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1. 发明专利

JPS5156740A DOHIFUKUARUMINIUMU BUSUBAANO DENSETSUMENSHORIHOHO 失效
公开(公告)号：JPS5156740A
公开(公告)日：1976-05-18
申请号：JP13108574
申请日：1974-11-15
申请人： HITACHI CABLE , HITACHI LTD
发明人： HANAMI TAKEMITSU , DEIITORITSUHI EERUSHUREEGERU , SANKI SADAHIKO , ONDA MAMORU , SAITO YOSHIO , SAITO TADASHI
IPC分类号： H01R11/11 , C25C7/00 , C25C7/02 , C25D7/00 , C25D17/00 , C25D17/12 , H01R25/16

2. 发明专利

JPH07230942A MULTICHAMBER SYSTEM AND ITS CONTROL METHOD 失效
公开(公告)号：JPH07230942A
公开(公告)日：1995-08-29
申请号：JP2163694
申请日：1994-02-18
申请人： HITACHI LTD
发明人： ISHIKAWA KATSUHIKO , SAITO YOSHIO , OKUDAIRA SADAYUKI
IPC分类号： H01L21/677 , H01L21/02 , H01L21/68
摘要： PURPOSE:To prevent contamination of the outside part, and to increase the number of processes with which a continuous treatment can be conducted. CONSTITUTION:A multichamber device 1M, on which a wafer carrying chamber 1a is commonly used by a plurality of process chambers 2 and 3 using a general purpose multichamber device, is constituted, and multichamber devices 2M to 6M, having the constitution same as the above-mentioned multichamber device 1M, are coupled in loop shape so that the semiconductor wafer, which is the object of treatment, can make a round. Also, the carrying in and carrying out of the semiconductor wafer is conducted using a load-locking chamber 5 which is connected to the multichamber device 1M.

3. 发明专利

JPH06340333A CONVEYING DEVICE BY GAS FLOW 失效
公开(公告)号：JPH06340333A
公开(公告)日：1994-12-13
申请号：JP12893393
申请日：1993-05-31
申请人： HITACHI LTD
发明人： ITO HIDEFUMI , SAITO YOSHIO , TANABE YOSHIKAZU , NITTA TAKEHISA
IPC分类号： B65G49/07 , B65G51/03 , B65H5/22 , H01L21/677 , H01L21/68
摘要： PURPOSE:To position a platy body accurately and in short time at a desired stop position by controlling the positioning operation of the platy body relative to a positioning member by a fluid force. CONSTITUTION:When a wafer 2 under floated condition is conveyed from the left side by a wafer floating nozzle 4, it is stopped by a drag force generated by a gas jet from a control nozzle 5b opened in the direction reverse to the conveying direction, and the stoppage under floated condition is maintained by a jet from the wafer floating nozzle 4. In the floated condition, the wafer 2 is rotated by the presence of the orientation flat 2a of the wafer 2. In this case, first a positioning pin 6 is raised from a nozzle plate 3 to around the wafer 2, and the balance of forces caused by the jets from the control nozzle 5a and the control nozzle 5b in the directions reverse to each other is controlled to press the wafer 2 gently against the side surface of the step part 6a of the positioning pin 6 for complete stop.

4. 发明专利

JPH06134258A DENITRATION METHOD AND CATALYST USED THEREIN 失效
公开(公告)号：JPH06134258A
公开(公告)日：1994-05-17
申请号：JP28562092
申请日：1992-10-23
申请人： HITACHI LTD , BABCOCK HITACHI KK
发明人： SAITO YOSHIO , TATE TAKAHIRO , KURODA OSAMU , YAMASHITA HISAO , MIYADERA HIROSHI
IPC分类号： B01D53/56 , B01D53/34 , B01D53/94 , B01J29/06 , F01N3/08 , B01D53/36
摘要： PURPOSE:To obtain high denitration capacity within a temp. range wider than individual catalysts by arranging a plurality of denitration catalysts having different reaction temps. capable of obtaining the max. activities in a reaction gas passage. CONSTITUTION:In a denitration method for removing nitrogen oxide in exhaust gas containing 5000ppm or more of oxygen using hydrocarbon as a reducing agent, two or more kinds of catalysts 3-5 having different reaction temps. capable of obtaining the max. activities are provided in an exhaust gas passage direction 2 in series to obtain high activity within a temp. range wider than the individual catalysts. As a result, in the denitration reaction due to the catalyst, high denitration capacity can be obtained within a temp. range wider than a conventional catalyst.

