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1. 发明专利

JP2001041931A LASER MASS SPECTROMETER 失效
公开(公告)号：JP2001041931A
公开(公告)日：2001-02-16
申请号：JP21315999
申请日：1999-07-28
申请人： HITACHI LTD
发明人： YAMAGUCHI HIROKATSU , IBE HIDEFUMI , EGUCHI KINYA , SUGIMOTO ARITOSHI , SAKIMOTO MASAKAZU
IPC分类号： H01J49/10 , G01N27/62 , G01N27/64 , H01J49/40
摘要： PROBLEM TO BE SOLVED: To correctly cut a film down to the foreign matter on a semiconductor sample up to the position of the foreign matter and remove the film on the surface of the sample, when the foreign matter in the film or at the interface of the film is to be analyzed by observing a laser spot on the sample, every time the sample surface is cut by making a laser irradiation. SOLUTION: After a semiconductor wafer sample 4 is placed on a stage, the stage is moved to move the position of foreign matter below an objective lens 17. The focal point of a laser light is focused for correction by moving a collective lens 19. A carved depth Δz of the surface of the sample is obtained from a movement distance M.Δz of the collective lens 19, every time a pulse laser light is irradiated once. The cut depth per pulse can be adjusted, by adjusting the attenuation rate of an attenuation filter 13. The intensity of the laser light is set to be minimum at first, and then increased stepwise by each pulse. The intensity of the laser light is fixed, when the cut depth per pulse becomes approximately 1/10 the depth from a sample surface to the foreign matter.

2. 发明专利

JP2000223065A MASS SPECTROMETER 失效
公开(公告)号：JP2000223065A
公开(公告)日：2000-08-11
申请号：JP1944699
申请日：1999-01-28
申请人： HITACHI LTD
发明人： YAMAGUCHI HIROKATSU , EGUCHI KINYA , SAKIMOTO MASANORI
IPC分类号： H01J49/06 , G01N27/62 , H01J49/40
摘要： PROBLEM TO BE SOLVED: To provide a small device for analyzing a surface by loading a large sample on a sample stage as it is, by providing a rear-stage reflection electrode on an ion track in order to guide ions ejected from an ion reflector to a detector. SOLUTION: Laser beams going out of a laser beam source 3 are reflected by a mirror 6 having a through hole, and are focused onto a sample 2 by an objective lens 5. Ions generated with irradiation are accelerated by an ion drawing electrode 8, and are guided to this flight-time-type mass spectrometer 1. A polarization electrode 11 is adjusted so as to direct a progressing direction of the ions to an ion reflector (reflectron) 9. The ions reflected by the reflectron 9 are reflected by a rear-stage reflection electrode 40, and focused by an ion lens 41, and are detected by an ion detector 10. Masses are determined by measuring a time required from laser oscillation to arrival at the ion detector 10. By reflecting the ions with the rear-stage reflection electrode 40, the detector 10 can be placed at a position away from a sample container 20, and measurement of a large sample is allowed.

3. 发明专利

JPH11190695A SEMICONDUCTOR STRESS MEASURING RAMAN SPECTROPHOTOMETER 失效
公开(公告)号：JPH11190695A
公开(公告)日：1999-07-13
申请号：JP36091397
申请日：1997-12-26
申请人： HITACHI LTD
发明人： YAMAGUCHI HIROKATSU , EGUCHI KINYA , SAKIMOTO MASAKAZU , TAKASHIMA MUNEHIKO
IPC分类号： G01J3/44 , G01N21/65 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To measure stress rapidly with high sensitivity in a Raman microspectrophotometer. SOLUTION: In a low dispersion spectroscope 13, focal length is 60 cm, the ruling number of an echelette diffraction grating 30 is 3600/mm, and primary diffracted light is used. In a high dispersion spectroscope 14, the focal length of a concave reflecting mirror is 60 cm, the ruling number of an echelle diffraction grating 35 is 75/mm, and 48-order diffracted light is used. In the case of detecting Raman spectrum of silicon excited by argon laser 514.5 nm, the low dispersion spectroscope 13 provided with the echelette diffraction grating 30 is adjusted in such a way that light from 515 nm to 535 nm is dispersed on an intermediate slit 32, and the width of the intermediate slit 32 is adjusted to correspond to this wavelength width to measure stress.

