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    • 4. 发明专利
    • MANUFACTURE OF DIELECTRIC ISOLATING SUBSTRATE
    • JPH07335744A
    • 1995-12-22
    • JP12348094
    • 1994-06-06
    • HITACHI LTDHITACHI HARAMACHI SEMI CONDUCT
    • OWADA NOBUHITOKURITA SHINICHISAKAGAMI TAKESHIKAWAMOTO KOJISAKURABA KOJI
    • H01L21/762H01L21/02H01L27/12
    • PURPOSE:To prevent the defective joining of joint surfaces by thermally treating a laminated wafer in the direct joining of polycrystalline silicon and single crystal silicon within a specific temperature range as the heat treatment of the wafer. CONSTITUTION:In the heat treatment process of a wafer after laminating during the direct joining process of the wafer, the temperature of heat treatment correlates with the generation of voids. Consequently, it is considered that the temperature of heat treatment correlates with the generation of the voids even in the direct joining of polycrystalline silicon and single crystal silicon, and the generation of the voids to the temperature of heat treatment is examined. The result of the examination is shown in a graph. The axis of abscissas in the graph represents the temperature of heat treatment after laminating and the axis of ordinates the fraction defective of the joining of joint surfaces. The fraction defective of joining is reduced with a temperature rise, and a region, in which no defective joining is generated, is obtained within the range of a temperature of 1150-1250 deg.C. When the temperature is elevated to 1250 deg.C or higher, the fraction defective of joining is augmented again. Accordingly, the temperature of heat treatment after laminating is optimized, thus hardly generating defective joining.
    • 5. 发明专利
    • MANUFACTURE OF POWER IC
    • JPS63249333A
    • 1988-10-17
    • JP8299287
    • 1987-04-06
    • HITACHI LTDHITACHI HARAMACHI SEMI CONDUCT
    • KAWAMOTO KOJIKURITA SHINICHI
    • H01L21/28H01L21/76H01L21/762H01L29/41
    • PURPOSE:To obtain a high-performance power IC which is highly integrated and small-sized enough to decrease reactive power loss substantially and still provides high reliability, by forming a substrate contact region by means of selective oxidation performed during formation of a field oxide film instead of etching the oxide film. CONSTITUTION:After a thin oxide film 7' is formed on the surface of an element, an anti-oxidant Si3N4 film 10 is formed on a part of the surface where a substrate contact region is to be provided. A field oxide film 6 is then formed by thermal oxidation and the Si3N4 film 10 is removed thereafter. The thick field oxide film 6 thus formed is connected to the thin oxide film 7' in the substrate contact region with gently inclined junctions. Accordingly, there is no need of etching the oxide film. Even if the element isolating oxide film is overlapped with the substrate contact region, the element isolating oxide film can be reserved as it is. Thus, it is possible to obtain a high-performance power IC which is highly integrated and small-sized enough to decrease reactive power loss substantially, and still provides high reliability.
    • 6. 发明专利
    • DRIVE CIRCUIT FOR INVERTER DEVICE
    • JPH11313488A
    • 1999-11-09
    • JP11816298
    • 1998-04-28
    • HITACHI LTDHITACHI HARAMACHI SEMI CONDUCT
    • OURA HITOSHIKAWAMOTO KOJI
    • H02M7/5387
    • PROBLEM TO BE SOLVED: To reduce power consumption when integrating a circuit by using a level shift circuit being operated by a pulse signal, and by keeping on an upper-arm switching element by the retention function of drive charge, only during a pulse period. SOLUTION: A lower arm QB1 is turned on and off by a control signal SB, via a driving circuit 3 where VCC is used as a power supply. An upper arm QT1 is driven by a drive element M5, where a power supply VCH for the upper arm is used as the power supply. An upper arm ST gives an external signal from a circuit 11 for driving switching elements S1 and S2 by a signal with the same logic as an upper-arm switching element to have it operate. When the element S1 is turned on and voltage drops in a resistor Ra for lowering potential, the signal is transferred by logic inverters 8 and 9, and a P- channel switching element M5 is turned on for driving the QT1. After the drive period of QT1, the P-channel switching element M5 is turned off, and if the QT1 that is a voltage-type switching element is once driven, a driving voltage is kept and on-state is maintained, since the QT1 is a voltage-type switching element.