5. 发明专利

JPH0393899A CLEANSER AND METHOD FOR CLEANSING 失效
公开(公告)号：JPH0393899A
公开(公告)日：1991-04-18
申请号：JP23131289
申请日：1989-09-06
申请人： MITSUI PETROCHEMICAL IND , HITACHI LTD
发明人： TSUMOTO TAKAMASA , MIYAKE HIROHIKO , TAKEHANA YOICHI , SAITO YOSHIO , ITO KATSUHIKO
IPC分类号： B08B3/08 , C11D7/28 , C11D7/50 , H01L21/304 , H05K3/26
摘要： PURPOSE:To provide a cleanser comprising a mixture of 5-fluoropropanol and a solvent miscible with the 5-fluoropropanol, effective for cleansing substrates, etc., used in the processes of semiconductor preparation without employing CFC gas and without having the danger of fire and explosion. CONSTITUTION:The objective cleanser comprises 5-fluoropropanol and a solvent (e.g. water, an alcohol, an ether, a ketone or a hydrocarbon excluding halogenated hydrocarbons) miscible with the 5-fluoropropanol.

6. 发明专利

JPS63256330A OPERATION CONTROLLER FOR MACHINE TOOL 失效
公开(公告)号：JPS63256330A
公开(公告)日：1988-10-24
申请号：JP8685687
申请日：1987-04-10
申请人： HITACHI LTD
发明人： HANADA SHOJI , ASABUKI HIROSHI , FUJI KUNIHIKO , EDA MINORU , SAITO YOSHIO
IPC分类号： B23Q5/10 , B23Q5/04 , B23Q15/00
摘要： PURPOSE:To provided high accuracy working without any effects of electromagnetic vibration from an AC motor by providing a power supply for dropping voltage supplying power to the AC motor as the degree of working is heightened. CONSTITUTION:A machine tool controller 103 is constituted to store or output information about the tool selection, tool transfer position, running speed of motor and the degree of working. And a V/F change-over circuit 253 receiving the output degree of working, i.e. signal D of degree of working changes over selectively a straight line L representing the relationship between the normally selected output voltage V and the output frequency F to a straight line M. Thus, when the output frequencies F are same, the output result is reduced and the output signal is given to a voltage controlling circuit 255 such that in the normal working such as rough and medium cut working the lower output voltage is provided. Thus, in the precision working of higher degree the output voltage can be reduced to prevent the accuracy of worked surface from the degradation caused by electromagnetic vibration force and improve the quality of working.

7. 发明专利

JPS63134482A OPERATION METHOD AT TIME OF CONTROL OF ELEVATOR 失效
公开(公告)号：JPS63134482A
公开(公告)日：1988-06-07
申请号：JP27660686
申请日：1986-11-21
申请人： HITACHI LTD , HITACHI ELEVATOR ENG & SERVICE
发明人： SAITO YOSHIO
IPC分类号： B66B5/02 , B66B5/00

