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    • 9. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS63127540A
    • 1988-05-31
    • JP27186486
    • 1986-11-17
    • HITACHI LTDHITACHI VLSI ENG
    • MIWA TAKASHIHONDA ATSUSHIOTA TADAAKI
    • H01L21/52H01L23/02
    • PURPOSE:To enable attaching a pellet by using a resin such as silicone rubber and to contrive preventing the crack of the pellet by attaching the pellet with a cement supplied in a hole for supplying the cement made in a package substrate. CONSTITUTION:A pellet 2 is mounted on a hole 1a for supplying a cement on a package substrate 1 and the bottom surface of the pellet 2 is vacuum- sucked via the hole 1a for supplying the cement and a through hole 7a for supplying the cement and adsorbed on the package substrate 1. In this state, wire bonding and the seal with a cap 4 are carried out by using a comparatively high deposition temperature sealing material 6 such as low melting point glass. After the sealing, a resin such as silicone rubber is supplied by means of such as pouring in the hole 1a for supplying the cement on the back surface of the pellet via the through hole 7a for supplying the cement or spraying and the pellet 2 is attached to the package substrate 1 with the cement 3. For this reason, the pellet can be attached by using the cement which is the resin which causes no crack of the pellet.