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1. 发明专利

JPS60190835A Fine particle detector 失效
标题翻译：精细粒子检测器
公开(公告)号：JPS60190835A
公开(公告)日：1985-09-28
申请号：JP3268085
申请日：1985-02-22
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： YAMADA KUNIO , IWATANI FUKUO , TSUKADA KAZUYA , TAKAMI KATSUMI , SUDA TADASHI , TAKAHASHI KENSAKU
IPC分类号： G01N21/53 , G01N15/00 , G01N15/14 , G01N21/47 , G01N21/49
CPC分类号： G01N21/47
摘要： PURPOSE:To expand a light receiving angle, by providing a rotary elliptic mirror, which is arranged so that a converged light detecting means of scattered light occupies the first focal point in a detecting region, and providing a spherical mirror, which has a radius of curvature equal to the distance between the focal points of said rotary elliptic mirror. CONSTITUTION:A rotary elliptic mirror 19 is arranged so that a converged light detecting means of scattered light has the first focal point in a detecting region. A radius (v) of a spherical mirror 20 is made equal to the interval between two focal points S and R of the elliptic mirror 19. The center of the spherical mirror 20 is made to agree with the focal point S, i.e., the detecting region. At this time, the scattered light, which is reflected by an arbitrary point (m) of the elliptic mirror 19, is concentrated at the focal point R. Scattered light, which is reflected by an arbitrary point (n) of the spherical mirror 20, is reflected by a point (k) on the elliptic mirror 19 through the focal point S again and concentrated at the focal point R. When the gap at the connecting point of the elliptic mirror 19 and the spherical mirror 20 is eliminated, a total solid angle 4pisr can be made to be a light receiving solid angle. Thus the light receiving angle can be expanded to the limit.
摘要翻译：目的：为了扩大受光角度，通过提供一种旋转椭圆镜，其被布置成使得散射光的会聚光检测装置在检测区域中占据第一焦点，并且提供球面镜，其具有半径曲率等于所述旋转椭圆镜的焦点之间的距离。构成：旋转椭圆镜19被布置成使得散射光的会聚光检测装置具有检测区域中的第一焦点。使球面镜20的半径（v）等于椭圆镜19的两个焦点S和R之间的间隔。使球面镜20的中心与焦点S一致，即检测地区。此时，由椭圆镜19的任意点（m）反射的散射光集中在焦点R.由球面镜20的任意点（n）反射的散射光，再次通过焦点S被椭圆镜19上的点（k）反射并聚焦在焦点R.当消除了椭圆镜19和球面镜20的连接点处的间隙时，总共立体角4pisr可以做成光接收立体角。因此，光接收角度可以扩大到极限。

2. 发明专利

JPS60214238A Fine particle detector 失效
标题翻译：精细粒子检测器
公开(公告)号：JPS60214238A
公开(公告)日：1985-10-26
申请号：JP7088584
申请日：1984-04-11
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： SAITOU SUSUMU , SUZUKI MICHIO , SUDA TADASHI , HACHIKAKE YASUO , TSUKADA KAZUYA
IPC分类号： G01N21/53 , G01N15/02 , G01N15/14 , G01N21/39 , G01N21/49
CPC分类号： G01N15/0205 , G01N15/14 , G01N2021/391
摘要： PURPOSE:To detect fine particles in an aerosol stably with high precision by arranging a detection cell through which the aerosol to be measured is passed in an external resonator which resonates with the output of a laser oscillator, and measuring scattered light. CONSTITUTION:The laser output light 6 from the laser oscillator 1 is made incident on the Fabry-Perot optical resonator constituted by placing mirrors 2 and 2' opposite to each other. Laser light 8 is reflected repeatedly between mirrors 2 and 2' to obtain a value nearly equal to the light intensity in the laser resonator. The aerosol 7 to be measured is passed through a detection cell 3 in the resonator from a suction nozzle 4 while crossing the laser luminous flux and discharged through a discharge nozzle 5. Laser light scattered by fine particles in the aerosol is converged through a condenser lens optical system 9 and converted into an electric signal by a photodetector 10.
摘要翻译：目的：通过在与激光振荡器的输出共振的外部谐振器中设置待测量气溶胶通过的检测单元，并测量散射光，以高精度稳定地检测气溶胶中的微粒。构成：将来自激光振荡器1的激光输出光6入射到通过将镜子2和2'彼此相对放置而构成的法布里 - 珀罗光学谐振器。激光8在反射镜2和2'之间反复反射以获得几乎等于激光谐振器中的光强度的值。被测量的气溶胶7在与激光光束交叉的同时从吸嘴4通过谐振器中的检测单元3，并通过排出喷嘴5排出。气溶胶中的细颗粒散射的激光被会聚在聚光透镜光学系统9，并由光电检测器10转换成电信号。

