 , H01J37/256 , H01J37/30 , H01J37/305
摘要： PURPOSE:To provide a convergent ion beam processing device capable of monitoring the cross-sectional image of a test piece during processing. CONSTITUTION:A convergent ion beams processing device is provided with an image memory 11, an image memory control means 12 and a display 13. The image memory control means 12 stores an optional cross-sectional image of a test piece 6 during processing in the image memory 11 and images stored in the image memory 11 are displayed on the display 13.

6. 发明专利

JPH09306407A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH09306407A
公开(公告)日：1997-11-28
申请号：JP12434596
申请日：1996-05-20
申请人： HITACHI LTD
发明人： KANEOKA NORIYUKI , KAGEYAMA KASHIO
IPC分类号： H01J37/22 , H01J37/21
摘要： PROBLEM TO BE SOLVED: To provide an equipment, which can detect the optimal condition of a focal point of a lens so as to accurately perform the automatic focal point control in a short time, by providing a deflecting signal generating means, which is formed of an oscillator a scanning counter, a conversion table and a D/A converter. SOLUTION: Electron beam 2 emitted from an electron gun 1 is throttled narrow by an electron lens 3. The electron lens 3 has a lens working function of a magnetic field to be generated by flowing the current in a coil, and an electron lens control circuit 10 controls the current of the coil so that the electron lens 3 works at a focal distance indicated by a control CPU 20. The electron beam 2, which is throttled narrow by the electron lens 3, is deflected by the two-dimensional scanning in a direction X and a direction Y of deflecting units 4, 5. Deflecting amplifiers 11, 12 controls the current to be flowed to coils of the deflecting units 4, 5. When a sample is irradiated with the electron beam 2, secondary grains 8 such as secondary electron is generated in response to the shape and the material of the sample. The secondary grains 8 are detected by a secondary grain detection unit 9 and amplified, and stored in an image memory 14.

7. 发明专利

JPH05292491A 失效
公开(公告)号：JPH05292491A
公开(公告)日：1993-11-05
申请号：JP9406892
申请日：1992-04-14
申请人： HITACHI LTD
发明人： SHIMURA TAKANORI , KINEBUCHI YUTAKA , KANEOKA NORIYUKI
IPC分类号： H04N5/232 , H04N7/14
摘要： PURPOSE:To transmit good sized human figure images to a transmission destination by measuring the distance between a camera and the human figure and controlling the viewing angle of a zoom lens. CONSTITUTION:This method is composed of a camera 2 to which a zoom lens 37 is attached, focal distance measuring circuit 30 to measure the distance from a human figure 36 to the camera 2, and viewing angle control circuit 31 to control the viewing angle of the zoom lens. And, the viewing angle theta0 of the zoom lens 37 is set beforehand when the distance between the human figure 36 and the camera 2 is d0, for the human figure 36 to be a good size inside a display. Further, when a result (d) which the distance between the human figure 36 and the camera 2 is measured at the focal distance measuring circuit 30 is (d)=d0/2, the viewing angle control circuit 31 sets the viewing angle theta to theta=2Xtheta0. Inversely, when the result (d) which the distance between the human figure 36 and the camera 2 is measured at the focal distance measuring circuit 30 is (d)=2Xd0, the viewing angle control circuit 31 sets the viewing angle theta to be theta=theta0/2.

8. 发明专利

JPH04266293A COLOR PICTURE SIGNAL DECODER 失效
公开(公告)号：JPH04266293A
公开(公告)日：1992-09-22
申请号：JP2708691
申请日：1991-02-21
申请人： HITACHI LTD
发明人： SHIMURA TAKANORI , TAKIZAWA MASAAKI , KANEOKA NORIYUKI , KINEBUCHI YUTAKA , KUDO SHIGEMI
IPC分类号： G09G5/02 , H04N5/44 , H04N9/74 , H04N11/04
摘要： PURPOSE:To attain decoding and display of two kinds of luminance and chrominance signals with two frame memories (FM) only by allocating a decoding area and a display area of a luminance signal to one FM and allocating a decoding area and a display area of a chrominance signal to the other FM. CONSTITUTION:When an FM changeover control circuit 11 receives a decoding end signal 201 representing the end of decoding of one pattern from a decoding circuit 3 and receives a frame switching signal 202 from a display control circuit 7, the circuit 11 inverts an area selection signal 101. As a result, an FM decoding area and a display area are switched. Then the decoding circuit 3 writes a luminance signal to an area Y2 and a chrominance signal to an area C2. Thus, the FM switching control circuit 11 displays a decoded picture while selecting the decoded area and the display area.

9. 发明专利

JPH09259805A CHARGED PARTICLE BEAM RADIATOR 失效
公开(公告)号：JPH09259805A
公开(公告)日：1997-10-03
申请号：JP6060596
申请日：1996-03-18
申请人： HITACHI LTD
发明人： KAGEYAMA KASHIO , KANEOKA NORIYUKI
IPC分类号： H01J37/20 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide such a charged particle beam radiator suitable for effectively making visual field selection of a sample while avoiding any mutual contact between parts. SOLUTION: A sample slanting (R) mechanism 7 and a sample Z movement mechanism 6 are driven by a motor 13 and controlled by a calculation controller 17. Pulses from an encoder 15 are counted by a coordinates counter 16 and this result is read in the calculating controller 17. As those mutually interfering shafts, a distance Z between an objective lens 9 and a sample 2 surface, and a slant angles T of the sample are provided within a moving range of a sample. When either one of those Z, T shafts is driven and it reaches the limit of its movable range (allowable range), the other shaft is automatically driven in such a direction as allowing the abovementioned drive to be realized.

10. 发明专利

JPH0354625A CLUSTER TYPE MAGNETIC DISK DEVICE 失效
公开(公告)号：JPH0354625A
公开(公告)日：1991-03-08
申请号：JP18877289
申请日：1989-07-24
申请人： HITACHI LTD
发明人： KANEOKA NORIYUKI , OYAMA MITSUO , KATO KANJI , KAWAGUCHI HISAMITSU , FUJISAWA HIROMICHI
IPC分类号： G06F3/06 , G11B17/22
摘要： PURPOSE:To input/output plural files successively by satisfying fast transfer speed by requested by host equipment, and comprising the device of the minimum number of magnetic disk devices corresponding to the capacity of a data base to store data. CONSTITUTION:The device is comprised of (n) data memory devices 15 having the magnetic disk device 1, an input/output buffer 3 with the capacity of one cylinder of the magnetic disk device 1 connected to each of the memory devices, respectively, and a multi-disk controller 4 which controls them. Assuming data transfer speed from the magnetic disk device to the input/output buffer as tByte/sec, and the rotating speed of the magnetic disk device as Rrps, the device is comprised of the minimum number of data memory devices which satisfies conditions I and II as equation II in the case of being less than equation I when the minimum seek time of the magnetic disk device exceeds a time M/ Tsec to transfer the data of MByte of one input/output buffer to the host equipment. In such a way, it is possible to input/output the plural files large in memory capacity successively and at high speed in spite of the size of the file.

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