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1. 发明专利

JP2003021605A Pattern inspecting method and device 有权
标题翻译：模式检查方法和设备
公开(公告)号：JP2003021605A
公开(公告)日：2003-01-24
申请号：JP2001207213
申请日：2001-07-09
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： HIROI TAKASHI , WATANABE MASAHIRO , TANAKA MAKI , KUNI TOMOHIRO , SHISHIDO CHIE , MIYAI YASUSHI , NARA YASUHIKO , ISOBE MITSUNOBU
IPC分类号： G01N23/00 , G01N21/956 , G06T1/00 , G06T7/00 , H01J37/22 , H01L21/66
CPC分类号： G06T7/001 , G06T2207/30148
摘要： PROBLEM TO BE SOLVED: To resolve problems in a pattern inspecting device acquiring images by repeating stage scanning, determining a place with a different pattern as a defect candidate by comparing images of places with detection images stored in detected order and expected to have the same pattern, and determining a place determined as a defect candidate twice as a true defect where there are deterioration in various types of error defect detecting performance and un- inspectable areas respectively due to comparison of images acquired by different stage scanning and an occurrence of a place which can be inspected only once.
SOLUTION: A defect detected in highly sensitive conditions is regarded as a defect candidate, and a critical threshold value (a value where it is determined that there is a defect when a threshold is not more than this value) of the defect candidate is acquired by an image circuit or processing an image of the defect candidate by software. A plurality of inspection results can be acquired from one inspection by comparing the acquired critical threshold value with a plurality of threshold values.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：为了解决通过重复舞台扫描获取图像的图案检查装置中的问题，通过比较具有以检测顺序存储的并且预期具有相同图案的检测图像的位置的图像来确定具有不同图案的位置作为缺陷候选并且确定作为缺陷候选确定的两个作为真实缺陷的位置，其中由于通过不同阶段扫描获取的图像与发生的位置的发生而分别地存在各种类型的错误缺陷检测性能和不可检查区域的恶化，只能检查一次。解决方案：在高度敏感的条件下检测到的缺陷被认为是缺陷候选，并且通过以下方式获得缺陷候选的临界阈值（当阈值不大于该值时确定存在缺陷的值）图像电路或通过软件处理缺陷候选者的图像。通过将所获取的临界阈值与多个阈值进行比较，可以从一次检查获得多个检查结果。

2. 发明专利

JP2001005961A DEVICE AND METHOD FOR INSPECTING FINE DEFECT AND POSITIONAL DEVIATION CALCULATING CIRCUIT 失效
公开(公告)号：JP2001005961A
公开(公告)日：2001-01-12
申请号：JP17118599
申请日：1999-06-17
申请人： HITACHI LTD
发明人： YOSHIDA ATSUSHI , MAEDA SHUNJI , OKABE TAKASHI , MIZUMOTO HISASHI , ISOBE MITSUNOBU
IPC分类号： G01N21/88 , G01N21/94 , G01N21/956 , G06T1/00 , H01L21/66 , G06T7/00
摘要： PROBLEM TO BE SOLVED: To detect an image with small pixel dimensions to detect a fine defect on an object substrate to be inspected having small patterns, to fast perform aligning process of a wide range because the aligning range becomes equivalently wide at that time and also to make an image processing circuit fast and also small-sized. SOLUTION: An image of pixel dimensions of =±4 pixels. Also, a fast and small image processing part 13 is realized by mounting image processing circuits 10 and 11 composed of an LSI capable of (k) channel processing on one substrate 15.

3. 发明专利

JPS60151502A CONVERTER FOR STRAIN GAUGE SENSOR DATA 失效
公开(公告)号：JPS60151502A
公开(公告)日：1985-08-09
申请号：JP716484
申请日：1984-01-20
申请人： HITACHI LTD
发明人： ISOBE MITSUNOBU
IPC分类号： G01B7/00 , G01B7/16
摘要： PURPOSE:To reduce the circuit quantity of a strain gauge sensor data converter and to calibrate the sensitivity of a strain gauge automatically by controlling a variable gain amplifier circuit which is used in common to plural strain gauges on the basis of gain calibration data from nonvolatile memory. CONSTITUTION:When a calibration operation start signal is applied, a control operation circuit 9 selects plural strain gauges which are applied previously with standard strain successively and predetermined gain calibration data is supplied to the variable gain amplifier circuit 6. Then, a digital output passed through a sample holding circuit 7 and an A/D converting circuit 8 is compared with the standard value to determine gain calibration data on respective sensors 3 and 4, which are stored in the nonvolatile memory 10 to calibrate the sensitivity of the strain gauge sensors automatically. Then, normal data operation conversion is carried out through the variable gain amplifier circuit common to the strain gauge sensors to eliminate the need for an amplifier circuit for every strain gauge sensor, thereby reducing the circuit quantity of the strain gauge sensor data converter.