3. 发明专利

JPS6189526A Mechanism for monitoring output of external mirror laser 失效
标题翻译：用于监测外部反射激光输出的机构
公开(公告)号：JPS6189526A
公开(公告)日：1986-05-07
申请号：JP20986784
申请日：1984-10-08
申请人： Hitachi Electronics Eng Co Ltd
发明人： AKASAKA NORIYUKI , TSUKADA KAZUYA , HACHIKAKE YASUO
IPC分类号： G01J1/02 , G01J1/42 , H01S3/00 , H01S3/03 , H01S3/10
CPC分类号： G01J1/4257
摘要： PURPOSE:To make it possible to measure only the intensity of laser beam without taking in the discharge beam from a discharge tube, by arranging a beam receiving element for monitoring laser output to the outside of an external mirror. CONSTITUTION:A mirror 2 is arranged to the lefthand end of a discharge tube 3 having a gaseous mixture such as He-Ne sealed therein and the beam of said discharge tube 1 is passed through pinholes 7 and reflected by an external mirror 3 to form an oscillator while a beam receiving element 6 is arranged outside the mirror 3. By this mechanism, the passage of discharge beam generated in the tube 1 can be prevented by the pinholes 7.
摘要翻译：目的：通过将用于监控激光输出的光束接收元件布置在外部反射镜的外部，使得仅能够测量激光束的强度而不从放电管入射放电束。构成：将反射镜2配置在具有密封在其中的He-Ne等气体混合物的放电管3的左端，并且放电管1的光束穿过针孔7并被外部反射镜3反射，形成振荡器，而光束接收元件6布置在反射镜3的外部。通过这种机制，可以通过针孔7来防止在管1中产生的放电束的通过。

4. 发明专利

JPS59104533A Light scattering type detector for fine particle 失效
标题翻译：光散射型微型探测器
公开(公告)号：JPS59104533A
公开(公告)日：1984-06-16
申请号：JP21386082
申请日：1982-12-08
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： YAMADA KUNIO , TSUKADA KAZUYA , SHINPO SENJI , TAKAMI KATSUMI
IPC分类号： G01N15/02 , G01N15/14
CPC分类号： G01N15/1459
摘要： PURPOSE:To enhance the intensity of irradiation to improve the detection sensitivity and increase a sampling flow rate, by oscillating an external mirror laser consisting of an external mirror and a plasma tube in multimode and allowing an aerosol to pass in a laser resonator. CONSTITUTION:A laser plasma tube 1 constitutes an external mirror-type laser oscillator with a mirror 2 and an external mirror 3 and generates a multimode laser light 9. A double suction nozzle 11 and a discharge nozzle 15 are incorporated in positions orthogonal to the laser light 9 in the detecting cell 4, and a jet where an aerosol 13 is enveloped with a clean air 12 passes through a detecting area 5. The aerosol is irradiated with the laser light 9, and a scattered light 10 is transmitted to a photodetector 8 through a condenser lens 6 and a slit 7 and is converted to an electric signal, and fine particles in the aerosol are detected electrically.
摘要翻译：目的：通过在多模中振荡由外部反射镜和等离子体管组成的外部镜像激光器，使气溶胶通过激光谐振器，增强照射强度，提高检测灵敏度，提高采样流量。构成：激光等离子体管1构成具有反射镜2和外部反射镜3的外部镜面式激光振荡器，并产生多模激光9.双吸嘴11和放电喷嘴15并入与激光正交的位置检测单元4内的光9和气溶胶13被清洁空气12包围的射流通过检测区域5.用激光9照射气溶胶，并将散射光10透射到光电检测器8 通过聚光透镜6和狭缝7，并转换为电信号，并且电气检测气溶胶中的微粒。

5. 发明专利

JPS61133836A Fine particle detector 失效
标题翻译：精细粒子检测器
公开(公告)号：JPS61133836A
公开(公告)日：1986-06-21
申请号：JP25578184
申请日：1984-12-05
申请人： Hitachi Electronics Eng Co Ltd
发明人： YAMAMOTO HOZUMI , TSUKADA KAZUYA , KAWAKAMI YUKIO , AKASAKA NORIYUKI
IPC分类号： G01N15/14 , G01N21/53
CPC分类号： G01N21/53
摘要： PURPOSE:To enable the sampling at two atmospheres simultaneously with one laser tube, by providing a Brewster window and a scattered light detecting means respectively at both ends of the laser tube. CONSTITUTION:Brewster windows 3a and 3b are provided at both ends of a laser tube 1, external reflectors 4a and 4b for causing a laser oscillation on the extention of the axis of the laser tube thereoutside and cells 5a and 5b having a detection means for scattered light due to fine particles are arranged between the windows 3a and 3b and the reflectors 4a and 4b. A laser beam 2 irradiates the flows of sample airs 9a and 9b at the right angle thereto and when fine particles exist in the sample air, the laser is caused to scatter by the fine particles and detected by a scattered light detecting means comprising condensers 10a and 10b and photo electric multipliers 11a and 11b.
摘要翻译：目的：通过在激光管的两端分别设置一个布鲁斯特窗口和一个散射光检测装置，可以在一个激光管同时进行两个大气压的采样。构成：布鲁斯特窗口3a和3b设置在激光管1的两端，外部反射器4a和4b，用于在外侧激光管的轴线延伸引起激光振荡，并且具有散射检测装置的单元5a和5b 由于微粒子的光被布置在窗口3a和3b与反射器4a和4b之间。激光束2以与其成直角的方式照射试样空气9a，9b的流动，当样品空气中存在微粒子时，由微粒引起激光散射，并由散射光检测装置检测出包括电容器10a， 10b和光电倍增器11a和11b。

