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1. 发明专利

JP2014070243A Sensor head for quartz oscillation type film thickness monitor 审中-公开
标题翻译： QUARTZ振荡型薄膜厚度监测器传感器头
公开(公告)号：JP2014070243A
公开(公告)日：2014-04-21
申请号：JP2012216336
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KAMEYAMA HIROKI , KATO NOBORU , FUKUDA HIROSHI
IPC分类号： C23C14/24
摘要： PROBLEM TO BE SOLVED: To provide a sensor head for a quartz oscillation type film thickness monitor, which can perform a film thickness measurement stable for a long time period so that it can extend a continuous operation time period of an organic EL manufacturing apparatus.SOLUTION: A sensor head for a quartz oscillation type film thickness monitor comprises: a quartz oscillator for detecting evaporation particles from a heated crucible; a quartz oscillator holder 10 having the quartz oscillator attached thereto; a metallic cover 17 for covering the quartz oscillator holder; a monitor body connected thermally to the cover; and a cooling member attached to the monitor body. The sensor head is characterized in that the cover is made of stainless steel 17a at its portion near a heat source and an aluminum alloy 17b at its portion to contact the monitor body.
摘要翻译：要解决的问题：提供一种用于石英振荡型膜厚度监测器的传感器头，其可以执行长时间稳定的膜厚测量，从而可延长有机EL制造设备的连续工作时间。：用于石英振荡型膜厚度监测器的传感器头包括：用于从加热的坩埚中检测蒸发颗粒的石英振荡器; 具有石英振荡器的石英振荡器支架10; 用于覆盖石英振荡器支架的金属盖17; 一个与盖子热连接的显示器主体; 以及附接到监视器主体的冷却构件。传感器头的特征在于，盖子在靠近热源的部分由不锈钢17a制成，并且其部分处的铝合金17b与监视器主体接触。

2. 发明专利

JP2011107166A Method for evaluating pattern shape and electron microscope 有权
标题翻译：用于评估图案形状和电子显微镜的方法
公开(公告)号：JP2011107166A
公开(公告)日：2011-06-02
申请号：JP2011048474
申请日：2011-03-07
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAMAGUCHI ATSUKO , FUKUDA HIROSHI , KOMURO OSAMU , KAWADA HIROKI
IPC分类号： G01B15/04 , G01B15/00
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus of calculating and evaluating the level of roughness actually present in a pattern, for precisely and quickly evaluating the level of edge roughness from a SEM observation image of a fine line pattern having many noises, by calculating contribution of random noise of the apparatus on the basis of image data of one image and subtracting the roughness originated in the apparatus from a measurement value of an edge roughness index, from among the measured edge roughness indexes. SOLUTION: A quantity (or dispersion value) of fluctuation of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined to be due to noise. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种计算和评估实际存在于图案中的粗糙度水平的方法和装置，用于从具有以下特征的细线图案的SEM观察图像精确且快速地评估边缘粗糙度的水平来精确和快速地评估：通过根据一个图像的图像数据计算装置的随机噪声的贡献，并从测量的边缘粗糙度指标中减去来自边缘粗糙度指标的测量值的装置中产生的粗糙度的许多噪声。
解决方案：当N个边缘位置数据项被平均时，由于随机噪声引起的边缘位置的波动的量（或色散值）预期在统计上减小到1 / N。使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为噪声。版权所有（C）2011，JPO＆INPIT

