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    • 2. 发明专利
    • ELECTRON MICROSCOPE OBSERVATION SYSTEM
    • JPH0963529A
    • 1997-03-07
    • JP21047495
    • 1995-08-18
    • NIPPON TELEGRAPH & TELEPHONE
    • IWATA TSUNEKAZUIKEDA KOSUKEKUROSAWA MASARU
    • H01J37/20H01J37/21H01J37/22H01J37/24H04N7/18
    • PROBLEM TO BE SOLVED: To construct an environment just like a person who requests analysis feels as if staying near an electron microscope by transferring a magnified image of the electron microscope via a transmission path to the person in a remote site. SOLUTION: An image of a sample output by an electron microscope main body 1 is converted by a converter 2 and an A/D converter 3 into a signal for transfer, which is then transmitted to a transmission path 4. A D/A converter 5 converts the signal from the transmission path 4 into an analog signal for display on an image display device 6. In the case of a scanning electron microscope, the converter 2 converts the image with a frame speed of 30 to 90 per second corresponding to the scanning speed characteristic of the microscope into a standard video signal. The transmission path 4 utilizes an ISDN circuit or other networks convenient for transfer of image information. A person who requests analysis observes the magnified image of the sample and shows photographic requirements, such as portions of the sample, a desired magnification, to the operator of the electron microscope main body 1. Alternatively, using a scanning signal input device 7 the person directly operates the electron microscope main body 1 via an electron microscope operating device 8.
    • 3. 发明专利
    • CORROSIVE GAS TRAPPING DEVICE
    • JPH0954025A
    • 1997-02-25
    • JP32943895
    • 1995-11-27
    • NIPPON TELEGRAPH & TELEPHONE
    • WATANABE MASAMITSUIKEDA KOSUKE
    • G01N17/00G01N1/22G01N30/00
    • PROBLEM TO BE SOLVED: To provide such a low-cost corrosive gas trapping device as being capable of trapping corrosive gas for every constant period on the same specimen in a short time by arranging a means of accelerating corrosion and deterioration of a metal specimen. SOLUTION: For example, a heater 12 which is arranged in contact with a corrosive gas adsorptive material 11 with a silver-evaporated film formed on a silicon substrate is used to heat and control the corrosive gas adsorptive material 11 at/to a constant temperature, higher than room temperature, for example 50 deg.C. With the corrosive gas adsorptive material 11 heated and controlled at/to a preset temperature, higher than room temperature, reaction speed between corrosive gas and the adsorptive material 11 is increased and the adsorbing amount of the corrosive gas on the surface of the adsorptive material 11 can be greatly increased, so that a corrosion environment can be effectively evaluated in an extremely short time. As the temperature can be easily controlled, the effect of temperature change in an exposure-to-air environment between summer and winter is minimized.
    • 5. 发明专利
    • CORROSIVE ENVIRONMENT EVALUATING METHOD
    • JPH08152384A
    • 1996-06-11
    • JP31771694
    • 1994-11-29
    • NIPPON TELEGRAPH & TELEPHONE
    • IKEDA KOSUKEWATANABE MASAMITSU
    • G01N23/225G01N1/22G01N17/00
    • PURPOSE: To accurately measure the corrosive component increase amount of corrosive component collecting material by previously measuring the corrosive component amount of a dotted part before corrosive component collected sample is exposed, and measuring the corrosive component amount of the different site from the dotted part previously measured after the sample is exposed for a predetermined period. CONSTITUTION: Materials for adhering and reacting corrosive gas are fixed in a dotted state to a flat board 1 to manufacture a plurality of infinitesimal corrosive component collected samples 2. As the material of the dot, silver or copper is used to collect the component, and as the board, a silicon wafer, etc., is used. The numbers of the dots are three in a row A and four in a row B. A dot mask is placed on the silicon wafer substrate, the corrosive component collecting material such as silver is vacuum deposited. Before the sample is exposed, the corrosive component amount of the dot is previously measured by a composition analyzing method using an electron beam as a probe, and after the sample is exposed for a predetermined period, the corrosive component amount of the site different from the dot previously measured is measured, and the corrosive environment is evaluated based on the increase amount of the component amount.
