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    • 2. 发明专利
    • CONTROL PLASMA GENERATING DEVICE
    • JPH09171899A
    • 1997-06-30
    • JP33379895
    • 1995-12-21
    • HORII KYOYUKINIPPON TELEGRAPH & TELEPHONE
    • HORII KIYOYUKIKUROSAWA MASARUISHII YOSHIICHI
    • H05H1/00H05H1/30
    • PROBLEM TO BE SOLVED: To provide a stable plasma flow with little turbulence which is converged to the blowout axis by making a current flow to a high frequency coil, and making a spiral flow passing a gradually contracted tube part into a plasma. SOLUTION: An inert gas is supplied from a gas feed port 6, and the gas is blown out through an annular Coanda slit part 3. The angle θ of an inclined surface 3 is set to 5-70 deg., whereby a Coanda spiral flow which is one kind of turning flows is formed in the process of passing in a gradually contracted tube part 7 to develop a strong negative pressure sucking force in a suction port 2, and the spiral flow is consequently sucked into a device through the suction port 2 by the negative pressure sucking force. Further, the current is made to flow to a high frequency coil 8 wound on the outer wall of the gradually contracted tube part 7 to make the spiral flow passing the gradually contracted tube part 7 into a plasma. Thus, the plasma flow containing this turning spectrum component is converted to the blowout axis, and further forms a stable plasma flow with little turbulence.
    • 5. 发明专利
    • MICROWAVE ION GUN
    • JPH03254047A
    • 1991-11-13
    • JP5127590
    • 1990-03-02
    • NIPPON TELEGRAPH & TELEPHONE
    • TANAKA TORUMARUO TETSUYAKUROSAWA MASARU
    • H01J27/18H01J37/08
    • PURPOSE:To provide possibility of taking out ions, which has been difficult according to any conventional technique, by confining plasma using a radial permanent magnet, wherein the plasma is produced through microwave discharge generated by an antenna, and generating ions by reactions of antenna with plasma. CONSTITUTION:Microwaves from a wave-guide pipe 1 are introduced to an antenna 2. At one end of wave-guide pipe 1 at its periphery, a cooling pipe 9 is mounted with a BN spacer 3 interposed, and a crystal pipe 5 is installed on the outside of this cooling pipe. A drawout electrode 8 is provided at one end of this crystal pipe, and a hole 10 is provided in the center of this drawout electrode. A discharge chamber 4 is formed in the space bounded by the inside of the crystal pipe 5, outside of the cooling pipe 9, and the antenna 2. An 8-polar radial permanent magnet 6 is installed on the outside of this discharge chamber 4, and the plasma produced is confined. Gas from a gas lead-in part 7 is sprayed to the antenna 2 to produce ions with reactions associate with the discharge, and these ions are led out of the system by the drawout electrode 8.
    • 9. 发明专利
    • ELECTRON MICROSCOPE OBSERVATION SYSTEM
    • JPH0963529A
    • 1997-03-07
    • JP21047495
    • 1995-08-18
    • NIPPON TELEGRAPH & TELEPHONE
    • IWATA TSUNEKAZUIKEDA KOSUKEKUROSAWA MASARU
    • H01J37/20H01J37/21H01J37/22H01J37/24H04N7/18
    • PROBLEM TO BE SOLVED: To construct an environment just like a person who requests analysis feels as if staying near an electron microscope by transferring a magnified image of the electron microscope via a transmission path to the person in a remote site. SOLUTION: An image of a sample output by an electron microscope main body 1 is converted by a converter 2 and an A/D converter 3 into a signal for transfer, which is then transmitted to a transmission path 4. A D/A converter 5 converts the signal from the transmission path 4 into an analog signal for display on an image display device 6. In the case of a scanning electron microscope, the converter 2 converts the image with a frame speed of 30 to 90 per second corresponding to the scanning speed characteristic of the microscope into a standard video signal. The transmission path 4 utilizes an ISDN circuit or other networks convenient for transfer of image information. A person who requests analysis observes the magnified image of the sample and shows photographic requirements, such as portions of the sample, a desired magnification, to the operator of the electron microscope main body 1. Alternatively, using a scanning signal input device 7 the person directly operates the electron microscope main body 1 via an electron microscope operating device 8.