4. 发明专利

JPH0945276A MASS SPECTROMETER 失效
公开(公告)号：JPH0945276A
公开(公告)日：1997-02-14
申请号：JP19143295
申请日：1995-07-27
申请人： HITACHI LTD
发明人： AKAMATSU NAOTOSHI , EGUCHI KINYA , YAMAGUCHI HIROKATSU
IPC分类号： G01N27/62 , H01J49/10 , H01J49/40
摘要： PROBLEM TO BE SOLVED: To reduce a focusing diameter through the application of a laser beam from the vertical direction and to enhance image resolution by opposing a microscope to a sample, and causing ions to fly crosswise by means of ion accelerating electrodes. SOLUTION: A sample 2 is inserted between accelerating electrodes 22. During mass spectrometry, a laser beam 7a from a laser beam source 6 is focused onto the sample 2 by a condensing lens 22. An ion beam 21b excited thereby is accelerated by an accelerating electrode 40 in an almost perpendicular direction to the direction of incidence of the laser beam and is made to impinge on a mass spectrometer part 1. The ion beam 21b is reflected by an ion reflector 30 and impinges on an ion detecting part 34. Ion flight time can be obtained by measuring the time from the application of the laser beam 7b to the arrival of the ions at the ion detector 34. Mass spectrometry of the ions can thus be performed. During observation of the sample, light from a sample illuminating light source 8 is made to impinge on the sample 2 from the condensing lens 22. An image of the sample 2 formed thereby is observed with a TV camera 10.

5. 发明专利

JPH08193979A SAMPLE ANALYZING DEVICE AND METHOD 失效
公开(公告)号：JPH08193979A
公开(公告)日：1996-07-30
申请号：JP691595
申请日：1995-01-20
申请人： HITACHI LTD
发明人： OSHIDA YOSHITADA , EGUCHI KINYA , MIZUNO FUMIO , NOZOE MARI , SUGIMOTO ARITOSHI
IPC分类号： G01N27/62 , G01N1/00 , G01N21/71 , H01L21/66
摘要： PURPOSE: To analyze a fine pattern defect and the constituent of a fine adhered foreign object by opening a hole at a tip lens facing the sample of a transmission-type optical system and passing a vaporized atom, molecule, or ion and leading it to an analyzing system. CONSTITUTION: Holes 231 and 232 with a lens light axis nearly as the center are opened at tip lenses 201 and 202 facing a sample 1 of a transmission-type optical system 2 with a large pupil diameter. When light is applied from a laser light source 3, beams are of donut shape by a pupil-conjugate filter 34, form an image on the pupil of an optical system 2 by lenses 35 and 21, do not hit against the side surface of the holes 231 and 232, cause a small spot close to a diffraction limitation determined by the numerical aperture of the optical system 2 to be formed on the surface of the sample 1, and allow an object on the surface of the ionized sample 1 to be guided to a flight-time-type mass analyzer 8 through the holes 231 and 232. As a result, the transmission-type optical system 2 with a large numerical aperture can be arranged nearly vertically to the sample 1, thus applying light with a smaller spot size and selectively vaporizing a fine region.

6. 发明专利

JPH08148116A MICRO-LASER FLIGHT TIME TYPE MASS SPECTROMETER 失效
公开(公告)号：JPH08148116A
公开(公告)日：1996-06-07
申请号：JP28499994
申请日：1994-11-18
申请人： HITACHI LTD
发明人： EGUCHI KINYA , EZAWA MASAYOSHI , MIZUNO FUMIO , YAMAGUCHI HIROKATSU , AKAMATSU NAOTOSHI
IPC分类号： G01N27/62 , H01J49/06 , H01J49/10 , H01J49/40
摘要： PURPOSE: To provide a micro-laser flight time type mass spectrometer irradiating with a laser beam, focusing the excited ion particles and having good resolution. CONSTITUTION: This micro-laser flight time type mass spectrometer is provided with a reflecting mirror 24, a Cassegrainian objective lens 22, electrode plates 25a, 25b and an ion detector 34. The reflecting mirror 24 is arranged at a position outside the objective lens 22, a laser beam 7 squeezed small irradiate a sample 2 and ions 18 are excited. The ions 18 are focused by the ion passing hole 24a of the reflecting mirror 24, the ion passing hole 24b of the objective lens 22, and Einzel-lenses 30a, 30b, 30c, controlled by electrode plates 25a, 25b, and detected by the ion detector 34.

7. 发明专利

JPH04306549A MICROSCOPIC LASER MASS SPECTROMETER 失效
公开(公告)号：JPH04306549A
公开(公告)日：1992-10-29
申请号：JP7080591
申请日：1991-04-03
申请人： HITACHI LTD
发明人： YAMAGUCHI HIROKATSU , EGUCHI KINYA , EZAWA MASAYOSHI
IPC分类号： G01N27/62 , G01N27/64 , H01J49/10 , H01J49/40
摘要： PURPOSE:To narrow down a laser beam small and improve ionizing efficiency by disposing an objective lens with a gradient between an ion electrode and a sample base. CONSTITUTION:Objective lenses 22a, 22b are inclined; no barrier is between them and a sample 2 except an ion drawing electrode 28, and as the lenses 22a, 22b, those having small focal distances and large aperture can be used. Thus, a laser beam 7 can be narrowed down small onto the sample 2 by the lens 22b, and radiated to a measuring position on the sample 2. Since a gap is provided between the lenses 22a and 22b, a material separated from the sample 2 can be sent to a mass spectrometric part 1 by the laser beam without any barrier. By providing two or more objective lenses as the lenses 22a, 22b, plural kinds of laser beams 7a, 7b can be efficiently radiated to the sample 2, and the ionizing efficiency can be improved.

