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1. 发明专利

JPS61150926A CONVEYING DEVICE 失效
公开(公告)号：JPS61150926A
公开(公告)日：1986-07-09
申请号：JP24748985
申请日：1985-11-05
申请人： HITACHI LTD , HITACHI KIDEN KOGYO KK
发明人： NITTA TAKEHISA , SAITO YOSHIO , WATANABE SEIJU , TAKAHASHI NAOYUKI
IPC分类号： H01L21/677 , B65G54/02 , H01L21/67
摘要： PURPOSE:To enable to convey loads in a stable condition without side slide, by arranging compressed air injection nozzles around both sides of the upper face of the conveying route and the upper edge of the both sides opposing to the carrier pallet. CONSTITUTION:The compressed air generated in a compressor 7 is delivered to each block unit of the conveying route respectively, through a high pressure dust 5 and feed control devices 91, 92, 93... of the compressor 7, injected upward and sidewise from the carrier table 1, through nozzles 1C arranged symmetrically at the top and both side surfaces of the carrier table 1. The injected high compressed air hits the bottom of the pallet 6 and presses it upward and sidewise, causing to keep the pallet 6 floated up as well as keeping equal spaces in both sides of the pallet 6. In such a position, the pallet 6 is conveyed along the arrow direction without side slide, driven by the linear motor.

2. 发明专利

JPS61150924A CONVEYING DEVICE 失效
公开(公告)号：JPS61150924A
公开(公告)日：1986-07-09
申请号：JP24748785
申请日：1985-11-05
申请人： HITACHI LTD , HITACHI KIDEN KOGYO KK
发明人： NITTA TAKEHISA , SAITO YOSHIO , FUKUWATARI ICHIRO , WATANABE SEIJU
IPC分类号： B65G49/00 , B65G54/02 , H01L21/67 , H01L21/677 , H01L21/68
摘要： PURPOSE:To enable to convey loads with accuracy, stability and reliability, in the condition where vibration and dust of the load are restrained, by keeping the carrier pallet sloped to the conveying direction. CONSTITUTION:On the carrier pallet 6 is furnished a reaction plate 6a, on which supporting bars 6b are arranged projecting upward. On the supporting bars 6b is arranged a holding plate 6c with a slope to the conveying direction, over which loads (such as electronic parts or medicinal goods that must be free from dust) are placed. The reaction plate 6a of the pallet 6 is driven as the secondary circuit of the linear motor, by a propelling power received from the primary magnetic flux of the linear motor, to drive the pallet 6 in the direction of the arrow. In this case, the load is, together with the holding plate 6c, conveyed in the position sloped in a given angle constantly, causing to improve stability to the conveying direction, and to reduce vibration of the load coming from inertia of motions and halts of the pallet 6.

3. 发明专利

JPS61150925A LINEAR MOTOR CONVEYOR FOR WAFER 失效
公开(公告)号：JPS61150925A
公开(公告)日：1986-07-09
申请号：JP24748885
申请日：1985-11-05
申请人： HITACHI LTD , HITACHI KIDEN KOGYO KK
发明人： NITTA TAKEHISA , SAITO YOSHIO , FUKUWATARI ICHIRO , WATANABE SEIJU
IPC分类号： H01L21/677 , B65G54/02 , H01L21/67
摘要： PURPOSE:To enable to convey a carrier pallet and wafer thereon in the stable condition free from dust, by driving the pallet with a linear motor, and by floating up the load with compressed air. CONSTITUTION:The conveying route 2 is furnished with the primary side of a linear motor 3, and the reaction plate of the bottom of the carrier pallet 6 is used as the secondary side of the linear motor 3. The magnetic flux of the primary side of the linear motor 3 gives a propelling power to the reaction plate to move the pallet 6 with the wafer on it, in the direction of the arrow. In this case, compressed air is injected through nozzles 1C of the carrier table 1 to keep the pallet 6 in a floating position over the table 1, and conveys the pallet 6 and the wafer along the conveying route 2 in the condition free from dust.

4. 发明专利

JPH0144610B2 失效
公开(公告)号：JPH0144610B2
公开(公告)日：1989-09-28
申请号：JP12917283
申请日：1983-07-14
申请人： HITACHI SEISAKUSHO KK , HITACHI KIDEN KOGYO KK
发明人： NITSUTA TAKEHISA , SAITO YOSHIO , FUKUWATARI ICHIRO , WATANABE SEIJU
IPC分类号： B65G51/03 , B65G54/00 , B65G54/02

5. 发明专利

JPH0255337B2 失效
公开(公告)号：JPH0255337B2
公开(公告)日：1990-11-27
申请号：JP24748785
申请日：1985-11-05
申请人： HITACHI SEISAKUSHO KK , HITACHI KIDEN KOGYO KK
发明人： NITSUTA TAKEHISA , SAITO YOSHIO , FUKUWATARI ICHIRO , WATANABE SEIJU
IPC分类号： B65G49/00 , B65G54/02 , H01L21/67 , H01L21/677 , H01L21/68

6. 发明专利

JPH07230942A MULTICHAMBER SYSTEM AND ITS CONTROL METHOD 失效
公开(公告)号：JPH07230942A
公开(公告)日：1995-08-29
申请号：JP2163694
申请日：1994-02-18
申请人： HITACHI LTD
发明人： ISHIKAWA KATSUHIKO , SAITO YOSHIO , OKUDAIRA SADAYUKI
IPC分类号： H01L21/677 , H01L21/02 , H01L21/68
摘要： PURPOSE:To prevent contamination of the outside part, and to increase the number of processes with which a continuous treatment can be conducted. CONSTITUTION:A multichamber device 1M, on which a wafer carrying chamber 1a is commonly used by a plurality of process chambers 2 and 3 using a general purpose multichamber device, is constituted, and multichamber devices 2M to 6M, having the constitution same as the above-mentioned multichamber device 1M, are coupled in loop shape so that the semiconductor wafer, which is the object of treatment, can make a round. Also, the carrying in and carrying out of the semiconductor wafer is conducted using a load-locking chamber 5 which is connected to the multichamber device 1M.

