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    • 1. 发明专利
    • X-ray image magnifying device
    • X射线图像放大器
    • JP2003279693A
    • 2003-10-02
    • JP2002080947
    • 2002-03-22
    • Hamamatsu Photonics Kk浜松ホトニクス株式会社
    • OBA AKIRASUGIYAMA MASARUONODA SHINOBU
    • G01N23/04G21K1/06G21K7/00
    • G21K1/06G01N23/04G21K7/00
    • PROBLEM TO BE SOLVED: To provide an X-ray image magnifying device capable of changing an imaging magnification by using an oblique incidence mirror having no wavelength selectivity. SOLUTION: This X-ray image magnifying device is characterized by being provided with an illumination optical system 3 for irradiating the X-ray emitted from an X-ray source to a sample 4, an objective lens 5 configurated by an oblique incidence mirror composed of a rotary hyperboloidal face and a rotary ellipsoidal face for magnifying and focusing the X-ray penetrating through the sample 4 onto a predetermined position, an X-ray image detecting means 6 for detecting the focused X-ray image, and a focusing magnification adjusting means for adjusting the focusing magnification of the X-ray image by axially moving at least one of the X-ray image detecting means 6, the sample 4 and the illumination optical system 3. Thereby, in the device using the oblique incidence mirror as the objective lens, the imaging magnification can be changed without exchanging the oblique incidence mirror in the X-ray image magnifying device. COPYRIGHT: (C)2004,JPO
    • 解决的问题:提供能够通过使用不具有波长选择性的倾斜入射镜来改变成像倍率的X射线图像放大装置。 解决方案:该X射线图像放大装置的特征在于设置有用于将从X射线源发射的X射线照射到样品4的照明光学系统3,由斜入射构成的物镜5 用于将穿透样品4的X射线放大并聚焦到预定位置的旋转双曲面和旋转椭圆面构成的反射镜,用于检测聚焦的X射线图像的X射线图像检测装置6和聚焦 用于通过轴向移动X射线图像检测装置6,样本4和照明光学系统3中的至少一个来调节X射线图像的聚焦倍率的倍率调节装置。因此,在使用倾斜入射镜的装置 作为物镜,可以在X射线图像放大装置中不更换倾斜入射镜来改变成像倍率。 版权所有(C)2004,JPO
    • 2. 发明专利
    • X-ray image magnifying device
    • X射线图像放大器
    • JP2003057400A
    • 2003-02-26
    • JP2001245579
    • 2001-08-13
    • Hamamatsu Photonics Kk浜松ホトニクス株式会社
    • OBA AKIRASUGIYAMA MASARUONODA SHINOBU
    • G01N23/04G02B21/00G21K1/06G21K5/00G21K5/02G21K7/00
    • PROBLEM TO BE SOLVED: To provide an X-ray image magnifying device capable of making an efficient survey of the observation part of a sample and observing the sample with high magnification.
      SOLUTION: This X-ray image magnifying device, wherein an X-ray image of the sample 5 is magnified by oblique incidence reflecting mirrors 7, 8 and detected by an X-ray detecting means 11, is provided with a magnification changing means for selectively intercepting the incident or reflected X-ray of the oblique incidence reflecting mirror 7 and the incident or reflected X-rays of the oblique incidence reflecting mirror 8 to change the magnification of the X-ray image detected by the X-ray detecting means 11. This constitution permits the efficient survey of the observation part of the sample based on a wide view by the reflected X-rays from the oblique incidence reflecting mirror 8, and the minute observation of the sample based on the image of high magnification by the reflected X-rays from the oblique incidence reflecting mirror 7.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:提供能够对样品的观察部分进行有效测量并以高倍率观察样品的X射线图像放大装置。 解决方案:该X射线图像放大装置,其中样品5的X射线图像被倾斜入射反射镜7,8放大并由X射线检测装置11检测,设置有用于选择性地 截取斜入射反射镜7的入射或反射X射线以及倾斜入射反射镜8的入射或反射X射线,以改变由X射线检测装置11检测的X射线图像的放大倍数。 这种结构允许基于来自倾斜入射反射镜8的反射X射线的宽视角对样本的观察部分进行有效的测量,并且基于通过反射X的高倍率的图像的样本的微观观察 从倾斜入射反射镜7射出。
    • 3. 发明专利
    • X-ray image expansion apparatus
    • X-RAY图像扩展装置
    • JP2003075600A
    • 2003-03-12
    • JP2001270761
    • 2001-09-06
    • Hamamatsu Photonics Kk浜松ホトニクス株式会社
    • OBA AKIRASUGIYAMA MASARUONODA SHINOBU
    • G01N23/04G02B5/08G02B17/00G21K1/06G21K7/00
    • PROBLEM TO BE SOLVED: To provide an X-ray image expansion apparatus allowing the efficient search of the observation site of a sample and the observation of the sample to be performed at a high magnification. SOLUTION: This X-ray image expansion apparatus for expanding the X-ray image of the sample 5 by oblique incident reflector mirrors 7 and 8 to perform a detection by an X-ray detecting means 11 is characterized in that it is provided with a branch means 10 for branching the reflected X-ray by the oblique incident reflector mirror 7 from the reflected X-ray by the oblique incident reflector mirror 8. According to such a structure, the effective search of the observation site of the sample based on an image with wide visual field by the reflected X-ray from the reflector mirror 8 and the minute observation of the sample based on an image of high magnification by the reflected X-ray from the reflector mirror 7 can be simultaneously performed.