8. 发明专利

JPH01287448A METHOD AND DEVICE FOR STRAY LIGHT REMOVAL FOR RAMAN SPECTRAL DIFFUSION 失效
公开(公告)号：JPH01287448A
公开(公告)日：1989-11-20
申请号：JP11710788
申请日：1988-05-16
申请人： HITACHI LTD
发明人： EGUCHI KINYA , WAKANA SHIGERU , EZAWA MASAYOSHI , NIITSUMA KIKUE
IPC分类号： G01J3/44 , G01N21/65
摘要： PURPOSE:To perform laser Raman spectral diffusion with high reliability by guiding light which is emitted by a sample to a spectrometer through a dichroic mirror which reflects exciting laser light regularly and transmits Raman scattered light. CONSTITUTION:Laser reflected light 3 and Raman scattered light 4 generated by the sample 2 which is irradiated with exciting laser light 1 become parallel light beams through a lens 5 and are made incident on dichroic mirrors 6, 7, 8, and 9 arranged at specific angles to incident light one after another. Incident laser reflected light 3 is reflected according to the characteristics of the mirrors 6, 7, 8, and 9, but the Raman scattered light 4, on the other hand, is reflected by none of the mirrors 6 to 9 and transmitted to travel backward through the same optical path with the incident light, so that the light enters a spectrometer 11 through a condenser lens 10. Thus, a decrease in the quantity of the Raman scattered light is reduced to remove stray light caused by the laser reflected light, thereby performing the high-reliability laser Raman spectral diffusion.

9. 发明专利

JPS6375642A INFRARED ABSORPTION SPECTRUM REFLECTING AND MEASURING APPARATUS 失效
公开(公告)号：JPS6375642A
公开(公告)日：1988-04-06
申请号：JP21959886
申请日：1986-09-19
申请人： HITACHI LTD
发明人： EGUCHI KINYA , NIITSUMA KIKUE , WAKANA SHIGERU , EZAWA MASAYOSHI
IPC分类号： G01N21/3563 , G01N21/35 , G01N21/47
摘要： PURPOSE:To measure an infrared spectrum with high sensitivity by guiding infrared rays to the minute part of a specimen while reducing the scattering thereof, by guiding infrared rays to a fine pipe made of gold or having a gold plated inner surface to irradiate the specimen and condensing the reflected light from the specimen to a detector through an eccentric type ellipsoidal reflecting mirror. CONSTITUTION:The tille apparatus measures an infrared absorption spectrum according to a reflecting method and is especially adapted to a minute point infrared reflecting spectral apparatus requiring high brightness infrared rays. That is, the infrared rays 2 from an infrared rays source pass through a pipe (light pipe) made of gold without generating scattering to irradiate the extremely minute point of a specimen 3 to be analyzed. The incident angle of said infrared rays at this time is set to 45 deg.. The measuring part of the specimen 3 to be analyzed is present at the almost one focus position of an eccentric type ellipsoidal reflecting mirror 4 constituting a reflected light condensing system and the reflected light from the specimen 3 to be analyzed is condensed to a detector 5 by the eccentric type ellipsoidal reflecting mirror 4.

10. 发明专利

JPS61281946A METHOD FOR MEASURING TOTAL REFLECTION INFRARED ABSORPTION SPECTRUM 失效
公开(公告)号：JPS61281946A
公开(公告)日：1986-12-12
申请号：JP12245085
申请日：1985-06-07
申请人： HITACHI LTD
发明人： ISHIKAWA MEGUMI , EGUCHI KINYA
IPC分类号： G01N21/27 , G01N21/35 , G01N21/552
摘要： PURPOSE:To analyze the depth in a total IR light wavelength region at one time by using an inorg. compd. having no absorption in the wavelength region of IR light as a spacer. CONSTITUTION:The IR light 2 emitted from an IR light source 1 passes through a Michelson interferometer 3, is made incident on a crystal 5 in a sample holder 4 and is totally reflected by the boundary between the crystal 5 and the spacer 6. The inorg. compd. such as ZnSe or PbF2 which has the refractive index lower than the refractive index of the crystal 5 and is transparent to IR light is used for the spacer 6. Part 7 of the incident IR light bleeds to a measuring sample 8 beyond the boundary, is reflected by receiving the effect of the absorption by the sample 8 and is detected by a detector 9. The detected light is processed by a data processor 10 and the total reflection IR absorption spectrum is obtd. The penetration depth of the IR light 7 penetrating into the sample 8 in the stage of total reflection changes when the thickness of the spacer 6 is changed. The depth analysis is thus made possible. The depth in the total IR wavelength region is thereby analyzed without receiving the effect of absorption by the spacer.

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