7. 发明专利

JPH06340333A CONVEYING DEVICE BY GAS FLOW 失效
公开(公告)号：JPH06340333A
公开(公告)日：1994-12-13
申请号：JP12893393
申请日：1993-05-31
申请人： HITACHI LTD
发明人： ITO HIDEFUMI , SAITO YOSHIO , TANABE YOSHIKAZU , NITTA TAKEHISA
IPC分类号： B65G49/07 , B65G51/03 , B65H5/22 , H01L21/677 , H01L21/68
摘要： PURPOSE:To position a platy body accurately and in short time at a desired stop position by controlling the positioning operation of the platy body relative to a positioning member by a fluid force. CONSTITUTION:When a wafer 2 under floated condition is conveyed from the left side by a wafer floating nozzle 4, it is stopped by a drag force generated by a gas jet from a control nozzle 5b opened in the direction reverse to the conveying direction, and the stoppage under floated condition is maintained by a jet from the wafer floating nozzle 4. In the floated condition, the wafer 2 is rotated by the presence of the orientation flat 2a of the wafer 2. In this case, first a positioning pin 6 is raised from a nozzle plate 3 to around the wafer 2, and the balance of forces caused by the jets from the control nozzle 5a and the control nozzle 5b in the directions reverse to each other is controlled to press the wafer 2 gently against the side surface of the step part 6a of the positioning pin 6 for complete stop.

8. 发明专利

JPH06134258A DENITRATION METHOD AND CATALYST USED THEREIN 失效
公开(公告)号：JPH06134258A
公开(公告)日：1994-05-17
申请号：JP28562092
申请日：1992-10-23
申请人： HITACHI LTD , BABCOCK HITACHI KK
发明人： SAITO YOSHIO , TATE TAKAHIRO , KURODA OSAMU , YAMASHITA HISAO , MIYADERA HIROSHI
IPC分类号： B01D53/56 , B01D53/34 , B01D53/94 , B01J29/06 , F01N3/08 , B01D53/36
摘要： PURPOSE:To obtain high denitration capacity within a temp. range wider than individual catalysts by arranging a plurality of denitration catalysts having different reaction temps. capable of obtaining the max. activities in a reaction gas passage. CONSTITUTION:In a denitration method for removing nitrogen oxide in exhaust gas containing 5000ppm or more of oxygen using hydrocarbon as a reducing agent, two or more kinds of catalysts 3-5 having different reaction temps. capable of obtaining the max. activities are provided in an exhaust gas passage direction 2 in series to obtain high activity within a temp. range wider than the individual catalysts. As a result, in the denitration reaction due to the catalyst, high denitration capacity can be obtained within a temp. range wider than a conventional catalyst.

9. 发明专利

JPH0393899A CLEANSER AND METHOD FOR CLEANSING 失效
公开(公告)号：JPH0393899A
公开(公告)日：1991-04-18
申请号：JP23131289
申请日：1989-09-06
申请人： MITSUI PETROCHEMICAL IND , HITACHI LTD
发明人： TSUMOTO TAKAMASA , MIYAKE HIROHIKO , TAKEHANA YOICHI , SAITO YOSHIO , ITO KATSUHIKO
IPC分类号： B08B3/08 , C11D7/28 , C11D7/50 , H01L21/304 , H05K3/26
摘要： PURPOSE:To provide a cleanser comprising a mixture of 5-fluoropropanol and a solvent miscible with the 5-fluoropropanol, effective for cleansing substrates, etc., used in the processes of semiconductor preparation without employing CFC gas and without having the danger of fire and explosion. CONSTITUTION:The objective cleanser comprises 5-fluoropropanol and a solvent (e.g. water, an alcohol, an ether, a ketone or a hydrocarbon excluding halogenated hydrocarbons) miscible with the 5-fluoropropanol.

10. 发明专利

JPS63256330A OPERATION CONTROLLER FOR MACHINE TOOL 失效
公开(公告)号：JPS63256330A
公开(公告)日：1988-10-24
申请号：JP8685687
申请日：1987-04-10
申请人： HITACHI LTD
发明人： HANADA SHOJI , ASABUKI HIROSHI , FUJI KUNIHIKO , EDA MINORU , SAITO YOSHIO
IPC分类号： B23Q5/10 , B23Q5/04 , B23Q15/00
摘要： PURPOSE:To provided high accuracy working without any effects of electromagnetic vibration from an AC motor by providing a power supply for dropping voltage supplying power to the AC motor as the degree of working is heightened. CONSTITUTION:A machine tool controller 103 is constituted to store or output information about the tool selection, tool transfer position, running speed of motor and the degree of working. And a V/F change-over circuit 253 receiving the output degree of working, i.e. signal D of degree of working changes over selectively a straight line L representing the relationship between the normally selected output voltage V and the output frequency F to a straight line M. Thus, when the output frequencies F are same, the output result is reduced and the output signal is given to a voltage controlling circuit 255 such that in the normal working such as rough and medium cut working the lower output voltage is provided. Thus, in the precision working of higher degree the output voltage can be reduced to prevent the accuracy of worked surface from the degradation caused by electromagnetic vibration force and improve the quality of working.

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