    • 要解决的问题:提供一种X射线图像扩展装置,其能够有效地搜索样品的观察部位,并且以高倍率进行样品的观察。 解决方案:用于通过倾斜入射反射镜7和8扩展样品5的X射线图像以执行X射线检测装置11的检测的该X射线图像扩展装置的特征在于,其设有分支 用于通过倾斜入射反射镜8从反射X射线将倾斜入射反射镜7反射的X射线分支的装置10.根据这种结构,基于图像对样本的观察部位的有效搜索 通过来自反射镜8的反射X射线具有宽视野,并且可以同时执行基于来自反射镜7的反射X射线的基于高倍率的图像的样本的微小观察。
    • 5. 发明专利
    • JPH05249300A
    • 1993-09-28
    • JP4854192
    • 1992-03-05
    • HAMAMATSU PHOTONICS KK
    • YOKOYAMA TOSHIKIOBA AKIRASUGIYAMA MASARU
    • G21K7/00
    • PURPOSE:To arrange on an optical axis a window with a specified size or a window with a specified material in accordance with X-ray image observation conditions without breaking the vacuum in an X-ray optical system. CONSTITUTION:Provided are an X-ray source 1, an X-ray optical system 2, aparture part 20 with a window, first and second bellows 12, 18 fixed air-tight at the end between the inlet window 2a of the X-ray optical system 2 and the aparture part 20 with a window, an X-Y stage consisting of first and second movable frames 13a, 13b supporting the aparture part 20 with a window movablly in the direction perpendicular to the light axis, and first and second screws 28, 29 adjusting the X-Y stage 13 to the reference of a reference surface structure part 14. By moving two dimensionally the aparture 20 with a window in the direction perpendicular to the light axis, a window 30 with different size or a window 30 of a different material can be brought on the optical axis without breaking the vacuum.
    • 6. 发明专利
    • APPARATUS FOR OBSERVING ENLARGED RADIATION IMAGE
    • JPH04213047A
    • 1992-08-04
    • JP40063290
    • 1990-12-06
    • HAMAMATSU PHOTONICS KK
    • OBA AKIRASUGIYAMA MASARUOSUGA SHINJIYOKOYAMA TOSHIKI
    • G01N23/04G21K7/00
    • PURPOSE:To make it possible to observe X-ray, visible light and other radiation image by providing a constitution wherein an X-ray screening means transmits the specified radiation and casts the radiation on a sample setting position, and a slant-incident reflecting mirror expands the image of the specified radiation from the sample setting position. CONSTITUTION:A reflecting and diffusing plate 52 is made to go back. X rays are emitted from an X-ray source 51 on a sample 54. Thus the X-ray image is formed. The X rays are transmitted through an incident window 55 and cast on a radiation- image enlarging part 56. The X rays are reflected from a slant-incident reflecting mirror 7. The enlarged X-ray image is focused on a photoelectric plane 9. Meanwhile, the X rays emitted into the cylindrical cavity of the slant-incident reflecting mirror 7 are screened with a lens 58a. The lens 58a does not transmit the X rays but transmits the specified radiation. The visual light beam emitted from a light source 71 is made to pass through a half mirror 73 and cast into a mirror 58b. The light beam passes through the lens 58a, and the small spot image is condensed at the position of the sample 54. The spot image is enlarged with the slant-incident reflecting mirror 7 and projected on the photoelectric plane 9. When a reflecting mirror 10 is moved, the spot image is detected with a first photodetector 12.
    • 7. 发明专利
    • OPTICAL ENERGY PISTON ENGINE
    • JPH02211385A
    • 1990-08-22
    • JP2932289
    • 1989-02-08
    • HAMAMATSU PHOTONICS KK
    • HIRUMA TERUOSUGIYAMA MASARUOTAKE YOSHIYUKI
    • F03G7/00
    • PURPOSE:To obtain a safe optical energy piston engine using the gas particles which are not harmful to a human body by charging the inside of a cylinder having an optical window with the ionized gas particles which generate ionization in reversible manner by the light irradiation and installing an electrode which can collect the ionized gas particles. CONSTITUTION:Light B is irradiated onto the ionized gas particles A in a cylinder 1 through an optical window 6 through which light can pass, and the gas particles A are ionized, and at the same time, an electric field is generated by applying a voltage between electrodes 8 and 8, and the ionized gas particle A is collected onto the electrode 8. Then, the irradiation of the light B and the application of voltage are suspended, and the gas particles A collected onto the electrode 8 are liberated from the electrode 8, and the neutral gas particles A are generated. By the repetition of the reversible reactions, a piston 2 is repetitively applied with the pressure lowering in the cylinder 1 accompanied with the collection and the increase of the pressure accompanied with liberation Therefore, the piston 2 is moved repetitively, and a crankshaft 4 can be revolved through a link 3.
    • 10. 发明专利
    • VIDICON TARGET
    • JPS60250543A
    • 1985-12-11
    • JP10721584
    • 1984-05-25
    • HAMAMATSU PHOTONICS KK
    • SUGIYAMA MASARU
    • H01J29/45
    • PURPOSE:To obtain a vidicon target suitable to photograph an X-ray image by constituting the target with a ferroelectric and photoconductive monocrystal flake, a transparent and conductive film formed on the light incident side of the monocrystal flake, and a high-resistance insulating layer formed on the other surface of the monocrystal flake. CONSTITUTION:Both surfaces of ferroelectric and photoconductive bismuth germanate (Bi12GeO20) are polished into a mirror to form a flake 3. A transparent and conductive film 2 of about 1,000Angstrom is formed on the first surface of this flake 3. CdTe of about 1,000Angstrom is deposited on the other surface to form a high- resistance insulating layer 4, thereby a vidicon target is formed. Accordingly, the production process is simple and the thickness of the monocrystal flake can be made large, thus the X-ray absorption factor can be made large and its sensitivity can be improved by about ten times as compared with the conventional target.