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    • 7. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS63127540A
    • 1988-05-31
    • JP27186486
    • 1986-11-17
    • HITACHI LTDHITACHI VLSI ENG
    • MIWA TAKASHIHONDA ATSUSHIOTA TADAAKI
    • H01L21/52H01L23/02
    • PURPOSE:To enable attaching a pellet by using a resin such as silicone rubber and to contrive preventing the crack of the pellet by attaching the pellet with a cement supplied in a hole for supplying the cement made in a package substrate. CONSTITUTION:A pellet 2 is mounted on a hole 1a for supplying a cement on a package substrate 1 and the bottom surface of the pellet 2 is vacuum- sucked via the hole 1a for supplying the cement and a through hole 7a for supplying the cement and adsorbed on the package substrate 1. In this state, wire bonding and the seal with a cap 4 are carried out by using a comparatively high deposition temperature sealing material 6 such as low melting point glass. After the sealing, a resin such as silicone rubber is supplied by means of such as pouring in the hole 1a for supplying the cement on the back surface of the pellet via the through hole 7a for supplying the cement or spraying and the pellet 2 is attached to the package substrate 1 with the cement 3. For this reason, the pellet can be attached by using the cement which is the resin which causes no crack of the pellet.
    • 9. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS62150870A
    • 1987-07-04
    • JP29067585
    • 1985-12-25
    • HITACHI VLSI ENGHITACHI LTD
    • OOTA TADAAKIHONDA ATSUSHI
    • H01L23/538H01L23/498
    • PURPOSE:To accurately bond a semiconductor pellet by connecting through hole wirings with a projection formed on a pellet mount. CONSTITUTION:The planar shape of a pellet mount 2 is formed of a square shape having a projection 2a. Through hole wirings 11 which are electrically connected at its end with a tungsten layer 13 are formed under the projection 2a, and electrically connected at its other end with inner layer wirings 10a. The wirings 10a are connected with a plating electrode to be electrically plated. Since the wirings 11a are connected with the projection 2a, the bonding surface of a pellet 3 can be formed flatly. Wirings 5 disposed at the side of the projection 2a are moved backward to obtain an interval between the projection 2a and wirings 5a. The end 7a of a frame 7 is formed in a circular-arc shape moved backward in the projecting direction of the projection 2a. Thus, effective length is obtained for the wirings 5a moved backward to effectively perform a wire bonding.