4. 发明专利

JPS59224278A REGULATOR 失效
公开(公告)号：JPS59224278A
公开(公告)日：1984-12-17
申请号：JP9583383
申请日：1983-06-01
申请人： HITACHI LTD
发明人： GOTOU TETSUYA , KOUNO MICHINAGA , OOWADA SHIYUNICHI , ISOBE MITSUNOBU , SEKIGUCHI KOUICHIROU
IPC分类号： B25J9/16 , B25J9/00 , H05K13/00

5. 发明专利

JPS5959393A Automatic regulating and checking method 失效
标题翻译：自动调节和检查方法
公开(公告)号：JPS5959393A
公开(公告)日：1984-04-05
申请号：JP16831182
申请日：1982-09-29
申请人： Hitachi Ltd
发明人： SEKIGUCHI KOUICHIROU , GOTOU TETSUYA , KOUNO MICHINAGA , ISOBE MITSUNOBU
IPC分类号： G07C11/00 , B25J19/00 , B25J19/04

6. 发明专利

JPS598443A Digital signal transmitter 失效
标题翻译：数字信号发生器
公开(公告)号：JPS598443A
公开(公告)日：1984-01-17
申请号：JP11623082
申请日：1982-07-06
申请人： Hitachi Ltd
发明人： ISOBE MITSUNOBU
IPC分类号： H04J3/00 , H04J3/04
CPC分类号： H04J3/047
摘要： PURPOSE:To transmit a multichannel signal by a simple circuit, by applying a digital phase modulation to each digital signal so as to include clock information and obtaining a synchronizing signal at a fixed level and transmitting the signal by time-division and multiplexing to demodulate the signal. CONSTITUTION:The 1st channel digital signal (a) from an input terminal 6 is supplied to a multiplexer 7 and a polarity inverting circuit 9, and a signal (b) having the polarity inverted is supplied to a multiplexer 8. The 2nd, the 3rd- digital signals are supplied respectively to the multiplexers 7, 8, and clock signals phi1, phi1' and a switching signal (d) are supplied to the multiplexers 7, 8. The multiplexers 7, 8 sample a channel designated from the switching signal (d) by the signals phi1, phi1' to output the result. The digital signal of each channel is transmitted by time-division and multiplexing from a photoelectric converter 15 to transmit the signal, the signal is demodulated at a receiving side and a multichannel signal is transmitted by a simple circuit.
摘要翻译：目的：通过简单的电路传输多通道信号，通过对每个数字信号进行数字相位调制，以便包括时钟信息并获得固定电平的同步信号，并通过时分复用来发送信号，以解调信号。构成：来自输入端子6的第1通道数字信号（a）被提供给多路复用器7和极性反转电路9，并且具有极性反转的信号（b）被提供给多路复用器8.第二，第三 - 数字信号分别提供给多路复用器7,8，并且时钟信号phi1，phi1'和切换信号（d）被提供给多路复用器7,8。多路复用器7,8对从切换信号（ d）由信号phi1，phi1'输出结果。每个信道的数字信号通过光电转换器15的时分复用传输，发送信号，在接收端解调信号，并通过简单的电路发送多信道信号。

7. 发明专利

JPS5842101B2 失效
公开(公告)号：JPS5842101B2
公开(公告)日：1983-09-17
申请号：JP6434078
申请日：1978-05-31
申请人： HITACHI LTD
发明人： TANEDA KOKI , KOBAYASHI KOJI , YANO KYOSHI , ISOBE MITSUNOBU , SUGIMOTO NOBORU
IPC分类号： B65H54/28 , H01B13/00 , H01F41/06