3. 发明专利

JP2007333745A Method of evaluating pattern shape, evaluating device, and method of manufacturing semiconductor device 审中-公开
标题翻译：评价图案形状，评价装置的方法以及制造半导体器件的方法
公开(公告)号：JP2007333745A
公开(公告)日：2007-12-27
申请号：JP2007196889
申请日：2007-07-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAMAGUCHI ATSUKO , FUKUDA HIROSHI , KAWADA HIROKI , MAEDA TATSUYA
IPC分类号： G01B15/04 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To extract a spatial frequency component to be evaluated specially when creating a device or analyzing a material and a process in edge roughness on a fine line pattern for indicating with an index. SOLUTION: Data of the edge roughness are acquired over a sufficiently long area, and a component, which corresponds to a spatial frequency range set by an operator on a power spectrum, is integrated and displayed on a length measurement SEM. Alternatively, the data of the edge roughness of the sufficiently long area are divided, fitting by statistic processing and logic calculation is performed, and long-period roughness and short-period roughness corresponding to an arbitrary inspection region are calculated and displayed on the length measurement SEM. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：在创建装置或分析材料时特别评价的空间频率分量，以及用于用索引指示的细线图案上的边缘粗糙度的处理。解决方案：在足够长的区域上获取边缘粗糙度的数据，并且将对应于操作者在功率谱上设置的空间频率范围的分量集成并显示在长度测量SEM上。或者，分割充分长的区域的边缘粗糙度的数据，通过统计处理进行拟合，进行逻辑运算，并计算与任意检查区域对应的长周期粗糙度和短周期粗糙度，并显示在长度测量 SEM。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2006215020A Method for evaluating pattern shapes with high accuracy, and apparatus thereof 有权
标题翻译：用于高精度评估图案的方法及其装置
公开(公告)号：JP2006215020A
公开(公告)日：2006-08-17
申请号：JP2005343047
申请日：2005-11-29
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAMAGUCHI ATSUKO , FUKUDA HIROSHI , KOMURO OSAMU , KAWADA HIROKI
IPC分类号： G01B15/04 , G01N23/225 , H01L21/66
CPC分类号： G01N23/2251
摘要： PROBLEM TO BE SOLVED: To provide a method for evaluating edge roughness actually existing in an object to be observed or indexes of roughness in line width, and a roughness component originated from noise contained in a observation result from one sheet of image obtained by normal pattern observation in shorter time than the conventional time, and without decreasing at least a same precision as the conventional method, and to provide an apparatus thereof. SOLUTION: To precisely and quickly evaluate the degree of the edge roughness from a SEM observation image of a micro line pattern with noisy, contribution of random noise originated from a device in indexes of the edge roughness is calculated based on data of one sheet of image. The degree of roughness, actually existing in the pattern, is calculated by subtracting the roughness originated from the device from the measured value of the edge roughness index. Quantity (distributed values), originated from the random noise in fluctuations at edge position statistically reduces to 1/N when N pieces of edge position data, are averaged. The image is averaged by values of various parameters S to one image in the lengthwise direction, by using the feature, and then the index of edge roughness is determined. The S dependence of the index of edge roughness is analyzed, and a term with distributed value proportional to 1/S is originated from noise. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于评估实际存在于要观察对象物中的边缘粗糙度的方法或线宽度粗糙度指标，以及源自所获得的一张图像的观察结果中包含的噪声的粗糙度分量通过常规图形观察在比传统时间更短的时间内，并且不降低与常规方法至少相同的精度，并提供其装置。
解决方案：为了从具有噪声的微线图案的SEM观察图像精确且快速地评估边缘粗糙度的程度，基于一个数据，计算来自边缘粗糙度指标的器件的随机噪声的贡献一张图片。实际存在于图案中的粗糙度通过从边缘粗糙度指数的测量值中减去从装置产生的粗糙度来计算。当N个边缘位置数据被平均时，源自边缘位置波动的随机噪声的数量（分布值）统计地减小到1 / N。通过使用该特征，将图像通过各种参数S的长度方向的一个图像的值进行平均，然后确定边缘粗糙度的指标。分析了边缘粗糙度指数的S依赖性，分布值与1 / S成比例的项源自噪声。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2006073286A Pattern inspection device 审中-公开
标题翻译：图案检查装置
公开(公告)号：JP2006073286A
公开(公告)日：2006-03-16
申请号：JP2004253727
申请日：2004-09-01
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAMAGUCHI ATSUKO , FUKUDA HIROSHI , KAWADA HIROKI , IIIZUMI TAKASHI
IPC分类号： H01J37/22 , G01B15/04 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To optimize easily various parameters for extracting the line edge shape of a pattern with high precision and over a wide range in a semiconductor device inspection process using a scanning type microscope.
SOLUTION: Out of various parameters which are required in an image processing process, those which are easily understood by an operator are inputted from a control system or an adjoining terminal of a scanning type microscope, and then the remaining parameters are made automatically optimized. When the number of required scanning lines exceeds the possible value of the device side, scanning is made split into a plurality of image data, and the obtained images are overlapped to form one sheet of an image.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：在使用扫描型显微镜的半导体器件检查过程中，可以容易地优化用于在高精度和宽范围内提取图案的线边缘形状的各种参数。解决方案：在图像处理过程中需要的各种参数中，从扫描型显微镜的控制系统或邻接终端输入操作者容易理解的各种参数，然后自动进行其余参数优化。当所需的扫描行数超过装置侧的可能值时，将扫描分割为多个图像数据，并将所获得的图像重叠以形成一张图像。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2006038779A Evaluation method and evaluation device of pattern shape, and manufacturing method of semiconductor device 审中-公开
标题翻译：图案形状的评估方法和评估装置，以及半导体器件的制造方法
公开(公告)号：JP2006038779A
公开(公告)日：2006-02-09
申请号：JP2004222737
申请日：2004-07-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YAMAGUCHI ATSUKO , FUKUDA HIROSHI , KAWADA HIROKI , MAEDA TATSUYA
IPC分类号： G01B15/04 , H01L21/66
CPC分类号： G01B15/08 , G01N23/2251 , G03F7/70625 , H01J2237/223 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To extract a component of spatial frequency which particularly needs evaluation in formation of a device or in analysis of a material or process of edge roughness on a micro line pattern, and express it by an index.