6. 发明专利

JPS60190834A Nozzle of fine particle detector 失效
标题翻译：细颗粒探测器喷嘴
公开(公告)号：JPS60190834A
公开(公告)日：1985-09-28
申请号：JP3267985
申请日：1985-02-22
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： IWATANI FUKUO , YAMADA KUNIO , TSUKADA KAZUYA , TAKAMI KATSUMI , SUDA TADASHI , TAKAHASHI KENSAKU
IPC分类号： G01N21/53 , G01N1/22 , G01N15/00
CPC分类号： G01N1/2202 , G01N2001/2223
摘要： PURPOSE:To obtain a high-speed, stable laminar air of aerosol, by providing a nozzle so that the outer screen of the aerosol comprises two or more layers having different speeds. CONSTITUTION:At the outside of an original pipe, a pipe 10, which can be slidden in the axial direction, is further provided. Second clean air 11 is introduced into this pipe, and the second layer screen is formed. In order to make aerosol 3 into a stable laminar air, speeds V1 and V2 are made approximately equal and an appropriate intermediate value between the speed V2 and the zero speed is imparted to a speed V3. It is necessary to determine the speed V3 empirically. In present invention, the speed V3 is adjusted by providing a sliding mechanism in the pipe 10, moving the pipe 10 in the axial direction, and changing the interval between tips 12' and 12'' of a nozzle 12. Thus the high-speed, stable laminar air of the aerosol can be obtained.
摘要翻译：目的：通过提供喷嘴使得气溶胶的外屏幕具有不同速度的两层或多层，以获得高速稳定的气溶胶层流空气。构成：在原管的外侧，进一步设置能够沿轴向切断的管道10。将第二清洁空气11引入该管中，形成第二层筛。为了使气溶胶3成为稳定的层流空气，速度V1和V2大致相等，将速度V2和零速度之间的适当中间值赋予速度V3。有必要经验性地确定速度V3。在本发明中，通过在管10中设置滑动机构，使管10沿轴向移动，并且改变喷嘴12的尖端12'和12“之间的间隔来调节速度V3。因此，高速，可以获得气溶胶的稳定层流空气。

7. 发明专利

JPS58206949A Inspecting device of defect 失效
标题翻译：检查缺陷设备
公开(公告)号：JPS58206949A
公开(公告)日：1983-12-02
申请号：JP8993282
申请日：1982-05-28
申请人： Hitachi Electronics Eng Co Ltd , Hitachi Ltd
发明人： SUDA TADASHI , TSUKADA KAZUYA , KAWAKAMI YUKIO , NAGATOMO HIROTO , AKIBA MASAKUNI
IPC分类号： G01N21/88 , G01N21/89 , G01N21/956 , G03F1/84 , H01L21/027 , H01L21/66
CPC分类号： G01N21/89
摘要： PURPOSE:To detect exactly a defect on the surface of a semiconductor chip, by recognizing the existence of DC and AC components appearing in one scanning signal as it is, envelope-detecting its signal, and thereafter, using it as comparison voltage of an original signal, and binary-coding and extracting a defect signal pulse. CONSTITUTION:A signal is amplified by an amplifier 23, and thereafter, is inputted to an absolute value circuit 25 through an atteuator 24 provided in order that adjustment is executed easily. It is executed so that detection can be executed even in case when that which inverts polarity of a defect signal pulse appears, and an output signal of the absolute value circuit 25 is made one of inputs of a comparator 29. Also, an output of the absolute value circuit 25 is separated and is envelope-detected through a low-pass filter 26. An output of the low-pass filter is amplified by prescribed times, and also an adder 28 for applying variable DC voltage 27 is provided in order to adjust upwards and downwards a level of an envelope. When envelope detection of automatic level following, which is generated in this way is inputted as comparison voltage of the comparator 29, a defect signal pulse can be extracted.
摘要翻译：目的：为了准确检测半导体芯片表面的缺陷，通过识别一个扫描信号中出现的直流和交流分量的存在原理，对其信号进行包络检测，然后将其作为原始电路的比较电压信号和二进制编码，并提取缺陷信号脉冲。构成：由放大器23放大信号，之后，通过设置在输入装置24上的绝对值电路25输入，以便容易进行调整。即使执行了使缺陷信号脉冲的极性反转的情况下也能够进行检测，并且将绝对值电路25的输出信号作为比较器29的输入之一进行检测。而且，绝对值电路25被分离，并且通过低通滤波器26被包络检测。低通滤波器的输出被放大规定时间，并且还提供了用于施加可变直流电压27的加法器28，以便调整上下一层信封。当以这种方式产生的自动电平跟随的包络检测被输入作为比较器29的比较电压时，可以提取缺陷信号脉冲。

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