8. 发明专利

JPS6381932A ETCHING DEVICE 失效
公开(公告)号：JPS6381932A
公开(公告)日：1988-04-12
申请号：JP22605886
申请日：1986-09-26
申请人： HITACHI LTD
发明人： YAMAGUCHI TATSUYA , SAITO YOSHIO
IPC分类号： C23F1/00 , H01L21/306
摘要： PURPOSE:To improve the operating efficienty of an etching device by installing an etchant mixing tank having a temperature control means at the pre-stage of a treating tank conducting etching treatment and supplying the treating tank with a temperature-controlled etchant by the mixing tank. CONSTITUTION:Water and hydrogen fluoride each weighed by a weighting tank 2 and a weighting tank 1 are introduced into a mixing tank 3. An elevating liquid temperatuer is cooled by a coil 4 for cooling by the exothermic reaction of hydrogen fluoride and water at that time, and hydrogen fluoride and water are kept at a proper temperature (23 deg.C). An etchant is exchanged as follows. The etchant in a treating tank 9 and an external vessel 10 is discharged by a discharge system, and the etchant kept at the proper temperature (23 deg.C) is induced into the treating tank 9. The etchant in the external vessel 10 is transferred to a temperature controller 12, and the etchant is brought to the proper temperature again and returned to the treating tank 9 when the etchant is not held at the proper temperature. A material to be etched is brought into contact with the etchant in the treating tank 9 for a fixed time under the state, and etched and treated.

9. 发明专利

JPS61150926A CONVEYING DEVICE 失效
公开(公告)号：JPS61150926A
公开(公告)日：1986-07-09
申请号：JP24748985
申请日：1985-11-05
申请人： HITACHI LTD , HITACHI KIDEN KOGYO KK
发明人： NITTA TAKEHISA , SAITO YOSHIO , WATANABE SEIJU , TAKAHASHI NAOYUKI
IPC分类号： H01L21/677 , B65G54/02 , H01L21/67
摘要： PURPOSE:To enable to convey loads in a stable condition without side slide, by arranging compressed air injection nozzles around both sides of the upper face of the conveying route and the upper edge of the both sides opposing to the carrier pallet. CONSTITUTION:The compressed air generated in a compressor 7 is delivered to each block unit of the conveying route respectively, through a high pressure dust 5 and feed control devices 91, 92, 93... of the compressor 7, injected upward and sidewise from the carrier table 1, through nozzles 1C arranged symmetrically at the top and both side surfaces of the carrier table 1. The injected high compressed air hits the bottom of the pallet 6 and presses it upward and sidewise, causing to keep the pallet 6 floated up as well as keeping equal spaces in both sides of the pallet 6. In such a position, the pallet 6 is conveyed along the arrow direction without side slide, driven by the linear motor.

10. 发明专利

JPH06319953A PURIFICATION OF NITROGEN OXIDE 失效
公开(公告)号：JPH06319953A
公开(公告)日：1994-11-22
申请号：JP11333293
申请日：1993-05-14
申请人： HITACHI LTD
发明人： TATE TAKAHIRO , SAITO YOSHIO , KURODA OSAMU , YAMASHITA HISAO , MIYADERA HIROSHI
IPC分类号： B01D53/56 , B01D53/86 , B01D53/94 , F01N3/22 , F02B3/06 , B01D53/36 , B01D53/34
摘要： PURPOSE:To provide a catalyst and its reaction control method and system for reducing and purifying the nitrogen oxide in oxygen-containing combustion exhaust gas by using a hydrocarbon. CONSTITUTION:The purification is effected by causing an incomplete combustion of hydrocarbon with oxygen on the catalyst and allowing reaction between the incomplete combustion product and nitrogen oxide. By controlling the reaction conditions so that the amount of CO produced on the catalyst layer reaches a predetermined or higher concn., the catalyst can be used in the optimum conditions. The result from a reaction made between C3H8 and NO in the presence of 10% oxygen using CO-carrying mordenite catalyst shows that a high NO conversion ratio can be obtained under the conditions of a high CO yield rate. This method is effective in the purification of the nitrogen oxide in the exhaust gas emitted from diesel engine, lean burn gasoline engine, etc., to which the conventional denitration catalyst, catalytic converter rhodium, etc., are not applicable.

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