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    • 1. 发明专利
    • Method and equipment for percussion machining of workpiece, and semiconductor device machined through them
    • 用于工件加工的方法和设备以及通过它们加工的半导体器件
    • JP2004148465A
    • 2004-05-27
    • JP2002318209
    • 2002-10-31
    • Hitachi LtdIncorporated Educational Institution Meisei学校法人明星学苑株式会社日立製作所
    • ISHINO MASAKAZUOTSUKA KANJI
    • B26F1/00H01L23/52H01L25/065H01L25/07H01L25/18
    • H01L2924/0002H01L2924/00
    • PROBLEM TO BE SOLVED: To drill small holes through a semiconductor wafer or a chip formed of semiconductor wafers through punching-based machining. SOLUTION: It is arranged that, in a cylinder, a hammer 4 is lowered at a slow speed to collide with a piston 6 with much impact and to apply pressure with much impact onto air-mixed combustion gas previously put into the cylinder through a combustion gas injection valve 7. In this process, the gas passes through a flow rectification channel 8, and at that time, its speed is upgraded as a contraction stress wave of more than d 1 /d 2 times (=0.578 times), with the air carried to a speed acceleration guide 11 through an impedance conforming guide 9. In the speed acceleration guide 11, a punch 10 formed within it progresses while being accelerated by the contraction stress wave, and rams into a wafer 13, which is a workpiece, through the intermediation of a guard rail 12. Under this arrangement, a through-hole is formed through the wafer 13. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:通过冲孔加工从半导体晶片或由半导体晶片形成的芯片上钻小孔。 解决方案:设置在气缸中,锤4以较低的速度下降以与冲击很大的活塞6碰撞,并且将大量冲击施加的压力施加到预先放入气缸中的空气混合燃烧气体 通过燃烧气体喷射阀7.在该过程中,气体通过流量整流通道8,此时其速度升高为大于d SB SB的收缩应力波 (= 0.578次),通过阻抗一致导向器9将空气运送到加速导向器11.在速度加速导向器11中,形成在其内的冲头10在加速时被加速 收缩应力波,并通过保护轨道12进入作为工件的晶片13中。在这种布置下,通过晶片13形成通孔。(C)2004 ,JPO
    • 9. 发明专利
    • LOW NOISE SEMICONDUCTOR PACKAGE
    • JPH06132349A
    • 1994-05-13
    • JP16063692
    • 1992-06-19
    • HITACHI LTD
    • MIWA TAKASHIOTSUKA KANJISHIRAI MASAYUKIMATSUNAGA TOSHIHIRO
    • H01L21/60
    • PURPOSE:To obtain the semiconductor package in which a current flows to the grounding or a power source in the switched direction when the output buffer of a TTL and a CMOS is switched, the electromotive force corresponging to the inductance of the power source or the grounding is generated, this electromotive force is turned into noise, and a signal is made larger in proportion to the increases in speed. CONSTITUTION:The power source of a multilayer tab substrate or printed substrate 3, consisting of two or more layers, and a grounding 5 are connected by a bypass capacitor 2, and a bypass capacitor 2 is positioned in the vicinity of a semiconductor chip 1 in the semiconductor package. As a result, when the power source and the grounding are connected by the by pass capacitor 2, a high frequency signal is passed through the resistor of the capacitor easily. As a result, the boosting of electromotive force can be suppressed, a high speed low noise package can be realized and also as power source/grounding are connected by the bypass capacitor in the neighborhood of the chip, the efficiency of the package becomes great.