8. 发明专利

JPS57195337A METHOD AND DEVICE FOR DETECTING DISK INFORMATION TRACK 失效
公开(公告)号：JPS57195337A
公开(公告)日：1982-12-01
申请号：JP7809881
申请日：1981-05-25
申请人： HITACHI LTD
发明人： SATOU MITSUO , ISOBE MITSUNOBU
IPC分类号： G11B7/09 , G11B7/095
摘要： PURPOSE:To detect the presence and eccentricity of a track by measuring the quantity of light through a shielding plate where light diffracted by a track on a disk other than diffracted light of degree 0 passes. CONSTITUTION:A shielding plate 10 is so shaped that diffracted light other than diffracted light of degree 0 of diffracted light of degree (n) diffracted by an information track on a disk 6 passes through the plate 10. The size of a spot beam 8 converged onto the disk 6 is large enough to cover plural information tracks. When there is no information present in the irradiate spot beam 8, its reflected beam does not reaches a photodetector 12 because it can not pass through the shielding plate 10. When the spot beam 8 illuminates some information track and the disk is eccentric, diffracted light from the information track varies in quantity with the number of information tracks irradiated with the spot beam 8, so the eccentricity of the disk 6 is detected by the variation in the output of the photodetector 12.

9. 发明专利

JP2001124530A METHOD AND APPARATUS FOR DETECTING SOLID SHAPE AND METHOD AND APPARATUS FOR INSPECTION 失效
公开(公告)号：JP2001124530A
公开(公告)日：2001-05-11
申请号：JP30561499
申请日：1999-10-27
申请人： HITACHI LTD
发明人： KOSHISHIBA HIROYA , OKUDA HIROTO , HONDA TOSHIFUMI , ISOBE MITSUNOBU , YOSHIMURA KAZUSHI , KOBAYASHI HARUOMI
IPC分类号： G01B11/24 , G01B11/06 , G01B11/245
摘要： PROBLEM TO BE SOLVED: To inspect the solid shape of an object under inspection with high accuracy and at high speed. SOLUTION: A slit light illuminates an object 1 under inspection through an objective 15, a reflected light from the irradiated region is reflected by a perforated mirror 14 and branched by beam splitters 18a, 18b on three optical paths, after passing through an aperture restriction 16 and an image-forming lens 17. Line sensors 7a, 7b are provided for each branch optical path, the line sensor 7a is disposed in front of the focal plane, the line sensor 7b is disposed behind the focal plane, the line sensors 7a, 7b are positionally adjusted so that n-th detection pixels of the sensors 7a, 7b receive the image of n-th unit regions on the slit light irradiated region of the object 1, the defocus quantity of the images on the planes of the light sensors 7a, 7b differs, depending on the unit region height on the slit light irradiated region of the object 1 and cells of the light sensors 7a, 7b detect the light quantity, corresponding to the defocus quantity.

10. 发明专利

JP2000356512A VISUAL INSPECTION SYSTEM AND VISUAL INSPECTION METHOD 失效
公开(公告)号：JP2000356512A
公开(公告)日：2000-12-26
申请号：JP16715499
申请日：1999-06-14
申请人： HITACHI LTD
发明人： KOSHISHIBA HIROYA , DOI HIDEAKI , ISOBE MITSUNOBU , YOSHIMURA KAZUSHI , KOBAYASHI HARUOMI , SHISHIDO CHIE
IPC分类号： G01B11/24 , G01B11/245 , G01N21/88 , G01N21/94 , G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To reduce costs and shorten a development period by taking images by a line image sensor, and extracting defects by a software process at plurality of personal computers connected by a communication network. SOLUTION: The visual inspection system for inspecting patterns of electronic circuit boards or the like has a group of personal computers 18a-18n connected, e.g. by a local area network 17. For example, the optical image of an object 1 to be inspected by an optical system 4 which moves on an XY stage 3 is taken into a line image sensor 5 of, e.g. a multi-tap output delay integration type or the like and inputted as a digital image signal to a personal computer 6 for image input, or the like. The image data is appropriately selected and distributed from the personal computer 6 and sent to each of personal computers 18a-18n for image processing, where the predetermined process of extracting defects from the detected image data is carried out. A required capability for the processing can be easily changed by increasing, decreasing the number of personal computers or the like manner.

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