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    • 1. 发明专利
    • Rfid tag
    • RFID标签
    • JP2009075687A
    • 2009-04-09
    • JP2007241732
    • 2007-09-19
    • Hitachi Ltd株式会社日立製作所
    • DAIROKU NORIYUKIISADA NAOYASHINDO HIDEHIKOKAMISAKA KOICHI
    • G06K19/077G06K19/07
    • G06K19/07749
    • PROBLEM TO BE SOLVED: To provide an RFID tag for allowing heightening of communication accuracy between a circuit chip and its external circuit through an antenna while keeping the circuit chip and the antenna of a tag sheet in a non-contact state, and allowing sticking even to any object. SOLUTION: In this RFID tag, the circuit chip formed with a loop-like antenna coil on its principal face and the tag sheet formed with an antenna pattern on its principal face are prepared, and the circuit chip is mounted on the principal face of the tag sheet such that the circuit chip does not overlap the antenna pattern. The circuit chip is disposed close to the antenna pattern, and preferably, at least a half round of the principal face thereof is made to face to the antenna pattern. Thereby, because transfer of a signal or power between the circuit chip (the antenna coil) and the antenna pattern is certainly performed, the high-performance and strong RFID tag can be obtained by only roughly aligning the circuit chip and the tag sheet. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种RFID标签,用于通过天线提高电路芯片和其外部电路之间的通信精度,同时保持电路芯片和标签片的天线处于非接触状态,以及 允许粘贴甚至任何物体。 解决方案:在该RFID标签中,准备在其主面上形成有环状天线线圈的电路芯片和在其主面上形成有天线图案的标签片,并且将电路芯片安装在主体上 使得电路芯片不与天线图案重叠。 电路芯片靠近天线图案设置,并且优选地,其主面的至少半个圆形面对天线图案。 因此,由于可靠地进行电路芯片(天线线圈)和天线方向图之间的信号或电力的传递,所以只要将电路芯片和标签片材大致对准即可得到高性能,强大的RFID标签。 版权所有(C)2009,JPO&INPIT
    • 8. 发明专利
    • SUBSTRATE CLEANING METHOD AND ITS APPARATUS
    • JP2002025970A
    • 2002-01-25
    • JP2000203054
    • 2000-06-30
    • HITACHI LTD
    • SAEKI TOMONORITAKAHARA YOICHIDAIROKU NORIYUKITANAKA YUICHIROAIUCHI SUSUMU
    • H01L21/304
    • PROBLEM TO BE SOLVED: To solve the problem of establishing a drying method capable of protecting a substrate against contamination caused by liquid attached to the periphery of a cleaning plate in a drying process, where the above problem is caused by the fact that liquid attached to the cleaning plate is apt to contaminate the surface of the substrate in a conventional method of cleaning and drying the surface of the substrate, by continuously feeding liquid and gas to a space between the substrate and the opposed cleaning plate, therefore liquid attached to the cleaning plate is required to be removed quickly after a drying process is started, but liquid attached to the periphery of the cleaning plate is not easily removed. SOLUTION: The cleaning plate larger than the substrate is used, by which the periphery of the cleaning plate where liquid is left is set separate from the substrate. Furthermore, it is effective that a means for keeping distances short between the substrate and the cleaning plate, and a substrate holding part and the cleaning plate respectively is jointly used to decrease liquid left on the surface of the cleaning plate.