    • 8. 发明专利
    • CRYOGENIC STAGE IN VACUUM VESSEL
    • JPH01104349A
    • 1989-04-21
    • JP25825087
    • 1987-10-15
    • NIPPON TELEGRAPH & TELEPHONE
    • IKEDA KOSUKEISHII YOSHIICHIYAMAZAKI SHIGETOMOKURATA TSUGIO
    • B01L9/00B01L99/00
    • PURPOSE:To make it possible to move a sample table widely and accurately, by separately providing a stage part on which samples are placed and a refrigerating part, connecting both by thin wire bundles having high flexibility and thermal conductivity, and further cooling a heat-shielding plate by another refrigerating tank. CONSTITUTION:By the action of a pump 9, a refrigerant in an external refrigerant tank 5 is transferred through a first refrigerant tank 7 to a second refrigerant tank 8, whereby a sample table 4 is cooled through the medium of bundles 10 of thin wires. Since the first refrigerant tank 7 is independent of the second refrigerant tank 8 for a heat-shielding plate 12, the cooling ability of each is greatly improved. Further, the sample table 4 and the first refrigerant tank 7 are provided separately, both being connected with each other by the thin wire bundles 10 for heat conduction between the two, and the thin wire bundles 10 are positioned around the sample table 4 such that they are symmetrical about a point of symmetry. Because of this, the movement of the sample table 4 is not limited and uniform accuracy of movement can be maintained. Furthermore, the vibration of the sample table 4 is greatly reduced.
    • 9. 发明专利
    • METHOD AND DEVICE FOR MEASURING AMOUNT OF DUST/DIRT
    • JP2000121541A
    • 2000-04-28
    • JP28941398
    • 1998-10-12
    • NIPPON TELEGRAPH & TELEPHONE
    • WATANABE MASAMITSUIKEDA KOSUKEAOKI NOBUE
    • G01N15/06G01N1/02G01N21/47
    • PROBLEM TO BE SOLVED: To make measurable the amount of dust/dirt with a compact, inexpensive, and simple device by evaluating the amount of floating dust/dirt according to the reflection intensity of light on the surface of a capturing material. SOLUTION: Light is applied from an emission part 7 to a floating dust/dirt capturing material 11 on a hole part 20 to detect the quantity of weak reflected light from the floating dust/dirt capturing material 11 at a light reception part 18. As the amount of floating dust/dirt being captured by the floating dust/dirt capturing material 11 increases, the amount of weak reflection light from the floating dust/dirt capturing material 11 gradually decreases. The change in the quantity of reflected light is recorded at a recording part 19 at every constant time. Then, a motor 13 is driven by a motor drive driver 14 at each constant time and the floating dust/dirt capturing material 11 is moved for a constant distance. The operation is repeated, the change in the quantity of reflected light on the surface of the floating dust/dirt capturing material is recorded, the amount of change dL/dt per unit time (t) is obtained, and the amount of floating dust/dirt D is obtained from a relation expression being obtained in advance, D=k×dL/dt, where K is a conversion coefficient.
    • 10. 发明专利
    • APPARATUS FOR EVALUATING EXPOSURE TO SODIUM CHLORIDE PARTICLE
    • JPH10318910A
    • 1998-12-04
    • JP12719897
    • 1997-05-16
    • NIPPON TELEGRAPH & TELEPHONE
    • WATANABE MASAMITSUIKEDA KOSUKE
    • G01N17/00G01N33/20
    • PROBLEM TO BE SOLVED: To obtain a compact and simple exposure evaluation apparatus by generating sodium chloride particles, sending it into a sealed container while controlling the amount of the particles, and carrying out an exposure test for an object to be evaluated. SOLUTION: An ultrasonic vibration is caused to a sodium chloride aqueous solution by an ultrasonic humidifier 1, thereby generating mist wherein sodium chloride is dissolved in water. A slit 4 is set at a particle exit 2 of the ultrasonic humidifier 2 and a container 3 is disposed to tightly shut the part. The container 3 is connected to a sealed container 6 via a pipe 7. The air is sucked from the sealed container 6 by a pump 8. sodium chloride particles generated in the ultrasonic humidifier 2 are discharged out from the particle exit 2 and introduced to the sealed container 6 through a slit gap 5 of the slit 4. A material to be evaluated is arranged inside the sealed container 6 to carry out an exposure test to the sodium chloride particles. The amount of the sodium chloride particles discharged from the particle exit 2 can be restricted by the slit 4. Accordingly, a metallic mateal or the like can be subjected to exposure test in a relatively simple constitution of the apparatus.