SOLUTION: Data of edge roughness are acquired over a sufficiently long area, and components corresponding to a spatial frequency range set by an operator on a power spectrum are integrated and displayed on a length measuring SEM. Otherwise, data of edge roughness in a sufficiently long area are divided, and fitting by statistic processing and logic calculation is performed thereto, and a long period roughness and a short period roughness corresponding to an optional inspection area are calculated and displayed on a length measuring SEM.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提取特定需要在形成装置时进行评价的空间频率分量，或者分析微线图案上的边缘粗糙度的材料或工艺，并通过指数表示。
解决方案：在足够长的区域上获取边缘粗糙度的数据，并且将对应于由操作者在功率谱上设置的空间频率范围的分量集成并显示在长度测量SEM上。否则，在足够长的区域中的边缘粗糙度的数据被划分，并且通过统计处理和逻辑计算进行拟合，并且计算与选择的检查区域相对应的长周期粗糙度和短周期粗糙度，并显示在测量长度 SEM。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2010145597A Apparatus and method for attaching optical film, and method for manufacturing display panel 有权
标题翻译：用于连接光学膜的装置和方法，以及制造显示面板的方法
公开(公告)号：JP2010145597A
公开(公告)日：2010-07-01
申请号：JP2008320839
申请日：2008-12-17
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： FUJIMOTO KINUKO , FUKUDA HIROSHI , YUMIBA KENJI , DAIROKU NORIYUKI
IPC分类号： G02B5/30 , G02F1/1335 , G09F9/00 , H01L51/50 , H05B33/02 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To prevent the occurrence of bubbles or wrinkle in an attachment starting part in attaching an optical film to a display panel.
SOLUTION: The winding of the optical film 2 is started in a specific region 3a of a cylindrical member 3. A hole 10 is formed in the specific region 3a of the cylindrical member 3. The optical film 2 can be sucked by vacuum or peeled off by compressed air through the hole 10. The optical film 2 is brought into contact with a display panel 1 by the rotation of the cylindrical member 3 and is peeled off from the cylindrical member 3 by supplying the compressed air to the hole 10 of the cylindrical member 3. As a result, the optical film 2 can be attached on the display panel 1 without wrinkles.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了防止在将光学膜附着到显示面板上时附件起始部分中出现气泡或起皱。
解决方案：光学膜2的卷绕在圆柱形构件3的特定区域3a中开始。在圆筒构件3的特定区域3a中形成孔10.光学膜2可以通过真空吸入或通过孔10被压缩空气剥离。光学薄膜2通过圆柱形构件3的旋转而与显示面板1接触，并通过将压缩空气供应到孔10中而从圆筒构件3上剥离结果，光学膜2可以附着在显示面板1上而没有皱纹。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2010137424A Optical functional film sticking apparatus 审中-公开
标题翻译：光学功能胶片装置
公开(公告)号：JP2010137424A
公开(公告)日：2010-06-24
申请号：JP2008315143
申请日：2008-12-11
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： FUKUDA HIROSHI , TAKEI TETSUYA
IPC分类号： B29C63/02 , B29C65/78 , G02B5/30 , G02F1/13 , G02F1/1335
摘要： PROBLEM TO BE SOLVED: To pressurize an optical functional film including a portion of a suction hole to a whole surface of a substrate including the portion of the suction hole when the optical functional film is stuck to the substrate in a pressurizing state. SOLUTION: A fluid connection chamber 12 is provided in a drum body 10a of a holder drum 10 and two or more suction holes 11a constituting a suction hole group 11 are opened in order to hold a polarization film 2 by suction on a surface of an elastic seat layer 10b provided at an outer peripheral surface of the drum body 10a. A negative pressure source 14 and a pressurizing source 15 are connected with the fluid connection chamber 12 via a switching means 13. The switching means 13 is equipped with a first switching valve 20 and a second switching valve 21. The first switching valve 20 is connected with an influent channel 22 which is connected with the fluid connection chamber 12 so that the influent channel 22 can be switched between a state of being connected with the negative pressure source 14 via the second switching valve 21 and a state of being connected with a pressurizing channel 23 from the pressurizing source 15. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：当在加压状态下将光学功能膜粘附到基板时，将包括吸入孔的一部分的光学功能膜加压到包括吸入孔的部分的基板的整个表面。解决方案：将流体连接室12设置在保持器鼓10的鼓体10a中，并且打开构成吸入孔组11的两个或更多个吸入孔11a，以便通过吸力将偏振膜2保持在表面上设置在鼓体10a的外周面的弹性座位层10b。负压源14和加压源15经由开关装置13与流体连接室12连接。切换装置13配备有第一切换阀20和第二切换阀21.第一切换阀20连接具有与流体连接室12连接的流入通道22，使得流入通道22可以在经由第二切换阀21与负压源14连接的状态之间切换，并且与加压通道22连接的状态通道23来自加压源15.版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2010089905A Protective film separation device and flat display panel 审中-公开
标题翻译：保护膜分离装置和平板显示面板
公开(公告)号：JP2010089905A
公开(公告)日：2010-04-22
申请号：JP2008261727
申请日：2008-10-08
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： FUKUDA HIROSHI , MINATO YUSUKE , TAKEI TETSUYA
IPC分类号： B65H41/00 , G02F1/1335
摘要： PROBLEM TO BE SOLVED: To enhance a clamp force of a protective film by a pressing member without reducing adhesive strength to the protective film even in repetitive use for operating so as to tear off the protective film by clamping by the pressing member after separating an end by its adhesive strength for separating the protective film from a film material. SOLUTION: A laminated film material 3 is wound on an outer peripheral surface of a rotary drum 10, and pressed to a separation starting end of the protective film 2 by a separation roller 20 composed of a hard member formed of a pressure sensitive adhesive substance, and separated from a polarizing plate 1 by being adhered to the separation roller 20. The protective film 2 is clamped by the separation roller 20 and a pressing member 21 by driving the pressing member 21. The protective film 2 is torn off from the polarizing plate 1 by rotating the rotary drum 10 in the opposite direction of the moving direction of a separation unit 22 by moving the separation unit 22 composed of the separation roller 20 and the pressing member 21. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决问题：为了通过按压部件提高保护膜的夹持力，即使在重复使用中也不会降低与保护膜的粘合强度，从而通过按压部件夹紧后将保护膜撕下来通过其粘合强度分离端部以将保护膜与膜材料分离。解决方案：层叠膜材料3缠绕在旋转鼓10的外周面上，并通过分离辊20被压到保护膜2的分离开始端，分离辊20由形成于压力敏感区域并且通过粘附到分离辊20与偏振片1分离。通过驱动按压部件21，保护膜2被分离辊20和按压部件21夹紧。保护膜2从通过移动由分离辊20和按压构件21构成的分离单元22，使旋转鼓10与分离单元22的移动方向相反的方向旋转偏振片1.版权所有（C）2010 ，JPO＆INPIT

10. 发明专利

JP2009109979A Device for bonding optical film and method of manufacturing display panel 有权
标题翻译：用于粘合光学膜的装置和制造显示面板的方法
公开(公告)号：JP2009109979A
公开(公告)日：2009-05-21
申请号：JP2008191428
申请日：2008-07-24
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OCHIAI YUKIO , YUMIBA KENJI , SATO KIMIHARU , KOJIMA HIDEAKI , YASUTOME TAKESHI , MATSUZAKI TETSUO , FUKUDA HIROSHI , TOGAMI KAZUYUKI
IPC分类号： G02F1/13 , G09F9/00
摘要： PROBLEM TO BE SOLVED: To uniformly press an optical film to be bonded to a display panel with high quality when the optical film is held by a drum and the optical film is nearly simultaneously bonded to both surfaces of a display panel substrate. SOLUTION: When the optical film is bonded to the display panel, both the display panel and the optical film are obliquely erected with a predetermined inclination angle from a vertical direction, a polarizing plate is held in an inclined drum in the obliquely erected state and the optical film is nearly simultaneously bonded on both surfaces (a first principal surface (a CF surface) and a second principal surface (a TFT surface)) by controlling rotation of the drum. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：当光学薄膜被滚筒保持并且光学薄膜几乎同时粘结在显示面板基板的两个表面上时，均匀地将待粘合到显示面板上的光学薄片按压到显示面板。解决方案：当光学膜粘合到显示面板上时，显示面板和光学薄膜以垂直方向倾斜预定的倾斜角度，将偏振片保持在斜立的倾斜滚筒中通过控制滚筒的旋转，光学膜几乎同时粘结在两个表面（第一主表面（CF表面）和第二主表面（TFT表面）上）。版权所有（C）2009，JPO＆INPIT

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